TW201144194A - Processing device and transfer device for a strip-shaped sheet substrate - Google Patents

Abstract

Disclosed is a transfer device provided with a first guide roller (G1) and a second guide roller (G2). A strip-shaped sheet substrate (FB), i.e. a resin film or foil, is turned over via diagonal folding by the first guide roller (G1) and turned over again via diagonal folding by the second guide roller (G2). An alignment camera (51) detects alignment marks (AM) on the substrate (FB), and on the basis thereof, adjustment mechanisms (52 and 53) shift or tilt the guide rollers (G1 and G2). This shifting (parallel movement) or tilting moves the substrate (FB) sideways between the first and second guide rollers (G1 and G2). A processing device (10) forms organic EL elements on a surface (Fp) of the substrate (FB). Circular cones (G3 and G4) may be used instead of the guide rollers (G1 and G2). A third guide roller (G23) or circular cone (G27) may be added. A fourth guide roller (G24) or circular cone (G28) may also be added. The guide rollers and circular cones do not touch the surface (Fp) of the substrate (FB) which is processed. Wrinkles do not form in the substrate (FB) during the aforementioned sideways movement of the substrate (FB).

Description

201144194 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a conveying apparatus and a substrate processing apparatus. [Prior Art] As the display elements constituting the display device such as a display device, there are, for example, a liquid crystal display element, an organic motor light-emitting (organic EL) element, an electrophoresis element for electronic paper, and the like. At present, these display elements are gradually becoming active on the surface of the substrate by forming a switching element called a thin film transistor (Thin Film Transist 〇r: tft), and forming an active device on the display element. . In recent years, a technique of forming a sheet member on a sheet substrate (e.g., a film member or the like) has been proposed. As such a technique, for example, a method called a roll-to-roll (r〇U to r〇11) (hereinafter, simply referred to as a "winding method") is widely known (for example, refer to the patent document). The winding method is a method in which a sheet-like substrate (for example, a strip-shaped film member) wound on a supply side of a substrate is fed out, and the substrate which is discharged side by side (four) is used as a recycling roll on the substrate recovery side. Winding to transport the substrate. While the substrate is being conveyed to the time of being wound, for example, a plurality of transfer rollers are used to transport the substrate, and a plurality of processing devices are used to form a gate electrode, a gate oxide film, a semiconductor film, a source/drain, and the like which constitute the TFT. The constituent elements of the display element are sequentially formed on the processed surface of a certain board. For example, in the case of forming an organic EL element, a light-emitting layer, an anode, a cathode, a motor circuit, and the like are sequentially formed on a substrate. In the formation of the member element, for example, in order to arrange the component on the substrate with high precision, for example, the positional alignment between the processing device and the substrate is required. Therefore, a technique has been developed in which the position adjusting roller is disposed at the end portion in the direction orthogonal to the substrate conveying direction, and the rotational speed of the position adjusting roller is adjusted to adjust the position of the substrate. [Patent Document 1] International Publication No. 2/6/1,868 [Invention] However, the position adjustment may be different from the conveyance direction due to the difference in the rotational speed between the rollers for position adjustment. The force of the direction acts on the substrate to cause, for example, a slanting of the substrate. Further, the surface to be treated is in contact with, for example, the transport roller at the time of substrate conveyance, and may affect the processing state of the surface to be processed. Since &:: It is possible to reduce the contact with the substrate to be processed surface as much as possible before performing various treatments on the processed surface of the substrate. SUMMARY OF THE INVENTION An object of the present invention is to provide a feeding device and a substrate processing apparatus which can improve the positioning accuracy of a substrate. According to another aspect of the present invention, there is provided a transfer apparatus and a substrate processing apparatus capable of suppressing contact with a substrate to be processed by a substrate. Means for Solving the Problem The conveying device according to the first aspect of the present invention is for conveying a substrate, and includes: the fourth member of the monthly material guide-guide that is transported from the first direction (or to the first direction) 201144194 = After bending obliquely, 'transforming the sheet substrate from the direction into a second direction different from the first direction; the second guide is transported from the second direction (or to the second After the two-material substrate of the two directions is bent obliquely, the transfer direction of the sheet substrate is changed from: the first direction to the third direction different from the second direction; and the squeezing mechanism is provided At least one of the first guiding member and the second guiding member is used for adjusting the position of the first guiding member and the position of the second guiding member to two positions: adjusting to be in contact with the second direction In the substrate processing apparatus of the second aspect of the invention, the substrate processing apparatus of the second aspect of the invention includes: a conveying device for conveying a belt-shaped plate; and a predetermined processing for the sheet substrate; The conveying device of the aspect. According to a third aspect of the present invention, in a conveying apparatus, a belt-shaped sheet substrate is conveyed, and the second guide member 2 supports the back surface of the sheet substrate, and is sent from the first ° (or to the first The sheet substrate of the direction is obliquely bent: the conveying direction of the sheet substrate is changed from the first direction to a second direction different from the back direction; the second guiding member supports the sheet The substrate=surface' is such that the sheet conveyed from the second direction (or in the second direction) is bent toward the direction in which the sheet substrate is conveyed from the second direction: a third direction having a different direction; and the third guide' supports the back surface of the sheet substrate, and the sheet substrate conveyed from the third direction (or in the t direction) is obliquely folded to The conveyance direction of the sheet substrate is converted from the third direction to a fourth direction different from the third direction. The fourth substrate processing apparatus according to the fourth aspect of the present invention includes: a transport device for transporting a strip-shaped 201144194 sheet substrate, and a processing device; and a device for picking up and transporting the device, and using the above-described aspect. Transfer device. The substrate processing apparatus according to the fifth aspect of the present invention performs predetermined processing on the surface of the strip plate, and the I material base is used for the purpose of guiding the sheet, and the sheet is conveyed in the first direction (or toward the first direction). The sheet of white is replaced by: bending so that the conveying direction of the sheet substrate is changed from the first direction to a first direction that is not in the first direction; the second guiding unit receives the sheet On the back surface of the material substrate, the sheet substrate of the '', which is transported from the first direction) is obliquely turned to the time when the transfer direction of the 3H sheet substrate is changed from the second direction to And the second and third guides are removed from the upper side of the J & Le Yi Wan, _ 〃 sheet substrate, and will be transported from the third direction (or the third direction) The sheet was defeated and bent obliquely to transport the moon substrate from a ten-foot door. The second direction is changed to a fourth direction different from the third direction; the fourth guide # $ supports the back surface of the slab sheet substrate, and is transported from the fourth direction (or to the "μ direction" The sheet substrate is obliquely bent and folded to change the direction in which the sheet substrate is transferred from the fourth direction to a fifth direction different from the fourth direction, the fifth direction of the jade a., J, and the first processing unit Between the first guide member and the second guide member, the surface of the sheet substrate is subjected to a predetermined process. The effect of the invention is 'higher than the previous one' to enable high positioning according to the above aspect of the present invention. The substrate can be conveyed while being touched. The position of the substrate is adjusted according to the above aspect of the present invention. Further, the substrate to be processed is prevented from being connected to the substrate 6 201144194. [Embodiment] <First Embodiment> The structure of the substrate processing apparatus FPA of the first embodiment is shown. As shown in Fig. 1, the substrate processing apparatus FPA has a substrate supply unit su for supplying a sheet substrate (for example, a strip-shaped film member) FB, and a sheet substrate FB. Surface (processed surface) The substrate processing unit pR, the substrate recovery unit CL that collects the sheet substrate FB, and the control unit CONT that controls the respective units. The substrate processing apparatus FPA is provided, for example, in a factory. The substrate processing apparatus FPA is in the slave substrate supply unit. The roll-to-roll method (hereinafter, simply referred to as "winding method") in which the surface of the sheet substrate FB is subjected to various processes during the period from the delivery of the sheet substrate FB to the sheet-receiving portion CL. Device. The substrate processing apparatus FpA can be used to form a display element (electronic element) such as an organic EL device or a liquid crystal display element on the sheet substrate FB. Of course, the processing device FpA can also be used in the case of forming components other than these components. For the sheet substrate fb to be processed by the substrate processing apparatus FPA, for example, a resin film or a K film such as a non-recording steel can be used. As the resin film, for example, a polyethylene resin, a polypropylene resin, a polyester resin, a vinyl ethylene copolymer (CEthylene vinyl cop〇lymer) resin, a polyethylene resin, a cellulose resin, a polyamide resin, a polyimide resin, a poly Materials such as carbonate resin, polystyrene resin, and polyvinyl ethyl ester resin. The γ-direction (short-side direction) dimension of the sheet substrate FB is, for example, about 2 to 2 m, and the X-direction (long-side direction) is formed to be, for example, 10 μm or more. 201144194 Of course, this size is only an example and is not limited to this example. For example, the dimension of the sheet substrate printed in the Y direction is lm or less or 5 〇 c m or less, and may be 2 or more. Further, the dimension of the sheet substrate FB in the X direction may be 1 μm or less. The sheet substrate FB is formed to have flexibility, for example. Here, the term "sexuality" means, for example, a property in which at least the self-weight is applied to the substrate, and the substrate is f-folded or broken to be folded. Further, for example, the property of being bent by the above-mentioned predetermined force is also included in the flexibility indicated. Further, the flexibility described above varies depending on the material, size, thickness, temperature, and the like of the substrate. Further, the sheet substrate FB may be formed in a strip-like shape or a substrate in which a plurality of units are connected to form a strip shape. The material substrate FB is preferably one which is subjected to a relatively warm temperature (e.g., 2001 degree) and whose thermal density is small (the thermal deformation is small). For example, the inorganic filler may be mixed with the resin film to reduce the heat expander filler '❹ aerobic money, zinc oxide, oxonium, oxygen cut, etc.. The substrate supply unit su sends the sheet substrate fb, for example, rolled into a roll, to f It should go to the substrate processing unit PR. The substrate supply portion SU is provided with a shaft portion for winding the sheet substrate FB, for example, and a rotary drive source for rotating the shaft portion. In place of the substrate supply portion, for example, a cover portion for covering the sheet substrate FB wound in a roll state, or the like may be provided instead of or in addition to the substrate supply portion. The substrate collecting portion CL collects the sheet substrate FB from the substrate processing portion PR and winds it in a roll shape. In the substrate collection unit, the same as the substrate supply unit: U, is provided with a shaft portion for winding the sheet substrate FB, and a cover for driving the substrate to be transferred, and covering the recovered sheet substrate 2011 201144194 Department and so on. In the case where the substrate processing unit slaps the sheet substrate FB, for example, in a form of a panel, the substrate plate collecting portion may be configured to be, for example, to collect the sheet substrate fb in a stacked state. The configuration of the sheet substrate fb is recovered in a state different from the state of being wound into a roll. The substrate processing unit PR transports the sheet substrate FB supplied from the substrate supply unit to the substrate collection unit CL, and processes the processed surface Fp of the sheet substrate in the transfer process. The substrate processing unit pR includes, for example, a processing device 1A, a transfer device 30, an alignment device 5, and the like. The processing #1 has a respective (four) arrangement for forming the organic EL element, for example, on the processed surface Fp of the sheet substrate FB. As such a device, for example, a partition forming device for forming a partition wall on the surface Fp to be processed is used to form an electrode forming device for driving an electrode of an organic EL opening, a φ ku, a dicing member, and The light-emitting layer for forming the light-emitting layer is formed. Specifically, there is a droplet applying device (for example, a film forming device such as an ink jet type coating device or a spin coating type coating device, a film forming device such as a money splashing device, and an exposure device, a developing device, and a surface modifying device, and washing) For example, each of these devices is suitably disposed on a transport path of the sheet substrate FB. For example, two or more processing devices may be disposed along the transport direction. The transport device has a substrate processing unit PR. For example, the roller device R that transports the sheet substrate FB to the substrate collecting portion CL and the cooling device H) are disposed on the upstream side and the downstream side of the processing device 1G to guide the roller device to the sheet substrate FB. The transport path is provided, for example, in plural. A drive mechanism (not shown) is attached to the roller unit r of the plurality of roller unit portions. By the rotation of the roller device R, the sheet substrate 201144194 is transported in the X-axis direction. In addition, for example, a part of the plurality of roller devices r, the 'sound> & n n filer rolling device scale can be arranged to be orthogonal to the transport direction, and the transport device 3 in the present embodiment, In the upper side and the downstream side of the sheet substrate fb, the upper side of the side W guide roller G, a loose portion (not shown) is provided on the sheet substrate FB to prevent the tension from being applied to the sheet substrate FB'. Fig. 2 and Fig. 3 are schematic diagrams showing the configuration of the processing apparatus 1 and the guide roller °, and the structure of the substrate processing apparatus FPA is observed from the side (+χ direction). Fig. 3 shows the configuration of the substrate processing FPA when viewed from above. As shown in Figs. 2 and 3, the guide roller G has a first guide roller (1) and a first guide roller G2. The first guide roller G1 is formed, for example, in a cylindrical shape or a cylindrical shape. The opposing processing device 1 is disposed on the upstream side in the transport direction of the sheet substrate FB. The second guide roller G2 is formed, for example, in a cylindrical shape or a cylinder. The relative processing device 10 is disposed on the downstream side in the transport direction of the sheet substrate FB. The first guide roller G1 is not driven by the first guide roller G1 with respect to the first portion of the sheet substrate fb conveyed from the upstream side of the first guide roller g to the first direction (+χ direction) The portion before the guide, that is, the short side direction (width direction: here, Y direction) of the upper guide roller G1 and the upper side portion F1 of the sheet substrate FB is disposed such that the central axis C1 tends to be oblique . The first guide/衮旖G1 guides the back surface of the sheet substrate FB on the drum surface (guide surface) Gla. Further, the sheet substrate 10 201144194 FB conveyed from the upstream side of the first guide roller G1 is in a state in which the back surface Fq of the sheet substrate FB faces upward.

The first guide roller G1 bends the sheet substrate FB in the oblique direction with respect to the short side direction of the sheet substrate FB and folds back the sheet substrate FB along the drum surface of the first guide roller G!, whereby the sheet substrate is pressed The transport direction of the FB is changed from the first direction to the second direction ("γ direction"). In the present embodiment, the first guide roller (1) can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be folded while being twisted by the first guide roller G1. In the sheet substrate FB, a portion of the peripheral surface inclined with respect to the conveyance direction (first direction) can be formed in a portion guided by the first guide roller (1). A sheet substrate F G1 having a traveling direction of the first ... U direction). Has a second direction 卜*. ... The sheet substrate FB in the direction of the music in the direction of the music is led out from the first guide roller (1). In the present embodiment, the direction is orthogonal to the first direction. For example, it is guided by the first guide, the cylinder G: ? °, the substrate FB is on the side of the sheet: Further, the sheet metal side (processing device * Γ) the soil plate FB is supported on the surface GU of the first guide roller G1 until the first guide and the second portion (guided by Gu Zhe_, the door of the door) Thereafter, the first portion F1 is in front of the first guide, _ Μ a guide roller G2, that is, the opposite guide roller g2, JI phase behavior. The soil upper flow side portion F2 is flat:: guide The drum G2 is arranged to roll the G2 F2 from the second direction of the upper machine side 4, and the central axis C2 is inclined obliquely to the second portion of the material substrate FB. The surface (guide surface) G2a, the guide bow m and the first guide roll G2 is on the drum and from the back of the first plate. The first substrate is guided by the upstream side of the first guide roller I2. The sheet substrate 201144194 FB '(4) 2 'as mentioned above' is a sheet The processed surface Fp of the substrate FB is directed upward. The first guiding roller G2 bends the second portion F2 of the sheet substrate FB in the oblique direction with respect to the short side direction of the sheet substrate FB and follows the second guide The surface of the drum of the drum G2 folds back the sheet Ai and the material substrate FB, thereby changing the conveying direction of the sheet substrate FB from the second direction Direction in the third direction). In the present embodiment, the first tomb 3 丨 奋 η τ 一 一 一 导引 guiding guide roll G2 can bend the sheet substrate FB substantially obliquely. The sheet M I β #号 listening coffin substrate FB can be bent while being twisted by the second guiding roller G2. The private y # prays to the sheet substrate FB, and in the portion guided by the second guide roller G2, the peripheral surface of the portion which is inclined with respect to the transport direction (second direction) can be formed by the w w 1 knife. The sheet sheet FB having the second direction (the direction of the needle (Y direction) enters the second guide roller G2. /, the direction of the rod (+X direction) of the sheet substrate FB from the first direction In the two guiding energy, 嗲筮-古hy丨, K is in the form of a second direction, such as a sheet parallel to the first direction, a guide roller G2 folded back, and a sheet of material FB, in the third direction, the back surface Μ faces upward, and is processed downwards. Further, = the board smashes the roller surface G2a of the second guide (four) G2 until the first portion F2 and the third portion (being the first 毽j The first part of the guide roller G3 is guided to the front side of the guide roller G3, that is, the third guide roller G3 and the slice # knife are parallel to each other. The flow side portion of the sheet substrate FB is the transport direction of the two substrates FB, The sheet substrate 叩-guide roller G1 is located above the flow side portion in the conveying direction (first portion: X-direction (first direction), portion between the first guide rollers G1', ', + (second portion F2) γ ^ a = failure cylinder G2 V brother one direction), in the second 12 201144194 guide roller G2 in the direction of transport, also 丨 ^ The part (the third part F3) is blown into the +X direction (the third direction). Thus, the re-entry material substrate FB is guided by the guide roller G1 and the second guide 潦n ^ & The first guide roller G1 is driven by a crank-like path with a G2 angle of -G2, for example, the shaft and the bearing member 60 are provided with a driving first guide for support. In the kiss 'Gongdong G" Axis direction: The first guide roller G2 and the first guide _ &, supported by the Du Ru bearing structure, the shaft = the same as the 'the swaying mechanism 63 of the example cylinder G2. The medium mechanism member 62 is provided with a drive The second guide rotates in the direction of the central axis. A guide roll G2, for example, the first guide roller 〇1 and the second guide respectively detect the amount of rotation, the speed of rotation 苟G2,5, and the key a code, etc. A detection device (not shown) is used to detect the CONT of the detection device. The control unit is disposed between the first guide roller G1 and the stage guide ST of the second guide support sheet substrate FB, for example. The first part F2 of the sheet substrate FB with respect to the first part F2 of the sheet substrate B is disposed on the second part F2 of the back substrate FB The support surface 8 (/side) has a surface that supports the sheet material, or has a curved surface. The support surface Sa is formed, for example, on the surface of the curvature of the flattened tantalum. The stage device ST, if the support surface Sa is an example In the case of a gentleman, it is arranged such that the support surface Sa is parallel to the plane of the crucible. 64 The stage mechanism ST is provided with a stage moving mechanism 64. The hunting table drive mechanism 64 sets the stage device ST. For example, it can move in the X direction, the Y direction, and the direction. 13 201144194 The stage device st has the adsorption portion 4G on the support surface Sa (see FIG. 2). The adsorption portion 40 is disposed, for example, at one or a plurality of locations on the support surface Sa. A suction mechanism 41 such as a suction pump is connected to the adsorption unit 40. Therefore, the stage device st can support the second portion F2 of the sheet substrate FB while being adsorbed on the support surface. Referring back to Fig. 1, the alignment device 50 performs an alignment operation on the sheet substrate FB. The alignment device 5A has an alignment camera 51 for detecting the positional state of a certain cylinder J sheet substrate FB of the sheet, and the sheet substrate B is in the X direction, the Y direction, and the z direction according to the detection result of the alignment camera 51. , ^ direction, 0 γ direction μ = first adjustment mechanism (first adjustment unit (8) and whole mechanism (second adjustment unit) 53).

Forming the household I, on the surface of the sheet substrate FB (the surface on the side of the surface to be processed) = There is: a quasi-label AM. The alignment mark AM is formed on both ends of the sheet substrate FB 3 Φ . ^ as - a side in the sheet substrate. Figure

A only shows that a plurality of ends of the pair of alignment marks AM FB are arranged, for example. - continuous upper edge sheet substrate

Further, in the present embodiment, the handle 4 of the alignment camera 5 and the end portions of the FB=direction of the moon substrate are disposed to face each other. In the present embodiment, the alignment marks AM at both end portions of the sheet substrate are detected by the alignment photographing. The detection area cA of each pair of the camcorders 51 is an area of 1A 'AM. For example, the alignment-adjusting mechanism 52 supports, for example, the first portion. The first adjustment mechanism 52 is configured to move the both ends of the movement G1 to a direction parallel to the central axis of the first, for example, to make the first guide roller 14 201144194 in the χγ plane, The χγ plane is orthogonal or intersects in-plane. The advanced first adjustment mechanism 52 rotates the first guide roller G1 in the 0 X direction, the ΘΥ direction, and the 0 Ζ direction. In other words, the first adjustment mechanism 52 can set the rotation center of each rotation direction to the end of the both ends of the first guide roller G1 or the central portion of the center axis direction of the first guide roller Gi. . The second adjustment mechanism 53 supports, for example, both end portions of the second guide roller G2. The second adjustment mechanism 53 moves the second guide roller 〇2 in a direction parallel to the central axis of the second guide roller G2, for example, the second guide roller is orthogonal or intersecting with the χγ plane in the XY plane. Move inside. Further, the first adjustment mechanism 53 rotates the second guide roller G2 in the 0 X direction and the 0 γ direction. Further, the second adjustment mechanism 53 can set the rotation center of each rotation direction to, for example, the end of the second guide roller (10) or the center axis direction of the second guide roller G2. The alignment camera AM detects the alignment mark AM and sends the detection result to the control unit CGNT. The control unit c〇NT sends an adjustment signal for adjusting the position of the first guide roller G1 according to the detection result to the adjustment mechanism 52, and sends an adjustment signal for adjusting the position of the first guide roller G2 to the adjustment mechanism. The 3 fader mechanism 52 adjusts the position of the first guide roller G1 based on the adjustment signal from the control unit c〇NT. The adjustment mechanism 53 adjusts the position of the second guide roller G2 based on the adjustment signal from the control unit CONT. Further, the control unit CONT may generate an adjustment signal without using the detection result of the alignment camera 51, and may send the generated adjustment signal to the adjustment mechanism 52 and the apparatus processing device FPA configured as described above by the control unit FPA. In the control of the part CONT, a display element (electronic element) such as an organic EL element or a liquid crystal display element is manufactured by a winding method. Hereinafter, a process for manufacturing a display element using the substrate processing apparatus FPA having the above configuration will be described. First, the strip-shaped sheet substrate FB wound around the reel is attached to the substrate supply portion SU. The control unit C0NT rotates the reel to supply from the substrate from this state. P SU sends the sheet substrate FB. The sheet substrate FB passing through the substrate processing portion is wound around the reel of the substrate collecting portion CL. By controlling the substrate supply unit SU and the substrate collection unit CL, the processed surface ρρ of the sheet substrate FB can be continuously conveyed to the substrate processing unit pR. When the sheet substrate FB is ejected from the substrate supply unit su to the substrate recovery unit CL, the substrate processing unit 30 slaps the sheet substrate FB in the substrate processing unit pR. It is conveyed and formed on the sheet substrate FB by a processing apparatus. 10, the constituent elements of the display element are sequentially subjected to the virtual evaluation when the processing is set to 1 〇, and the control unit CONT uses the alignment device 50 to perform the skewing of the sheet substrate fb. ; 1 Li 罝 to soap. For example, the alignment of the sheet substrate FB is detected by the alignment photographing 5 1 , and the driving amount of the scale of the roller unit R of the conveying device 30 is adjusted according to the detection result. And guide roller G (No.

Position and posture of a guide roller G1 and a second guide roller H guide G2)

Quantity, rotation speed, etc. W The guide roller is rounded to explain the position and posture of the guide roller G (the first guide roller (1) and the second guide G2). 4 shows that the makeup shown in Figure 3 can be enough for the β-no-state so that the first guide roller G1 and the second 16 201144194 guide roller G2 are left and under & against the valley from the central axis in the parallel direction (Fig. 4 For an X direction) per iw &&

The state of the mobile movement. In this case, the sheet substrate FB is tensioned by the first pass _ 21 μ ... guide bow / 衮 G G1 and the second guide roller G 2 in a state of being folded back. & Therefore, when the first guide roller G1 and the first guide roller G2 are moved in the above manner, the respective folded-back positions are moved by the same distance in the -X direction, and accordingly, the sheet substrate The second part of fb moves to the -X direction. In this manner, even if the direction in which the first guide roller and the second guide roller move to the sheet substrate FB does not change, it is possible to suppress or eliminate the action in the direction different from the direction in which the sheet substrate FB is transported. Therefore, for example, the second portion F2 of the sheet substrate FB can be moved in a direction orthogonal to the conveyance direction without causing wrinkles or the like on the sheet substrate FB. After the movement of the guide roller G, the control unit CONT adjusts the position of the second portion F2 of the sheet substrate FB such that the stage device ST moves in the X direction and the Y direction. Further, in the conveyance direction of the sheet substrate FB, the slack portion of the sheet substrate fb is provided on the flow side of the first guide roller G1 and the flow side of the second guide roller G2, so that even the first guide roller is adjusted. The position of 1 and the position of the second guide roller G2 can also suppress or eliminate the force acting on the sheet substrate fb. After adjusting the X direction and the γ direction position of the stage device ST, the control unit CONT moves the stage device ST in the +Z direction, and abuts the back surface of the sheet substrate FB against the support surface Sa. By this operation, the surface of the sheet substrate FB is supported by the support surface Sa of the stage device ST. At this time, the control unit CONT may, for example, cause the sheet substrate FB to be adsorbed to the adsorption unit 40 of the stage device ST. 17 201144194 In addition, before the back surface of the sheet substrate FB is brought into contact with the support surface Sa of the stage device ST, the first guide roller G1 and the second guide roller G2 may be brought close to each other (reduced interval) to make the sheet The material substrate FB loosens him. By loosening the sheet FB of the sheet, the sheet substrate FB can be abutted and adhered to the support surface Sa of the stage device ST without tension. Further, the control unit c〇NT moves the stage device St to the +z side, for example, while supporting the sheet substrate FB, thereby adjusting the Z-direction position of the sheet substrate FB. In this case, the control unit CONT moves the first guide roller G 1 and the second guide roller G2 in the z direction depending on the amount of movement of the stage device ST in the Z direction. After the position alignment of the sheet substrate FB in the Z direction is performed, the control unit c〇nt performs a predetermined process on the second surface Fk of the sheet substrate FB by the processing surface fp. When the processing is performed while the second blade F2 of the sheet substrate is being conveyed, the control unit adjusts the processing timing of the processing device 1G and the transfer timing of the sheet substrate FB. When the sheet substrate FB is adsorbed to the stage device π, the control unit C0NT moves the stage and the ST to the substrate transport direction (for example, a Y direction) by, for example, the movement of the sheet substrate fb. By repeating the above-described series of processes on the sheet substrate ,, the constituent elements of the display elements are formed on the processed surface Fp of the sheet. According to this embodiment, the description of the jin is:

The sheet substrate FB conveyed in the (sound X direction) is bent obliquely from the sheet direction FB (Y direction) to the sheet substrate FB to convey the direction of the sheet substrate FB. The second direction in which the first direction is different (the γ square G1' is the sheet substrate that is transported from the second direction to the sheet substrate 18 in the direction of 201144194). 5 is a diagonal direction of the sheet substrate FB, and the direction in which the sheet substrate FB is transported is changed from the first direction to the third direction (+X direction) different from the second direction. a guiding roller G2, and a first guiding roller G1 and a second guiding cylinder G2 for respectively adjusting the position of the first guiding roller and the position of the second guiding device (J2 $ > ae The adjustment mechanism for adjusting the position of the sheet base B in the direction crossing the second direction can thus suppress the direction different from the conveyance direction

The force acts on the sheet substrate FB. In this way, the sheet substrate FB can be conveyed with high conveyance accuracy while suppressing defects such as wrinkles in the sheet substrate FB. According to the present embodiment, since the second portion F2 between the first guide roller G1 and the second guide roller G2 is processed in the sheet substrate fb, the processing can be performed in the sheet substrate FB. Part of the efficient movement. <Second Embodiment> Next, a second embodiment of the present invention will be described. In the present embodiment, the substrate processing and the same configuration as that of the substrate processing apparatus FPA of the first embodiment will be described. Hereinafter, in the case where the respective constituent elements of the substrate processing apparatus are described, the same reference numerals as used in the first embodiment are used. In the present embodiment, for example, the first guide roller G1 and the first guide roller G2 are rotated in the ZO direction to tilt the sheet substrate FB in the transport direction. Fig. 5 is a view showing a state in which the sheet substrate FB is conveyed when the first guide roller G1 and the second guide roller G2 are rotated in the ΘΖ direction. Fig. 19 201144194 5 shows that the first part F1 and the third part F3 of the sheet substrate FB do not maintain the transport direction, and at the same time maintain the tension of the second portion of the sheet substrate FB. The state in which the guide drum G1 is rotated. For example, when only the first guide roller G1 is rotated while maintaining the conveyance direction of the first portion F1, the control unit c〇NT makes the first guide to avoid the change of the conveyance of the third portion F3. The drum G1 rotates in the direction of 02 in synchronization with the second guide roller G2, and moves the second guide roller G2 in the -X direction. At this time, the center of rotation of the second guide roller G2 may be offset from the center of rotation of the first guide roller G1. At this time, the control unit CONT makes the first guide roller (7) first in order to match the timing, the rotation direction, the rotation angle, and the rotation speed between the first guide roller (1) and the second guide roller G2. The two guide rollers G2 rotate. Further, the control unit c〇NT moves the second guide roller (7) in the "乂" direction in accordance with the amount by which the sheet substrate fb is displaced by the rotation of the first/guide roller G?. According to this embodiment, the first guide roller (1) and the second guide roller G2 can be rotated in the 0 Z direction so that the second Qiu F2 of the sheet substrate fb is moved relative to the second portion (four). In the γ direction), it is possible to prevent the force in the direction different from the respective transport directions from acting on the first portion F1 to the third portion F3' of the substrate FB, thereby preventing defects such as wrinkles in the sheet substrate FB. In this way, it is possible to carry out conveyance with higher precision while maintaining the conveyance state of the sheet substrate. Further, in the present embodiment, the case where the second guide roller is moved in the X direction without changing the position of the first guide roller (1) in the direction of the X guide roller is explained as an example. However, the present invention is not limited thereto. For example, both the first guide roller G1 and the second guide roller G2 may be moved in the X direction. Further, the rotation directions of the first guide roller Gi and the second guide roller 〇2 are not limited to the directions shown in Fig. 5, and may be rotated, for example, in a direction opposite to the direction shown in Fig. 5. <Third Embodiment> Next, a third embodiment of the present invention will be described. In the present embodiment, the first guide and the first guide provided in the substrate processing apparatus are described, and for example, an M-shaped member is used. In the substrate processing apparatus of the present embodiment, the first guide member is the same as the above-described respective embodiments except for the components other than the music guide and the first guide member. Therefore, the same reference numerals are given to explain:

Fig. 6 is a view showing the configuration of the substrate processing apparatus FpA viewed from above (+Z direction). As shown in Fig. 6, in the conveying device 3, the first guide member uses the first bell member G3 and the first guide member uses the second hammer member. In the case of autumn, the first hammer member G3 or the second hammer member 〇4 may be applied only to one of the first guide member and the second guide member. The first hammer-shaped member G3 and the second hammer-shaped member G4 are formed, for example, in a conical shape, and § 'the first hammer-shaped member G3 and the second hammer-shaped member 〇4 respectively have a circular bottom surface (the end portion) 8〇a and 80b, and having the outer diameter dimension gradually decreasing from the bottom faces 8a and b to the apex (the other end) 8 1 a and 8 1 b, the kneading surface (guide surface). The bell-shaped member G3 has a center point 216 through the center point of the bottom surface 80a and the vertex 81a. The first hammer-shaped member G3 is disposed with its central axis C3 phase 21 201144194 to the width direction of the first portion F1 of the sheet substrate FB. (γ direction) parallel. The bell-shaped member G 3 is provided with a drive mechanism 61 for rotating the bell-shaped member g 3 from the central axis c 3 to the middle to the red. This drive mechanism 61 also drives the first hammer member G3 in the χ direction, the γ direction, and the direction. The first hammer member guides the sheet substrate with the side surface (guide surface) G3a. The sheet substrate FB is supported on the side surface G3a of the first hammer-shaped member G3 until the processed surface Fp is parallel between the first portion F} and the second portion F2. The second hammer member G4 has a center point passing through the bottom surface 8〇b and a shaft C4 among the apexes 8 1 b. The first hammer-shaped member G4 is disposed such that the central axis C4 is parallel with respect to the width direction (χ direction) of the second portion F2 of the sheet substrate FB. The first hammer-shaped member G4 is provided with a drive mechanism 63 for rotating the hammer-shaped member G4 centered on the central axis C4. The drive mechanism 61 also drives the second hammer-shaped member G4 in the X-direction, the γ-direction, and the 0Z direction. The second bell member μ guides the sheet substrate on the side surface (guide surface) G4a. The sheet substrate FB is supported by the side surface G4a of the second hammer-shaped member G4 until the second portion F2 and the third portion F3' are processed by the surface Fp. In the substrate processing apparatus FpA configured in this manner, when the second portion F2 of the sheet substrate FB is moved in the X direction, the control portion c〇nt can make the first hammer member G3 and the second hammer member G4 moves in the direction of one direction, for example, the movement of the equal movement amount by the movement of the first hammer member (7) and the second hammer member G4, and the position at which the sheet substrate FB is wound is moved in the direction of _χ, respectively. The second portion F2 of the substrate FB moves in the _ χ direction. As described above, according to the present embodiment, even if the first hammer-shaped member G3 and the second hammer-shaped member G4 are moved, it is possible to suppress the force in the same direction as the transport direction 22 201144194 from causing wrinkles or the like. It can move, for example, on the sheet substrate FB. When the second portion F2 of the sheet substrate FB is moved, the second hammer member G4 may be disposed in the second state in the case of the second hammer member 〇3 and the second hammer member G4. When the center of the hammer-shaped member G4 is r and the central axis C4 of the first bell-shaped member G3 is formed in parallel, the same effect as the configuration shown in Fig. 6 can be exhibited. Further, compared with the configuration shown in Fig. 6, since the movement of the stage device ST can be made wider, it can be explained that it is a preferable configuration. Further, the configuration ' is configured such that the central axis C3 and the central axis are parallel to each other', but are not limited thereto. It is also possible to configure, for example, that the central axis C3 and the central axis C4 are parallel in the X direction. Further, the shape of the first hammer-shaped member G3 and the second hammer-shaped member G4 is not limited to, for example, a configuration in which a conical shape is formed as shown in FIGS. 6 to 8, and may be applied to other hammer-like shapes. In addition to the conical shape and the multi-angle, for example, a tapered portion may be formed in one of the cylindrical members, and the tapered portion may be used to bend the sheet substrate FB. In the above embodiments, the first guide and the first guide are used. Although the configuration of the rotation of the two guide members has been described as an example, the present invention is not limited thereto. For example, a cylindrical member fixed to the substrate processing apparatus FPA, a cylindrical member, or a bell-shaped member may be used. In the case of the cylindrical member or the hammer member, the position of the sheet substrate FB can be adjusted in the same manner as the guide roller G except for the point that the rotation of the guide roller G is not performed. In the case of the cylindrical member, the cylindrical member, and the bell-shaped member 23 201144194, only the guide surface supporting the back surface of the sheet substrate FB may be retained, and portions other than the guide surface may be removed. Using a cylinder In the case where the shape member, the cylindrical member, and the hammer member are the first guide and the second guide, the first guide and the second guide such as the sheet substrate FB are in contact with each other as an example. Although not limited to this, for example, the sheet substrate fb and the guide may be in a non-contact state. As such a configuration, for example, a gas layer is formed on the surfaces of the first guide and the second guide. The configuration of the sheet substrate FB is maintained by the gas layer. In the above embodiment, the alignment camera is disposed in the portion between the first guide roller G1 and the second guide roller G2 in the sheet substrate FB. 5 1, using the detection result of the alignment camera 5 to drive the configuration of the first guide roller G1 and the second guide roller G2 as an example. In addition, it may be made, for example, in the first guide. The roller G1 is further configured to be at least one of the upstream side in the transport direction and the downstream side in the transport direction from the second guide roller G2, and is configured to be aligned with another camera. In this case, the detection of the alignment camera according to another arrangement is separately provided. The result is to adjust the sheet substrate FB Further, as the adjustment mechanism, for example, the roller device r or other configuration can be used. In the above embodiment, the sheet substrate FB is formed by using the alignment mark 形成 formed on the sheet substrate FB. The configuration of the positional alignment is described as an example, but is not limited thereto. For example, even in the case where an alignment mark is not formed on the sheet substrate, the alignment of the sheet substrate FB by the alignment camera 51 may be performed. The transport direction is parallel to both sides, and the position of the sheet 24 201144194 substrate FB is aligned using the detection result. Further, in the above embodiment, the support surface Sa of the support sheet substrate FB is formed in the pick-up device ST. The case of the flat surface _ 囟 is described as an example, but is not limited thereto. For example, the support surface may be formed into a concave or convex curved surface, and the present invention may be applied. This a warfare D device ST configures the drum and uses a portion of the drum surface as a support® Sa. In the above embodiment, the case where the sheet substrate FB is adsorbed to the stage nightmare device ST after the alignment of the sheet substrate FB is described as an example, but the present invention is not limited thereto. For example, before the position of the sheet J slab FB is aligned, for example, the sheet substrate FB is adsorbed to the stage step 吸附 and the adsorption unit 4 of the crater ST. In this case, the skew of the sheet substrate FB is performed.

In the case of the direct alignment, for example, the driving of the stage device ST is synchronized with the driving of the first guide roller G1 and the 丨' mounting G2, while maintaining the force acting on the sheet substrate FB & The position of the sheet substrate FB is adjusted while the direction of the rD knife is being adjusted. The first guide and the second guide described in the above embodiment are not limited to the transport path of the sheet substrate FB which can be disposed in the substrate processing apparatus FPA, for example, at a position where the processing apparatus 1 is sandwiched. & In the above embodiment, the processing means ι disposed between the first guide and the second guide may be singular or plural. Further, a slack portion (not shown) may be formed between the first guide roller G1 and the roller device R on the upstream side of the first guide roller G1, and the downstream side of the second guide roller G2 and the second guide roller G2 may be formed. A slack is formed between the roller devices R. Further, the roller device r on the upstream side and the roller device R on the downstream side may be in contact with the front and back surfaces of the sheet substrate FB, and the structure of the sheet substrate FB of 25 201144194 may be held. <Fourth Embodiment> Next, a fourth embodiment of the present invention will be described. Fig. 9 is a view showing the configuration of a substrate processing apparatus FPA according to a fourth embodiment of the present invention. In the following description, the same or equivalent components as those in the above-described embodiments are denoted by the same reference numerals, and the description thereof will be simplified or omitted. In the present embodiment, as shown in FIG. 9, the substrate processing unit sighs the sheet substrate FB supplied from the substrate supply unit su to the substrate collection unit c1, and performs the processing on the processed surface of the sheet substrate FB during the transfer. deal with. The substrate processing unit PR# includes, for example, a process cartridge s1, a transfer device i% & an alignment device (not shown), and the like. Processing device 10, and the right side is μ ν, the processed surface of the sheet substrate fb

Forming, for example, an organic ele 侔 夂 夂 老 old „ A

Various processing units in the afternoon (for example, processing unit 10A, etc.). As this! The main #, s has, for example, used to be processed

The Fp is formed with a partitioning wall between the cores 1 and an electroluminescent drawer for forming electrodes for driving the EL TG members and for forming a light-emitting layer. And the ship; ' pm 8 5, there are droplet coating devices (such as spray, 箄 箄 & amine device), vapor deposition device, sputtering film set, and exposure device wash 妒 辇. ^.,, the shirt device, the surface modification device, the device. These devices are suitable for transport on the route. ' 彳 5 5 配置 FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB FB 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 The FB transport path is set to _ a plurality of. At least one of the plurality of drums ... is equipped with a drive cutter ^

The rotation will be >^^ (not shown). “ The direction in which the sheet substrate FB is transported by the roller device R to the plurality of roller devices R. The reticle P-roller device R may be disposed in the direction of the father in the direction of movement. In the substrate processing unit, the sheet substrate FB is conveyed in the + χ direction. Fig. 1 is a schematic view showing the configuration of the processing device 1A and the guide roller G. The configuration of the substrate processing apparatus FPA is observed above (+z direction). As shown in Fig. 10, the guide roller G has a first guide roller (3), a second guide roller G22, a third guide roller (10), and a fourth guide. The guide roller G2 [the first guide roller G21 to the fourth guide roller G24 are arranged in order from the upstream side to the downstream side of the transport path of the sheet substrate 。. The first guide roller G2i to the fourth guide roller G24 are formed. For example, a cylindrical shape, a cylindrical shape, or the like. The first guide roller G2 1 is disposed to be the first portion of the sheet substrate fb that is conveyed from the upstream side of the first guide roller G21 toward the first direction (in the first direction) The portion before being guided by the first guiding roller G2 1 , that is, the first guiding roller G21, the upper side portion of the sheet substrate FB), the short side direction of the f1 (width direction: here, the Y direction), and the central axis C1 is inclined to the oblique direction. The first guide roller G21 is on the surface of the roller (the guide surface) G21a guides the back surface of the sheet substrate FB. Further, the sheet substrate FB conveyed from the upstream side of the first guide roller G2 1 is in a state in which the back surface Fq of the sheet substrate FB faces upward. 27 201144194 The first guide roller G2 1 bends the first portion f 1 of the sheet substrate FB obliquely with respect to the short side direction of the sheet substrate FB, and folds back the sheet substrate along the drum surface of the first guide roller G21 FB, according to the transfer direction of the sheet substrate from the first direction to the second direction (_丫 direction), in the embodiment, the first guide roller G21 can substantially bend the sheet substrate FB obliquely The sheet substrate FB can be bent at the same time as the twist through the first guiding roller G2i. In the portion of the sheet substrate FB guided by the first guiding roller, a relative conveying direction can be formed (first Direction) the circumferential surface of the inclined portion. It has the first direction (+χ direction) The sheet substrate FB in the traveling direction enters the first guide roller G2i, and the sheet substrate FB having the traveling direction in the second direction ("γ direction" exits from the first guide roller G21. In the present embodiment, the second The direction is, for example, a direction orthogonal to the first direction. The first guide roller G21 folds back the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB. For example, the sheet folded back by the first guide roller G2 In the second direction, the processed surface Fp faces upward (processing device side). Further, the sheet substrate FB is supported by the roller surface G21a' of the first guiding roller G21 until the first guiding roller G21 Before and after, the first part Η is parallel to the second part F2 described later. The second guide roller G22 is disposed so as to be opposite to the second portion of the sheet substrate fb conveyed from the upstream side of the second guide roller G22 in the second direction (the portion guided by the second guide roller G22, That is, with respect to the second guide: the cylinder G22, the upper side portion F2 of the sheet substrate FB, the central axis a thereof is inclined in the oblique direction. The second guide roller G22 is on the back surface of the roller surface (FB) on the surface of the roller (guide surface). In addition, as shown in Fig. 10, the sheet substrate FB sent from the upper side of the second guide roller (10) is moved upward, and as shown in Fig. 10, the processed surface Fp of the sheet substrate FB is directed upward. The second guiding roller G22 bends the second portion F2 of the sheet substrate fb in the oblique direction with respect to the short side direction of the sheet substrate FB, and folds back the sheet substrate FB along the drum surface of the second guiding roller G22. The second guide roller G 2 2 can change the conveyance direction of the sheet substrate from the second direction to the third direction (+χ direction). The second guide roller G 2 2 can bend the sheet substrate F substantially obliquely. The sheet substrate FB can be bent and twisted while being twisted by the second guide roller G22. The sheet substrate FB can be formed in a relative transport direction in a portion guided by the second guide roller G22. a partial peripheral surface of the inclined direction. The sheet substrate FB having the traveling direction of the second direction (−Y direction) enters the second guiding roller G22e having the traveling direction of the third direction (+χ direction), the sheet substrate FB In the second embodiment, the third direction is, for example, a direction parallel to the first direction. The second guide roller G22 is folded back to the sheet substrate FB while supporting the back surface of the sheet substrate FB. For example, the FB returned by the second guide roller (10) to a third party The inner surface of the inner surface of the second guide roller 22 is supported by the inner surface of the second guide roller 22, and the sheet substrate FB is supported by the roller surface G22a of the second guide roller 22 The two guide rollers G22 are before and after the minute F2 and the third portion F3 to be described later are parallel to each other. The first guide roller 〇 23 is arranged to be opposite to the direction from the upstream side of the G23 to the second: The third part of the sheet base conveyed in the X direction (the portion before being guided by the flute _ second guide roller G23, that is, the third guide roller G23, y1), that is, the sheet substrate FB The upper side portion) the short side 29 of ρ3 201144194 direction (width direction: here is the Y direction), the central axis C3 is inclined obliquely. The third guide roller G23 is on the drum surface (guide surface)_guide sheet In the back surface of the substrate FB, the back surface Fq of the sheet substrate FB is oriented upward as in the case of the sheet substrate FB which is conveyed from the upstream side of the third guide roller (3). The third guiding roller G23 compares the third portion ρ3 of the sheet substrate FB with respect to the sheet substrate FB The side (4) is folded in the oblique direction and along the drum surface of the third guide roller (3) to fold the sheet substrate fb, thereby converting the sheet substrate fb: the conveying direction from the third direction to the fourth direction (+Y direction) In the present embodiment, the third guide roller G23 can substantially fold the sheet substrate FB obliquely. The sheet substrate 叩 can be bent through the third guide roller (10) while being twisted (four). The substrate FB can form a partial peripheral surface inclined with respect to the transport direction (third direction) at a portion guided by the third guide roller (3). The sheet substrate FB having the traveling direction of the third direction (+X direction) enters. The second guide roller G23. The traveling direction having the fourth direction (+γ direction): the sheet substrate third guiding roller (10) comes out. In the present embodiment, the fourth direction is, for example, a direction orthogonal to the first direction and the third direction and a direction opposite to the second direction. The third guide roller (3) folds back the sheet substrate while supporting the back surface Fq of the sheet substrate FB. For example, the sheet substrate printed by the third guide roller G23 is printed, and the processed surface FP is oriented in the fourth direction. The processing sheet substrate FB, which can be processed and disposed to be processed, is supported on the third guiding roller such as the drum surface G23a until after the third guiding roller g23, the third point and the following The fourth part is parallel to each other. —° 30 201144194 The fourth guide roller G24 is disposed to be the fourth portion of the sheet substrate FB that is conveyed from the upstream side of the fourth guide roller G24 to the fourth direction (+γ direction) (fourth The front portion of the guide roller G24 is guided, that is, the fourth guide roller G24, the upper flow side portion F4 of the sheet substrate fB, and its central axis C4 is inclined in the oblique direction. The fourth guide roller G24 guides the back surface of the sheet substrate FB on the drum surface (guide surface) G24a. In addition, as described above, the sheet substrate FB which is conveyed from the upstream side of the fourth guide roller G24 is in a state in which the processed surface Fp of the sheet substrate FB is directed upward. The fourth guiding roller G24 folds the fourth portion F4 of the sheet substrate FB relative to the short side direction of the sheet substrate FB in the oblique direction and along the drum surface of the fourth guiding roller G24 to the sheet substrate. The conveyance direction of the sheet substrate is changed from the fourth direction to the fifth direction (+χ direction). In the present embodiment, the fourth guide roller G24 can substantially bend the sheet substrate fb obliquely. The sheet substrate FB is folded by the fourth guide roller (four) while being twisted. The portion of the sheet substrate FB that is guided by the fourth guide roller (10) can form a partial peripheral surface that is inclined with respect to the transport direction (fourth direction). The sheet substrate FB of the traveling direction of the fourth direction (+Υ direction) enters the fourth guide roller G24. The sheet substrate FB having the ancient potential material w / and the traveling direction in the fifth direction (+χ direction) is taken out from the fourth guide 丨 rolling G24. In the present embodiment, the fifth direction is, for example, a direction parallel to the first direction and the first direction. The fourth guide roller G24 supports the η from the back surface Fq of the soil sheet B of the sheet, and folds back to the sheet substrate FB. For example, in the sheet substrate on which the fifth surface Λ G24 is folded back, the state in which the back surface Fq faces upward and the surface to be processed Fp faces downward. Further, the μ face Fp is supported on the drum surface G24a' of the fourth guide roller 31 201144194 G24 until after the fourth guide roller G24, the fourth portion F4 and the fifth portion F5 (fourth The portion guided by the guide roller G24, that is, the portion opposite to the fourth guide roller G24 and the sheet substrate FB, is parallel to each other. The conveyance direction of the sheet substrate FB conveyed by the four guide rollers G21 to G24 is the +? direction (first direction) in the first portion, and the -Y direction (second direction) in the second portion F2. The third portion ρ3 is again in the +X direction (the third direction), the fourth portion 1?4 is the +¥ direction (the fourth direction), and the fifth portion F5 is the +X direction (the fifth direction). At this time, the sheet substrate FB faces upward in the first direction, the third direction, and the fifth direction sheet substrate FB, and faces the processed surface Fp of the sheet substrate FB in the second direction and the third direction. Above. As described above, the processed surface Fp is directed downward before the processing surface Fp of the sheet substrate FB is processed by the processing apparatus 1 (the processing unit i〇a and the processing unit 10B), so that the dust can be reduced. Wait for the attached surface & As described above, the sheet substrate FB is conveyed by a crank-like path in which the first guide roller (four), the first guide roller G22, the third guide roller G23, and the fourth guide roller G24 are f-angled. Further, the sheet substrate FB which is bent by the fourth guide roller G is conveyed in the fifth direction, that is, in the conveyance direction of the sheet substrate FB which is the entire substrate processing PR. Further, as shown in Fig. ί, the processing unit 1 has a processing unit ι〇α processing unit. The processing unit 10 is disposed, for example, at a position between the first guide bow cylinder (10) and the second guide roller G22 in the γ direction, and is disposed to face the processed surface & the second portion F2 of the substrate FB. The processing section is just 32. 201144194:::Y direction is set between the third guide bow cylinder (10) and the first question asked the Xingdi four guide W cylinder G24, and is arranged as the fourth of the opposite sheet substrate FB. Part F4 breaks the treatment surface Fp. This embodiment forms a process of, for example, mutual differentiation. The processing unit core and the processing unit are the processing unit 10A, for example, the remote unit 4 is connected to the drive mechanism 11, and is provided so that the flute λ m can be moved, for example, in the X direction and the Y direction. For example, the processing unit 10A is movable between the first position A1 on the second portion and the second position A2 on the fourth portion F4 (moving in the X direction). The J5 flute processing unit l〇A of 1 can move on the second portion F2 and the fourth portion F4 (moving in the Y direction). The upper processing unit 10B is, for example, 诖 & amp 移动 移动 移动 移动 移动 移动 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于I knife Jiang Xu π Shiren part of the second position on the F2 Β 2 door

Γ Move to). Further, the processing unit can move on the fourth portion F4 of the first portion VIII (moving in the 丫 direction). . The knives and the first guide rollers (}21 to the illustrated bearing members and the like are supported. The guide rollers G24' are, for example, not shown (10) to 4th guide rollers BG2 "the bearing members are provided with the first guide roller structure The first guide roller G: rr moving mechanism (not shown) is rotated to form a second guide roller (10), which is centered on the fourth guide roller (10), and can be twisted into the second portion of the sheet substrate FB. F2 and #F4-2 side arrangement stage device: the blade and the fourth processing unit 1〇Α and the processing "the stage device supports the portion of the first shirt 8 μ. The ancient stone II in the stage device: The F2 and the fourth part...the support surface can be supported by a curved surface.

S 33 201144194 An alignment device (not shown) performs an alignment operation on the sheet substrate FB. The alignment device includes an alignment camera (not shown) for detecting the positional state of the sheet substrate FB, and a detection result of the alignment camera in the χ direction γ direction, the Ζ direction, the 0 Χ direction, the 0 ¥ direction, An adjustment mechanism (not shown) for fine adjustment of the sheet substrate FB in the 0Ζ direction. Further, an alignment mark (not shown) is formed on the surface to be processed Fp of the sheet substrate. The alignment marks are formed on the surface to be processed Fp so that, for example, both ends in the short side direction of the sheet substrate FB. In the substrate processing apparatus FPA configured as described above, display elements (electronic elements) such as organic & elements and liquid crystal display elements are manufactured by winding control by the control unit ONT. Hereinafter, the process of manufacturing the display element by the substrate processing apparatus FPA having the above configuration will be described. First, the strip-shaped sheet substrate FB wound around the reel is mounted on the substrate supply 4 SU. The control unit C0NT rotates the reel to feed the β-th sheet substrate FB from the substrate supply P SU from this state. The sheet substrate FB passing through the substrate processing portion PR is wound around a roll of the substrate collecting portion CL. By controlling the substrate supply unit SU and the substrate collection unit CL, the processed surface Fp of the sheet substrate FB can be continuously conveyed to the substrate processing unit pR. The control unit CONT transfers the sheet substrate while the sheet substrate FB is being ejected from the substrate supply unit su to the substrate recovery unit CL while the substrate processing unit pR is being transported by the substrate processing unit pR! In the substrate processing unit pRR, the constituent elements of the display elements are sequentially formed on the sheet substrate FB by the processing device 1 (including the processing units of the processing unit 10A and the processing unit 10B). In this case, as shown by the circle 10, the sheet substrate is guided by a first guide roller 34 201144194, a cylinder G21, a second guide roller G22, a third guide roller g23, and a fourth guide.

The state in which the guide roller G24 supports the back surface Fq is folded back. Therefore, before the processing unit 1A and the processing unit 10B, the sheet substrate FB is conveyed without being in contact with the four guide rollers G21 to G24.

Further, the sheet substrate FB is oriented toward the processing unit 10A and the processing unit 1B by the respective processed surfaces Fp of the second portion F2 and the fourth portion F4 corresponding to the processing unit 1A and the processing unit 1B. The side way is carried. In this case, for example, the second portion F2 and the fourth portion F4 are arranged in the z-direction. Therefore, the processing unit 1 that processes the processed surface Fp of the second portion F2 can process the processed surface FP of the fourth portion F4, and conversely, the processing portion 1B of the processed surface Fp that processes the fourth portion F4 also The face Fp of the second portion F2 can be processed.

According to the present embodiment, the substrate processing apparatus PA has the first guide roller G21 to the fourth guide roller G24. Therefore, the sheet substrate FB can be transported in the direction in which the sheet substrate is conveyed. (4) The conveying direction of the entire substrate processing apparatus FPA (for example, the +X direction). A, since the second portion F2 and the fourth portion of the sheet substrate FB are aligned with the processed surface Fp toward the processing portions 1A and 1B, the processing portion 1 and 8B It is easy to move between the second part F2 and the fourth part. In this way, a variety of processing operations can be performed. Further, in the present embodiment, the processing unit 1A processes the processed surface Fp of the second portion eight, and the processing of the fourth portion F4 of the processing portion is described. It is not limited to this configuration. For example, it is reasonable. In the case of Ρ10Β, the fourth guide roller can be omitted, and the guide roller G21, the second guide roller G22, and the third guide roller 〇23 can transport the sheet substrate FB at the No. 35 201144194. As described above, according to the present embodiment, since the transport apparatus 3 is provided with at least three of the first guide roller G21, the second guide roller G22, and the second guide roller G23, only the support piece can be supported. At the same time as the back surface Fq of the material substrate fb, the sheet substrate FB is conveyed. According to this, it is possible to 'transfer the sheet substrate FB while preventing external contact with the processed surface Fp of the sheet substrate FB. <Fifth Embodiment> Next, a fifth embodiment of the present invention will be described. The present embodiment is described as a configuration in which a hammer member is used as the first to fourth guides provided in the substrate processing apparatus. In the following description, the same or equivalent components as those in the above-described embodiments are denoted by the same reference numerals, and the description thereof will be simplified or omitted. Fig. 11 shows the configuration when the substrate processing apparatus FPA is viewed from above (+z direction). As shown in Fig. 11, the conveying device 3 uses the first hammer member ^5 as the first guide and the second bell member (10) as the second guide. The third hammer member G27 is used as the third guide, and the fourth hammer member 〇28 is used as the fourth guide. Alternatively, it is also possible to form a hammer-like member using only a part of the first to fourth guides. Fig. 2 shows that the first figure π and Fig. 12 are first formed into a conical shape. Specifically, the configuration of the hammer member G25 is an example. As the hammer-shaped member G25 to the fourth hammer-shaped member G28, the first hammer-shaped member G25 to the fourth hammer 36 201144194-shaped member G28 respectively have a circular bottom surface (one end portion) 8 〇 and an apex (the other end 4) 8 1 Further, there is a side surface (guide surface) which is formed to have an outer diameter dimension from the bottom surface 8 to the vertex 8 1 . The first hammer-shaped member (10) to the fourth bell-shaped member (10) respectively have central axes C5 to C8 passing through the center point of the bottom surface 80 and the apex 81. The first bell-shaped member G25 is disposed such that the central axis C5 is parallel to the width direction (γ direction) of the first portion F1 of the sheet substrate FB. The first hammer-shaped member (3) is provided with a drive mechanism (not shown) for rotating the first hammer-shaped member G25 around the central axis ^. The first hammer member G25 guides the sheet substrate on the side surface (guide surface) G25a. The sheet substrate FB is supported on the side surface G25a of the first hammer-shaped member (10) until the processed surface Fp is parallel with the second portion η in the first portion η. The second hammer-shaped member G26 is disposed such that the central axis C6 is parallel to the width direction (X direction) of the first portion F2 of the sheet substrate FB. The second hammer member 〇 26 is provided with a drive mechanism (not shown) for rotating the second hammer member G26 around the central axis C6. The second hammer member G26 guides the sheet substrate on the side surface (guide surface) G26a. The sheet substrate FB is supported by the side surface G26a' of the second hammer-shaped member Q26 until the processed surface Fp is parallel with the third portion f3 at the second portion ρ2. The third hammer member G27 is disposed such that the central axis C7 is the first to the sheet substrate FB.卩 is parallel to the width direction (Y direction) of F3. The third hammer-shaped member g27 is provided with a drive mechanism (not shown) that rotates the third hammer-shaped member G27 about the central axis C7. The third hammer member G27 guides the sheet substrate on the side surface (guide surface) 〇 27a. The sheet substrate FB is supported on the side surface G27a of the third hammer member 〇 27 until the processed surface Fp is parallel with the fourth portion F4 37 201144194 at the third portion F3. The fourth hammer-shaped member G28 is disposed such that the central axis C8 is parallel to the width direction (χ direction) of the fourth file F4 of the sheet substrate. The fourth hammer-shaped member g28 is provided with a driving mechanism (not shown) for turning the fourth hammer-shaped member G28 into a towel. The fourth hammer member G28 guides the sheet substrate on the side surface (guide surface) G28a. The sheet substrate FB is supported on the side surface G28a of the fourth hammer member G28 until the processed surface Fp is parallel to the fifth portion F5 at the fourth portion F4. As described above, according to the present embodiment, the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are folded back to the sheet substrate FB, and in this case, the back surface Fq of the sheet substrate FB can be supported. The sheet substrate FB is conveyed. According to this, it is possible to convey the sheet substrate ρ 同时 while preventing the external contact with the processed surface Fp of the sheet substrate fb. Further, when the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are opened/on, for example, as shown in FIG. 13, the first bell-shaped member 〇2 5 may be formed as the first axis C 5 and the fourth. The first hammer-shaped member G25 to the fourth clock are disposed such that the central axis C 8 of the bell-shaped member g 2 8 is parallel and the central axis C6 of the second hammer-shaped member G26 is parallel to the central axis C7 of the third hammer-shaped member G27. The structure of the member G28. In this configuration, the same effect as that shown in Fig. 1 can be exerted. Further, the distance between the second portion F2 of the sheet substrate FB and the fourth portion F4 becomes closer than the configuration shown in Fig. 11. Therefore, the processing units 1a and 1B are easily moved between the second portion F2 and the fourth portion F4, which is a preferred configuration. Further, the shapes of the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are preferably formed in a conical shape, but may be formed into other hammer shapes (38 201144194). The composition of the groove is round and multi-angled. Further, as in the case where a portion of the cylindrical member is formed into a tapered portion, the tapered shape is used. The composition of the sheet substrate FB is obtained by the paste. Further, in the above embodiments, the configuration in which the first to fourth guides are rotated is described as an example, but the present invention is not limited thereto. Example. A cylindrical member, a cylindrical member, and a hammer member fixed in the substrate processing apparatus FPA can also be used. When such a cylindrical member, a cylindrical member, or a hammer-shaped member is used, the position adjustment of the sheet substrate FB can be performed in the same manner as the guide roller G except that the rotation of the guide roller G is not performed. . Further, in the case of using such a fixed cylindrical member, a cylindrical member, and a hammer member, only the guide surface supporting the back surface of the sheet substrate can be retained, and portions other than the guide surface can be removed. In the above-described embodiments, when the guide roller G, the columnar member, the cylindrical member, and the hammer member are used as the first to fourth guides, the sheet substrate FB is brought into contact with The configuration of the first to fourth components is described as an example, but is not limited thereto. The example h ' can also be formed as a non-contact (four) between the sheet substrate FB and each of the guide members. In this configuration (1), a gas layer is formed on the surfaces of the first to fourth guides, and the sheet substrate FB is held by the gas layer. The first to fourth guides described in the above embodiments are not limited to, for example, the transport path of the sheet substrate FB is disposed in the vicinity of the processing apparatus W, and may be appropriately disposed at another position. Further, the configuration may be such that the mth fourth guide of the form (4) is repeatedly formed in the direction of x 39 201144194. Further, in the above embodiment, the case where the processing unit 10A and the processing unit 10B are differently processed is described as an example, but the present invention is not limited thereto. For example, when the same processing is performed between the processing unit 10A and the processing unit 10B, the application of the present invention is also possible. Further, in the above embodiment (see, for example, FIG. 2), the sheet substrate FB is folded back in the +γ direction by the third guide so that the second portion F2 and the fourth portion F4 of the sheet substrate fb are The configuration in which the χ direction is arranged adjacent to each other is not limited thereto, and the sheet substrate FB may be folded back in the opposite direction to the second portion F2 (for example, a γ direction in FIG. 10) by the third guide. Further, in the above embodiment, the first guide member is folded back until the first portion F1 and the second portion F2 are parallel to each other, but the second portion F2 may be folded back to the upper or lower portion with respect to the first portion F1. The relationship between the second portion f2 and the third portion F3, the third portion F3 and the fourth portion F4, the fourth portion ρ4, and the fifth portion F 5 is also not limited to being parallel. Further, in the above embodiment, the first direction and the third direction, and the relationship between the second direction and the fourth direction are parallel to each other. However, the present invention is not limited to being parallel, and may be a direction other than parallel.

Further, since the roller device R on the upstream side of the first guide roller G21 functions as a transport roller before the surface to be processed of the sheet substrate FB, the roller device R can be brought into contact with the sheet substrate FB. The front and back sides 'and sandwich the sheet substrate FB. Further, after performing all the processes on the processed surface of the sheet substrate fb, the flow side of the fourth guide roller G24 may be flowed to contact the back surface and the surface of the sheet substrate FB, and the sheet substrate FB 40 201144194 The roller device R is configured in such a manner. The technical scope of the present invention is not limited to the above-described embodiments, and may be appropriately modified within the scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a schematic configuration of a substrate processing apparatus according to an embodiment. FIG. 2 is a side cross-sectional view showing a part of a configuration of a transport apparatus according to the present embodiment. FIG. 3 is a view showing the present embodiment. A plan view of a part of the transport device. Fig. 4 is a view showing the conveyance operation of the substrate processing apparatus of the embodiment. Fig. 5 is a view showing the conveyance operation of the substrate processing apparatus of the second embodiment. Fig. 6 is a view showing a partial configuration of a conveying device of a substrate processing apparatus according to a third embodiment. Fig. 7 is a perspective view showing a part of the configuration of the conveying apparatus of the embodiment. Fig. 8 is a view showing another configuration of the conveying device of the embodiment. Fig. 9 is a general view showing a schematic configuration of a substrate processing apparatus according to a fourth embodiment. Fig. 1 is a plan view showing a part of the configuration of the conveying apparatus of the embodiment. 41 201144194 Fig. 11 is a view showing a part of the configuration of the conveying apparatus of the fifth embodiment. Fig. 1 is a view showing a part of the configuration of the conveying apparatus of the sixth embodiment. Fig. 1 is a view showing another configuration of the conveying device of the embodiment. [Main component representative symbol] 10 Processing device 30 Transfer device 40 Adsorption unit 50 Alignment device 51 Alignment camera 52 ' 53 Adjustment mechanism 60 ' 62 Bearing member 61, 63 Drive mechanism 64 Stage drive mechanism 80a ' 80b Bottom surface 81a ' 81b Vertex AM alignment mark CA detection area CL substrate recovery portion CONT Control portion C1 to C8 Center axis FB Sheet substrate 42 G28 Gla, G2a, G21a - G24a G3a, G4a, G21a to G25a to G28a 201144194

FPA

Fp

FI ~ F5 G G1 , G21 G2 , G2 G3 ' G25 G4 , G26 G23 G24 G27

PR

R

Sa

ST su substrate processing device processing surface first to fifth portion guide roller first guide roller second guide roller first hammer member second hammer member third guide roller fourth guide roller third hammer shape Member fourth hammer member drum surface G24a Roller surface side substrate processing portion Roller device support surface stage device substrate supply portion 43

Claims (1)

201144194 VII. Patent application scope: 1 · A conveying device for conveying a strip-shaped sheet substrate, comprising: a first guiding member 'the sheet substrate conveyed from the first direction is obliquely folded 'Transforming the sheet substrate from the first direction into a second direction different from the first direction; the second guide' obliquely bending the sheet substrate conveyed from the second direction Thereafter, the conveying direction of the sheet substrate is changed from the second direction to a third direction different from the second direction; and the adjusting mechanism is disposed at least in the first guiding member and the second guiding member 'The position of the sheet substrate in the direction intersecting the second direction by adjusting the position of the first guide and the position of the second guide to the rear side α5. 2. If you apply for a patent scope! In the item conveying apparatus, the guide member has a cylindrical member having a central axis extending in the oblique direction with respect to the width direction of the sheet base. 3. The transfer device of the second aspect of the invention, wherein the guide member is provided with the cylindrical member in the center. a slight middle-to-one drive: wherein the first end of the first sheet of the substrate is toward the other end. 4. The transport guide of the first item of the patent application has a bell-shaped member, the bell-shaped member. The central axis having the phase and the direction of the parallelism is gradually smaller as the outer diameter is smaller from the center portion. 5. The transport member of the fourth aspect of the patent application is provided with a drive for rotating the hammer member around the first to the middle axis of the towel. In the case where the second substrate is opposed to the sheet substrate, the transport member of the first aspect of the invention has a cylindrical member having a width direction extending in a central axis of the oblique direction. , guide structure. 7. The conveying device according to item 6 of the patent application is provided with a driving device that makes the cylindrical member centered on the central axis, wherein the second heart rotates, as in the patent item range i, wherein two The guide member has a hammer-shaped member having a center parallel to the sheet substrate = parallel direction, and the outer diameter dimension from the end portion of the central shaft is gradually smaller. The structure of the first aspect of the invention is provided with a moving device for moving the hammer-shaped member, wherein the second driving device that rotates around the central axis is as in the first to the ninth aspect of the patent application. In any one of the conveying devices, the first guide has a guiding surface, and the guiding surface bends the sheet substrate until the surface of the sheet substrate conveyed in the second direction The surface of the sheet substrate conveyed in one direction is parallel to each other. The conveying device according to any one of the preceding claims, wherein the second guiding member has a guiding surface, the guiding surface bending the sheet substrate until the third direction is conveyed The surface of the sheet substrate and the surface of the sheet substrate conveyed from the second direction of the fifth side are parallel to each other. 12. The transport apparatus of any one of claims 1 to 11 wherein the second direction is the direction of the first direction. 45 201144194 For example, in the scope of the patent range i to 12, the third direction is parallel to the first direction. The transporting device of any one of the claims 帛i to i, wherein the adjusting mechanism has: a first adjusting portion for adjusting a position of the first guiding member; and a position for adjusting a position of the second guiding member And a control unit that controls the first adjustment unit and the second adjustment unit. The transport unit of claim 14, wherein the control unit controls the first guide and the first The second guide member tilts the sheet substrate. <16> The transport device of any one of the above-mentioned claims, wherein the step of detecting the mark provided on the sheet substrate is detected The β-throwing mechanism adjusts the position of the sheet substrate according to the detection result of the mark detecting unit. 17·If the patent application scope 帛i to i “the transport device of any one of the members” has the stage The device is disposed between the first guiding member and the second guiding member to support the sheet substrate and is movable at least in a direction to push the sheet substrate. 18. The transfer apparatus of claim 17, wherein the stage device has an adsorption unit that adsorbs the sheet substrate on a surface supporting the sheet substrate. 19. A substrate processing apparatus comprising: a transport apparatus for transporting a strip-shaped sheet substrate; and a processing apparatus for performing predetermined processing on the sheet substrate; 46 201144194 The transport apparatus is used in claims 1 to 18 Any-item transport device. The substrate processing apparatus of claim 19, wherein the grounding device is configured to be between the first guiding member and the second guiding member of the conveying device. The area performs this processing. A transporting apparatus is configured to transport a strip-shaped sheet substrate, comprising: a guide member that supports the back surface of the sheet substrate, and obliquely bends the sheet substrate conveyed from the first direction And changing a conveying direction of the sheet substrate from the first direction to a second direction different from the first direction; the second guiding member supports the back surface of the sheet substrate and is transported from the second direction The sheet substrate is bent obliquely to convert the conveying direction of the sheet substrate from the second direction to a third direction different from the second direction; and the first guide supports the sheet The back surface of the substrate is bent obliquely by the slanted sheet substrate conveyed from the third direction, and the transport direction of the sheet substrate is changed from the ith direction # to the fourth direction The transport device of claim 21, wherein the first guide has a first guiding surface, the first guiding surface folding the sheet substrate to be transported from the first direction The surface of the sheet substrate and the sheet conveyed in the second direction The surface of the substrate parallel to each other so far. [3] The conveying device of claim 21, wherein the - Xuan-guide has a second guiding surface, the second guiding surface bending the sheet substrate 47 201144194 from the second a conveying device of the surface of the sheet substrate that is conveyed in the direction and the surface of the sheet substrate that is transported in the third direction, ... The third guiding member has a third guiding surface, and the third guiding surface bends the sheet substrate to a surface of the sheet substrate conveyed from the third direction and the sheet conveyed in the fourth direction The surfaces of the material substrates are parallel to each other. - the conveying device of any one of the items of the invention, wherein the at least one of the first guide member, the second guide member and the third guide member has a cylindrical member The member has a central axis that extends obliquely with respect to the width direction of the plate. The transporting device of the second aspect of the present invention, wherein at least one of the first guide member, the second guide member and the third guide member has a hammer member The bell-shaped member has a central axis 'parallel to the width direction of the sheet, and the outer diameter dimension thereof gradually decreases from one end portion of the central shaft portion. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In the case of any of the items 21 to 27 of the patent range, the third direction is parallel to the first direction. The transporting apparatus according to any one of claims 21 to 28, wherein the fourth direction is a direction parallel to the second direction. In the case of any of the items 21 to 29 of the patent application, the first guide member is provided with a cylindrical member having a central axis extending obliquely with respect to the width of the sheet substrate. The guide member of the extension is provided with a cylindrical member having a central axis extending parallel to the central axis of the first guide member. • The transport device of the 3G item of the patent application, in the middle, the columnar member 'this cylindrical member There is a central axis extending in the direction in which the second guide member is in the direction of the axis. In the case of the patent, the transfer device of the items 21 to 29 of the patent range is selected. And there is a hammer-shaped μ; Du, thousand" has a hammer-shaped member'. The hammer-shaped member has a central axis in which the width direction of the phase-sheet substrate is parallel, and the outer diameter of the other end portion from the end of the mandrel The second guide member has a hammer-shaped member having a central axis extending in parallel with respect to a central axis of the h-th member, and an outer diameter of the outer end portion from one end of the central shaft to the other end small. _ 33. The conveying device of claim 32, wherein the first guide member has a hammer-shaped member, the hammer-shaped member having a central axis extending in a direction in which the second guide member intersects with the axis, And the outer diameter of the central shaft is tapered from the end to the other end. 34. The conveying device according to any one of claims 21 to 33, wherein the step of providing a fourth guide member 'the fourth guide member supporting the back surface of the sheet substrate' is carried from the fourth direction The sheet substrate is bent obliquely with respect to the width direction of the sheet substrate such that the sheet substrate conveyance direction is changed from the fourth direction to a fifth direction different from the fourth direction. 35. A substrate processing apparatus comprising: a transport apparatus for transporting a strip-shaped sheet substrate; and a processing apparatus for performing a predetermined process on the sheet substrate; and the transfer apparatus is used in the second to A transport device of any of the 34 items. A substrate processing apparatus is configured to perform a predetermined process on a surface of a strip-shaped sheet substrate, and includes: a first guide that supports the back surface of the sheet substrate and conveys the sheet from the first direction The substrate is obliquely oriented (four) such that the transport direction of the sheet substrate is changed from the first direction to a second direction different from the first direction; and the second guide supports the back surface of the sheet substrate, The second direction is transported. The lamella substrate is obliquely bent # to change the conveying direction of the sheet substrate from the second direction to a third direction different from the second direction; the third guiding member supports the back surface of the sheet substrate; The β-shaped sheet substrate conveyed from the third direction is obliquely bent to change the conveying direction of the sheet substrate from the third direction to a fourth direction different from the third direction; The guide member supports the back surface of the sheet substrate, and the sheet substrate conveyed from the fourth direction is obliquely bent # to change the conveying direction of the sheet substrate from the fourth direction to The fifth direction is different from the fourth direction; and the upper portion is between the first guide and the second guide, and the surface of the sheet substrate is subjected to a predetermined process. 37. The transport process of claim 帛%, wherein the first guide has a first guiding W-face, the first guiding surface bending the sheet base 50 201144194 plate until the first direction The surface of the sheet substrate conveyed and the surface of the sheet substrate conveyed in the second direction are parallel to each other; the second guiding member has a second guiding surface, and the second guiding surface is bent The sheet substrate 'until the surface of the sheet substrate conveyed from the second direction and the surface of the slab sheet substrate conveyed in the second direction are parallel to each other; the third guide has a third guide The third guiding surface bends the sheet substrate until the surface of the sheet substrate conveyed from the third direction and the surface of the sheet substrate conveyed in the fourth direction are parallel to each other. 38. The substrate processing apparatus of claim 36 or 37, wherein the first processing portion is disposed to be disposed at a first position between the first guiding member and the second guiding member, and The second guide moves between the second position disposed between the fourth guide and the fourth guide. Please provide the second processing unit for the surface of the sheet substrate between the second and fourth guides in the second and fourth guides of the patent scope. . 4 = Substrate processing apparatus according to claim 39. The first processing unit and the second processing unit perform processing different from each other. , medium eight, schema: (such as the next page) 51