JP6950867B2 - Lithium thin film manufacturing method and lithium thin film manufacturing equipment - Google Patents

Description

The present invention relates to a method for producing a lithium thin film and an apparatus for producing a lithium thin film, which winds up the organic film while forming a lithium thin film on the traveling organic film by feeding the organic film.

Patent Document 1 describes a roll-to-roll type film transfer device including a unwinding roller for feeding a film, a winding roller for winding the film fed from the unwinding roller, and a processing unit. In this film transfer device, a film can be formed on the processed surface of the film in the processing unit. The document describes that a paper interleaving mechanism is provided to prevent the transfer of dust and the like to the film after film formation and the prevention of sticking of the film. The interleaving paper mechanism is composed of a free roller which is arranged in the vicinity of the take-up roller and does not have its own rotary drive unit. The interleaving paper is wound around the interleaving paper mechanism. The interleaving paper overlaps the non-deposited surface of the film after film formation and is wound together with the film on a take-up roller.

JP-A-2017-110283

In the roll-to-roll system, when the film and the interleaving paper are overlapped and wound, the interleaving paper may be wrinkled. For example, when a film with a lithium film is wound with a copper foil interposed therebetween, there is a problem that wrinkles are likely to occur on the copper foil.

In view of the above circumstances, an object of the present invention is to provide a method for producing a lithium thin film and an apparatus for producing a lithium thin film capable of producing a film with a lithium film without causing wrinkles on the copper foil. ..

In order to achieve the above object, the method for producing a lithium thin film according to an embodiment of the present invention comprises forming a first lithium thin film, forming a first structure, forming a first winding body, and the like. The lithium thin film of 2 is formed, a second structure is formed, and a second winding body is formed.
In the first lithium thin film film forming step, the first lithium thin film is formed on the treated surface of the first organic film.
In the step of forming the first structure, a copper foil is arranged on the first lithium thin film to form the first structure.
In the first winding body forming step, the first winding body is formed by winding the first structure in a roll shape so that the copper foil is inside the first organic film.
In the second lithium thin film forming step, the second lithium thin film is formed on the treated surface of the second organic film.
In the step of forming the second structure, the copper foil of the first structure sent out from the first winding body and the second lithium thin film are brought into contact with each other on the second lithium thin film. The first structure is arranged in the above to form a second structure.
In the step of forming the second winding body, the second winding body is formed by winding the second structure in a roll shape so that the copper foil is inside the first organic film.

According to such a configuration, the copper foil is wound so as to be inside the first organic film in both the first winding body forming step and the second winding body forming step, so that the copper foil is wound up. The occurrence of wrinkles in the winding body at the time is suppressed, and the winding abnormality can be effectively suppressed.

In the first winding body forming step, the tension acting on the copper foil may be set to be larger than the tension acting on the first organic film.

In this way, by setting the tension acting on the copper foil, which has a much higher Young's modulus than the organic film, to be larger than that of the organic film, the occurrence of wrinkles in the copper foil during winding is suppressed. NS.

In the second winding body forming step, the tension acting on the first structure and the tension acting on the second organic film may be set to be the same.

In this way, by setting the tension acting on the first structure and the tension acting on the second organic film to be the same at the time of winding, the occurrence of wrinkles at the time of winding is suppressed.

In order to achieve the above object, the lithium thin film manufacturing apparatus according to one embodiment of the present invention includes a film unwinding roller, a winding roller, a processing unit, a copper foil unwinding roller, a first tension roller, and a first. It is provided with 2 tension rollers.
The film unwinding roller feeds out an organic film.
The take-up roller winds up the organic film fed from the take-up roller whose rotation direction can be changed.
The processing unit is arranged in the transport path of the organic film to form a lithium thin film on the treated surface of the organic film.
The copper foil unwinding roller sends out a first structure in which a lithium thin film and a copper foil are sequentially laminated on a copper foil or an organic film arranged on the lithium thin film.
The first tension roller is arranged between the copper foil unwinding roller and the take-up roller, supports the copper foil or the first structure, and is said to be at the time of winding by the take-up roller. The first tension of the copper foil or the first structure is adjustable.
The second tension roller is arranged between the processing unit and the take-up roller, supports the organic film, and can adjust the second tension of the organic film at the time of winding by the take-up roller. It is composed of.

In this way, since the take-up roller is configured so that the direction of rotation can be changed, the direction of rotation when the copper foil is attached to the copper foil unwinding roller and when the first structure is attached is opposite. can do. As a result, when the first structure is superposed on an organic film on which another new lithium thin film is formed and wound, the copper constituting the first structure when the first structure is wound is formed. It can be wound in the same positional relationship as the foil and the organic film, and the occurrence of wrinkles in the winding body is suppressed.
Further, since the first tension and the second tension are adjustable, the situation is different depending on whether the copper foil is attached to the copper foil unwinding roller or the first structure is attached. It can be adjusted to an appropriate tension.

The lithium thin film manufacturing apparatus has the first detection unit for detecting the first tension, the second detection unit for detecting the second tension, and the first detection unit based on the detection results by the detection unit. A control unit that controls the tension and the second tension may be further provided.

The processing unit is arranged to face the main roller supporting the non-processed surface of the organic film opposite to the treated surface and the main roller to form a film forming the treated surface of the organic film. It may include a unit.

As described above, according to the present invention, a film with a lithium film can be produced without causing wrinkles on the copper foil.

It is a schematic vertical sectional view which shows the structure of the lithium thin film manufacturing apparatus which concerns on one Embodiment of this invention, and shows the mode at the time of winding a copper foil and a 1st organic film. It is a schematic vertical sectional view which shows the structure of the said lithium thin film manufacturing apparatus, and shows the form at the time of winding up a 1st structure and a 2nd organic film. It is a schematic cross-sectional view which shows the structure of the 1st winding body which the 1st structure is wound | manufactured by the said lithium thin film manufacturing apparatus, and is the figure which shows the laminated structure of the 1st structure. It is a schematic cross-sectional view which shows the structure of the 2nd winding body which the 2nd structure is wound | manufactured by the said lithium thin film production layer, and is the figure which shows the laminated structure of the 2nd structure.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In the lithium thin film manufacturing apparatus according to the embodiment of the present invention, a second structure in which a pair of organic films are arranged so as to sandwich a copper foil in which the lithium thin films are arranged on both sides is wound. 2 rolls are manufactured.

[Explanation of the first and second structures]
The first structure is manufactured through the first step described later. The second structure is manufactured through two stages, a first stage and a second stage, which will be described later. The same lithium thin film manufacturing apparatus is used in the first step and the second step manufacturing process.

FIG. 3 is a schematic cross-sectional view showing the configuration of the first winding body formed in the first stage.
FIG. 4 is a schematic cross-sectional view showing the configuration of the second winding body formed in the second stage.

In the first stage, as shown in FIG. 3, a first winding body 91 is formed in which the first structure 151 is wound in a roll shape.
The first structure 151 includes a first organic film 211, a first lithium thin film 411 formed on the treated surface of the first organic film 211, and copper arranged on the first lithium thin film 411. It is composed of a foil 51.
In the first structure 151, the first lithium thin film 411 is formed on the first organic film 211 to form the first laminated body 421, and further, the first of the first laminated body 421 is formed. It is formed by arranging a copper foil 51 on a lithium thin film 411.
The first structure 151 is wound so that the copper foil 51 is located inside the first organic film 211.

In the second stage, as shown in FIG. 4, a second winding body 92 is formed in which the second structure 152 is wound into a roll shape.
The second structure 152 was arranged on the first structure 151, the second lithium thin film 412 arranged on the copper foil 51 of the first structure 151, and the second lithium thin film 412. It is composed of a second organic film 212.
In the second structure 152, a second lithium thin film 412 is formed on the second organic film 212 to form a second laminated body 422, and further, a second laminated body 422 is formed. It is formed by superimposing the first structure 151 formed in the first step on the lithium thin film 412. At the time of superposition, the copper foil 51 of the first structure 151 is arranged so as to be in contact with the second lithium thin film 412.
The second structure 152 is wound so that the copper foil 51 is located inside the first organic film 211.

The first organic film 211 and the second organic film 212 are made of the same material. For convenience, the organic film 21 on which the first lithium thin film 411 is formed in the first step is the first organic film 211, and the organic film 21 in which the second lithium thin film 412 is formed in the second step is the first. It is referred to as the organic film 212 of 2.

Further, the first lithium thin film 411 and the second lithium thin film 412 are films formed under the same film forming conditions by the same lithium thin film manufacturing apparatus described later. For convenience, the lithium thin film 41 formed in the first stage is referred to as a first lithium thin film 411, and the lithium thin film 41 formed in the second stage is referred to as a second lithium thin film 412.

Hereinafter, when it is not necessary to distinguish between the first organic film 211 and the second organic film 212, and the first lithium thin film 411 and the second lithium thin film 412, they are referred to as an organic film 21 and a lithium thin film 41, respectively. In some cases.

[Overall configuration of lithium thin film manufacturing equipment]
1 and 2 are schematic vertical sectional views showing a configuration of a lithium thin film manufacturing apparatus (hereinafter, referred to as a thin film manufacturing apparatus) according to an embodiment of the present invention for manufacturing the above-mentioned second winding body 92.
FIG. 1 shows a form taken at the first stage of forming the first winding body 91, and FIG. 2 shows a form taken at the second stage of forming the second winding body 92.
In the figure, the X-axis, the Y-axis, and the Z-axis show three axial directions that are orthogonal to each other. In the present embodiment, the X-axis and the Y-axis show the horizontal direction, and the Z-axis shows the height direction. There is.

The thin film manufacturing apparatus 1 includes a film unwinding roller 2, a winding roller 3, a main roller 4, a copper foil unwinding roller 5, a plurality of guide rollers 6A, 6B, 7A to 7F, and a first tension detection. A unit 131, a second tension detecting unit 132, a film forming unit 12, and a vacuum chamber 13 accommodating these are provided.

The thin film manufacturing apparatus 1 is a roll-to-roll type apparatus.
The thin film manufacturing apparatus 1 faces the main roller 4 while winding a long base organic film (hereinafter referred to as an organic film) 21 continuously or intermittently fed from the film unwinding roller 2 around the main roller 4. The evaporative material from the film forming unit 12 arranged above the film is deposited on the organic film 21, and the vapor-deposited organic film 21 is wound by the take-up roller 3.

The vacuum chamber 13 has a closed structure and is connected to the vacuum pump P via the exhaust line L. As a result, the inside of the vacuum chamber 13 can be exhausted or maintained in a predetermined depressurized atmosphere.

The vacuum chamber 13 has a partition plate 8 inside. The partition plate 8 is arranged at a substantially central portion of the vacuum chamber 13 in the Z-axis direction, and has an opening having a predetermined size. The peripheral edge of the opening faces the outer peripheral surface of the main roller 4 with a predetermined gap. The inside of the vacuum chamber 13 is divided by a partition plate 8 into a transport chamber 9 on the upper side in the Z-axis direction from the partition plate 8 and a film forming chamber 10 on the lower side in the Z-axis direction from the partition plate 8.

An exhaust line L is connected to the film forming chamber 10. Therefore, when the inside of the vacuum chamber 13 is exhausted, the inside of the film forming chamber 10 is first exhausted. On the other hand, since there is a predetermined gap between the partition plate 8 and the main roller 4 as described above, the inside of the transport chamber 9 is also exhausted through this gap. As a result, a pressure difference is generated between the film forming chamber 10 and the transport chamber 9. Due to this pressure difference, it is possible to prevent the vapor flow of the evaporated material from the film forming unit 12 from entering the transport chamber 9.

In the present embodiment, the exhaust line L is connected only to the film forming chamber 10, but by connecting another exhaust line to the transport chamber 9, the transport chamber 9 and the film forming chamber 10 are connected at the same time or independently. May be exhausted.

Film unwinding roller 2, take-up roller 3, main roller 4, copper foil unwinding roller 5, guide rollers 6A, 6B, guide rollers 7A to 7F, first tension detection unit 131, second tension detection unit 132 Consists of the film transport mechanism 50. The film unwinding roller 2, the winding roller 3, the main roller 4, and the copper foil unwinding roller 5 each include a rotation drive unit (not shown), and are configured to be rotatable around an axis parallel to the X axis.

The film unwinding roller 2, the winding roller 3, and the copper foil unwinding roller 5 are arranged in the transport chamber 9, and are configured to be rotatable at a predetermined speed by their respective rotation drive units. The film unwinding roller 2 may be rotated in any direction as long as the organic film 21 can be fed toward the main roller 4. The winding roller 3 may be rotated in any direction as long as the organic film 21 can be wound from the main roller 4. The rotation direction of the copper foil unwinding roller 5 may be any direction as long as the copper foil 51 can be fed toward the winding roller 3.

In the present embodiment, the take-up roller 3 is in the direction indicated by the arrow in FIG. 1 (clockwise direction) in the first stage, and in the direction indicated by the arrow in FIG. 2 (counterclockwise direction) in the second stage. ), The direction of rotation is controlled. Further, the film unwinding roller 2 and the copper foil unwinding roller 5 are controlled in the counterclockwise direction in the first and second steps.

The main roller 4 is arranged between the film unwinding roller 2 and the take-up roller 3 in the transport path of the organic film 21. Specifically, at least a part of the lower portion of the main roller 4 in the Z-axis direction is arranged at a position facing the film forming chamber 10 through the opening provided in the partition plate 8.

Further, the main roller 4 is configured to be rotatable counterclockwise at a predetermined speed by a rotation driving unit, similarly to the film unwinding roller 2 and the winding roller 3. Further, the main roller 4 is made of a metal material such as iron or stainless steel in a cylindrical shape, and has a circulation mechanism for a cooling medium or a heating medium (not shown) inside the main roller 4. As a result, the inner surface (non-treated surface) of the organic film 21 in contact with the outer peripheral surface of the main roller 4 is cooled to a predetermined temperature or lower or heated to a predetermined temperature or higher by the main roller 4. The size of the main roller 4 is not particularly limited, but typically, the axial length (axial length) is equal to or longer than the width of the organic film 21.

The organic film 21 is wound around the film unwinding roller 2 so that the processing surface on which the lithium thin film 41 is formed later faces inward, and the organic film 21 is fed out.
The take-up roller 3 winds up the organic film 21.
The copper foil unwinding roller 5 feeds out the copper foil 51 or the first structure 151 in a transport path different from the transport path of the organic film 21. In the first stage, the copper foil 51 is wound around the copper foil unwinding roller 5, and the copper foil 51 is sent out. In the second stage, the first winding body 91 is attached to the copper foil unwinding roller 5, and the first structure 151 is sent out.

The organic film 21 wound around the main roller 4 is conveyed by the rotation of the main roller 4, and in the transfer process, a lithium thin film 41 is formed on the treated surface of the organic film 21 by the film forming unit 12. The organic film 21 on which the lithium thin film 41 is formed is wound around the winding roller 3 via the guide rollers 5E and 5F.

As shown in FIG. 1, in the first stage, the copper foil 51 is attached to the copper foil unwinding roller 5. A first structure in which a first laminate 421 in which a first lithium thin film 411 is formed on a first organic film 211 and a copper foil 51 fed from a copper foil unwinding roller 5 are superposed on each other. Body 151 is formed. At the time of superposition, the copper foil 51 is arranged on the first lithium thin film 411. The first structure 151 is wound by the take-up roller 3 to form the first winding body 91.

As shown in FIG. 2, in the second stage, the first winding body 91 formed in the first stage is attached to the copper foil unwinding roller 5. The second laminated body 422 formed by forming the second lithium thin film 412 on the second organic film 212 and the first structure 151 delivered from the copper foil unwinding roller 5 are overlapped with each other. The structure 152 of 2 is formed. At the time of superposition, the first structure 151 is arranged so that the copper foil 51 of the first structure 151 and the second lithium thin film 412 are in contact with each other. The second structure 152 is wound by the winding roller 3 to form the second winding body 92.

The take-up roller 3 is set in the clockwise rotation direction in the first stage, and is set in the counterclockwise rotation direction in the second stage. By setting the rotation directions to be opposite to each other in the first step and the second step in this way, the copper foil 51 is always caught inward of the first organic film 211 at the time of winding. It is wound up like this.

The guide rollers 6A and 6B are arranged between the copper foil unwinding roller 5 and the winding roller 3, support the copper foil 51 or the first structure 151, and guide the traveling.

The guide rollers 7A, 7B, 7C, and 7D are arranged between the film unwinding roller 2 and the main roller 4 in the transport path of the organic film 21, support the organic film 21, and guide the traveling. Further, the guide rollers 7E and 7F are arranged between the take-up roller 3 and the main roller 4 in the transport path of the organic film 21, support the organic film 21 on which the lithium thin film 41 is formed, and guide the traveling. ..

The guide roller 6B is installed immediately before the take-up roller 3 on the transport path of the copper foil 51 or the first structure 151. The guide roller 6B is configured so that the first tension (tension) acting on the copper foil 51 or the first structure 151 sent out from the copper foil unwinding roller 5 and wound up by the winding roller 3 can be adjusted. It also functions as the first tension roller.

The guide roller 7F is installed immediately before the take-up roller 3 on the transport path of the organic film 21. The guide roller 7F adjusts the second tension (tension) acting on the organic film 21 on which the lithium thin film 41 wound together with the copper foil 51 or the first structure 151 is formed by the winding roller 3. It functions as a second tension roller that is configured to be possible.

The guide roller 6B (7F) that functions as a tension roller is configured such that the rotation shaft can be moved by a drive mechanism (not shown). As a result, the relative distance between the take-up roller 3 and the guide roller 6A (7E) located before and after the guide roller 6B (7F) on the route can be changed. By changing the relative distance, the first tension and the second tension are adjusted, respectively.

The first tension detecting unit 131 detects the first tension acting on the conveyed copper foil 51 or the first structure 151. The first tension detection unit 131 is composed of a load cell connected to the guide roller 6B. The first tension detecting unit 131 detects the load applied to the guide roller 6B by the conveyed copper foil 51 or the first structure 151 as tension.

The second tension detection unit 132 detects the second tension acting on the organic film 21 on which the lithium thin film 41 to be conveyed is formed. The second tension detection unit 132 is composed of a load cell connected to the guide roller 7F. The second tension detection unit 132 detects the load applied to the guide roller 7F by the organic film 21 on which the lithium thin film 41 to be conveyed is formed as the tension.

The detected first tension and second tension are transmitted to the controller 11 as a control unit, which will be described later, which is connected via wiring (not shown). The controller 11 controls the positions of the guide roller 6B and the guide roller 7F so that the first and second tensions are preferable at each stage.

As shown in FIG. 1, the film forming unit 12 is arranged in the film forming chamber 10 and has an evaporation source 121 and an adhesive plate 122.

The evaporation source 121 is arranged directly below the main roller 4 in the Z-axis direction. Although not shown, the evaporation source 121 includes a round crucible as a container for holding the evaporation material, and an induction coil surrounding the outer peripheral portion of the crucible. The induction coil is electrically connected to an AC power source (not shown) installed outside the vacuum chamber 13. The evaporation source 121 generates vapor of the evaporation material to be deposited on the film-forming surface (treated surface) of the organic film 21 by an induction heating method. However, the present invention is not limited to this, and the evaporated material may be heated by a resistance heating method, electron beam heating, or the like.
In this embodiment, the evaporative material is Li (lithium).

The protective plate 122 has an opening 1221 and is arranged between the main roller 4 and the evaporation source 121. Further, the adhesive plate 122 is connected to the inner wall surface of the vacuum chamber 13 via a support portion (not shown) to prevent the evaporation material from adhering to the inner wall surface of the vacuum chamber 13. The material constituting the adhesive plate 122 is not particularly limited, and a metal material such as stainless steel or copper is typically applied.

The opening 1221 is a rectangular through hole provided in a substantially central portion of the protective plate 122, and is arranged so as to face the outer peripheral surface of the main roller 4. The size and shape of the opening 1221 are not particularly limited, and can be appropriately set according to the distance from the evaporation source 121, the distance from the organic film 21, and the like. In the present embodiment, the opening 1221 functions as a mask that defines the film formation region of the organic film 21.

In the film transport mechanism 50, the main roller 4 and the evaporation source 121 (deposition unit 12), which are respectively installed in the film transport path, correspond to a treatment section for applying a predetermined surface treatment to the treatment surface of the organic film 21.

The organic film 21 is made of a long plastic film cut to a predetermined width, and for example, PET (polyethylene terephthalate) film, PI (polyimide) film, PEN (polyethylene naphthalate) film and the like are used.

The thickness of the organic film 21 is not particularly limited, and is, for example, about 1 μm to 249 μm. Further, the width and length of the organic film 21 are not particularly limited and can be appropriately selected depending on the intended use. Typically, as the organic film 21, a long film having a length of 1000 m or more is used.

The thickness of the copper foil 51 is not particularly limited, and is, for example, about 4 μm to 100 μm. Further, the width and length of the copper foil 51 are not particularly limited and can be appropriately selected depending on the intended use.

The thickness of the lithium thin film to be formed is about 1 μm to 100 μm, and in this embodiment, it is set to 20 μm.

As shown in FIG. 1, the thin film manufacturing apparatus 1 further includes a controller 11 installed outside the vacuum chamber 13. The controller 11 is composed of, for example, a CPU (Central Processing Unit), a computer including a memory, and the like, and controls each part of the thin film manufacturing apparatus 1 in an integrated manner. The controller 11 controls, for example, the operation of the vacuum pump P, the rotational drive and position control of each roller, the control of the amount of evaporation of the evaporated material in the evaporation source 121, the control of the first and second tensions, and the like.

[Control of first and second tension]
The first and second tensions are controlled by the controller 11 so as to have a preferable value at each stage.

In the present embodiment, in the first step of superimposing and winding the first laminated body 421 and the copper foil 51, the tension acting on the copper foil 51 is applied to the first laminated body 421 having the first organic film 211. It is set to be higher than the tension acting on.
Specifically, the tension acting on the copper foil 51 is preferably 10 to 300 N, and in the present embodiment, the tension acting on the first laminated body 421 is preferably 1 to 200 N. The form was 80 N.

On the other hand, in the second step of superimposing and winding the second laminated body 422 and the first structure 151, the second laminated body 422 having the first structure 151 and the second organic film 212, respectively. The tension acting on the is set to be the same.
Specifically, the tension acting on the first structure 151 and the second laminated body 422 is preferably 1 to 200 N, and in the present embodiment, it is 80 N. Here, the same tension includes a tension in which the tension acting on the first structure 151 is in the range of −20% to 20% of the tension acting on the second organic film 212.

In this way, by setting the tension acting on the copper foil 51 to be larger than the tension acting on the first laminated body 421 having the first organic film 211 in the first step, the copper foil 51 It can be wound up without wrinkles.

Here, the film formation start position of the first lithium thin film 411 on the first organic film 211 is a place where a gap is provided from the tip portion in the longitudinal direction of the long first organic film 211. Therefore, immediately after the start of winding by the winding roll 3, only the portion of the first organic film 211 on which the first lithium thin film 411 is not formed is wound.
For example, when the copper foil 51 and the organic film 21 are wound around without applying tension to the copper foil 51, the copper foil 51 is not wrinkled in the portion of only the organic film 21 on which the lithium thin film 41 is not formed. Can be wound up. However, when the organic film 21 on which the lithium thin film 41 is formed is wound up, wrinkles are likely to occur on the copper foil 51.
It is considered that this is because the surface of the lithium thin film 41 is sticky, so that the copper foil 51 cannot move smoothly on the lithium thin film 41 and wrinkles are generated.

Further, the copper foil 51 has a high Young's modulus and high rigidity as compared with the lithium thin film 41, for example, the organic film 21 made of PET or the like.

Therefore, in the present embodiment, the copper foil is set so that the tension acting on the relatively rigid copper foil 51 is larger than the tension acting on the first organic film 211 in the first stage. The generation of wrinkles of 51 is suppressed and the film can be wound up.

On the other hand, as described above, in the second stage, by setting the tensions acting on the first structure 151 and the second organic film 212 to be the same, the generation of wrinkles is suppressed and the film is wound. Can be taken.

In the first stage, since the copper foil 51 was wound up, the tension was set to act on the copper foil 51 with high tension. On the other hand, in the second stage, the first structure 151 composed of the copper foil 51 having significantly different Young's modulus, the first lithium thin film 411, and the first organic film 211 is wound up. .. Therefore, as in the first step, when the tension acting on the first structure 151 is made larger than that of the second organic film 212, the copper foil 51 and the first lithium thin film 411 having significantly different Young's moduli are generated. Shear stress acts at the interface with the first organic film 211 formed into a film, and structural destruction is likely to occur, and wrinkles are likely to occur in the first structure 151 during winding.
Therefore, in the second stage, the tension acting on the first structure 151 is made to be substantially the same as the tension acting on the second organic film 212 on which the second lithium thin film 412 is formed, thereby causing wrinkles. Can be suppressed.

The first and second tensions are preset with preferable numerical values at each stage, and are controlled by the controller 11 so as to be within the range.
The controller 11 periodically acquires detection results from the first tension detection unit 131 and the second tension detection unit 132, and based on the detection results, guide rollers 6B so as to be within a preset numerical range of tension. And the position of 7F is controlled. For example, since the tension changes due to a change in the diameter of the first and second winding bodies 91 and 92 due to winding, the positions of the guide rollers 6B and 7F are determined by the controller 11 as the first and second tensions. It is controlled to be in the range of.

(Manufacturing method of lithium thin film)
Next, using FIGS. 1 to 4, a second winding body using the above-mentioned lithium thin film manufacturing apparatus 1 in which a second structure in which lithium thin films are arranged on both sides of a copper foil is wound up. The manufacturing method of the above will be described.

(First stage)
First, as shown in FIG. 1, the wound first organic film 211 is attached to the unwinding roller 2, and the wound copper foil 51 is attached to the copper foil unwinding roller 5. The rotation direction of the film unwinding roller 2 and the copper foil unwinding roller 5 is set counterclockwise, and the rotation direction of the winding roller 3 is set clockwise. Further, the winding start portion of the copper foil 51 and the first organic film 211 is arranged on the winding roller 3 so that the copper foil 51 of the first structure 151 is wound inside at the time of winding.

The organic film 21 is a long film having a thickness of 50 μm and a width of 250 mm.
The copper foil 51 has a thickness of 10 μm and a width of 300 mm.

Next, the vacuum chamber 13 is evacuated. Paper is passed so that the tension acting on the first organic film 211 between the film unwinding roller 2 and the guide roller 7E is 80 N, and the first organic film 211 is conveyed. Further, the copper foil 51 is passed through the paper so that the tension acting on the copper foil 51 between the unwinding roller 2 and the guide roller 6B is 200 N, and the copper foil 51 is conveyed.

A first lithium thin film 411 having a thickness of 20 μm is formed in the film forming chamber 10 on the processing surface of the first organic film 211 fed out by the film unwinding roller 2, and the first laminated body 421 is formed. Will be done.
Next, the copper foil 51 sent out from the copper foil unwinding roller 5 overlaps with the first laminated body 421 to form the first structure 151.
The first structure 151 is wound around the winding roller 3 in a roll shape to form the first winding body 91. As shown in FIG. 3, when wound, the first structure 151 is wound so that the copper foil 51 is located inside the first organic film 211.
After the formation of the first winding body 91, the evacuation is released and the first winding body 91 is taken out.

(Second stage)
As shown in FIG. 2, the organic film 21 attached in the first stage can be used as it is for the unwinding roller 2. The first winding body 91 formed in the first stage is attached to the copper foil unwinding roller 5. The rotation directions of the film unwinding roller 2, the copper foil unwinding roller 5, and the winding roller 3 are set counterclockwise. Further, the winding start portions of the first structure 151 and the second organic film 212 are arranged on the winding roller 3 so that the copper foil 51 is located inside the first organic film 211 at the time of winding. ..

Next, the vacuum chamber 13 is evacuated. Paper is passed so that the tension acting on the second organic film 212 between the film unwinding roller 2 and the guide roller 7E is 80 N, and the second organic film 212 is conveyed. Further, the first structure 151 is passed through the paper so that the tension acting on the first structure 151 between the unwinding roller 2 and the guide roller 6B is 80 N, and the first structure 151 is conveyed. ..

A second lithium thin film 412 having a thickness of 20 μm is formed in the film forming chamber 10 on the treated surface of the second organic film 212 sent out by the film unwinding roller 2, and the second laminated body 422 is formed. It is formed.
Next, the first structure 151 sent out from the copper foil unwinding roller 5 overlaps the second laminated body 422 to form the second structure 152.
The second structure 152 is wound around the winding roller 3 in a roll shape to form the second winding body 92. At the time of winding, the second structure 152 is wound so that the copper foil 51 is located inside the first organic film 211.
After the formation of the second winding body 92, the evacuation is released and the second winding body 92 is taken out.

As described above, the pair of organic films 211 and 212 are in contact with the lithium thin films 411 and 412 so as to sandwich the laminate in which the first lithium thin film 411 and the second lithium thin film 412 are arranged on both sides of the copper foil 51, respectively. A second structure 152 in which the above is arranged is obtained.

In the above manufacturing method, the copper foil 51 is wound so as to be located inside the first organic film 211 at the time of winding in both the first stage and the second stage. As a result, in the second stage, winding can be performed without wrinkles.

That is, in the first winding body 91 wound in the first stage, the copper foil 51 is located on the inside and the first organic film 211 is located on the outside, so that the first winding body 91 is wound. The diameters of the copper foil 51 and the first organic film 211 are different from each other, and the length in the winding direction of the first organic film 211 is longer than that of the copper foil 51.
Therefore, for example, when the second structure 152 is wound so that the first organic film 211 is located inside the copper foil 51 during the winding in the second stage, the first organic film 211 is wound. Wrinkles are more likely to occur on the first organic film 211 due to the fact that the length of the film is longer than that of the copper foil 51.
On the other hand, in the present embodiment, in the second step, as in the first step, the winding is performed while maintaining the state in which the first organic film 211 is located outside the copper foil 51. Therefore, winding can be performed without wrinkles.

In the present embodiment, the steps of the first step and the second step can be performed by using the same thin film manufacturing apparatus 1 by changing what is attached to the copper foil unwinding roller 5. The steps of the first step and the second step may be performed by using different thin film manufacturing apparatus 1. When another thin film manufacturing apparatus 1 is used, fine adjustment is required due to individual differences in the manufacturing apparatus. Therefore, when the same thin film manufacturing apparatus 1 is used, a lithium thin film having the same film quality is formed on both sides of the copper foil 51. Very efficient.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and it goes without saying that various modifications can be made.

For example, in the above-described embodiment, the first and second tensions are adjusted by moving the guide rollers 6B and 7F, but the present invention is not limited to this. For example, the tension (second tension) of the organic film 21 may be adjusted by controlling the rotation speed of the film unwinding roller 2, the winding roller 3, or the main roller 4. Further, the tension (first tension) of the copper foil 51 or the first structure 151 may be adjusted by controlling the rotation speeds of the copper foil unwinding roller 5 and the winding roller 3.

1 ... Lithium thin film manufacturing equipment 2 ... Film unwinding roller 3 ... Winding roller 4 ... Main roller 5 ... Copper foil unwinding roller 6B ... Guide roller (first tension roller)
7F ... Guide roller (second tension roller)
11 ... Controller (control unit)
12 ... Film formation unit 21 ... Organic film 41 ... Lithium thin film 91 ... First winding 92 ... Second winding 131 ... First tension detection unit (first detection unit)
132 ... Second tension detection unit (second detection unit)
151 ... 1st structure 152 ... 2nd structure 211 ... 1st organic film 212 ... 2nd organic film 411 ... 1st lithium thin film 412 ... 2nd lithium thin film

Claims (6)

A first lithium thin film is formed on the treated surface of the first organic film,
A copper foil is arranged on the first lithium thin film to form a first structure.
The first structure is wound into a roll so that the copper foil is inside the first organic film to form the first roll.
A second lithium thin film is formed on the treated surface of the second organic film,
The first structure is arranged on the second lithium thin film so that the copper foil of the first structure sent out from the first winding body and the second lithium thin film are in contact with each other. Forming a second structure,
A method for producing a thin film lithium, in which the second structure is wound into a roll so that the copper foil is inside the first organic film to form a second winding body. The method for producing thin film lithium according to claim 1.
A method for producing a thin film lithium, in which the tension acting on the copper foil is set to be larger than the tension acting on the first organic film in the step of forming the first winding body. The method for producing thin film lithium according to claim 1 or 2.
A method for producing a thin film lithium, in which the tension acting on the first structure and the tension acting on the second organic film are set to be the same in the step of forming the second winding body. A film unwinding roller that feeds out organic film,
A take-up roller that winds up the organic film sent out from the film take-out roller, which can change the direction of rotation, and a take-up roller.
A processing unit arranged in the transport path of the organic film and forming a lithium thin film on the processing surface of the organic film, and a processing unit.
A copper foil unwinding roller that feeds out a first structure in which a lithium thin film and a copper foil are sequentially laminated on a copper foil or an organic film arranged on the lithium thin film.
The copper foil or the first structure is arranged between the copper foil unwinding roller and the winding roller, supports the copper foil or the first structure, and is wound by the winding roller. A first tension roller configured to adjust the first tension of the body,
A second tension that is arranged between the processing unit and the take-up roller, supports the organic film, and is configured to be able to adjust the second tension of the organic film when it is taken up by the take-up roller. Lithium thin film manufacturing equipment equipped with rollers. The lithium thin film manufacturing apparatus according to claim 4.
The first detection unit that detects the first tension and
A second detection unit that detects the second tension, and
A lithium thin film manufacturing apparatus further comprising a first tension and a control unit for controlling the second tension based on the detection result by the detection unit. The lithium thin film manufacturing apparatus according to claim 4 or 5.
The processing unit
A main roller that supports a non-treated surface of the organic film opposite to the treated surface,
A lithium thin film manufacturing apparatus including a film forming unit that is arranged to face the main roller and forms a film on the treated surface of the organic film.

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