CN102803109B

CN102803109B - Processing device and transfer device for a strip-shaped sheet substrate

Info

Publication number: CN102803109B
Application number: CN201180008588.XA
Authority: CN
Inventors: 铃木智也
Original assignee: Nikon Corp
Current assignee: Nikon Corp
Priority date: 2010-02-12
Filing date: 2011-02-10
Publication date: 2015-04-22
Anticipated expiration: 2031-02-10
Also published as: JPWO2011099562A1; WO2011099562A1; KR101747989B1; CN102803109A; TWI627120B; TW201144194A; JP5765240B2; KR20120125984A; KR101803692B1; TWI592353B; TW201733890A; KR20170069297A

Abstract

The invention provides a transfer device and a processing device for a strip-shaped sheet substrate, wherein the transfer device is provided with a first guide roller (G1) and a second guide roller (G2). A strip-shaped sheet substrate (FB), i.e. a resin film or foil, is turned over via diagonal folding by the first guide roller (G1) and turned over again via diagonal folding by the second guide roller (G2). An alignment camera (51) detects alignment marks (AM) on the substrate (FB), and on the basis thereof, adjustment mechanisms (52 and 53) shift or tilt the guide rollers (G1 and G2). This shifting (parallel movement) or tilting moves the substrate (FB) sideways between the first and second guide rollers (G1 and G2). A processing device (10) forms organic EL elements on a surface (Fp) of the substrate (FB). Circular cones (G3 and G4) may be used instead of the guide rollers (G1 and G2). A third guide roller (G23) or circular cone (G27) may be added. A fourth guide roller (G24) or circular cone (G28) may also be added. The guide rollers and circular cones do not touch the surface (Fp) of the substrate (FB) which is processed. Wrinkles do not form in the substrate (FB) during the aforementioned sideways movement of the substrate (FB).

Description

For carrying device and the processing equipment of strip of sheet material substrate

Technical field

The invention relates to carrying device and substrate board treatment.

Background technology

As the display element forming the read out instrument such as display equipment, such as, there are liquid crystal display cells, organic electroluminescent (organic EL) element, electrophoresis element etc. for Electronic Paper.At present, these display elements are with after substrate surface formation is called as the on-off element (Thin Film Transistor:TFT) of membrane transistor, and the active member (Active device) forming respective display element is thereon gradually main flow.

In recent years, a kind of technology at plate shape substrates (such as film member etc.) upper formation display element is proposed.As this kind of technology, be widely known by the people (for example, referring to patent documentation 1) such as to have one to be called as volume to volume (roll to roll) mode (following, referred to as winding method).Winding method is that a slice plate shape substrates (such as, banded film member) of the confession application cylinder by being wound on supply substrate side is sent and reeled with the recovery cylinder of substrate recovery side by the substrate sent and transports substrate.

And, period to being wound is sent at substrate, such as use the conveyance substrates such as a plurality of conveyance cylinders while use a plurality of processing equipment to be formed the gate, lock fire coat, semiconductor film, source-drain electrodes electrode etc. that form TFT, the processed surface of substrate is sequentially formed the constitutive requirements of display element.Such as, when forming organic EL element situation, be sequentially formed to send out luminescent layer, anode, negative electrode, motor circuit etc. on substrate.

When display element is formed, in order to such as be configured on substrate by high-precision for constitutive requirements, the position alignment between processing equipment and substrate must be carried out.Therefore, develop a kind of at the end difference allocation position adjustment cylinder with substrate conveyance direction orthogonal directions, mat adjusts the rotative speed of this position adjustment cylinder, the technology of the position of adjustment substrate.

Prior art document

No. 2006/100868th, [patent documentation 1] International Publication

Summary of the invention

The problem that invention solves

But the masterpiece with conveyance direction different directions likely because of the difference of the rotative speed between position adjustment cylinder, and is used for substrate by the adjustment of above-mentioned position, makes substrate produce such as fold etc.

In addition, when substrate transports, processed surface is contacted with and such as transports cylinder, and likely has an impact to the treatment state of processed surface.Therefore, be required in the front and back of the processed surface of substrate being implemented to various process, to do one's utmost to reduce the formation to the contact of substrate processed surface.

Various embodiments of the present invention, its object is providing a kind of carrying device and the substrate board treatment that can promote substrate orientation precision.Another object of embodiments of the invention, is providing a kind of carrying device and the substrate board treatment that can suppress to transport the contact of substrate processed surface substrate.

In order to solve the means of problem

The invention provides a kind of carrying device, be transport banded sheet material substrate, possess:

First guiding element, the conveyance direction of sheet material substrate, in addition after oblique bending, is transformed into the second direction different from first direction from first direction by the sheet material substrate that will transport (or toward first direction) from first direction;

Second guiding element, the conveyance direction of sheet material substrate, in addition after oblique bending, is transformed into the third direction different from second direction from second direction by the sheet material substrate that will transport (or toward second direction) from second direction; And

Adjusting mechanism is at least one party being located at the first guiding element and the second guiding element, in order at least one party of the position of the position and the second guiding element that adjust the first guiding element, to adjust the position of the sheet material substrate in the direction intersected with second direction.

The present invention also provides a kind of substrate board treatment, possesses: the carrying device of the sheet material substrate that conveyance is banded; And sheet material substrate is carried out to the processing equipment of set process; Carrying device uses above-mentioned carrying device.

The present invention also provides a kind of carrying device, it is the sheet material substrate of conveyance band shape, possess: the first guiding element, be the back side of supporting sheet substrate, by from the in addition oblique bending of the sheet material substrate of first direction conveyance (or past first direction), so that the conveyance direction of sheet material substrate is transformed to the second direction different from first direction from first direction; Second guiding element is the back side of this sheet material substrate of supporting, makes from the oblique bending of sheet material substrate of second direction conveyance (or toward second direction), so that the conveyance direction of sheet material substrate is converted to the third direction different from second direction from second direction; And the 3rd guiding element, be the back side of supporting sheet substrate, make from the oblique bending of sheet material substrate of third direction conveyance (or toward third direction), so that the conveyance direction of sheet material substrate is converted to the fourth direction different from third direction from third direction.

The present invention also provides a kind of substrate board treatment, possesses: the carrying device of the sheet material substrate that conveyance is banded, with processing equipment sheet material substrate being carried out to set process; Carrying device uses above-mentioned carrying device.

The present invention also provides a kind of substrate board treatment, that set process is implemented to the sheet material substrate surface of band shape, possess: the first guiding element, be the back side of supporting sheet substrate, make, from the oblique bending of sheet material substrate of first direction conveyance (or toward first direction), to be transformed to the second direction different from this first direction to make the conveyance direction of sheet material substrate from first direction; Second guiding element, be the back side of supporting sheet substrate, the sheet material substrate in addition oblique bending of (or toward second direction) will be transported, so that the conveyance direction of sheet material substrate is transformed to the third direction different from this second direction from second direction from second direction; 3rd guiding element, be the back side of supporting sheet substrate, the sheet material substrate in addition oblique bending of (or toward third direction) will be transported, so that the conveyance direction of sheet material substrate is transformed to the fourth direction different from this third direction from third direction from third direction; 4th guiding element, be the back side of supporting sheet substrate, the sheet material substrate in addition oblique bending of (or toward fourth direction) will be transported, so that the conveyance direction of sheet material substrate is transformed to five direction different from this fourth direction from fourth direction from fourth direction; And first handling part, tie up between the first guiding element and the second guiding element, set process is carried out to the surface of sheet material substrate.

Invention effect

By the above embodiment of the present invention, and previously to compare, the position of substrate can be adjusted with high position precision.In addition, can also suppress to transport substrate to the contact of substrate processed surface.

Accompanying drawing explanation

Fig. 1 is the entirety figure of the schematic configuration of the substrate board treatment of display first embodiment.

Fig. 2 is the side cutaway view that the part of the carrying device of display the present embodiment is formed.

Fig. 3 is the birds-eye view that the part of the carrying device of display the present embodiment is formed.

Fig. 4 is the figure of the transporting operation of the substrate board treatment of display the present embodiment.

Fig. 5 is the figure of the transporting operation of the substrate board treatment of display second embodiment.

Fig. 6 is the figure that the part of the carrying device of the substrate board treatment of display the 3rd embodiment is formed.

Fig. 7 is the block diagram that the part of the carrying device of display the present embodiment is formed.

Fig. 8 is other figure formed of the carrying device of display the present embodiment.

Fig. 9 is the entirety figure of the schematic configuration of the substrate board treatment of display the 4th embodiment.

Figure 10 is the birds-eye view that the part of the carrying device of display the present embodiment is formed.

Figure 11 is the figure that the part of the carrying device of display the 5th embodiment is formed.

Figure 12 is the figure that the part of the carrying device of display the 6th embodiment is formed.

Figure 13 is other figure formed of the carrying device of display the present embodiment.

Drawing reference numeral

FPA substrate board treatment

FB sheet material substrate

CONT control part

Fp treated side

G1, G21 first guide roller

G2, G2 second guide roller

G23 the 3rd guide roller

G24 the 4th guide roller

C1 ~ C8 center shaft

G1a, G2a, G21a ~ G24a Roll cylinder surface

ST bearing table device

Sa areal of support

AM alignment mark

CA surveyed area

G3, G25 first hammers shape component into shape

G4, G26 second hammers shape component into shape

G27 the 3rd hammers shape component into shape

G28 the 4th hammers shape component into shape

G3a, G4a, G21a ~ G24a Roll cylinder surface

G25a ~ G28a side

10 processing equipment

30 carrying devices

40 adsorption sections

51 aim at video camera

52,53 adjusting mechanisms

61,63 driver trains

63 driver trains

64 microscope carrier driver trains

Detailed description of the invention

< first embodiment >

Fig. 1 is the pie graph of the substrate board treatment FPA of display first embodiment.

As shown in Figure 1, substrate board treatment FPA have supply sheet material substrate (such as banded film member) FB supply substrate portion SU, the processing substrate portion PR that the surface (processed surface) of sheet material substrate FB is processed, reclaim the substrate recoverer CL of sheet material substrate FB and control the control part CONT in these each portions.Substrate board treatment FPA is such as arranged on workshop etc.

Substrate board treatment FPA, be after sending sheet material substrate FB from supply substrate portion SU, to reclaiming sheet material substrate FB with substrate recoverer CL period, the surface of sheet material substrate FB is imposed to the device of the volume to volume mode (following, referred to as winding method) of various process.The occasion that substrate board treatment FPA can form the such as display element such as organic EL element, liquid crystal display cells (electronic component) on sheet material substrate FB uses.Certainly, processing equipment FPA also can use in the occasion forming the element beyond these elements.

At the sheet material substrate FB of substrate board treatment FPA as handling object, the paper tinsel (film) of such as resin film and corrosion-resistant steel etc. can be used.Resin film can use the such as material such as poly-vinyl resin, acrylic resin, alkide resin, Ethylene vinyl copolymer (Ethylene vinyl copolymer) resin, Vinyl chloride resin, celluosic resin, amilan, polyimide resin, polycarbonate resin, polystyrene resin, vinyl acetate resin.

Y-direction (short side direction) size of sheet material substrate FB is that to be formed as such as 1m ~ 2m degree, X-direction (long side direction) size be formed as such as more than 10m.Certainly, this size is only an example, is not limited to this example.Such as the Y-direction of sheet material substrate FB is of a size of below 1m or below 50cm, also can be more than 2m.Again, the X-direction size of sheet material substrate FB also can at below 10m.

Sheet material substrate FB is formed as such as having pliability.Herein, so-called pliability, refers to the character that the pre-determined force such as imposing to substrate degree of at least conducting oneself with dignity also can not rupture or break and this substrate can be bent.In addition, such as because of above-mentioned pre-determined force, bending character is also contained in pliability.Again, above-mentioned pliability can change along with environment of this substrate material, size, thickness or temperature etc. etc.Moreover sheet material substrate FB can use the substrate of a slice band shape, also the substrate of a plurality of unit can be connected and be formed as banded formation.

Sheet material substrate FB, even if the hot coefficient of dilatation smaller of its size of heat of bearing higher temperatures (such as 200 DEG C of degree) also unchanged in fact (thermal deformation is little) is better.Such as inorganic filler can be mixed in resin film to reduce hot coefficient of dilatation.As inorganic filler, such as, there are titanium oxide, zinc oxide, aluminium oxide, monox etc.

The sheet material substrate FB being such as rolled into roll sends to be supplied to processing substrate portion PR by supply substrate portion SU.In supply substrate portion SU, be provided with the axle portion in order to such as roll sheet substrate FB and rotary driving source etc. that this axle portion is rotated.Certainly, can also replace and/or additional mode, in supply substrate portion SU setting example as being rolled into the covering part etc. of the sheet material substrate FB of roll state in order to covering.

Sheet material substrate FB from processing substrate portion PR is such as wound into roll to be reclaimed by substrate recoverer CL.In substrate recoverer CL, same with supply substrate portion SU, be provided with the covering part etc. in order to the axle portion of roll sheet substrate FB and the sheet material substrate FB of the rotary driving source making this axle portion rotate and covering recovery.Also can replace and/or additional mode, when sheet material substrate FB is such as cut into the occasion etc. of flat board (panel) shape by processing substrate portion PR, substrate recoverer CL also can be configured to such as sheet material substrate FB is recycled into the formation that the states different from the state being wound into roll such as overlapping state reclaim sheet material substrate FB.

Processing substrate portion PR, transports the sheet material substrate FB supplied from supply substrate portion SU to substrate recoverer CL and in the processed surface Fp process of conveyance process to sheet material substrate FB.Processing substrate portion PR has such as processing equipment 10, carrying device 30 and alignment device 50 etc.

Processing equipment 10 has the various devices in order to form such as organic EL element to the processed surface Fp of sheet material substrate FB.As this kind of device, such as, there is the spaced walls forming apparatus in order to form spaced walls on processed surface Fp, be used for driving the electrode forming apparatus of electrode of organic EL element and the luminescent layer forming apparatus etc. in order to form luminescent layer in order to be formed.Specifically, apparatus for coating liquid droplet (such as inkjet type apparatus for coating, rotary coating type apparatus for coating etc.), the film formation device of evaporation coating device, sputtering unit etc. and exposure device, developing apparatus, surfaction device, decontaminating apparatus etc. are had.These each device is in the suitable transport path being located at such as sheet material substrate FB.

Such as the processing equipment of more than two can be configured along conveyance direction.

Carrying device 30, have such as sheet material substrate FB is transported towards substrate recoverer CL in processing substrate portion PR roller device R, with clip processing equipment 10 and be configured in the upstream side of this processing equipment 10 and the guide roller G of downstream side.Roller device R is such as provided with a plurality of along the transport path of sheet material substrate FB.Roller device R at least partially in a plurality of roller device R is provided with driver train (not shown).Rotate by this kind of roller device R, sheet material substrate FB is transported by toward X-direction.Also such as a part of roller device R in a plurality of roller device R can be configured to be arranged to move with conveyance direction orthogonal directions.

Again, the carrying device 30 in the present embodiment, relates to the conveyance direction of sheet material substrate FB, at upstream side and the downstream side of guide roller G, for avoiding tension force to put on sheet material substrate FB, is provided with flaccid part (not shown) in sheet material substrate FB.

Fig. 2 and Fig. 3 is the skeleton diagram of the formation of display processing unit 10 and guide roller G.Fig. 2 shows formation when observing substrate board treatment FPA from side (+X-direction).Fig. 3 shows formation when observing substrate board treatment FPA from top (+Z-direction).

As shown in Figures 2 and 3, guide roller G has the first guide roller G1 and the second guide roller G2.First guide roller G1 is formed as such as cylindric or cylindric etc., and relative processing equipment 10 is configured in the conveyance direction upstream side of sheet material substrate FB.Second guide roller G2 is formed as such as cylindric or cylindric etc., and relative processing equipment 10 is configured in the conveyance direction downstream side of sheet material substrate FB.

First guide roller G1 is that the Part I of the sheet material substrate FB relatively transporting from the upstream side of this first guide roller G1 toward first direction (+X-direction) and come is (by the part before the first guide roller G1 guiding, that is relative first guide roller G1, sheet material substrate FB upstream side part) short side direction (Width: be herein Y-direction) of F1, be configured to its center shaft C1 and be inclined to tilted direction.First guide roller G1, guides the back side of sheet material substrate FB in cylinder surface (guiding face) G1a.

In addition, transporting and next sheet material substrate FB from the upstream side of the first guide roller G1, in Fig. 2, is the back side Fq state upward of sheet material substrate FB.

The short side direction of relative this sheet material substrate FB of sheet material substrate FB is bent towards tilted direction and to turn back sheet material substrate FB along the cylinder surface of the first guide roller G1 by the first guide roller G1, by this conveyance direction of sheet material substrate FB is transformed to second direction (-Y-direction) from above-mentioned first direction.In the present embodiment, the first guide roller G1 can by the oblique bending in addition of sheet material substrate FB essence.Sheet material substrate FB can pass through the first guide roller G1 bending while torsion (twist).In sheet material substrate FB, by the part of the first guide roller G1 guiding, the portion peripheral surface that relative conveyance direction (first direction) tilts can be formed.The sheet material substrate FB with the direct of travel of first direction (+X-direction) enters the first guide roller G1.There is the sheet material substrate FB of the direct of travel of second direction (-Y-direction) from the first guide roller G1 out.In the present embodiment, this second direction is such as and first direction orthogonal directions.The sheet material substrate FB such as turned back by the first guide roller G1 in second direction, its processed surface Fp upward (processing equipment 10 side).Again, sheet material substrate FB is supported in the cylinder surface G1a of the first guide roller G1, until in the front and back of the first guide roller G1, Part I F1 and Part II (be led to the part before the second guide roller G2, that is relative second guide roller G2, sheet material substrate FB upstream side part) till F2 is parallel to each other.

Second guide roller G2 is the Part II F2 of the sheet material substrate FB being configured to relatively transport from this second guide roller G2 upstream side toward second direction and coming, and its center shaft C2 tilts toward tilted direction.Second guide roller G2 guides the back side of sheet material substrate FB in cylinder surface (guiding face) G2a.

In addition, the sheet material substrate FB come from the second guide roller G2 upstream side conveyance in Fig. 2, as previously mentioned, is the processed surface Fp state upward of sheet material substrate FB.

Sheet material substrate FB is turned back to tilted direction and along the cylinder surface of the second guide roller G2 by the second guide roller G2 by the short side direction bending of relative for the Part II F2 of sheet material substrate FB this sheet material substrate FB, the conveyance direction of sheet material substrate FB is converted to third direction (+X-direction) from above-mentioned second direction by this.In the present embodiment, the second guide roller G2 can by the oblique bending in addition of sheet material substrate FB essence.Sheet material substrate FB can pass through the second guide roller G2 bending while torsion (twist).In sheet material substrate FB, by the part of the second guide roller G2 guiding, the portion peripheral surface that relative conveyance direction (second direction) tilts can be formed.The sheet material substrate FB with the direct of travel of second direction (-Y-direction) enters the second guide roller G2.There is the sheet material substrate FB of the direct of travel of third direction (+X-direction) from the second guide roller G2 out.In the present embodiment, this third direction is such as parallel with first direction direction.Such as by the sheet material substrate FB that the second guide roller G2 turns back, in third direction become back side Fq upward and processed surface Fp downward.Again, sheet material substrate FB is supported in the cylinder surface G2a of the second guide roller G2, until Part II F2 and Part III (part before being guided by the 3rd guide roller G3, that is the upstream side part of the sheet material substrate FB of relative 3rd guide roller G3) are till F3 is parallel to each other.

The conveyance direction of sheet material substrate FB, in this sheet material substrate FB compared with the first guide roller G1 by the upstream side part (Part I F1) of conveyance direction be+X-direction (first direction), part (Part II F2) between the first guide roller G1 and the second guide roller G2 is-Y-direction (second direction), be+X-direction (third direction) again in the part (Part III F3) of the conveyance direction downstream side compared with the second guide roller G2.So, sheet material substrate FB is bending angle with the first guide roller G1 and the second guide roller G2 crank-like path transports.

First guide roller G1 be such as support by bearing components 60.The driver train 61 of driving first guide roller G1 is provided with in bearing components 60.Driver train 61 makes the first guide roller G1 rotate on central axis direction.

Second guide roller G2 is same with the first guide roller G1, such as support by bearing components 62.The driver train 63 of driving second guide roller G2 is provided with in bearing components 62.Driver train 63 makes the second guide roller G2 rotate on central axis direction.

Again, such as, in the first guide roller G1 and the second guide roller G2, be provided with the detecting device that coder detecting rotation amount, rotative speed etc. respectively etc. is not shown.Testing result by this detecting device is sent to such as control part CONT.

Between the first guide roller G1 and the second guide roller G2, be configured with the bearing table device ST of supporting sheet substrate FB.Bearing table device ST is that the Part II F2 of relative sheet material substrate FB is configured in rear side (-Z side), has the areal of support Sa of the Part II F2 of supporting sheet substrate FB.Areal of support Sa is with such as smooth face or the face formation with curvature.

Bearing table device ST is, if areal of support Sa is such as tabular surface, is then configured to areal of support Sa and XY plane parallel.Microscope carrier driver train 64 is provided with in bearing table device ST.By microscope carrier driver train 64, bearing table device ST is arranged to such as to move in X-direction, Y-direction and Z-direction.

Bearing table device ST, has adsorption section 40 (with reference to Fig. 2) in areal of support Sa.Adsorption section 40 is such as configured at a place or plural number place at areal of support Sa.The attracting mechanism 41 of such as suction pump etc. is connected in adsorption section 40.Therefore, bearing table device ST can while the Part II F2 of sheet material substrate FB is adsorbed in areal of support Sa, supported.

Get back to Fig. 1, alignment device 50 carries out alignment actions to sheet material substrate FB.Alignment device 50 has the aligning video camera 51 of the location status detecting sheet material substrate FB, with the testing result of aiming at video camera 51 according to this sheet material substrate FB carried out the first adjusting mechanism (the first adjustment part) 52 and second adjusting mechanism (the second adjustment part) 53 of inching in X-direction, Y-direction, Z-direction, θ X-direction, θ Y-direction, θ Z-direction.

As shown in Figure 3, alignment mark AM is formed with in sheet material substrate FB surface (processed surface Fp side).Alignment mark AM, is in sheet material substrate FB surface, is respectively formed at the short side direction both ends of such as sheet material substrate FB.In Fig. 3, only show a pair alignment mark AM, but be in fact such as configured with a plurality of along each end of sheet material substrate FB.

In addition, the aligning video camera 51 in the present embodiment configures with the short side direction end difference subtend of sheet material substrate FB.In the present embodiment, aiming at video camera 51 is the alignment mark AM detecting sheet material substrate FB both ends respectively.The surveyed area CA of each aligning video camera 51 is the regions being set as such as comprising alignment mark AM.

First adjusting mechanism 52 is the both ends of supporting such as the first guide roller G1.Such as, and the first adjusting mechanism 52 makes the first guide roller G1 be displaced into the direction parallel with the center shaft of the first guide roller G1, makes the first guide roller G1 in XY plane, moves in or the face that intersects orthogonal with XY plane.Further, the first adjusting mechanism 52 makes the first guide roller G1 rotate around θ X-direction, θ Y-direction, θ Z-direction.In addition, the centre of gration of each hand of rotation can be set in the end of the side in the first guide roller G1 both ends or be set in the middle body of central axis direction of the first guide roller G1 by the first adjusting mechanism 52.

Second adjusting mechanism 53 is the both ends of supporting such as the second guide roller G2.Such as, and the second adjusting mechanism 53 makes the second guide roller G2 be displaced into the direction parallel with the center shaft of the second guide roller G2, makes the second guide roller G2 in XY plane, moves in or the face that intersects orthogonal with XY plane.Further, the second adjusting mechanism 53 makes the second guide roller G2 rotate around θ X-direction, θ Y-direction, θ Z-direction.In addition, the centre of gration of each hand of rotation can be set in the end of the side in such as the second guide roller G2 both ends or be set in the middle body of central axis direction of the second guide roller G2 by the second adjusting mechanism 53.

Aim at video camera 51 detect this alignment mark AM and testing result is delivered to control part CONT.Control part CONT delivers to adjusting mechanism 52 according to this testing result in order to the adjustment signal adjusting the position of the first guide roller G1, and the adjustment signal of the position in order to adjust the second guide roller G2 is delivered to adjusting mechanism 53.Adjusting mechanism 52 is the positions adjusting the first guide roller G1 according to the adjustment signal from this control part CONT.Adjusting mechanism 53 is the positions adjusting the second guide roller G2 according to the adjustment signal from this control part CONT.In addition, control part CONT also can not use the testing result of aligning video camera 51 and generate adjustment signal, and the adjustment signal of this generation is delivered to adjusting mechanism 52 and 53.

The substrate board treatment FPA formed in the above described manner is the control by control part CONT, manufactures the display element (electronic component) of organic EL element, liquid crystal display cells etc. with winding method.Below, the technique using the substrate board treatment FPA of above-mentioned formation to manufacture display element is described.

First, the strip of sheet material substrate FB being wound in cylinder is installed on supply substrate portion SU.Control part CONT makes drum rotating, sends this sheet material substrate FB with from then on state from supply substrate portion SU.And, this sheet material substrate FB by processing substrate portion PR is wound in the cylinder of substrate recoverer CL.By control this supply substrate portion SU and substrate recoverer CL, can to the processed surface Fp of processing substrate portion PR continuous print conveyance sheet material substrate FB.

Control part CONT during sheet material substrate FB to be sent to from supply substrate portion SU and to be reeled with substrate recoverer CL, by the carrying device 30 of processing substrate portion PR by conveyance suitable in this processing substrate portion PR for sheet material substrate FB, while the constitutive requirements of display element are sequentially formed on sheet material substrate FB by processing equipment 10.

When processing by processing equipment 10, control part CONT uses alignment device 50 to carry out the position alignment of sheet material substrate FB.Such as detect the alignment mark AM of sheet material substrate FB by aiming at video camera 51, and adjust the drive volume of the roller device R of such as carrying device 30 or the position of guide roller G (the first guide roller G1 and the second guide roller G2) and posture, rotation amount, rotative speed etc. according to testing result.

Secondly, the position of adjustment guide roller G (the first guide roller G1 and the second guide roller G2) and the situation of posture are described.

Fig. 4 is that display makes the first guide roller G1 and the second guide roller G2 each with the state of equal amount of movement movement in parallel direction (being-X-direction the situation of Fig. 4) to respective center shaft from state shown in Fig. 3.When this situation, sheet material substrate FB by the first guide roller G1 and the second guide roller G2 to be applied tension force by the state of turning back.Therefore, as aforesaid way make the situation of the first guide roller G1 and the second guide roller G2 movement time, respective position of turning back is to move in-each the equidistance of X-direction, and with this, the Part II F2 of sheet material substrate FB is past-X-direction moves.

So, even if make the first guide roller G1 and the second guide roller G2 move, also can not change the direction of the power of sheet material substrate FB effect, therefore can suppress or eliminating effect in the power of the conveyance direction different directions with sheet material substrate FB.Therefore, can, to such as sheet material substrate FB when not producing fold etc., the Part II F2 of sheet material substrate FB be made to be displaced into the direction orthogonal with conveyance direction.After guide roller G moves, the position of control part CONT coordinating example as the Part II F2 of sheet material substrate FB makes bearing table device ST be displaced into X-direction and Y-direction.

In addition, about the conveyance direction of sheet material substrate FB, the flaccid part of sheet material substrate FB is provided with at the upstream side of the first guide roller G1 and the downstream side of the second guide roller G2, even if therefore adjust the position of the first guide roller G1 and the position of the second guide roller G2, also can suppress or eliminating effect in the power of sheet material substrate FB.

Behind the X-direction of adjustment bearing table device ST and Y-direction position, control part CONT make bearing table device ST past+Z-direction moves, and the back side of sheet material substrate FB is connected to areal of support Sa.By this action, the back side of sheet material substrate FB is supported in the areal of support Sa of bearing table device ST.Now, control part CONT also can such as make sheet material substrate FB be adsorbed in the adsorption section 40 of bearing table device ST.Again, also can make before the back side of sheet material substrate FB is connected to the areal of support Sa of bearing table device ST, to make the interval between the first guide roller G1 and the second guide roller G2 closer to each other to make sheet material substrate FB relax.By making sheet material substrate FB relax, under the tension-free state of sheet material substrate FB, can abut and be adsorbed in the areal of support Sa of bearing table device ST.Again, control part CONT makes bearing table device ST move toward such as+Z side under the state of supporting sheet substrate FB, adjusts the Z-direction position of sheet material substrate FB by this.When this situation, control part CONT makes the first guide roller G1 and the second guide roller G2 move toward Z-direction depending on bearing table device ST toward the amount of movement of Z-direction.

After the Z-direction position alignment of sheet material substrate FB is carried out, control part CONT uses the processed surface Fp of the Part II F2 in processing equipment 10 couples of sheet material substrate FB to carry out set process.Transporting the Part II F2 of this sheet material substrate FB while when carrying out the situation processed, control part CONT is that the conveyance sequential of the process sequential and sheet material substrate FB adjusting processing equipment 10 carries out above-mentioned process.When sheet material substrate FB is adsorbed on the situation of bearing table device ST, control part CONT such as coordinates the movement of sheet material substrate FB to make bearing table device ST be displaced into the conveyance direction (such as-Y-direction) of substrate.

Repeat above-mentioned a series of process by sheet material substrate FB, form the constitutive requirements of display element in the processed surface Fp of sheet material substrate FB.

As previously discussed, according to the present embodiment, owing to possessing: the first guide roller G1, the sheet material substrate FB come from first direction (+X-direction) conveyance is transformed to the second direction (-Y-direction) different from this first direction relative to Width (Y-direction) the oblique bending of this sheet material substrate FB, by the conveyance direction of sheet material substrate FB from first direction; Second guide roller G2, is transformed to from second direction different third direction (+X-direction) relative to Width (X-direction) the oblique bending of this sheet material substrate FB, by the conveyance direction of sheet material substrate FB from second direction by sheet material substrate (the sheet material substrate toward the second direction conveyance) FB come from second direction conveyance; And adjusting mechanism, the position of the sheet material substrate FB in the direction intersected with second direction that is located at the first guide roller G1 and the second guide roller G2, adjusts the position of the position of the first guide roller G1 and the second guide roller G2 respectively, adjusts; Therefore can suppress with the masterpiece of conveyance direction different directions for sheet material substrate FB.By this, this sheet material substrate FB can be transported while suppressing to form the defects such as fold in sheet material substrate FB, with height conveyance precision.

Again, according to the present embodiment, due to the Part II F2 process between the first guide roller G1 in sheet material substrate FB and the second guide roller G2, the efficient movement of part carrying out this process in sheet material substrate FB therefore can be made.

< second embodiment >

Secondly, the second embodiment of the present invention is described.In the present embodiment, use and be described with the substrate board treatment of the identical formation of substrate board treatment FPA of the first embodiment.Below, when recording the situation of each constitutive requirements of substrate board treatment, the symbol identical with the symbol used in the first embodiment is used.

The present embodiment is that illustrative examples rotates on θ Z-direction, with the action making the relative conveyance direction of sheet material substrate FB tilt as made the first guide roller G1 and the second guide roller G2.

When Fig. 5 display makes the first guide roller G1 and the second guide roller G2 rotate on the situation of θ Z-direction, the figure of the conveyance state of sheet material substrate FB.In Fig. 5, show the Part I F1 of sheet material substrate FB and Part III F3 be maintain respectively conveyance direction, simultaneously maintain sheet material substrate FB Part II tension force state under, make the state that the first guide roller G1 rotates.

Such as, during the situation only making the first guide roller G1 rotate under the state of conveyance direction maintaining Part I F1, for avoiding the conveyance direction of Part III F3 to change, control part CONT make the first guide roller G1 synchronous with the second guide roller G2 around θ Z-direction rotate and make the second guide roller G2 past-X-direction moves.Now, the centre of gration of the second guide roller G2 can offset relative to the centre of gration of the first guide roller G1.

Now, control part CONT in order to make between the first guide roller G1 with the second guide roller G2, to rotate the sequential, hand of rotation, the anglec of rotation and the rotative speed that start consistent, and this first guide roller G1 and the second guide roller G2 rotated.Again, the amount that control part CONT offsets because of the rotation of the first guide roller G1 according to sheet material substrate FB, make the second guide roller G2 past-X-direction moves.

According to the present embodiment, θ Z-direction can be rotated on by making the first guide roller G1 and the second guide roller G2, making the conveyance direction (-Y-direction) of relative this Part II F2 of the Part II F2 of sheet material substrate FB tilt (tilt).And, owing to can prevent and the Part I F1 ~ Part III F3 of the masterpiece of respective conveyance direction different directions for sheet material substrate FB, therefore also can prevent terminating in the defect that sheet material substrate FB produces fold etc.By this, can while the conveyance state keeping sheet material substrate FB, carry out more high-precision conveyance.

In addition, the present embodiment, though make the situation of the X-direction position movement of the second guide roller G2 be described not make the X-direction change in location of the first guide roller G1, is not limited thereto.Two sides of the first guide roller G1 and the second guide roller G2 such as also can be made to be displaced into X-direction.Again, the hand of rotation of the first guide roller G1 and the second guide roller G2 is not limited to direction shown in Fig. 5, such as also can be made rotate on shown in Fig. 5 side in the opposite direction.

< the 3rd embodiment >

Secondly, the third embodiment of the present invention is described.

The present embodiment, is that the first guiding element and the second guiding element of being located at substrate board treatment are described, uses the formation such as hammering shape component into shape.The substrate board treatment of the present embodiment, because the constitutive requirements beyond the first guiding element and the second guiding element and the various embodiments described above are identical formation, therefore gives same-sign and illustrates.

Fig. 6 shows formation when observing substrate board treatment FPA from top (+Z-direction).

As shown in Figure 6, carrying device 30 is, uses the first hammer shape component G3 as the first guiding element, uses the second hammer shape component G4 as the second guiding element.Certainly, can also be the formation that a side only in the first guiding element and the second guiding element is suitable for the first hammer shape component G3 or second hammer shape component G4.

First hammer shape component G3 and second hammer shape component G4 is formed as such as conical.Specifically, the first hammer shape component G3 and second hammer shape component G4 has rounded bottom surface (end) 80a and 80b respectively and has the side (guiding face) gradually diminished toward its outside dimension of summit (the other end) 81a and 81b from this bottom surface 80a and 80b.

First hammer shape component G3 has the center shaft C3 of center-point by bottom surface 80a and summit 81a.It is parallel relative to the Width (Y-direction) of the Part I F1 of sheet material substrate FB that first hammer shape component G3 is configured its center shaft C3.The driver train 61 that this hammer shape component G3 is rotated centered by center shaft C3 is provided with in the first hammer shape component G3.This driver train 61 is also drive the first hammer shape component G3 in X-direction, Y-direction and θ Z-direction.First hammer shape component G3 lies in side (guiding face) G3a and guides sheet material substrate.Sheet material substrate FB is the side G3a being supported in the first hammer shape component G3, until become parallel at Part I F1 with Part II F2 processed surface Fp.

Second hammer shape component G4 has the center shaft C4 of center-point by bottom surface 80b and summit 81b.It is parallel relative to the Width (X-direction) of the Part II F2 of sheet material substrate FB that second hammer shape component G4 is configured to center shaft C4.The driver train 63 that this hammer shape component G4 is rotated centered by center shaft C4 is provided with in the second hammer shape component G4.Second hammer shape component G4 also drives in X-direction, Y-direction and θ Z-direction by this driver train 61.Second hammer shape component G4 lies in side (guiding face) G4a and guides sheet material substrate.Sheet material substrate FB is supported in the side G4a of the second hammer shape component G4, until till Part II F2 and Part III F3, processed surface Fp are parallel.

In the substrate board treatment FPA formed in this way, make the such as Part II F2 of sheet material substrate FB past-situation of X-direction movement time, control part CONT can make the first hammer shape component G3 and second hammer shape component G4 past-X-direction such as moves equal amount of movement at every turn.Position sheet material substrate FB being reeled by the movement of the first hammer shape component G3 and second hammer shape component G4 respectively past-X-direction is moved, and by this, the Part II F2 of sheet material substrate FB is past-and X-direction moves.

As previously discussed, according to the present embodiment, even if move owing to making the first hammer shape component G3 and second hammer shape component G4, also can suppress with the masterpiece of conveyance direction different directions for sheet material substrate FB, therefore can, in the situation of the such as unlikely generation fold of sheet material substrate FB etc., the Part II F2 of sheet material substrate FB be moved.

In addition, when using the situation of the first hammer shape component G3 and second hammer shape component G4, as shown in Figure 8, the center shaft C4 and first that also the second hammer shape component G4 can be configured to the second hammer shape component G4 hammers the parallel formation of the center shaft C4 of shape component G3 into shape.Under this situation, also can play and shown in Fig. 6, form identical effect.And, compare with forming shown in Fig. 6, due to the mobile possible range of bearing table device ST can be made comparatively wide, can illustrate it is the better formation of one.Again, form shown in Fig. 8, though be configured to center shaft C3 and center shaft C4 in the parallel formation of Y-direction, be not limited thereto.Also can be configured to such as center shaft C3 and center shaft C4 in the parallel formation of X-direction.

Again, the shape of the first hammer shape component G3 and second hammer shape component G4, is not limited to be formed as cone shape formation shown in such as from Fig. 6 to Fig. 8.Such as, also applicable be formed as other hammer shape (coniform, the polygonal hammer shape of Elliptical) formation.Again, also applicable such as in the part formation tapered portion of cylindrical element, use this tapered portion to carry out the formation of bending sheet materials substrate FB.

In addition, be described for example though the various embodiments described above are the formations making the first guiding element and the second guiding element rotate, be not limited thereto.Such as, also can use and be fixed on cylindrical element in substrate board treatment FPA and cylindrical structural member, hammer shape component.Use this kind of cylindrical element and cylindrical structural member, hammer shape component situation time, except not having the point of the spinning movement as guide roller G, the position adjustment of sheet material substrate FB is carried out in action that can be identical with guide roller G.

Again, when using the situation of this kind of fixing cylindrical element, cylindrical structural member and hammer shape component, only can retain the guiding face at the supporting sheet substrate FB back side, and remove the part beyond guiding face.

Again, in the various embodiments described above, when using situation as the first guiding element and the second guiding element of cylindrical element, cylindrical structural member, hammer shape component, though be described for formation sheet material substrate FB being contacted with these first guiding elements and the second guiding element, be not limited thereto.Such as, sheet material substrate FB can be also made and guiding element is the formation of contactless state.Form as this kind, such as, have and form gas blanket at the first guiding element and the second guiding element surface, keep the formation etc. of sheet material substrate FB through this gas blanket.

Again, above-described embodiment, be aim at video camera 51 with the partial configuration in sheet material substrate FB between the first guide roller G1 with the second guide roller G2, use and aim at the testing result of video camera 51 and drive the formation of the first guide roller G1 and the second guide roller G2 to be described for example.In addition, also can be made such as compared with the first guide roller G1 more by conveyance direction upstream side and compared with the second guide roller G2 more by least one party in conveyance direction downstream side, dispensing other aim at the formation of video cameras.When this situation, the adjusting mechanism adjusting the position of sheet material substrate FB according to the testing result of the aligning video camera of configuration in addition can be set separately.Again, as this kind of adjusting mechanism, such as roller device R or other formations can be used.

Again, be described for example though above-described embodiment is the formation using the alignment mark AM being formed in sheet material substrate FB to carry out the position alignment of sheet material substrate FB, be not limited thereto.Such as, even if not when sheet material substrate FB forms the situation of alignment mark, can also be detect both sides parallel with conveyance direction in sheet material substrate FB by aligning video camera 51, and use this testing result to carry out the formation of the position alignment of sheet material substrate FB.

Again, be described though above-described embodiment is the situation being formed as tabular surface for the areal of support Sa of supporting sheet substrate FB in bearing table device ST, be not limited thereto.No matter such as areal of support Sa is the curved surface being formed as concavity or convex, and the present invention all can be had to be suitable for.Again, configure cylinder in bearing table device ST and use a part for this cylinder surface also can as areal of support Sa.

Again, though above-described embodiment is described for the situation this sheet material substrate FB being adsorbed in bearing table device ST after the position alignment of sheet material substrate FB, be not limited thereto.Such as also before the position alignment of sheet material substrate FB, such as, sheet material substrate FB can be adsorbed in the adsorption section 40 of bearing table device ST.During this situation, in time carrying out the position alignment of sheet material substrate FB, such as make the driving of bearing table device ST synchronous with the driving of the first guide roller G1 and the second guide roller G2, the direction maintaining the power acting on sheet material substrate FB adjusts the position of this sheet material substrate FB.

The first guiding element described in above-described embodiment and the second guiding element, be not limited to be configured in the position such as clipping processing equipment 10, and suitably can be configured in the transport path of the sheet material substrate FB in substrate board treatment FPA.Again, in above-described embodiment, the processing equipment 10 be configured between the first guiding element and the second guiding element can be odd number, can also be plural number.

Again, also can make not shown flaccid part between the first guide roller G1 and the roller device R of the first guide roller G1 upstream side, between the second guide roller G2 and the roller device R of the second guide roller G2 downstream side, make flaccid part.Further, can also be the surface and the back side that the roller device R of upstream side and the roller device R of downstream side are contacted with sheet material substrate FB, and seize the formation of sheet material substrate FB on both sides by the arms.

< the 4th embodiment >

Secondly, the fourth embodiment of the present invention is described.Fig. 9 is the figure of the formation of the substrate board treatment FPA of display fourth embodiment of the invention.In the following description, to same as the previously described embodiments or equal component part system give same-sign and simplify or the description thereof will be omitted.

In the present embodiment, as shown in Figure 9, the sheet material substrate FB supplied from supply substrate portion SU transports toward substrate recoverer CL and to the processed surface Fp process of sheet material substrate FB in conveyance process by processing substrate portion PR.Processing substrate portion PR has such as processing equipment 10, carrying device 30 and alignment device (not shown) etc.

Processing equipment 10, has the various handling parts (such as handling part 10A and handling part 10B etc.) in order to form such as organic EL element to the processed surface Fp of sheet material substrate FB.As this kind of handling part, be provided with such as be used to processed surface Fp be formed spaced walls spaced walls forming apparatus, be used for driving the electrode forming apparatus of electrode of organic EL element and the luminescent layer forming apparatus etc. in order to form luminescent layer in order to be formed.Specifically, apparatus for coating liquid droplet (such as inkjet type apparatus for coating, rotary coating type apparatus for coating etc.), the film formation device of evaporation coating device, sputtering unit etc. and exposure device, developing apparatus, surfaction device, decontaminating apparatus etc. are had.In the transport path being such as located at sheet material substrate FB that these each device systems are suitable.

Carrying device 30, have such as sheet material substrate FB is transported toward substrate recoverer CL side in processing substrate portion PR roller device R, be configured in the upstream side of this processing equipment 10 and the guide roller G of downstream side in the mode clipping processing equipment 10.Roller device R is provided with such as a plurality of along the transport path of sheet material substrate FB.Roller device R at least partially in a plurality of roller device R is provided with driver train (not shown).By the rotation of this kind of roller device R, sheet material substrate FB is transported in X-direction.Can also be in a plurality of roller device R such as segment cylinder device R be arranged to can in the formation of the direction movement orthogonal with conveyance direction.Again, all in processing substrate portion PR, sheet material substrate FB is transported in+X-direction.

Figure 10 is the skeleton diagram of the formation of display processing unit 10 and guide roller G.In addition, Figure 10 shows formation when observing substrate board treatment FPA from top (+Z-direction).

As shown in Figure 10, guide roller G has the first guide roller G21, the second guide roller G22, the 3rd guide roller G23 and the 4th guide roller G24.First guide roller G21 ~ the 4th guide roller G24 sequentially configures from the transport path upstream side of sheet material substrate FB toward downstream side.First guide roller G21 ~ the 4th guide roller G24 divides and is formed as such as cylindric or cylindric etc.

The Part I of the sheet material substrate FB that the first guide roller G21 is configured to relatively transport from this first guide roller G21 upstream side toward first direction (+X-direction) and comes is (by the part before the first guide roller G21 guiding, that is relative first guide roller G21, sheet material substrate FB upstream side part) short side direction (Width: be herein Y-direction) of F1, its center shaft C1 favours tilted direction.First guide roller G21 guides the back side of sheet material substrate FB in cylinder surface (guiding face) G21a.In addition, the sheet material substrate FB come from the first guide roller G21 upstream side conveyance, in Figure 10, is the back side Fq state upward of sheet material substrate FB.

The short side direction of relative this sheet material substrate FB of the Part I F1 of sheet material substrate FB is bent towards tilted direction and to turn back sheet material substrate FB along the cylinder surface of the first guide roller G21 by the first guide roller G21, by this conveyance direction of sheet material substrate FB is transformed to second direction (-Y-direction) from above-mentioned first direction.In the present embodiment, the first guide roller G21 can by the oblique bending in addition of sheet material substrate FB essence.Sheet material substrate FB can pass through the first guide roller G21 bending while torsion (twist).In sheet material substrate FB, by the part of the first guide roller G21 guiding, the side face of the part that relative conveyance direction (first direction) tilts can be formed with.The sheet material substrate FB with the direct of travel of first direction (+X-direction) enters the first guide roller G21.There is the sheet material substrate FB of the direct of travel of second direction (-Y-direction) from the first guide roller G21 out.In the present embodiment, the direction that this second direction system is such as orthogonal with first direction.First guide roller G21 on one side supporting sheet substrate FB back side Fq, while this sheet material substrate FB is turned back.Such as, by the sheet material substrate FB that the first guide roller G21 turns back, in second direction, processed surface Fp is (processing equipment 10 side) upward.Again, sheet material substrate FB system is supported on the cylinder surface G21a of this first guide roller G21, until in the front and back of the first guide roller G21, till Part I F1 and aftermentioned Part II F2 is parallel to each other.

The Part II of the sheet material substrate FB that the second guide roller G22 is configured to relatively transport from this second guide roller G22 upstream side toward second direction and comes is (by the part before the second guide roller G22 guiding, that is relative second guide roller G22, sheet material substrate FB upstream side part) F2, its center shaft C2 favours tilted direction.Second guide roller G22 guides the back side of sheet material substrate FB in cylinder surface (guiding face) G22a.In addition, the sheet material substrate FB come from the second guide roller G22 upstream side conveyance in Figure 10, as previously mentioned, is the processed surface Fp state upward of sheet material substrate FB.

The short side direction of relative this sheet material substrate FB of the Part II F2 of sheet material substrate FB is bent towards tilted direction and to turn back sheet material substrate FB along the cylinder surface of the second guide roller G22 by the second guide roller G22, by this conveyance direction of sheet material substrate FB is transformed to third direction (+X-direction) from above-mentioned second direction.In the present embodiment, the second guide roller G22 can by the oblique bending in addition of sheet material substrate FB essence.Sheet material substrate FB can pass through the second guide roller G22 bending while torsion (twist).In sheet material substrate FB, by the part of the second guide roller G22 guiding, the portion peripheral surface that relative conveyance direction (second direction) tilts can be formed.The sheet material substrate FB with the direct of travel of second direction (-Y-direction) enters the second guide roller G22.There is the sheet material substrate FB of the direct of travel of third direction (+X-direction) from the second guide roller G22 out.In the present embodiment, this third direction is such as parallel with first direction direction.Second guide roller G22 on one side supporting sheet substrate FB back side Fq, while this sheet material substrate FB that turns back.Such as, by the sheet material substrate FB that the second guide roller G22 turns back, in third direction, become back side Fq upward, processed surface Fp state downward.Again, sheet material substrate FB is supported by the cylinder surface G22a of this second guide roller G22, until in the front and back of the second guide roller G22, till Part II F2 and aftermentioned Part III F3 is parallel to each other.

The Part III of the sheet material substrate FB that the 3rd guide roller G23 is configured to relatively transport from the 3rd guide roller G23 upstream side toward third direction (+X-direction) and comes is (by the part before the 3rd guide roller G23 guiding, that is relative 3rd guide roller G23, sheet material substrate FB upstream side part) short side direction (Width: be herein Y-direction) of F3, its center shaft C3 is tilted to tilted direction.3rd guide roller G23 guides the back side of sheet material substrate FB in cylinder surface (guiding face) G23a.In addition, transporting and next sheet material substrate FB from the upstream side of the 3rd guide roller G23, in Figure 10, is the back side Fq state upward of sheet material substrate FB as before.

The short side direction of relative this sheet material substrate FB of the Part III F3 of sheet material substrate FB is bent towards tilted direction and to turn back sheet material substrate FB along the cylinder surface of the 3rd guide roller G23 by the 3rd guide roller G23, by this conveyance direction of sheet material substrate FB is transformed to fourth direction (+Y-direction) from above-mentioned third direction.In the present embodiment, the 3rd guide roller G23 can by the oblique bending in addition of sheet material substrate FB essence.Sheet material substrate FB can pass through the 3rd guide roller G23 in bending while torsion (twist).In sheet material substrate FB, by the part of the 3rd guide roller G23 guiding, the portion peripheral surface that relative conveyance direction (third direction) tilts can be formed.The sheet material substrate FB with the direct of travel of third direction (+X-direction) enters the 3rd guide roller G23.There is the sheet material substrate FB of the direct of travel of fourth direction (+Y-direction) from the 3rd guide roller G23 out.In the present embodiment, such as orthogonal with first direction and the third direction direction of this fourth direction system, with second party in the opposite direction.3rd guide roller G23 on one side supporting sheet substrate FB back side Fq, while this sheet material substrate FB that turns back.Such as, by the sheet material substrate FB that the 3rd guide roller G23 turns back, in fourth direction, become processed surface Fp and processing means 10 can carry out the process of processed surface upward.Again, sheet material substrate FB is supported in the cylinder surface G23a of the 3rd guide roller G23, until in the front and back of the 3rd guide roller G23, Part III and aftermentioned Part IV parallel to each other till.

The Part IV of the sheet material substrate FB that the 4th guide roller G24 is configured to relatively transport from the upstream side of the 4th guide roller G24 toward fourth direction (+Y-direction) and comes is (by the part before the 4th guide roller G24 guiding, that is relative 4th guide roller G24, sheet material substrate FB upstream side part) F4, its center shaft C4 favours tilted direction.4th guide roller G24 guides the back side of sheet material substrate FB in cylinder surface (guiding face) G24a.In addition, the sheet material substrate FB come from the 4th guide roller G24 upstream side conveyance, in Figure 10, as previously mentioned, becomes the processed surface Fp state upward of sheet material substrate FB.

The short side direction of relative this sheet material substrate FB of the Part IV F4 of sheet material substrate FB is bent towards tilted direction and to turn back sheet material substrate FB along the cylinder surface of the 4th guide roller G24 by the 4th guide roller G24, by this conveyance direction of sheet material substrate FB is transformed to the 5th direction (+X-direction) from above-mentioned fourth direction.In the present embodiment, the 4th guide roller G24 can by the oblique bending in addition of sheet material substrate FB essence.Sheet material substrate FB is through the 4th guide roller G24 bending while torsion (twist).In sheet material substrate FB, by the part of the 4th guide roller G24 guiding, the portion peripheral surface that relative conveyance direction (fourth direction) tilts can be formed.The sheet material substrate FB with the direct of travel of fourth direction (+Y-direction) enters the 4th guide roller G24.There is the sheet material substrate FB of the direct of travel in the 5th direction (+X-direction) from the 4th guide roller G24 out.In the present embodiment, the direction that the 5th direction system is parallel with such as first direction and third direction.4th guide roller G24 on one side supporting sheet substrate FB back side Fq, while this sheet material substrate FB that turns back.Such as by the sheet material substrate FB that the 4th guide roller G24 turns back, in the 5th direction, become back side Fq upward, processed surface Fp state downward.Again, sheet material substrate FB is supported in the cylinder surface G24a of the 4th guide roller G24, until in the front and back of the 4th guide roller G24, Part IV F4 and Part V F5 (part after being guided by the 4th guide roller G24, that is relative 4th guide roller G24, sheet material substrate FB downstream side part) parallel to each other till.

By the conveyance direction of the sheet material substrate FB of above-mentioned four guide roller G21 ~ G24 conveyance, in Part I F1 be+X-direction (first direction), in Part II F2 be-Y-direction (second direction), in Part III F3 again for+X-direction (third direction), in Part IV F4 be+Y-direction (fourth direction), in Part V F5 be then+X-direction (the 5th direction).

Now, sheet material substrate FB in first direction, third direction and the 5th direction system sheet material substrate FB back side Fq upward, in second direction and third direction be then the processed surface Fp of sheet material substrate FB upward.

Therefore, due to before with processing equipment 10 (handling part 10A, handling part 10B) the processed surface Fp process to sheet material substrate FB, processed surface Fp towards under, therefore can reduce the attachment to processed surface Fp such as dirt bits.

As previously mentioned, the crank-like path that sheet material substrate FB system is respectively bent angle with the first guide roller G21, the second guide roller G22, the 3rd guide roller G23 and the 4th guide roller G24 is transported.Again, by the sheet material substrate FB of the 4th guide roller G24 bending, then transport toward the 5th direction that is as the conveyance direction of the sheet material substrate FB of processing substrate portion PR entirety.

Again, as shown in Figure 10, processing equipment 10 has handling part 10A and handling part 10B.Handling part 10A is such as located at the position between the first guide roller G21 and the second guide roller G22 in Y-direction, is configured to subtend in the processed surface Fp of the Part II F2 of sheet material substrate FB.Handling part 10B is such as located at the position between the 3rd guide roller G23 and the 4th guide roller G24 in Y-direction, is configured to subtend in the processed surface Fp of the Part IV F4 of sheet material substrate FB.In the present embodiment, handling part 10A and handling part 10B is the process carrying out such as inequality.

Handling part 10A, be such as be connected to driver train 11, be arranged to removable in such as X-direction and Y-direction.Such as, handling part 10A can move (X-direction moves) between the primary importance A1 on Part II F2 and the second place A2 on Part IV F4.Again, handling part 10A can move (Y-direction moves) on Part II F2 and on Part IV F4.

Handling part 10B is such as connected to driver train 12, is arranged to such as to move in X-direction and Y-direction.Such as, handling part 10B can move (X-direction moves) between the primary importance B1 on Part IV F4 and the second place B2 on Part II F2.Again, handling part 10B can move (Y-direction moves) on Part II F2 and on Part IV F4.

First guide roller G21 ~ the 4th guide roller G24, by supportings such as such as not shown bearing components.The driver train (not shown) that the first guide roller G21 ~ the 4th guide roller G24 is rotated is provided with in each bearing components.Driver train makes the first guide roller G21 ~ the 4th guide roller G24 rotate centered by center shaft C1 ~ C4 respectively.

Again, the formation of-Z side configuration bearing table device of Part II F2 in sheet material substrate FB and Part IV F4 can be also made.The part of the processed portion 10A of this bearing table device supporting and handling part 10B process.Support second portion F2 in bearing table device and the areal of support of Part IV F4 can be tabular surfaces, can also be curved surface.

Not shown alignment device, carries out alignment actions to sheet material substrate FB.This alignment device, has the aligning video camera (not shown) of the location status detecting sheet material substrate FB, to carry out the adjusting mechanism (not shown) of the inching of sheet material substrate FB with the testing result of aiming at video camera according to this in X-direction, Y-direction, Z-direction, θ X-direction, θ Y-direction, θ Z-direction.In addition, such as not shown alignment mark is formed with in the processed surface Fp of sheet material substrate FB.Alignment mark is formed in processed surface Fp, the short side direction both ends of such as sheet material substrate FB.

The substrate board treatment FPA formed in the above described manner, by the control of control part CONT, manufactures the display element (electronic component) of organic EL element, liquid crystal display cells etc. with winding method.Below, the processing procedure using the substrate board treatment FPA of above-mentioned formation to manufacture display element is described.

First, the strip of sheet material substrate FB being wound on cylinder is installed on supply substrate portion SU.Control part CONT makes drum rotating, sends this sheet material substrate FB with from then on state from supply substrate portion SU.Further, this sheet material substrate FB by processing substrate portion PR is reeled with the cylinder of substrate recoverer CL.By control this supply substrate portion SU and substrate recoverer CL, the processed surface Fp of sheet material substrate FB can be transported continuously by opposing substrate handling part PR.

Control part CONT to send to during being reeled with substrate recoverer CL, with the carrying device 30 of processing substrate portion PR by sheet material substrate FB suitable being transported, while the constitutive requirements of display element be sequentially formed on sheet material substrate FB by processing equipment 10 (comprising each handling part of handling part 10A and handling part 10B) in this processing substrate portion PR at sheet material substrate FB from supply substrate portion SU.

When this situation, as shown in Figure 10, sheet material substrate FB is turned back with the state of the first guide roller G21, the second guide roller G22, the 3rd guide roller G23 and the 4th guide roller G24 supporting back side Fq.Therefore, in the front and back of handling part 10A and handling part 10B, sheet material substrate FB is that its processed surface Fp transports when not contacting with above-mentioned four guide roller G21 ~ G24.

Again, sheet material substrate FB is with the respective processed surface Fp of its Part II F2 corresponding with handling part 10A and handling part 10B and Part IV F4, and the mode towards this handling part 10A and handling part 10B side is transported.When this situation, it is the state that such as Part II F2 and Part IV F4 arrange in X-direction.Therefore, the handling part 10A of the processed surface Fp of process Part II F2 can process the processed surface Fp of Part IV F4, contrary, and the handling part 10B of the processed surface Fp of process Part IV F4 also can process the processed surface Fp of Part II F2.

Again, according to the present embodiment, owing to being be made substrate board treatment FPA there is above-mentioned first guide roller G21 ~ the 4th guide roller G24, therefore can specify the conveyance direction of this sheet material substrate FB, make sheet material substrate FB by the conveyance direction (such as+X-direction) transported in this substrate board treatment FPA entirety.

Again, due to the state that processed surface Fp arranges towards the direction of handling part 10A and 10B by the Part II F2 in sheet material substrate FB and Part IV F4, therefore handling part 10A and 10B is easy to move between Part II F2 and Part IV F4.By this, diversified process action can be carried out.

In addition, though the present embodiment is described for the formation of the processed surface Fp of handling part 10A process Part II F2, the processed surface Fp of handling part 10B process Part IV F4, be not limited to this and form.Such as, when omitting the situation of handling part 10B, the 4th guide roller G24 can be omitted, and transport sheet material substrate FB with the first guide roller G21, the second guide roller G22, the 3rd guide roller G23.

As previously discussed, according to the present embodiment, due to be made carrying device 30 possess above-mentioned first guide roller G21, the second guide roller G22, at least three of the 3rd guide roller G23, therefore can while the back side Fq of only supporting sheet substrate FB, conveyance sheet material substrate FB.By this, can prevent from outside to the contact of the processed surface Fp of sheet material substrate FB while, transport this sheet material substrate FB.

< the 5th embodiment >

Secondly, the fifth embodiment of the present invention is described.

The present embodiment illustrates as the first guiding element being located at substrate board treatment ~ the 4th guiding element, such as, use the formation of hammer shape component.In the following description, to same as the previously described embodiments or equal component part system give same-sign and simplify or the description thereof will be omitted.

Formation when observing substrate board treatment FPA from top (+Z-direction) is shown in Figure 11.

As shown in figure 11, carrying device 30 uses the first hammer shape component G25 as the first guiding element, uses the second hammer shape component G26 as the second guiding element.Again, use the 3rd hammer shape component G27 as the 3rd guiding element, use the 4th hammer shape component G28 as the 4th guiding element.Certainly, the part that also can be made in only the first guiding element ~ the 4th guiding element uses the formation of hammer shape component.

Figure 12 is that display is for the figure of the formation of the first hammer shape component G25.As shown in FIG. 11 and 12, the first hammer shape component G25 ~ four hammers shape component G28 into shape and is formed as conical respectively.Specifically, the first hammer shape component G25 ~ four hammers shape component G28 into shape and has rounded bottom surface (end) 80 and summit (the other end) 81 respectively and have and be formed as the side (guiding face) gradually little toward its outside dimension of summit 81 from this bottom surface 80.First hammer shape component G25 ~ four hammers center shaft C5 ~ C8 that shape component G28 has center-point by bottom surface 80 and summit 81 respectively into shape.

It is parallel that first hammer shape component G25 is configured to the Width (Y-direction) of center shaft C5 to the Part I F1 of sheet material substrate FB.The driver train (not shown) that this first hammer shape component G25 is rotated centered by center shaft C5 is provided with in the first hammer shape component G25.First hammer shape component G25 guides sheet material substrate in side (guiding face) G25a.Sheet material substrate FB is supported in the side G25a of the first hammer shape component G25, until processed surface Fp becomes parallel at Part I F1 and Part II F2.

It is parallel that second hammer shape component G26 is configured to the Width (X-direction) of center shaft C6 to the Part II F2 of sheet material substrate FB.The driver train (not shown) that this second hammer shape component G26 is rotated centered by center shaft C6 is provided with in the second hammer shape component G26.Second hammer shape component G26 guides sheet material substrate in side (guiding face) G26a.Sheet material substrate FB is supported in the side G26a of the second hammer shape component G26, until processed surface Fp becomes parallel at Part II F2 and Part III F3.

It is parallel that 3rd hammer shape component G27 is configured to the Width (Y-direction) of center shaft C7 to the Part III F3 of sheet material substrate FB.The driver train (not shown) that the 3rd hammer shape component G27 is rotated centered by center shaft C7 is provided with in the 3rd hammer shape component G27.3rd hammer shape component G27 guides sheet material substrate in side (guiding face) G27a.Sheet material substrate FB is supported in the side G27a of the 3rd hammer shape component G27, until processed surface Fp becomes parallel at Part III F3 and Part IV F4.

It is parallel that 4th hammer shape component G28 is configured to the Width (X-direction) of center shaft C8 to the Part IV F4 of sheet material substrate FB.The driver train (not shown) that the 4th hammer shape component G28 is rotated centered by center shaft C8 is provided with in the 4th hammer shape component G28.4th hammer shape component G28 guides sheet material substrate in side (guiding face) G28a.Sheet material substrate FB is supported in the side G28a of the 4th hammer shape component G28, until processed surface Fp becomes parallel at Part IV F4 and Part V F5.

As previously discussed, according to the present embodiment, owing to being be made to use the first hammer shape component G25 ~ four hammer shape component G28 and to turn back sheet material substrate FB, because of under this situation, also the back side Fq of supporting sheet substrate FB sheet material substrate FB can be transported.By this, can prevent from outside to the contact of the processed surface Fp of sheet material substrate FB while, transport this sheet material substrate FB.

In addition, when using the first hammer shape component G25 ~ four to hammer the situation of shape component G28 into shape, such as shown in Figure 13, also can be made and hammer parallel and the second center shaft C6 and the 3rd hammer shape component G26 of the center shaft C8 of shape component G28 with the center shaft C5 and the 4th of the first hammer shape component G25 and hammer the parallel mode of the center shaft C7 of shape component G27 into shape, configure the formation that first hammers shape component G25 ~ four hammer shape component G28 into shape.

This can play and form identical effect shown in Figure 11 under forming.And compare with forming shown in Figure 11, the distance between the Part II F2 of sheet material substrate FB and Part IV F4 becomes near.Therefore, handling part 10A and 10B is easy to mobile between this Part II F2 and Part IV F4, is a better formation.

In addition, the first hammer shape component G25 ~ four hammers the shape of shape component G28 into shape, though as shown in Figure 11 ~ Figure 13 to be formed as cone shape formation better, be also formed as the formation of other hammers shape (coniform, the polygonal hammer shape of Elliptical).Again, can also be such as form tapered portion in a part for cylindrical element, use this tapered portion to carry out the formation of bending sheet materials substrate FB.

In addition, though the various embodiments described above make the formation that the first guiding element ~ the 4th guiding element rotates be described for example, be not limited thereto.Such as, also can use and be fixed on cylindrical element in substrate board treatment FPA and cylindrical structural member, hammer shape component.Use this kind of cylindrical element and cylindrical structural member, hammer shape component situation time, except not having the point of the spinning movement as guide roller G, the position adjustment of sheet material substrate FB is carried out in action that can be identical with guide roller G.

Again, in the various embodiments described above, when using situation as the first guiding element ~ the 4th guiding element of guide roller G and cylindrical element, cylindrical structural member, hammer shape component, though be described for formation sheet material substrate FB being contacted with these the first guiding elements ~ the 4th guiding element, be not limited thereto.Such as, the formation for contactless state between sheet material substrate FB and each guiding element can be also made.Form as this kind, such as, have and form gas blanket on the first guiding element ~ the 4th guiding element surface, keep the formation etc. of sheet material substrate FB through this gas blanket.

The first guiding element recorded in above-described embodiment ~ the 4th guiding element, is not limited to the flanking position being such as configured in processing equipment 10 in the transport path of sheet material substrate FB, also can be suitable be configured in other positions.Again, also by the formation till first guiding element of above-described embodiment ~ the 4th guiding element, the formation that such as X-direction is arranged repeatedly can be formed in.

Again, though above-described embodiment is described for the situation of carrying out different disposal between handling part 10A and handling part 10B, be not limited thereto.Such as, when carrying out the situation of same treatment between handling part 10A and handling part 10B, of the present invention being suitable for also is possible.

Again, above-described embodiment (such as, with reference to Figure 11), though be made sheet material substrate FB to be turned back in+Y-direction with the 3rd guiding element, to make the Part II F2 of sheet material substrate FB and Part IV F4 in the formation of X-direction arranged adjacent, but be not limited to this, also can such as with the 3rd guiding element, sheet material substrate FB be turned back in the formation with Part II F2 opposite sense (such as, being-Y-direction in Figure 10).

Again, in above-described embodiment, though be turn back to Part I F1 and Part II F2 is parallel to each other with the first guiding element, also can turn back into the relative Part I F1 of Part II F2 relatively above or below.Part II F2 and Part III F3, Part III F3 and Part IV F4, relation between Part IV F4 with Part V F5 are also not limited to parallel.

Again, though above-described embodiment is that to describe the relation of first direction and third direction and second direction and fourth direction parallel to each other, be not limited to parallel, can also be parallel beyond direction.

Again, the roller device R of the first guide roller G21 upstream side, because its function implements conveyance cylinder before treatment as to the processed surface of sheet material substrate FB, this roller device R therefore can be made to be contacted with the surface of sheet material substrate FB and the back side and to clip sheet material substrate FB.Again, after all process are implemented to the processed surface of sheet material substrate FB, can at the downstream side of the 4th guide roller G24, to be contacted with the back side of sheet material substrate FB and surface and the mode clipping sheet material substrate FB configures roller device R.

Technical scope of the present invention is not limited to above-described embodiment, can suitable being changed in the scope not departing from the present invention's interest purport.

Claims

1. a carrying device, is characterized in that, is to transport banded sheet material substrate, and described carrying device comprises:

First guiding element, after the described sheet material substrate that comes from first direction conveyance in addition oblique bending, is transformed into the second direction different from described first direction by the conveyance direction of described sheet material substrate from described first direction;

Second guiding element, after the described sheet material substrate that comes from the conveyance of described second direction in addition oblique bending, is transformed into the third direction different from described second direction by the conveyance direction of described sheet material substrate from described second direction; And

Multiple adjusting mechanism, is located at described first guiding element and described second guiding element respectively, in order to the position of the position and described second guiding element that adjust described first guiding element, to adjust the position of the described sheet material substrate in the direction intersected with described second direction;

First, second guiding element described, all relative to the long side direction of described sheet material substrate and conveyance direction and Width tilted configuration, and configure in the mode becoming the line of centers be parallel to each other, and be provided separately in the conveyance direction of described sheet material substrate, conveyance of by this described sheet material substrate being turned back;

Between first, second guiding element described, be provided with the bearing table device of the areal of support with the back side of supporting described sheet material substrate, carry out the processing equipment of set process in the processed surface part of the described sheet material substrate supported by described areal of support and detect the aligning video camera being formed in each alignment mark of the Width both sides of described sheet material substrate;

Described multiple adjusting mechanism, according to the mark testing result of described aligning video camera, make first, second guiding element described in the face parallel with the processed surface of described sheet material substrate, move in parallel toward equidirectional with equal amount of movement at every turn, or, described first guiding element is rotated in the face parallel with the processed surface of described sheet material substrate, and the amount making described second guiding element offset because of this rotation according to described sheet material substrate moves, carry out position skew adjustment or the tilt adjustments of the Width of the described sheet material substrate portion supported by described areal of support by this.

2. carrying device according to claim 1, is characterized in that, described first guiding element has cylindrical element, and the Width that this cylindrical element possesses relatively described sheet material substrate extends the center shaft of tilted direction.

3. carrying device according to claim 2, is characterized in that, described first guiding element possesses the driver train that described cylindrical element is rotated centered by described center shaft.

4. carrying device according to claim 1, it is characterized in that, described first guiding element has hammer shape component, the center shaft that the Width that this hammer shape component possesses relatively described sheet material substrate is parallel, along with the end from described center shaft is gradually little toward the other end outside dimension.

5. carrying device according to claim 4, is characterized in that, described first guiding element possesses the driver train that described hammer shape component is rotated centered by described center shaft.

6. carrying device according to claim 1, is characterized in that, described second guiding element has cylindrical element, and the Width that this cylindrical element possesses relatively described sheet material substrate extends the center shaft of tilted direction.

7. carrying device according to claim 6, is characterized in that, described second guiding element possesses the driver train that described cylindrical element is rotated centered by described center shaft.

8. carrying device according to claim 1, it is characterized in that, described second guiding element has hammer shape component, the center shaft that the Width that this hammer shape component possesses relatively described sheet material substrate is parallel, and toward the other end, its outside dimension is gradually little from an end of described center shaft.

9. carrying device according to claim 8, is characterized in that, described second guiding element possesses the driver train that described hammer shape component is rotated centered by described center shaft.

10. the carrying device according to claim arbitrary in claim 1 to 9, it is characterized in that, described first guiding element has guiding face, described sheet material substrate bends by this guiding face, until toward the described sheet material substrate of described second direction conveyance face, with transport from described first direction and the face of described sheet material substrate parallel to each other.

11. carrying devices according to claim arbitrary in claim 1 to 9, it is characterized in that, described second guiding element has guiding face, described sheet material substrate bends by this guiding face, until toward the described sheet material substrate of described third direction conveyance face, with transport from described second direction and the face of described sheet material substrate parallel to each other.

12. carrying devices according to claim arbitrary in claim 1 to 9, it is characterized in that, described second direction is the direction intersected with described first direction.

13. carrying devices according to claim arbitrary in claim 1 to 9, it is characterized in that, described third direction is the direction parallel with described first direction.

14. carrying devices according to claim arbitrary in claim 1 to 9, it is characterized in that, described adjusting mechanism comprises:

First adjustment part, adjusts the position of described first guiding element;

Second adjustment part, adjusts the position of described second guiding element; And

Control part, controls described first adjustment part and described second adjustment part.

15. carrying devices according to claim 14, is characterized in that, described control part controls described first guiding element and described second guiding element makes described sheet material substrate tilt.

16. carrying devices according to claim arbitrary in claim 1 to 9, is characterized in that, described bearing table device, are arranged to support described sheet material substrate and at least removable in the direction promoting described sheet material substrate.

17. carrying devices according to claim 16, is characterized in that, described bearing table device comprises: adsorption section, and this adsorption section is by the described areal of support of described sheet material substrate adsorption in the described sheet material substrate of supporting.

18. 1 kinds of substrate board treatments, is characterized in that, described substrate board treatment comprises:

Carrying device, the sheet material substrate that conveyance is banded; And

Processing equipment, carries out set process to described sheet material substrate;

Described carrying device uses the carrying device any one of claim 1 to 17.

19. substrate board treatments according to claim 18, is characterized in that, described processing equipment is configured to carry out described set process to described sheet material substrate meta in the region between described first guiding element and described second guiding element of described carrying device.

20. 1 kinds of carrying devices, is characterized in that, the sheet material substrate that described carrying device conveyance is banded, and described carrying device comprises:

First guiding element, supports the back side of described sheet material substrate, by come from first direction conveyance the in addition oblique bending of described sheet material substrate, so that the conveyance direction of described sheet material substrate is transformed to the second direction different from described first direction from described first direction;

Second guiding element, supports the back side of described sheet material substrate, makes the next oblique bending of described sheet material substrate from described second direction conveyance, so that the conveyance direction of described sheet material substrate is converted to the third direction different from described second direction from described second direction;

3rd guiding element, supports the back side of described sheet material substrate, makes the next oblique bending of described sheet material substrate from described third direction conveyance, so that the conveyance direction of described sheet material substrate is converted to the fourth direction different from described third direction from described third direction; And

21. carrying devices according to claim 20, it is characterized in that, described first guiding element has the first guiding face, this first guiding face described sheet material substrate is bent to the described sheet material substrate come from the conveyance of described first direction surface, parallel to each other with the surface of the described sheet material substrate transported toward described second direction till.

22. carrying devices according to claim 20 or 21, it is characterized in that, described second guiding element has the second guiding face, this second guiding face described sheet material substrate is bent to come from the conveyance of described second direction the surface of described sheet material substrate, parallel to each other with the surface of the described sheet material substrate transported toward described third direction till.

23. carrying devices according to claim 20 or 21, it is characterized in that, described 3rd guiding element has the 3rd guiding face, this 3rd guiding face described sheet material substrate is bent to the described sheet material substrate come from the conveyance of described third direction surface, parallel to each other with the surface of the described sheet material substrate transported toward described fourth direction till.

24. carrying devices according to claim 20 or 21, it is characterized in that, at least one in described first guiding element, described second guiding element and described 3rd guiding element possesses cylindrical element, and this cylindrical element has the center shaft of the oblique extension of Width of relatively described sheet material substrate.

25. carrying devices according to claim 20 or 21, it is characterized in that, at least one in described first guiding element, described second guiding element and described 3rd guiding element has hammer shape component, the center shaft that the Width that this hammer shape component possesses relatively described sheet material substrate is parallel, and toward the other end, its outside dimension is gradually little from an end of described center shaft.

26. carrying devices according to claim 20 or 21, it is characterized in that, described second direction is the direction intersected with described first direction.

27. carrying devices according to claim 20 or 21, it is characterized in that, described third direction is the direction parallel with described first direction.

28. carrying devices according to claim 20 or 21, it is characterized in that, described fourth direction is the direction parallel with described second direction.

29. carrying devices according to claim 20 or 21, it is characterized in that, described first guiding element possesses the cylindrical element of the center shaft of the oblique extension of Width with relatively described sheet material substrate;

Described second guiding element possesses the cylindrical element with the center shaft extended in parallel with the center shaft of described first guiding element.

30. carrying devices according to claim 29, is characterized in that, described 3rd guiding element possesses cylindrical element, and this cylindrical element has the center shaft to the direction extension that the center shaft of described second guiding element intersects.

31. carrying devices according to claim 20 or 21, it is characterized in that, described first guiding element has hammer shape component, the center shaft that the Width that this hammer shape component possesses relatively described sheet material substrate is parallel, and toward the other end, its outside dimension is gradually little from an end of described center shaft;

Described second guiding element has hammer shape component, the center shaft that the center shaft that this hammer shape component has relatively described first guiding element extends in parallel, and toward the other end, its outside dimension is gradually little from an end of described center shaft.

32. carrying devices according to claim 31, it is characterized in that, described 3rd guiding element has hammer shape component, and this hammer shape component possesses the center shaft to the direction extension that the center shaft of described second guiding element intersects, and toward the other end, its outside dimension is gradually little from an end of described center shaft.

33. carrying devices according to claim 20 or 21, it is characterized in that, described carrying device also comprises: the 4th guiding element, this the 4th guiding element supports the back side of described sheet material substrate, the Width of the relatively described sheet material substrate of described sheet material substrate come from described fourth direction conveyance is bent towards tilted direction, is transformed to five direction different from described fourth direction to make the conveyance direction of described sheet material substrate from described fourth direction.

34. 1 kinds of substrate board treatments, is characterized in that, described substrate board treatment comprises:

Carrying device, the sheet material substrate that conveyance is banded;

Described carrying device uses the carrying device according to any one of claim 20 to 33.

35. 1 kinds of substrate board treatments, is characterized in that, the sheet material substrate surface of described substrate board treatment to band shape implements set process, and described substrate board treatment comprises:

Carrying device as claimed in claim 1;

3rd guiding element, supports the back side of described sheet material substrate, by the in addition oblique bending of the described sheet material substrate that comes from the conveyance of described third direction, so that the conveyance direction of described sheet material substrate is transformed to the fourth direction different from described third direction from described third direction;

4th guiding element, supports the back side of described sheet material substrate, by the in addition oblique bending of the described sheet material substrate that comes from the conveyance of described fourth direction, so that the conveyance direction of described sheet material substrate is transformed to five direction different from described fourth direction from described fourth direction; And

First handling part, between described first guiding element and described second guiding element, carries out set process to the surface of described sheet material substrate.

36. substrate board treatments according to claim 35, it is characterized in that, described first guiding element has the first guiding face, this first guiding face bends described sheet material substrate, until the surface of the described sheet material substrate come from the conveyance of described first direction, parallel to each other with the surface of the described sheet material substrate transported toward described second direction;

Described second guiding element has the second guiding face, and this second guiding face bends described sheet material substrate, until the surface of the described sheet material substrate come from the conveyance of described second direction, parallel to each other with the surface of the described sheet material substrate transported toward described third direction;

Described 3rd guiding element has the 3rd guiding face, described 3rd guiding face bends described sheet material substrate, until the surface of the described sheet material substrate come from the conveyance of described third direction, parallel to each other with the surface of the described sheet material substrate transported toward described fourth direction.

37. substrate board treatments according to claim 35 or 36, it is characterized in that, described first handling part is configured to move between the primary importance that arranges between described first guiding element and described second guiding element and the second place arranged between described 3rd guiding element and described 4th guiding element.

38. substrate board treatments according to claim 35 or 36, it is characterized in that, described substrate board treatment is included in the second handling part between described 3rd guiding element and described 4th guiding element, the surface of described sheet material substrate being carried out to set process.

39., according to substrate board treatment according to claim 38, is characterized in that, described first handling part and described second handling part carry out process different from each other.

40. 1 kinds of substrate board treatments, are implement set process to the sheet material substrate surface of band shape, it is characterized in that possessing:

First guiding element, supports the back side of described sheet material substrate, by the oblique bending of described sheet material substrate transported in first direction, is transformed to the second direction different from described first direction to make the conveyance direction of described sheet material substrate;

Second guiding element, supports the back side of described sheet material substrate, by the oblique bending of described sheet material substrate transported in described second direction, is transformed to the third direction different from described second direction to make the conveyance direction of described sheet material substrate;

Processing equipment, carries out set process to the surface of described sheet material substrate between described first guiding element and described second guiding element; And

Alignment device, between described first guiding element and described second guiding element, by detecting each mark being formed at the both ends of described sheet material substrate, detect the location status by the described sheet material substrate between described first guiding element and the second guiding element, according to the testing result of its location status, make described first, second guiding element is in the face parallel with the processed surface of described sheet material substrate, move in parallel toward equidirectional with equal amount of movement at every turn, or, described first guiding element is rotated in the face parallel with the processed surface of described sheet material substrate, and the amount making described second guiding element offset because of this rotation according to described sheet material substrate moves, adjust position or the posture of the described sheet material substrate between described first guiding element and described second guiding element by this,

First, second guiding element described, all relative to the long side direction of described sheet material substrate and conveyance direction and Width tilted configuration, and configure in the mode becoming the line of centers be parallel to each other, and be provided separately in the conveyance direction of described sheet material substrate, conveyance of by this described sheet material substrate being turned back.

41. 1 kinds of substrate processing method using sames, are implement set process to the sheet material substrate surface of band shape, it is characterized in that, comprise:

By first guiding element at the back side of the described sheet material substrate of supporting, by the oblique bending of described sheet material substrate transported in first direction, be transformed to the second direction different from described first direction to make the conveyance direction of described sheet material substrate;

By second guiding element at the back side of the described sheet material substrate of supporting, by the oblique bending of described sheet material substrate transported in described second direction, be transformed to the third direction different from described second direction to make the conveyance direction of described sheet material substrate;

By the processing equipment be arranged between described first guiding element and described second guiding element, set process is carried out on the surface of the described sheet material substrate transported for described second direction;

Video camera is aimed between described first guiding element with described second guiding element by being arranged at, detect each mark being formed at the both ends of described sheet material substrate, and the location status detected by the described sheet material substrate between described first guiding element and described second guiding element, according to the testing result of its location status, make described first, second guiding element is in the face parallel with the processed surface of described sheet material substrate, move in parallel toward equidirectional with equal amount of movement at every turn, or, described first guiding element is rotated in the face parallel with the processed surface of described sheet material substrate, and the amount making described second guiding element offset because of this rotation according to described sheet material substrate moves, adjust position or the posture of the described sheet material substrate between described first guiding element and described second guiding element by this.