KR101892424B1 - Substrate cartridge, substrate storage device, and substrate processing system - Google Patents

Substrate cartridge, substrate storage device, and substrate processing system Download PDF

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Publication number
KR101892424B1
KR101892424B1 KR1020187008827A KR20187008827A KR101892424B1 KR 101892424 B1 KR101892424 B1 KR 101892424B1 KR 1020187008827 A KR1020187008827 A KR 1020187008827A KR 20187008827 A KR20187008827 A KR 20187008827A KR 101892424 B1 KR101892424 B1 KR 101892424B1
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KR
South Korea
Prior art keywords
substrate
roller
portion
direction
sheet substrate
Prior art date
Application number
KR1020187008827A
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Korean (ko)
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KR20180034708A (en
Inventor
도모히데 하마다
도루 기우치
Original Assignee
가부시키가이샤 니콘
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Priority to US32236010P priority Critical
Priority to US61/322,360 priority
Priority to US42320710P priority
Priority to US61/423,207 priority
Application filed by 가부시키가이샤 니콘 filed Critical 가부시키가이샤 니콘
Priority to PCT/JP2011/059006 priority patent/WO2011126133A1/en
Publication of KR20180034708A publication Critical patent/KR20180034708A/en
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Publication of KR101892424B1 publication Critical patent/KR101892424B1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00Advancing webs
    • B65H20/30Arrangements for accumulating surplus web
    • B65H20/32Arrangements for accumulating surplus web by making loops
    • B65H20/34Arrangements for accumulating surplus web by making loops with rollers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2402/00Features of construction
    • B65H2402/50Machine elements
    • B65H2402/52Bearings
    • B65H2402/521Details of mounting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00Parts for transporting or guiding the handled material
    • B65H2404/10Rollers
    • B65H2404/13Details of longitudinal profile
    • B65H2404/131Details of longitudinal profile shape
    • B65H2404/1313Details of longitudinal profile shape concave
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00Parts for transporting or guiding the handled material
    • B65H2404/10Rollers
    • B65H2404/13Details of longitudinal profile
    • B65H2404/131Details of longitudinal profile shape
    • B65H2404/1314Details of longitudinal profile shape convex
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2404/00Parts for transporting or guiding the handled material
    • B65H2404/10Rollers
    • B65H2404/13Details of longitudinal profile
    • B65H2404/132Details of longitudinal profile arrangement of segments along axis
    • B65H2404/1321Segments juxtaposed along axis
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2408/00Specific machines
    • B65H2408/20Specific machines for handling web(s)
    • B65H2408/21Accumulators
    • B65H2408/217Accumulators of rollers type, e.g. with at least one fixed and one movable roller
    • B65H2408/2172Accumulators of rollers type, e.g. with at least one fixed and one movable roller several cascaded loops of rollers

Abstract

The substrate cartridge CTR has a containing portion 1, a dispensing opening 3, a dispensing opening 2, and a guiding portion 4. The housing part (1) accommodates a band-like substrate (FB). The transfer port (3) and the transfer port (2) are provided in the accommodating portion (1) and allow the substrate (FB) to pass therethrough. The guide portion 4 guides the substrate FB from the refill 2 to the refill 3. The guide portion 4 includes a movable guide plate 45 and moving rollers 47 and 48. The moving rollers 47 and 48 include a stretchable portion 52b. First, the movable guide plate 45 is held horizontally, and the stretchable and contractible portion 52b is contracted. The leading end of the substrate FB is supported on the guide plate 45. [ When the substrate FB is conveyed from the carry-in roller 23, the guide plate 45 is rotated in a vertical posture. As the substrate FB is carried in, the stretchable and contractible portion 52b is stretched gradually. The cartridge CTR is connected to the substrate processing apparatus FPA.

Description

[0001] SUBSTRATE CARTRIDGE, SUBSTRATE STORAGE DEVICE, AND SUBSTRATE PROCESSING SYSTEM [0002]

The present invention relates to a substrate cartridge, a substrate storage device, and a substrate processing system.

The present application claims priority based on U.S. Provisional Application No. 61/322360, filed on April 9, 2010, and U.S. Provisional Application No. 61/423207, filed on December 15, 2010, the contents of which are incorporated herein by reference.

As a display element constituting a display device such as a display device, for example, a liquid crystal display element and an organic electroluminescence (organic EL) element are known. At present, active elements (active devices) forming thin film transistors (TFTs) on the surface of a substrate corresponding to each pixel are becoming mainstream in these display elements.

Recently, a technique for forming a display element on a sheet-like substrate (e.g., a film member or the like) has been proposed. As such a technique, for example, a technique called a roll-to-roll process (hereinafter simply referred to as "roll process") is known (see, for example, Patent Document 1). In the roll method, a single sheet-like substrate (for example, a strip-shaped film member) wound on a supply roller on a substrate supply side is fed out, and a fed substrate is wound around a return roller on a substrate recovery side, A desired processing is performed on the substrate by a processing device provided between the supply roller and the rotation roller.

Then, the substrate is transported by using, for example, a plurality of transport rollers or the like between the transporting of the substrate and the winding up of the substrate, the gate electrode constituting the TFT using the plurality of processing units (units) A semiconductor film, a source / drain electrode, and the like, and the constituent elements of the display element are sequentially formed on the surface of the substrate to be processed. For example, in the case of forming an organic EL device, a light emitting layer, a cathode, a cathode, an electric circuit and the like are sequentially formed on a substrate.

When the substrate wound around the collecting roller is to be fed, a portion of the substrate, which is at the farthest end of the take-up roller, is fed to the leading end. Therefore, when repeating the pattern formation with respect to the substrate, it is considered necessary to reverse the order of the pattern formation processing at the time of winding the substrate and feeding the substrate. In this way, since it is necessary to manage the beginning and the end of the substrate every time, the burden on the management may increase.

Patent Document 1: International Publication No. 2006/100868 pamphlet

In the roll-to-roll system, since the length of one substrate is long, it is required to reduce the management burden on the substrate.

An aspect of the present invention is to provide a substrate management apparatus, a substrate cartridge, and a substrate processing system capable of reducing a burden on the management of the substrate.

A substrate cartridge according to one aspect of the present invention includes a housing portion for housing a substrate formed in a band shape, a countercircuit provided in the housing portion for carrying the substrate, a countercircuit provided in the housing portion for carrying the substrate, And a guide portion for guiding the front end portion of the substrate accommodated in the accommodating portion from the refill opening to the outflow port.

A substrate processing system according to one aspect includes a substrate cartridge according to the first aspect of the present invention and a substrate processing apparatus having a connection portion to be connected to the substrate cartridge.

A substrate storage device according to one aspect of the present invention is a substrate storage device formed in a band shape and folded and held by a plurality of times in the longitudinal direction a plurality of times in a longitudinal direction by a flexible substrate. The substrate storage device includes a first folding portion A second folding portion for folding the first portion of the substrate such that the first portion folds back to one side and the backside of the first portion faces the first folding portion of the substrate and a second folding portion folded on the opposite side of the first folding portion by the second folding portion of the substrate A part of the third part turned by the substrate inversion part is folded by the first folding part of the substrate to the other side of the first part, And a third folding portion for folding the third portion so as to follow the surface or back side of the portion.

According to the aspect of the present invention, burden on the management of the substrate can be reduced.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a configuration of a substrate cartridge according to a first embodiment; Fig.
2 is a view showing a configuration of a substrate cartridge according to the embodiment;
3 is a view showing a configuration of a part of a substrate cartridge according to the embodiment;
4 is a view showing a configuration of a substrate processing system according to the embodiment;
5 is a view showing an operation of a part of the substrate processing system according to the embodiment;
6 is a view showing an operation of a part of the substrate processing system according to the embodiment;
7 is a view showing a configuration of a substrate cartridge according to a second embodiment;
8 is a view showing a configuration of a substrate cartridge according to the embodiment;
9A is a view showing another configuration of a substrate cartridge;
9B shows another configuration of the substrate cartridge;
10 is a view showing another configuration of a substrate cartridge;
11A is a view showing another configuration of a substrate cartridge;
11B is a view showing another configuration of the substrate cartridge;
11C is a view showing another configuration of the substrate cartridge;
11D shows another configuration of the substrate cartridge.
12A is a view showing another configuration of a substrate cartridge;
12B is a view showing another configuration of the substrate cartridge;
13A is a view showing another configuration of a substrate cartridge;
13B is a view showing another configuration of the substrate cartridge;
14 is a view showing another configuration of the substrate cartridge;
15 is a view showing another configuration of the substrate processing system;
16 is a view showing another configuration of a substrate cartridge;
17 is a view showing a configuration of a part of a substrate cartridge according to the third embodiment;
18 is a perspective view showing a configuration of a substrate storage device according to a fourth embodiment;
19 is a sectional view showing a configuration of a substrate storage apparatus according to a fifth embodiment;
20 is a sectional view showing a configuration of a substrate storage apparatus according to a sixth embodiment;
21 is a view showing another configuration of the substrate storage device;
22 is a view showing another configuration of the substrate storage device;
23 is a view showing another configuration of the substrate storage device;
24A is a view showing another configuration of the substrate storage device;
24B is a view showing another configuration of the substrate storage device;
25 is a view showing another configuration of the substrate storage device;
26 is a view showing another configuration of the substrate storage device;
27 is a view showing another configuration of the substrate storage device;
28 is a view showing another configuration of the substrate storage device;
29 is a view showing another configuration of the substrate storage device;
30 is a view showing another configuration of the substrate storage device;
31 is a view showing another configuration of the substrate storage device;
32A is a view showing another configuration of the substrate storage device;
32B is a view showing another configuration of the substrate storage device;
33 is a view showing another configuration of the substrate storage device;

[First Embodiment]

The first embodiment will be described with reference to the drawings.

1 is a side sectional view showing a configuration of a substrate cartridge CTR according to this embodiment.

As shown in Fig. 1, a substrate cartridge (or a sheet stocker, CTR) includes a receiving portion 1 for receiving a sheet substrate (for example, a strip-shaped film member) An inlet port 2 for feeding the sheet substrate into the accommodating portion 1 and an exit port 3 for carrying out the sheet substrate from the accommodating portion 1; A guiding portion 4 for guiding from the outlet 2 to the outlet 3, a control portion 5, and a connecting port 6. [ The substrate cartridge CTR is used, for example, on a bottom surface F of a manufacturing factory or the like.

In the following description, the XYZ orthogonal coordinate system is set, and the positional relationship of the respective members is described with reference to this XYZ orthogonal coordinate system. Specifically, a predetermined direction on a plane parallel to the bottom surface F is an X-axis direction, a direction orthogonal to the X-axis direction on the plane is a Y-axis direction, and a direction perpendicular to the plane is a Z-axis direction. The directions of rotation (inclination) around the X-axis, Y-axis, and Z-axis are θX, θY, and θZ directions, respectively.

As the sheet substrate, for example, foil (foil) such as resin film or stainless steel can be used. For example, the resin film may be formed of a resin such as polyethylene resin, polypropylene resin, polyester resin, ethylene vinyl copolymer resin, polyvinyl chloride resin, cellulose resin, polyamide resin, polyimide resin, polycarbonate resin, polystyrene resin, A resin or the like can be used.

The dimension of the sheet substrate in the Y direction (short direction) is, for example, about 50 cm to 2 m, and the dimension in the X direction (longitudinal direction) is, for example, 10 m or more. Of course, this dimension is merely an example, and the present invention is not limited thereto. For example, the dimension of the sheet substrate in the Y direction may be 50 cm or less, and it may be 2 m or more. In the present embodiment, a sheet substrate whose dimension in the Y direction exceeds 2 m is preferably used. The size of the sheet substrate in the X direction may be 10 m or less.

The sheet substrate has, for example, a thickness of 1 mm or less and is formed to have flexibility. Here, the flexibility refers to a property that, for example, a predetermined force of at least its own weight is applied to the substrate, not breaking or breaking the substrate, but bending the substrate. Also, for example, the property of bending by the predetermined force is included in the flexibility. The flexibility depends on the material, size, thickness, temperature, etc. of the substrate, and the like. As the sheet substrate, a single strip-shaped substrate may be used, but a configuration in which a plurality of unit substrates are connected and formed in a band shape may be employed.

It is preferable that the sheet substrate has a small coefficient of thermal expansion so that the dimension thereof does not change even if it receives heat of, for example, about 200 캜. For example, an inorganic filler may be mixed with a resin film to reduce the thermal expansion coefficient. Examples of the inorganic filler include titanium oxide, zinc oxide, alumina, silicon oxide and the like.

The housing part 1 has, for example, a case 10 having a plurality of wall surfaces. The plurality of wall surfaces are arranged, for example, at positions constituting respective surfaces of a rectangular parallelepiped. The case 10 may be placed, for example, so that the -Z side surface is in direct contact with the floor surface F. For example, the case 10 may be provided on the floor surface F via a caster or the like Does not matter. The case 10 may be provided with a cover (not shown) that can be opened and closed.

The inlet port 2 is formed on the wall surface 10a on the + X side of the case 10, for example. The inlet port 2 is provided with, for example, guide plates 21 and 22 and a carry-in roller (drive roller) 23. The guide plates 21 and 22 are provided at positions that sandwich the front surface and the back surface of the sheet substrate. The guide plate 21 is formed so as to project toward the + X side with respect to the guide plate 22. The loading roller 23 guides the sheet substrate carried in from the inlet port 2 into the receiving portion 1.

The exit port 3 is formed on the wall surface 10a on the + X side of the case 10, for example. In addition, the exit port 3 is formed on the upper side (+ Z side) of the wall surface 10a. The transfer port 3 is disposed, for example, on the lower side (-Z side) of the inlet port 2. As described above, in the present embodiment, the inlet port 2 and the outlet port 3 are arranged on the same wall surface 10a of the case 10. In addition, on the wall surface 10a, there is provided a connection port 6 with the outside. In the transfer port 3, for example, guide plates 31 and 32 and a take-out roller (drive roller) 33 are provided. The guide plates 31 and 32 are provided at positions sandwiching the front and back surfaces of the sheet substrate. The guide plate 31 is formed so as to project toward the + X side with respect to the guide plate 32. The take-out roller 33 guides the sheet substrate in the case 10 to the exit port 3.

The guide portion (4) is provided inside the case (10). The guide portion 4 includes a fixed guide plate 41, a first roller (drive roller) 42, a parallel guide plate 43, a second roller (drive roller) 44, a movable guide plate 45, 46). The folding mechanism 46 is disposed in a plurality of positions along the inner direction of the case 10 from the wall surface 10a on which the inlet port 2 and the outlet port 3 are disposed.

The fixing guide plate 41 is a plate member fixed horizontally to the inner wall of the case 10 immediately after the loading roller 23 and just before the first roller 42. [ The fixing guide plates 41 are arranged in parallel in the X direction, for example. The dimension of the fixing guide plate 41 in the Y direction is larger than the dimension of the sheet substrate in the short direction. However, the width of the sheet substrate in the Y direction is supported, It is also possible to use a configuration that is not likely to be used. The fixing guide plate 41 may be divided into a plurality of guide plates and the plurality of guide plates may be arranged at regular intervals along the X direction. The fixing guide plate 41 guides, for example, the sheet substrate carried by the carrying roller 23 in the -X direction.

The first roller 42 is disposed in the vicinity of the -X side end portion of the fixing guide plate 41. The first roller 42 is fixed to the inner wall of the case 10 so as to be rotatable in the? Y direction. The first roller 42 conveys the sheet substrate guided by the fixed guide plate 41 to the parallel guide plate 43.

The parallel guide plate (43) is a plate-like member fixed to the case (10). The parallel guide plate 43 has an inner guide plate 43a disposed on the + X side and an outer guide plate 43b disposed on the -X side. The inner guide plate 43a and the outer guide plate 43b are arranged so as to be opposed to each other in a state in which the inner guide plate 43a and the outer guide plate 43b are raised with respect to the horizontal plane, that is, the plate surface is parallel to the YZ plane.

The inner guide plate 43a and the outer guide plate 43b are arranged with a gap (a gap in the X direction in this embodiment) so that the sheet substrate can pass through. The inner guide plate 43a and the outer guide plate 43b are formed such that the end on the + Z side is curved toward the + X side toward the first roller 42, for example, For example, curved toward the + X side toward the second roller 44.

The second roller 44 is disposed on the inner side (-X side) inside the case 10 and in the vicinity of the -Z side end of the parallel guide plate 43. The second roller 44 is rotatably provided in the? Y direction. The second roller 44 sandwiches the front surface and the back surface of the sheet substrate guided by the parallel guide plate 43 and conveys the sheet to the movable guide plate 45. To the first roller 42 and the second roller 44, for example, a rotation drive mechanism (not shown) is connected.

The movable guide plate (45) guides the sheet substrate conveyed by the second roller (44). Fig. 2 is a view showing a configuration along a section A-A in Fig. 1. Fig. As shown in Fig. 2, concave portions 11 are formed on the inner surfaces of the wall portion 10b on the + Y side and the wall portion 10c on the -Y side of the case 10, respectively. The concave portion 11 is formed to be long in the X direction, for example. In the concave portion 11, for example, a shaft portion 12 rotatably mounted in the &thetas; X direction is provided.

The movable guide plate 45 is attached to the case 10 via the shaft portion 12. The shaft portion 12 is rotatable in the? X direction. The shaft portion 12 is connected to a rotation drive mechanism (not shown). 2, the basic operation of the rotation driving mechanism is controlled by the movable guide plate 45 (see FIG. 2), for example, by controlling the rotation angle, rotation speed, May be rotated between a substantially horizontal state and a substantially vertical state accommodated in the concave portion 11.

By adjusting the rotation angle of the shaft portion 12, for example, the movable guide plate 45 can be moved in a state of being parallel to the Y direction and a state of being parallel to the Z direction (a state in which the tip portion faces the -Z direction) Respectively. The movable guide plate 45 supports both ends of the sheet substrate conveyed by the second roller 44 in the Y direction in a state in which the movable guide plate 45 is parallel to the Y direction, for example. The movable guide plate 45 is accommodated in the concave portion 11 in a state in which the movable guide plate 45 is parallel to the Z direction, for example. Thus, the movable guide plate 45 is provided so as to be able to move in and out of the guide path of the sheet substrate.

As shown in Fig. 1, the plurality of folding mechanisms 46 has a first moving roller 47 and a second moving roller 48. As shown in Fig. Each of the folding mechanisms 46 has the same structure. A plurality of first moving rollers 47 are arranged on the -Z side of the sheet substrate, for example. The plurality of first moving rollers 47 are arranged at predetermined intervals along, for example, the X direction. A plurality of second moving rollers 48 are arranged on the + Z side of the sheet substrate, for example. The plurality of second moving rollers 48 are arranged at predetermined intervals along, for example, the X direction.

Each of the second moving rollers 48 is disposed between adjacent first moving rollers 47 in the X direction. Therefore, the first moving roller 47 and the second moving roller 48 are arranged alternately in the X direction, for example. In addition, for example, the first moving roller 47 and the second moving roller 48 are arranged so as not to overlap when viewed on the XY plane, for example.

3 is a view showing a configuration of the folding mechanism 46. Fig.

As shown in Fig. 3, the first moving roller 47 and the second moving roller 48 have the same constitution, respectively. The folding mechanism 46 in the state shown in Fig. 3 is connected to the case 10 And the folding mechanism 46 in the state shown in Fig. 3 is vertically inverted to be mounted on the upper side of the case 10 shown in Fig. 2 The second moving roller 48 is constituted. The first moving roller 47 and the second moving roller 48 have a fixing portion 51, a movable portion 52, a supporting portion 53 and a roller portion 54, respectively.

The fixing portion 51 has a pair of driving sources 51a to be fixed to the inner wall of the case 10 and a rod-like guide rod 51b for connecting the pair of driving sources 51a . The pair of driving sources 51a are aligned and fixed so that the guide rod 51b is parallel to the Y axis, for example. As the pair of driving sources 51a, for example, a configuration using a pneumatic or hydraulic piston, a pole screw and a nut, or the like can be used. In the driving source 51a, for example, the control unit 5 controls the driving amount, the driving timing, and the like.

The movable portion 52 has a pair of sliders 52a movable along the guide rod 51b and an expanding portion 52b extending and contracting in the Z direction in accordance with the movement of the pair of sliders 52a . The pair of sliders 52a are moved by the pair of driving sources 51a, for example. In the structure shown in Fig. 3, for example, when the pair of sliders 52a move to the center in the lateral direction, the stretchable and contractible portion 52b is stretched to the + Z side. Further, as the pair of sliders 52a move to the left and right ends in the figure, the expandable portion 52b contracts in the -Z direction.

Further, the state in which the stretchable and contractible portion 52b of the folding mechanism 46 is contracted most is set as an initial state.

The support portion 53 is fixed to the tip of the extensible portion 52b on the + Z side. The supporting portion 53 is provided so as to be movable in the Z direction by the stretching and contracting operation of the stretchable and contractible portion 52b. A roller portion 54 is attached to the support portion 53. [ The roller portion 54 is provided so as to be rotatable in the &thetas; Y direction, for example. The roller portion 54 is, for example, a portion where the sheet substrate is caught. The diameter of the roller portion 54 that folds and folds the sheet substrate is set within a range in which the sheet substrate does not undergo plastic deformation when the sheet substrate is folded in a U shape. For example, even in a sheet substrate of PET (polyethylene terephthalate) or PEN (polyethylene naphthalate) having a thickness of about 50 탆, a metal film such as aluminum or a UV curable resin layer is deposited on the surface of the sheet Since the minimum radius of curvature allowed when folding in a U-shape changes in the machining state, the diameter of the roller portion 54 is determined by the diameter of the sheet substrate to be stored (for example, the content of the processing process for performing processing on the sheet substrate ).

1 and 2 show a state in which the stretchable and contractible portion 52b contracts with respect to each of the first moving roller 47 and the second moving roller 48. In Fig. 1, the roller portion 54 is disposed at the position 47S with respect to the first moving roller 47, and the second moving roller 52 is positioned at the second moving roller 47, And is disposed at the position 48S with respect to the base 48.

4 is a diagram showing a configuration of a substrate processing system (SYS) according to an embodiment of the present invention.

4, the substrate processing system SYS includes a substrate supply section SU for supplying a sheet substrate FB, a substrate processing apparatus PR for performing a process on an object surface Fp of the sheet substrate FB A substrate collecting unit CL for collecting the sheet substrate FB, and a control device CONT for controlling the respective parts.

In the present embodiment, the above-described substrate cartridge CTR is used as an apparatus that also serves as a substrate supply section (SU) and a substrate recovery section (CL). The substrate processing apparatus PR is provided with a connection portion CN to the substrate cartridge CTR. The connection portion CN of the substrate processing apparatus PR is connected to the connection port 6 of the substrate cartridge CTR, for example. The substrate processing system SYS is provided in, for example, a factory. In this embodiment, the exit port 3 of the substrate cartridge CTR functions as the substrate supply section SU, and the inlet port 2 functions as the substrate collection section CL.

The substrate processing system SYS is a system in which the sheet substrate FB is discharged from the exit port 3 of the substrate cartridge CTR and then the sheet substrate FB is recovered at the inlet port 2 of the substrate cartridge CTR Various processes are performed on the surface of the sheet substrate FB. The substrate processing system SYS can be used when a display element (electronic device) such as an organic EL element or a liquid crystal display element is formed on the sheet substrate FB, for example. Of course, the substrate processing system SYS may be used in the case of forming elements other than these elements.

The substrate cartridge CTR feeds the sheet substrate FB accommodated in the accommodating portion 1 from the exit port 3 to the substrate processing apparatus PR. The substrate cartridge CTR recovers the sheet substrate FB from the substrate processing apparatus PR from the inlet port 2. The substrate cartridge CTR guides the leading end portion of the sheet substrate FB recovered from the inlet port 2 to the exit port 3 by the guide portion 4, for example.

The substrate processing apparatus PR transports the sheet substrate FB fed from the dispensing port 3 of the substrate cartridge CTR to the inlet port 2 of the substrate cartridge CTR, Processing is performed on the surface Fp of the substrate FB. The substrate processing apparatus PR includes, for example, a processing apparatus PA, a transport apparatus CV, and an alignment apparatus (not shown).

The processing apparatus PA has TFTs and various processing sections for forming organic EL elements, for example, on the processed surface Fp of the sheet substrate FB. As such a processing section, for example, there are a partition wall forming apparatus for forming barrier ribs on the surface to be treated Fp, an electrode forming apparatus for forming electrodes for driving TFTs and organic EL elements, a light emitting layer forming apparatus And the like. More specifically, the present invention relates to a film forming apparatus such as a droplet applying apparatus (e.g., an ink jet type applying apparatus, a screen printing type applying apparatus, etc.), a vapor deposition apparatus, a sputtering apparatus, A reforming device, and a cleaning device. Each of these devices is suitably provided on, for example, a conveyance path of the sheet substrate FB. As the processing apparatus PA, for example, a reader attaching unit for attaching the reader unit to the leading end in the conveying direction of the sheet substrate FB may be used.

The conveying device CV has a roller device R for conveying the sheet substrate FB to the inlet port 2 side in the substrate processing device PR, for example. A plurality of roller units R are provided along the conveyance path of the sheet substrate FB, for example. A drive mechanism (not shown) is mounted on at least a part of the roller devices R among the plurality of roller devices R. By rotating the roller device R as described above, the sheet substrate FB is conveyed in the X-axis direction. For example, a part of the roller apparatus R among the plurality of roller apparatuses R may be provided so as to be movable in a direction perpendicular to the carrying direction. The transport apparatus CV may be configured to include a reader holding unit CVL that holds the reader when the reader is attached to the front end of the sheet substrate FB.

The conveying device CV conveys the sheet substrate FB such that the bringing-in position and the bringing-out position of the sheet substrate FB together become the + X side of the substrate processing apparatus PR. For example, the conveying device CV has a folding roller RR. The conveying device CV conveys the sheet substrate FB fed from the + X side end of the substrate processing apparatus PR to the -X side by the folding roller RR, X side so as to transport the sheet substrate FB so as to return to the + X side end portion of the substrate processing apparatus PR.

The alignment apparatus detects alignment marks provided at both ends in the width direction of the sheet substrate FB and performs alignment operation of the sheet substrate FB with respect to the processing apparatus PA based on the detection results. The alignment apparatus includes an alignment camera for detecting an alignment mark provided on the sheet substrate FB and a control unit for controlling the alignment of the sheet substrate FB in the X direction, the Y direction, the Z direction, the X direction, an adjustment mechanism for fine adjustment in at least one direction of the? Y direction and the? Z direction, and the like.

The substrate processing system SYS configured as described above produces display devices (electronic devices) such as organic EL devices and liquid crystal display devices under the control of the control device CONT. Hereinafter, a process for manufacturing a display device using the substrate processing apparatus (FPA) having the above-described structure will be described with reference to FIG.

First, the substrate cartridge CTR is mounted on the connection portion CN of the substrate processing apparatus PR. The substrate cartridge CTR is provided with an inlet port 2 for carrying the sheet substrate FB and a discharge port 3 for carrying out the sheet substrate FB on the same wall surface 10a as shown in Fig. Therefore, it is preferable to connect the connection port 6 of the wall surface 10a to the connection portion CN. That is, the cartridge CTR can be easily and accurately connected to the processing apparatus PR with the mechanical connection accuracy between the connecting portion CN and the cartridge-side connecting port 6.

6, the sheet substrate FB housed in the substrate cartridge CTR is wound around a plurality of first rollers 42 and a plurality of second rollers 44, . Then, the sheet substrate FB from the substrate cartridge CTR is carried out by the following method.

After mounting the substrate cartridge CTR, the control unit 5 rotates the take-out roller 33 so that the sheet substrate FB is fed out from the exit port 3. The control device CONT is operated by the conveyance device CV of the substrate processing apparatus PR until the sheet substrate FB is fed out from the exit port 3 and then collected at the inlet port 2 The constituent elements of the display element are sequentially formed on the sheet substrate FB by the processing apparatus PA while appropriately transporting the sheet substrate FB in the substrate processing apparatus PR.

On the other hand, the control unit 5 draws the sheet substrate FB processed by the substrate processing apparatus PR into the cartridge CTR by the carry-in roller 23 of the inlet 2. By this control of the take-out roller 33 and the carry-in roller 23, the processed surface Fp of the sheet substrate FB can be continuously conveyed to the substrate processing apparatus PR. In the substrate cartridge CTR, the sheet substrate FB that has passed through the substrate processing apparatus PR is guided to the fixing guide plate 41 via the loading roller 23. [

The sheet substrate FB guided by the fixing guide plate 41 is guided to the movable guide plate 45 through the first roller 42, the parallel guide plate 43 and the second roller 44, for example, ). At this time, the control unit 5 sets the pair of movable guide plates 45 to be parallel to each other in the Y direction, and the elastic members 52b (52b) of the folding mechanism 46 having the first moving roller 47 Of the folding mechanism 46 having the first moving roller 48 and the second moving roller 48 is contracted (the state shown in Fig. 2). That is, the stretchable and contractible portion 52b of the folding mechanism 46 is set to the initial state.

Then, the front end portion of the sheet substrate FB is guided in the + X direction in a state where both ends in the Y direction are supported by the movable guide plate 45. [ The control unit 5 stops the driving of the take-out roller 33 when the leading end of the sheet substrate FB which has passed through the take-out roller 33 is supported by the guide plate 31 (state of Fig. 5).

After stopping the drive of the take-out roller 33, the control unit 5 temporarily stops the take-in roller 23 to hold the leading end of the sheet substrate FB. The control section 5 removes the drive of the first roller 42 and the second roller 44 from the drive shaft and is in a state of being vertically rotatable by the movement of the sheet substrate FB do. Thereafter, the control section 5 restarts the driving of the carry-in roller 23.

When the drive of the carry-in roller 23 is resumed, the sheet substrate FB is again fed from the feed-in port 2 and is fed through the carry roller 23, the first roller 42 and the second roller 44, (45). The control unit 5 causes the sheet substrate FB to be excessively tensioned in accordance with the conveying amount of the sheet substrate FB from the second roller 44 after the movable guide plate 45 is received in the recessed portion 11 The stretching and contracting portion 52b of the folding mechanism 46 is stretched so as to gradually move the first moving roller 47 (54) and the second moving roller 48 (54)

With this operation, the first moving roller 47 gradually pushes the sheet substrate FB from the -Z side surface of the sheet substrate FB in the + Z direction. On the other hand, the second moving roller 48 gradually pushes down the sheet substrate FB from the + Z side surface of the sheet substrate FB in the -Z direction. 6, the stretching portion 52b of the folding mechanism 46 having the first moving roller 47 and the stretching portion 52b of the folding mechanism 46 having the second moving roller 48 ) Are stretched together. The sheet substrate FB is wound on a part of the first moving roller 47 and a part of the second moving roller 48 and is received in a state of being folded a plurality of times in the X direction. After the first moving roller 47 and the second moving roller 48 are extended to the maximum extent of the movable range, the control section 5 stops the driving of the carrying roller 23.

Since the first moving roller 47 and the second moving roller 48 are arranged so that their positions do not overlap in the X direction, in the process of moving the first moving roller 47 and the second moving roller 48 , The sheet substrate FB is wound on the first moving roller 47 and the second moving roller 48 without being contacted. Therefore, even when the first moving roller 47 and the second moving roller 48 move to the maximum position in the movable range, the sheet substrates FB are not in contact with each other (non-contact state).

When the sheet substrate FB is taken out from this state, the control section 5 stops the driving of the carry-in roller 23 (while holding the terminal end portion of the sheet substrate FB) And drives the take-out roller 33, the first roller 42, the second roller 44, and the like. At the same time, the control section 5 controls the stretching and contracting section 52b of the folding mechanism 46 having the first moving roller 47 and the stretching and contracting section 52b of the folding mechanism 46 having the second moving roller 48 And controls the driving source 51a so as to gradually contract. In this case, the control unit 5 sequentially moves the retractable portion 52b of the folding mechanism 46 from the inner side of the substrate cartridge CTR to the side of the wall surface 10a among the stretchable and contractible portions 52b of the plurality of folding mechanisms 46, It is preferable to stretch the core 52. After the sheet substrate FB has become almost horizontally tight between the second roller 44 and the unloading roller 33, the control unit 5 stops the end of the sheet substrate FB from the loading roller 23 The movable guide plate 45 is in parallel with the Y direction and guides the trailing end of the sheet substrate FB to the take-out roller 33. [ As described above, the sheet substrate FB is fed and collected, and the sheet substrate FB is processed in the substrate processing apparatus PR.

As described above, according to the present embodiment, there are provided the accommodating portion 1 for accommodating the sheet substrate FB, the dispensing opening 3 provided in the accommodating portion 1 to carry out the sheet substrate FB, And a front end portion Fh of the sheet substrate FB accommodated in the receiving portion 1 from the inlet port 2 is provided at the exit port 3, When the sheet substrate FB housed in the board cartridge CTR is fed out, the leading end Fh of the sheet substrate FB at the time of receiving is fed . Therefore, it is not necessary to manage the leading end and the end of the sheet substrate FB every time. As a result, the burden on the management of the sheet substrate FB can be reduced even in the substrate processing system SYS.

[Second Embodiment]

Next, a second embodiment of the present invention will be described.

Since the structure of the movable guide plate 45 is different from that of the first embodiment, the substrate cartridge according to the present embodiment will be described focusing on the difference. Since the other configurations are the same as those of the first embodiment, the description is omitted or simplified.

Fig. 7 is a view showing a configuration of the substrate cartridge CTR2 according to the embodiment. Fig. 8 is a view showing a configuration along a section B-B in Fig. 7; Fig.

7 and 8, in this embodiment, the movable guide plate 45 is divided in the X direction, and the plurality of plate members 45a are arranged apart from each other in the X direction. That is, the movable guide plate 45 is formed, for example, in a rectangular shape. The plate-like members 45a may be configured to be rotatable individually, and for example, a plurality of plate-like members 45a may be integrally rotatable. Further, the plate-like members 45a may be partly connected to each other (comb-shaped).

The leading end Fh of the sheet substrate FB is sent from the second roller 44 to the take-out roller 33 by forming the movable guide plate 45 in a rectangular shape (or a comb shape) The roller portion 54 of each first moving roller 47 can be lifted up to the position 54F. The position 54F is set such that the upper surface of the plurality of plate members 45a constituting the movable guide plate 45 and the upper surface of the outer periphery of each of the roller portions 54 become substantially the same height Location. Therefore, it is possible to stably secure the conveying guide path of the sheet substrate FB.

The technical scope of the present invention is not limited to the above-described embodiment, but can be appropriately changed within the scope not deviating from the gist of the present invention.

For example, in the above-described embodiment, the description has been given taking the configuration in which the inlet port 2 is disposed on the + Z side and the outlet port is disposed on the -Z side, but the present invention is not limited thereto. For example, as shown in Fig. 9A, the inlet port 2 may be arranged on the -Z side (lower side) and the outlet port 3 may be arranged on the + Z side (upper side). 9A, the sheet substrate FB carried in from the inlet port 2 on the -Z side is guided in the -X direction by the fixing guide plate 41 disposed on the -Z side, (Drive roller) 42 and the parallel guide plate 43 in the + Z direction. The sheet substrate FB having passed through the parallel guide plate 43 and the second roller (drive roller) 44 is guided to the movable guide plate 45 and the folding mechanism 46 arranged on the + Z side, for example.

Both the first moving roller 47 and the second moving roller 48 which are disposed on the front surface side and the back surface side of the sheet substrate FB in the folding mechanism 46 are moved up and down As shown in FIG. 9A, the initial state of the sheet substrate FB, that is, the leading end of the sheet substrate FB is moved to the exit port 3, for example, , And the second moving roller 48 located at the top of the sheet is moved in the -Z direction when the sheet substrate is held substantially horizontally between the exit port 3 and the roller 44 . Therefore, the first moving roller 47 is pivotally supported so as to be able to roll to the upper (+ Z direction) position in the cartridge CTR.

9A, for example, the first moving roller 47 is fixed, and only the second moving roller 48 is located on both side walls of the cartridge CTR (side walls in a plane parallel to the paper surface of Fig. 9A) And is guided to the guide grooves formed in the Z direction and elongated in the Z direction so as to be movable in the Z direction. For this reason, at both ends of each of the second moving rollers 48, a shaft portion protruding to be engaged with the guide groove is formed in the same manner as the first moving roller 47 shown in Fig. 9A, for example.

9B, a ring-shaped bearing 47B is provided on each of the shaft portions 47A protruding from both ends of the roller 47 so as to be rotatable And both ends of the upper portion of the movable guide plate 45 are mounted on the bearing 47B. Therefore, even if the first moving roller 47 rotates in the &thetas; Y direction, the movable guide plate 45 is in a substantially horizontal state (substantially parallel in the X direction) as indicated by the solid line in Fig. 9A, (Almost parallel in the Z direction). This switching is carried out simultaneously with the movable guide plate 45 pivotally supported on each of the plurality of first moving rollers 47 by a driving mechanism not shown or in accordance with a conveyance sequence of the sheet substrate FB, (Sequential).

The movable guide plates 45 are arranged so as to fill the spaces between the adjacent first moving rollers 47 in a state in which the movable guide plates 45 are arranged in parallel to the X direction (or inclined with a slight upward slope in the sheet advancing direction) . However, as shown in Fig. 9A, the leading end of the guide plate 45 may be provided with a clearance such that it does not come into contact with the adjacent roller 47. In a state of being arranged in parallel to the Z direction, as shown in Fig. 9B, it is in a state of being retracted (retracted) from between the adjacent first moving rollers 47. [

9A, a slider member 49 for adjusting the timing of the movement of the second moving roller 48 in the Z direction is provided. The slider member 49 has support portions (nail portions) engaged with the shaft portions at both ends of the respective second moving rollers 48 and guide groove recesses for guiding the shaft portions. For example, two adjacent second moving rollers 48 will be described as an example.

10, the slider member 49 includes supporting portions (nail portions 49c and 49d) for supporting the shaft portions 48Aa and 48Ab of two adjacent second moving rollers 48, And guide recessed grooves 49a and 49b for guiding the shaft portions 48Aa and 48Ab. The adjacent support portions 49c and 49d have different dimensions in the X direction. Specifically, the dimension of the support portion 49c in the X direction is larger than the dimension of the support portion 49d in the X direction.

Therefore, as shown in Figs. 11A, 11B, 11C, and 11D, when the slider member 49 is moved in the + X direction, the shaft portion 48Ab supported by the support portion 49d having a shorter dimension in the X- ) Is firstly released from the supporting state and the second moving roller 48 having the shaft portion 48Ab moves in the -Z direction while pushing down the sheet substrate FB. When the slider member 49 is further moved in the + X direction, the supporting state of the shaft portion 48Aa supported by the support portion 49c having the larger dimension in the X direction is canceled, (48) also moves in the -Z direction while pressing down the sheet substrate (FB). Thus, since the slider member 49 is formed so that the dimension in the X direction is different by a predetermined amount, the slider member 49 is moved in the + X direction, for example, The timing of the movement (descent) of the roller 48 in the -Z direction can be adjusted.

12A, all the second moving rollers 48 are moved to the first moving rollers 48 (the second moving rollers 48) by the slider member 49. In this case, 47, for example, the entire slider member 49 is moved from the -Z side to the + Z side. 9A, the sheet substrate FB is conveyed from the state where all the second moving rollers 48 are positioned at the lowest position and the sheet substrate FB is longest received (stock) The sheet substrate FB is prevented from slipping by the first roller (drive roller 42) or the second roller (drive roller 44), which is brought into the drive stop state, The second moving roller 48 moves gradually in the upper direction (+ Z direction) in accordance with the amount of feeding from the transfer port 3 of the sheet substrate FB, . Thereafter, as shown in Fig. 12B, the slider member 49 is rotated so that the guide recessed groove 49e and the guide recessed groove 49f are aligned with the shaft portions 48Aa and 48Ab of the respective second moving rollers 48, 49 are moved in the X direction so that the shaft portions 48Aa, 48Ab are inserted into the guide recess grooves 49e, 49f, respectively. The second roller 44 and the take-out roller 33 are driven, for example, after the slider member 49 supports the shaft portions of all the second moving rollers 48, do.

13A and 13B, the engaging edge portion 49g may be provided on a part of the slider member 49, for example. In this case, the dimension L1 of the guide recess groove 49a in the X direction and the dimension L2 of the guide recess groove 49b in the X direction are formed to be the same dimension. In this case, as shown in Fig. 13B, when all the second moving rollers 48 move to the lowermost position in the -Z direction and then the slider member 49 is moved in the -Z direction as it is, the guide recess grooves 49a Is freely movable toward the + Z side through the guide recessed groove 49h at that position. On the other hand, the shaft portion 48Ab engaged with the guide recess groove 49b is moved to the + Z side by the engaging edge portion 49g.

The sheet substrate FB is pressed down on the -Z side by the own weight of the second moving roller 48. Therefore, when the sheet substrate FB is taken out from the exit port 3, Assuming that the rolling friction of the roller 48 is extremely small, a tension according to the weight of the second moving roller 48 is given to the sheet substrate FB. Therefore, by selecting the weight of the second moving roller 48, it is possible to set the tension of the sheet substrate FB to be sent to the processing apparatus to an appropriate range.

In the above embodiment, the inlet port 2 and the exit port 3 are provided on the same wall surface 10a of the case 10 of the substrate cartridge CTR. However, the present invention is not limited to this, The inlet port 2 and the outlet port 3 may be arranged on the other wall surface of the case 10 as shown in Fig.

As shown in Fig. 14, the case 10 of the substrate cartridge CTR is provided with wall surfaces 10a and 10d, for example. Of these, the wall surface 10a is provided with a refill 2. And an exit port 3 is provided on the wall surface 10d. 14 shows a structure in which the inlet port 2 is disposed on the + Z side and the outlet port 3 is disposed on the -Z side. However, the present invention is not limited to this configuration, and the inlet port 2 and the outlet port 3 may be provided, (The + Z side, the -Z side, and the center in the Z direction can be appropriately set). In addition, in each of the wall surface 10a and the wall surface 10d, the connection ports 6A and 6D are provided.

Fig. 15 is a schematic view showing a configuration of a substrate processing system SYS using the substrate cartridge CTR shown in Fig.

As shown in Fig. 15, in this case, the substrate processing apparatus PR is connected to the substrate cartridge CTR at both end portions on the + X side and the -X side. For example, the connection portion CN at the end on the + X side is connected to the connection port 6A on the side of the wall surface 10a of the substrate cartridge CTR. The connection portion CN at the end on the -X side is connected to the connection port 6D on the side of the wall surface 10d of the substrate cartridge CTR. As described above, the substrate cartridge (CTR) may be used as the substrate supply unit (SU) and the substrate recovery unit (CL), respectively. In this case, the sheet substrate is stored in the substrate cartridge (CTR) provided in the substrate supply section (SU) as shown in FIGS. 6 and 9A and the empty substrate cartridge CTR is arranged in the substrate recovery section CL, The sheet substrate processed and processed in the processing apparatus PR may be recovered in the substrate cartridge CTR on the substrate recovery section CL side.

In the above embodiment, the description has been made by taking the configuration in which one inlet port 2 and one exit port 3 of the substrate cartridge CTR are provided, but the present invention is not limited thereto. And the outlet 3 may be provided. For example, in the structure shown in Fig. 16, a plurality of outlets (for example, two outlets 3A and 3B) are provided in one case 10. [ The guide portion 4 is provided with a path switching mechanism (a movable guide plate or the like) for switching a guide path from the sheet substrate FB accommodated in the case 10 to the exit port 2 to the exit ports 3A and 3B , 40). The switching operation of the route switching mechanism 40 can be controlled by the control unit 5, for example. Although the configuration shown in Fig. 16 has been described by taking a configuration in which a plurality of outlets 3A and 3B are provided as an example, the present invention is not limited thereto. For example, Or more), and it is also possible to adopt a configuration in which three or more exit ports 3 are provided. 16 has been described by way of example in which the inlet port 2 and the exit ports 3 (3A and 3B) are disposed on separate wall surfaces 10a and 10d. However, the present invention is not limited to this, A plurality of inlet ports 2 and an outlet port 3 may be formed on the same wall surface. Of course, a plurality of inlet ports 2 and a plurality of outlet ports 3 may be formed in a plurality of wall surfaces (for example, each of the wall surfaces 10a and 10d).

In this case, when the substrate processing apparatus (PR) group is provided in the two layers of the manufacturing factory, the one-layer (one-layer) The sheet substrate can be efficiently transported between the substrate cartridge (CTR) provided on the stage and the substrate processing apparatus (PR) on the step.

[Third embodiment]

Next, a third embodiment of the present invention will be described with reference to Fig.

Since the vertical movement mechanism of the first moving roller 47 and the second moving roller 48 for folding the sheet substrate many times inside the substrate cartridge according to the present embodiment is different from the first embodiment , And explains the difference. Since the other configurations are the same as those of the first embodiment, the description is omitted or simplified.

In the first embodiment shown in Figs. 5 to 8, the first moving roller 47 and the second moving roller 48, which are adjacent to each other, are arranged such that the movement in the Z direction is reversed (complementary in phase) do. Thus, as shown in Fig. 17, the pair of the first moving roller 47 and the second moving roller 48, which are adjacent to each other, are arranged at both ends of the timing belts 103A and 103B. The timing belts 103A and 103B are structured such that they are hooked in an inverted U-shape on, for example, pulleys 100A and 100B which are rotatably and axially supported on upper portions of side walls in the cartridge.

The ends of the timing belts 103A and 103B are fixed to the bearings 47B and 48B that transmitably support the shaft portions at both ends of the rollers 47 and 48. If the pulleys 100A and 100B are not subjected to the rotational driving force (torque) in the ideal state, the rollers 47, 48 maintain their positions.

A drive pulley 102 is fixed to the pulleys 100A and 100B on one side of the pair of coils 100A and 100B, for example, on the side of the pulley 100A, An endless belt 104 is interposed between the drive pulley 102 and the neighboring drive pulley 102. Therefore, when the drive pulley 102 at the end in the X direction is driven by a motor, all the drive pulleys 102, that is, all the pulleys 100A and 100B rotate at the same speed, for example, When the roller 47 simultaneously moves upward, all the second moving rollers 48 are simultaneously moved downward.

FIG. 17 shows a state (initial loading state) in FIG. 5 (or FIG. 7) of the first embodiment, wherein the sheet substrate FB is disposed above each of the first moving rollers 47, In the lower space. In this state, when the drive pulley 102 driven by the motor is rotated, all of the first moving rollers 47 are simultaneously moved upward to be lifted up to the uppermost position while supporting the back surface of the sheet substrate FB At the same time, all the second moving rollers 48 are simultaneously moved downward and brought down to the lowest position while being in contact with the surface of the sheet substrate FB, (FB) is stored in the cartridge.

[Fourth Embodiment]

18 is a perspective view showing a configuration of the substrate storage apparatus according to the fourth embodiment.

18, the substrate storage apparatus STR includes a container CT which is formed in a band shape and accommodates a flexible substrate S, a plurality of folding units RC to which the substrate S is attached, . The substrate storage apparatus STR houses the substrate S in a container CT placed on a floor FL, for example, and stores the substrate S in a dry state on a plurality of folding units RC.

In the following description of the substrate storage STR, the XYZ orthogonal coordinate system is set, and the positional relationship of the respective members is described with reference to this XYZ orthogonal coordinate system. In the following drawings, the bottom surface FL of the XYZ orthogonal coordinate system is defined as the XY plane. The shorter direction of the substrate S in the XY plane is the Y axis direction, and the direction orthogonal to the Y axis direction is the X direction. The direction perpendicular to the bottom surface (FL (XY plane)) is the Z axis direction.

The container CT has, for example, a rectangular parallelepiped shape and six wall surfaces. In the interior of the container CT, a containing chamber RM surrounded by the corresponding six wall surfaces is formed. The container CT has two openings EN, EX on the same wall surface CTa. One of the openings is a substrate entry opening EN for loading the substrate into the containing chamber RM. The other opening is a substrate exit port EX for carrying out the substrate of the containing chamber RM. In the present embodiment, a configuration in which the substrate inlet EN is disposed on the -Z side of the substrate exit EX is taken as an example, but of course it may be reversed.

In the vicinity of the substrate inlet EN of the storage chamber RM, a carry-in roller Rn is provided. A pair of carry-in rollers Rn are provided at positions sandwiching the substrate S in the Z direction. The loading roller Rn is rotatable to draw the substrate S carried in from the substrate inlet EN into the containing chamber RM.

A take-out roller Rx is provided in the vicinity of the substrate exit EX in the accommodating chamber RM. The pair of take-out rollers Rx are provided at positions where the substrate S is sandwiched in the Z direction. The take-out roller Rx is rotatable so as to send the substrate S carried out from the substrate exit port EX to the outside of the containing chamber RM.

The plurality of folding portions RC have any one of a plurality of rollers R1 to R15 (here, 15 rollers) provided in the containing chamber RM. Each of the rollers R1 to R15 has a shaft portion Ra which is parallel to the Y direction. The rollers R1 to R15 are rotatably supported by the shaft portions Ra on the + Y side and -Y side wall portions of the container CT, for example. Around the shaft portion Ra of each of the rollers R1 to R15 is provided a cylindrical outer peripheral portion Rb in which the accommodated substrate S is caught.

The rollers R1 to R15 are sequentially arranged in a transport path of the substrate S from the substrate feed opening EN to the substrate feed opening EX. Hereinafter, the arrangement of the rollers R1 to R15 will be described in detail.

Among the plurality of rollers R1 to R15, the four rollers R1, R3, R5, and R7 are arranged side by side on a straight line parallel to the X-axis direction. Likewise, the three rollers R2, R4 and R6 are also arranged on a straight line parallel to the X-axis direction. The three rollers R2, R4, and R6 are arranged on the -Z side of the four rollers R1, R3, R5, and R7.

The four rollers R9, R11, R13 and R15 of the rollers R1 to R15 are also arranged on a straight line parallel to the X-axis direction. The four rollers R9, R11, R13, and R15 are disposed adjacent to the + Z side of the four rollers R1, R3, R5, and R7.

In addition, the three rollers R10, R12 and R14 of the rollers R1 to R15 are also arranged on a straight line parallel to the X-axis direction. The three rollers R10, R12, and R14 are arranged on the -Z side of the four rollers R1, R3, R5, and R7 and adjacent to the + Z side of the three rollers R2, .

In this manner, four rows of rollers arranged in the X direction are provided in the Z direction.

As for the rollers of two rows (+ Z side ends: rollers R9, R11, R13 and R15, and -Z side ends: rollers R2, R4 and R6) arranged at both ends in the Z direction among the four rows of rollers, The diameter of the roller is larger than that of the two rows.

As described above, two rollers R1 and R15 having different diameters from each other among the rollers R1 to R15 are arranged side by side so as to be adjacent to each other in the Z direction (the diameter of the roller R1 is smaller than that of the roller R15) Diameter, hereinafter referred to simply as "R1 <R15"). The rollers R4 and R12 (R12 &lt; R4), the rollers R3 and R13 (R3 <R13), the rollers R4 and the rollers R12 The roller R5 and the roller R9 (R9 &lt; R7)), the roller R6 and the roller R10 (R10 &lt; R6) Are arranged so as to be adjacent to each other in the Z direction.

The substrate S is sequentially guided to the rollers R1 to R15 so as to be guided to the conveyance path from the substrate inlet EN to the substrate exit EX. The substrate S is sequentially hooked in the + X direction to the respective rollers from the substrate inlet EN to the roller R7. Specifically, the substrate S is folded in the -Z direction by the roller R1. The downstream side of the roller (R1) of the substrate (S) is folded in the + Z direction by the roller (R2). The downstream side of the roller R2 among the substrates S is folded in the -Z direction by the roller R3. Thus, from the roller R 1 to the roller R 7, the substrate S is alternately folded in the + Z direction and the -Z direction.

The substrate S held by the roller R7 is caught by the roller R9 via the direction changing roller R8. This substrate S is sequentially hooked to the rollers R9 to R15 from the roller R9 to the substrate exit port EX in the -X direction. Specifically, the substrate S is folded in the -Z direction by the roller R9. The downstream side of the roller R9 among the substrates S is folded in the + Z direction by the roller R10. The downstream side of the roller R10 among the substrates S is folded in the -Z direction by the roller R11. Thus, from the roller R9 to the roller R15, the substrate S is alternately folded in the + Z direction and the -Z direction so that the substrates S are overlapped in the X direction.

The substrate S which is guided from the substrate inlet EN to the substrate exit EX in such a conveying path has the first surface Sa facing the + Z side at the substrate inlet EN, (Sb) is directed to the -Z side. In the substrate transfer port EX, the first surface Sa faces the -Z side, and the second surface Sb faces the + Z side.

In this embodiment, in the roller R6, the substrate S is folded so that the first surfaces Sa of the substrate S face each other. A portion of the substrate S which is folded toward the downstream side of the roller R6 by the roller R6 is referred to as a first portion S1. A portion of the substrate S folded in the direction opposite to the first portion S1 by the roller R6 is referred to as a fourth portion S4.

In the roller R7, the first portion S1 is folded so that the second surfaces Sb of the first portions S1 face each other. A portion of the substrate S that is folded toward the downstream side of the roller R7 by the roller R7 is referred to as a second portion S2.

In the rollers R8 and R9, the second portion S2 is changed in direction so as to face the roller R6. A portion of the substrate S which has been redirected by the roller R8 and the roller R9 is referred to as a third portion S3.

In the roller R10, the third portion S3 is folded along the first surface Sa of the fourth portion S4. At the same time, for example, the third portion S3 and the fourth portion S4 are moved in the reverse direction while the substrate S is moved from the substrate inlet EN to the substrate exit EX, for example, And the third portion S3 is folded by the roller R10.

Since the substrate S is folded as described above from the roller R6 to the roller R10, the portion of the substrate S which is caught by the rollers R1 to R7 and the portion of the substrate S on which the rollers R9 to R15 Is overlapped with the Z direction. In this embodiment, since the diameter of the roller is smaller on the roller row side than the roller row on the end face side in the Z direction of the containing chamber RM, the portion of the substrate S overlapping in the Z direction So that they do not come into contact with each other.

The portion of the substrate S held between the rollers R1 to R15 between the rollers R1 and R2 is parallel to the YZ plane. As described above, the four rollers (R1, R3, R5 and R7) constituting the roller train of the second row from the + Z side among the roller train of the four rows and the three rollers (R2, The positions of the rollers R1 to R7 in the X direction are adjusted so that the substrate S disposed between the rollers R1 and R6 is parallel to the YZ plane.

Likewise, four rollers (R9, R11, R13 and R15) constituting the roller train of the most + Z side among the four rows of rollers and three rollers (R10 and R12 The positions of the rollers R9 to R15 in the X direction are adjusted so that the substrate S disposed between the XY plane and the R14 is parallel to the YZ plane.

In the above description, the case where the substrate S is moved from the substrate inlet EN to the substrate exit port EX in the accommodation chamber RM has been described as an example. However, for example, The same explanation can be applied to the case of moving the storage chamber RM from the transfer outlet EX toward the substrate inlet EN. In this case, since the moving direction of the substrate S is opposite to that described above, the substrate exit port EX side is referred to as the upstream side and the substrate inlet port EN side is defined as the downstream side.

The substrate S is folded so that the second surfaces Sb of the substrate S face each other in the roller R10 as shown in Fig. A portion of the substrate S folded toward the downstream side of the roller R10 by the roller R10 is referred to as a first portion T1. A portion of the substrate S folded in the direction opposite to the first portion T1 by the roller R10 is referred to as a fourth portion T4.

In the roller R9, the first portion T1 is folded so that the first surfaces Sa of the first portion T1 are opposed to each other. A portion of the substrate S folded toward the downstream side of the roller R9 by the roller R9 is referred to as a second portion T2.

In the rollers R9 and R8, the second portion T2 is changed in direction so as to face the roller R10. A portion of the substrate S which has been redirected by the roller R8 and the roller R9 is referred to as a third portion T3.

In the roller R6, the third portion T3 is folded along the second surface Sb of the fourth portion T4. At the same time, for example, the third portion T3 and the fourth portion T4 are moved in the reverse direction while the substrate S is moved from the substrate transfer opening EX to the substrate entry opening EN, for example, And the third portion T3 is folded by the roller R6.

As described above, even when the substrate S is moved from the substrate exit opening EX to the substrate inlet EN, the substrate S is folded as described above from the roller R10 to the roller R6 . Therefore, a portion of the substrate S that is caught by the rollers R1 to R7 and a portion of the substrate S that is caught by the rollers R9 to R15 are arranged to overlap in the Z direction.

As described above, according to the present embodiment, since the substrates S are accommodated in the accommodating chamber RM in such a manner that the substrates S are folded in a wavy manner so as to overlap in the X direction and overlap with each other in the Z direction, The substrate S can be efficiently accommodated in a limited space of the substrate S. Thereby, a substrate storage apparatus STR having a high storage capacity of the substrate S is obtained.

[Fifth Embodiment]

Next, a fifth embodiment of the present invention will be described.

Fig. 19 is a diagram showing the configuration of the substrate storage device STR2 according to the present embodiment. In the present embodiment, since the configuration of the plurality of folding units RC differs from that of the fourth embodiment, this point will be mainly described. Other configurations are the same as those of the fourth embodiment. The same components as those in the fourth embodiment are denoted by the same reference numerals, and the description thereof will be omitted or simplified. In the present embodiment, the XYZ orthogonal coordinate system is used as in the fourth embodiment.

As shown in Fig. 19, in the substrate storage device STR2, a plurality of folding portions RC are formed so that the substrate S is arranged in triplicate in the Z direction. The folded portion RC has one of a plurality of rollers R21 to R44.

Of the rollers R21 to R44, eleven rollers are arranged on the -Z side with respect to the central portion in the Z direction of the containing chamber RM. The four rollers R21, R23, R25 and R27, the four rollers R29, R31, R33 and R35 and the three rollers R37, R39 and R41 are arranged in a row in the X direction .

Of the rollers R21 to R44, thirteen rollers are arranged on the + Z side with respect to the central portion in the Z direction of the containing chamber RM. The three rollers R22, R24 and R26, the four rollers R28, R30, R32 and R34 and the four rollers R36, R38, R40 and R42 are arranged in a row in the X direction . Further, rollers R43 and R44 are provided along the inner wall on the + Z side of the container CT.

As described above, in the present embodiment, the rows of rollers arranged in the X direction are arranged in six rows in the Z direction. The rows of the six rows of rollers are provided in three rows from the Z-direction central portion of the containing chamber RM to the + Z side and three rows to the -Z side. The diameter of the roller is gradually reduced from the roller row on the end side in the Z direction to the roller row on the center side of the accommodating chamber RM.

The substrate S is carried into the containing chamber RM from the substrate inlet EN via the carrying roller Rn and then folded in the + Z direction by the roller R21. The downstream side of the roller R21 of the substrate S is folded in the -Z direction by the roller R22. The substrate S is folded alternately in the + Z direction and the -Z direction in the rollers R23 to R27.

The downstream side of the roller R27 among the substrates S is folded by the direction switching roller R28 and the direction is switched. The downstream side of the roller R28 among the substrates S is alternately folded in the + Z direction and the -Z direction on the rollers R29 to R34, folded by the direction switching roller R35, and the direction is switched again.

The downstream side of the roller R35 among the substrates S is alternately folded in the + Z direction and the -Z direction by the rollers R36 to R41 and folded by the direction switching rollers R42 and R43 to change the direction. As described above, the substrates S are arranged to overlap in the X direction. The downstream side of the roller R43 of the substrate S is directed to the substrate exit port EX and is caught by the roller R44 and then taken out from the substrate exit port EX via the takeout roller Rx .

The portion of the substrate S held between the rollers R21 to R42, for example, between the rollers R21 and R22 is parallel to the YZ plane. As described above, the positions of the rollers R21 to R42 in the X direction are adjusted so that the portion of the substrate S across the central portion in the Z direction of the chamber RM is parallel to the YZ plane.

In the present embodiment, the substrate S is folded so that the second faces Sb of the substrate S face each other in the roller R26. A portion of the substrate S folded by the roller R26 toward the downstream side of the roller R26 is referred to as a first portion S21. A portion of the substrate S folded in the direction opposite to the first portion S21 by the roller R26 is referred to as a fourth portion S24.

In the roller R27, the first portion S21 is folded so that the first surfaces Sa of the first portion S21 face each other. A portion of the substrate S folded by the roller R27 toward the downstream side of the roller R27 is referred to as a second portion S22.

In the roller R28 and the roller R29, the second portion S22 is changed in direction so as to face the roller R26. The portion of the substrate S which has been redirected by the roller R28 and the roller R29 is referred to as a third portion S23.

In the roller R30, the third portion S23 is folded along the first surface Sa of the fourth portion S24. At the same time, for example, the third portion S23 and the fourth portion S24 are moved in the reverse direction while the substrate S is moving from the substrate inlet EN to the substrate exit EX, for example, And the third portion S23 is folded by the roller R30.

Since the substrate S is folded as described above from the roller R26 to the roller R30, the portion of the substrate S that is caught by the rollers R21 to R27 and the portion of the substrate S on which the rollers R29 to R35 Are overlapped with each other in the Z direction.

In the roller R33, the substrate S is folded so that the second surfaces Sb of the substrates S face each other. A portion of the substrate S folded toward the downstream side of the roller R33 by the roller R33 is referred to as a first portion T21. A portion of the substrate S folded in the direction opposite to the first portion T21 by the roller R33 is referred to as a fourth portion T24.

In the roller R34, the first portion T21 is folded so that the first surfaces Sa of the first portion T21 face each other. A portion of the substrate S which is folded toward the downstream side of the roller R34 by the roller R34 is referred to as a second portion T22.

In the rollers R35 and R36, the second portion T22 is changed in direction so as to face the roller R33. A portion of the substrate S which is redirected by the roller R35 and the roller R36 is referred to as a third portion T23.

In the roller R37, the third portion T23 is folded along the first surface Sa of the fourth portion T24. At the same time, for example, the third portion T23 and the fourth portion T24 are moved in the reverse direction while the substrate S is moving from the substrate inlet EN to the substrate exit EX, for example, And the third portion T23 is folded by the roller R37.

The portion of the substrate S caught by the rollers R29 to R35 and the portion of the substrate S on which the rollers R36 to R42 Are overlapped with each other in the Z direction.

In the present embodiment, since the diameter of the roller is gradually reduced from the roller row on the end face side in the Z direction to the roller row on the center side side of the containing chamber RM, the overlapping portions in the Z direction among the substrates S It is not contacted.

The method of determining the diameter of the roller having a small diameter is as described in the first embodiment.

As described above, according to the present embodiment, since the substrates S are accommodated in the accommodating chamber RM in such a state that the substrates S are folded in a wavy fashion so as to overlap in the X direction and are triple in the Z direction, The substrate S can be efficiently accommodated in a limited space of the substrate S. Thereby, the substrate storage apparatus STR2 having a high storage capacity of the substrate S is obtained.

[Sixth Embodiment]

Next, a sixth embodiment of the present invention will be described.

20 is a view showing the structure of the substrate storage device STR3 according to the present embodiment. This embodiment is different from the fifth embodiment in that a substrate inlet EN and a substrate exit EX are provided on the other side of the container CT. Incidentally, the configuration of the folded-back portion RC differs from that of the fifth embodiment. Other configurations are the same as those of the fifth embodiment. In this embodiment, an XYZ orthogonal coordinate system is used as in the above-described embodiment.

As shown in Fig. 20, the substrate inlet EN is provided in the wall portion CTa on the -X side of the container CT. On the other hand, the substrate transfer port EX is provided in the wall portion CTb on the + X side in the container CT. Thus, the substrate inlet EN and the substrate outlet EX are provided in the other wall portion in the X direction in the container CT.

The arrangement of the rollers R21 to R42 is the same as that of the fifth embodiment. Therefore, the positional relationship between the first portion S21 to the fourth portion S24 and the first portion T21 to the fourth portion T24 of the substrate S is also the same as that of the fifth embodiment. In the present embodiment, the rollers R43 and R44 in the fifth embodiment are not provided, so that the space of the containing chamber RM can be reduced correspondingly.

Since the substrate S is not folded by the roller R43, the positional relationship between the first surface Sa and the second surface Sb of the substrate S carried in from the substrate entry opening EN, The positional relationship between the first surface Sa and the second surface Sb of the substrate S taken out from the substrate transfer port EX can be made identical. More specifically, the first surface Sa of the substrate S faces the + Z side, and the second surface Sb faces the -Z side, even at the substrate inlet EN and the substrate exit EX. .

The technical scope of the present invention is not limited to the above-described embodiment, but can be appropriately changed within the scope not deviating from the gist of the present invention.

For example, in the fifth embodiment and the sixth embodiment, the portion of the substrate S across the center in the Z direction of the chamber RM is parallel to the YZ plane, The configuration in which the position in the X direction is adjusted has been described as an example, but the present invention is not limited to this.

The diameter of the rollers R36, R38, R40 and R42 arranged in the X direction, the rollers R28, R30, R32 and R34 arranged in the X direction from the end portion side in the Z direction to the center portion side in the accommodating chamber RM, The diameter of the rollers R22, R24 and R26 arranged in the X direction is gradually decreased and the rollers R37 and R39 arranged in the X direction from the center of the chamber RM toward the bottom, The diameter of the rollers R35, R33, R31 and R29 disposed in the X direction and the diameter of the rollers R21, R23, R25, and R27 arranged in the X direction are increased stepwise The rollers R21 to R42 may be arranged such that the portion of the substrate S which hangs over the central portion in the Z direction of the containing chamber RM is inclined with respect to the YZ plane as shown in Fig. In this case, the distance in the X direction of the roller is smaller than that in the fifth embodiment and the sixth embodiment. Therefore, the container CT can be made compact in the X direction.

In Fig. 21, the limitation of the diameter of the rollers R24 and R37 of the minimum diameter is as described in the first embodiment. The same applies to the restriction of the diameter of each of the plurality of rollers having the minimum diameter in Fig.

21, the substrate S between the rollers R23, R33, and R37 and the rollers R24, R32, and R38 is exemplarily described, but the same description can be applied to other parts. In the fourth embodiment as well, the rows of rollers R22, R24, and R26 on the center side from the rows of rollers R36, R38, R40, and R42 on the end side in the Z- Since the diameter is becoming smaller step by step, the same explanation is possible.

In the respective constitutions of the above embodiment, after the substrate S has been carried in from the substrate inlet EN, a guide S for guiding the substrate S so that the substrate S is caught by the rollers R21 to R42 But may be appropriately provided in the additional accommodating chamber RM. As a result, the substrate S can be surely held on the rollers R21 to R42.

As a modification of the embodiment, for example, a roller shown in Fig. 22 can be arranged. Three rollers R43, R28 and R42, three rollers R27, R29 and R41, three rollers R26, R30 and R40, three rollers R25, R31, R39 extending in the Y direction with respect to each of the three rollers R24, R32 and R38, three rollers R23, R33 and R37 and three rollers R22, R34 and R36, Is connected to the connecting member 210 (the connecting member 210 is movable in the Z direction). That is, the three rollers R43, R28 and R42 are mounted on the connecting member 210a, the three rollers R27, R29 and R41 are mounted on the connecting member 210b and the three rollers R26, R30, R40 are mounted on the connecting member 210c and the three rollers R25, R31 and R39 are mounted on the connecting member 210d and the three rollers R24, R32 and R38 are mounted on the connecting member 210e The three rollers R23, R33 and R37 are mounted on the connecting member 210f and the three rollers R22, R34 and R36 are mounted on the connecting member 210g. The connecting members 210a to 210g are arranged so that two of the three rollers are arranged in the X direction and the remaining one roller is alternately projected on the + Z side and the -Z side. That is, the rollers R42, R29, R40, R31, R38, R33 and R36 are arranged side by side in the X direction and the rollers R28, R27, R30, R25, R32, R23 and R34 are arranged side by side in the X direction. Further, the rollers R41, R39 and R37 are evacuated to the + Z side, and the rollers R43, R26, R24 and R22 are evacuated to the -Z side. A fixing roller 220A is disposed on the + X side of the rows of the rollers R28, R27, R30, R25, R32, R23 and R34 among the two rows of rollers arranged in the X direction, and the rollers R42, R29, R40, , R33, and R36, a fixing roller 220B is disposed on the -X side of the row.

In this state, as shown in Fig. 22, first, the substrate S is linearly conveyed in the + X direction from the conveying roller Rn, and between the roller R34 and the roller R22, between the roller R32 and the roller R32, Side fixing roller 220A so as to escape between the roller R30 and the roller R24 and between the roller R30 and the roller R26 and between the roller R28 and the roller 43, ) In the -X direction. Next, between the roller R28 and the roller 42, between the roller R29 and the roller R27, between the roller R40 and the roller R30, between the roller R31 and the roller R25 To the fixing roller 220B on the -X side so as to escape between the roller R38 and the roller R32, between the roller R33 and the roller R32, and between the roller R36 and the roller R34 And is folded in the + X direction by the fixing roller 220B. And thereafter reaches the take-out roller Rx so as to escape between the roller R37 and the roller R33, between the roller R39 and the roller R31, and between the roller R41 and the roller R29 .

Next, as shown in Fig. 23, the connecting members 210a, 210c, 210e and 210g are moved to the + Z side and the connecting members 210b, 210d and 210f are moved to the -Z side. By this operation, the substrate S is engaged with each roller. With this configuration, the substrate S can be fastened to each roller in a short time.

In the above-described embodiment, the structure of each roller has the shaft portion Ra and the outer peripheral portion Rb, and the outer peripheral portion Rb has a cylindrical shape. However, the present invention is not limited thereto .

24A and 24B, a roller 233 having a shaft portion 231 and a plurality of flange portions 232 is provided as a roller R22 of a folding portion for folding the sheet substrate FB May be used. In this case, the shaft portion 231 also serves as a connecting portion for connecting the plurality of flange portions 232 together. 24A and 24B show the rollers R22, R32, and R36 of the fifth and sixth embodiments, respectively. However, other rollers may have the same configuration. The rollers of the fourth embodiment may have the same configuration.

24B, the plurality of flange portions 232 are arranged side by side in the Y direction at intervals. The distance between the flange portions 232 connected to the central portion in the Y direction of the shaft portion 231 is wider than the distance between the flange portions 232 connected to the Y direction end portion of the shaft portion 231. [ The dimension (thickness) in the Y direction of the flange portion 232 connected to the central portion in the Y direction of the shaft portion 231 is greater than the thickness of the flange portion 232 connected to the Y direction end portion of the shaft portion 231 have. For example, the flange portions 232 may be arranged at equal pitches in the Y direction, and even if the flange portions 232 are formed to have the same thickness, Does not matter.

For example, as shown in Figs. 25 and 26, even if the shaft portion 231 and the two disk rollers 233 having a plurality of flange portions 232 are arranged in combination with the portion where the diameter of the folded portion increases, Okay. 26, two disk rollers 233 are displaced in the Y direction and two disk rollers 233 are provided between the flange portions 232 of one of the two disk rollers 233. In this case, The flange portion 232 of the other side may be pushed in. In this case, the diameter of the folded portion can be set to a desired value by adjusting the spacing of the two disk rollers 233 in the X direction. Therefore, the dimension in the Z direction can be suppressed from increasing.

Further, in the sheet substrate FB, a disk roller 233 having the same configuration can be used for all the folded portions having different diameters. In addition, since the interval P between the shaft portions 231 can be made smaller than the diameter of the flange portion 232, the width of the design can be widened.

25 shows a configuration in which three pairs of sets of disc rollers 233 are adjacent to each other in the Z direction. However, the present invention is not limited to this. For example, in the case where the disc roller 233 is in the Z The same description can be applied to a configuration adjacent to a combination or a configuration adjacent to four or more sets. In the structure shown in Fig. 25, the intervals of the disk rollers 233 adjacent to each other in the Z direction are the same, but they may be different from each other.

Even in this case, the minimum diameter of the flange portion 232 is set within a range in which the sheet substrate FB does not undergo plastic deformation even when folded into a U-shape.

The shaft portion 231 and the flange portion 232 may be fixed to the disk roller 233 shown in Figs. 24A, 24B, 25 and 26, May be independently rotatable.

27 and 28, the fluid pad 240 may be used as an air turn bar. Fig. 28 is a view showing a configuration along a section A-A in Fig. 27. Fig. 27 and 28, a pair of rollers 244 are provided at positions to support both ends of the substrate S in the Y direction. The roller 244 has an outer peripheral surface 244a formed into a cylindrical shape. A pair of rollers 244 are rotatably supported on the side wall 245 via a shaft 242. [

Between the pair of rollers 244, a plurality of fluid pads 240 are provided. The plurality of fluid pads 240 are arranged at intervals, for example, in the Y direction. The fluid pad 240 is supported by the shaft 242 via a bearing 241. [ The fluid pad 240 has a pad surface 240a formed in an arc shape. The diameter of the pad surface 240a is set to correspond to the diameter of the outer peripheral surface 244a of the roller 244. [ The positional relationship between the pad surface 240a and the outer peripheral surface 244a is fixed. The fluid pad 240 is configured such that it does not substantially rotate about the shaft 242 by the engagement pin 246 fixed to the side wall 245.

On the pad surface 240a of the fluid pad 240, a groove portion 240b is formed. The groove portion 240b is connected to the gas supply portion 248 through a flow path 247 provided in the fluid pad 240 and a tube 249 connected to the flow path 247. [ The gas supply unit 248 can supply a pressurized gas. The gas from the gas supply part 248 is supplied to the groove part 240b through the flow path 247 and is ejected onto the pad surface 240a.

27, both ends in the Y direction of the substrate S are held in frictional contact with the outer peripheral surface 244a of the roller 244. As shown in Fig. When the roller 244 rotates in this state, the rotation of the roller 244 is transmitted to the substrate S through the outer peripheral surface 244a, and the substrate S is moved. When the substrate S is supplied with the gas from the gas supply unit 248 while the substrate S is caught by the roller 244, the fluid layer 250 is formed between the pad S of the substrate S and the pad surface 240a . The diameter defining the pad surface 240a of the fluid pad 240 is substantially the same as the diameter of the roller 244 but is slightly smaller than the diameter of the roller 244 in consideration of the thickness (several mu m to several tens of mu m) It may be small.

The length of the fluid layer 250 formed by the fluid pad 240 in the circumferential direction (rotational direction of the shaft 242) is about the same as the circumferential length of the roller 244 in frictional contact with the substrate S . In the example shown in Fig. 27, it is set to be approximately 180 degrees.

The roller 244 may be constituted as a follower roller which freely rotates by friction contact with the substrate S when the substrate S is moved with the desired tension applied to the substrate S Or may be a structure as a drive roller to which a drive mechanism such as a motor not shown in the shaft 242 is connected.

29, it is also possible to arrange a plurality of configurations of the fluid pads 240 and the rollers 244 in the X direction to adjust the diameter of the folded portion of the sheet substrate FB . 29, the entire area of the pad surface 240a in the circumferential direction of the fluid pad 240 is not opposed to the substrate S, but a specific four minutes in the circumferential direction Only one region of the substrate S faces the substrate S. For this purpose, the groove 240b is formed in the pad surface 240a only in the region corresponding to 1/4 of the pad surface 240a. Thus, the range of the fluid layer 250 in the circumferential direction can be adjusted.

Alternatively, for example, as shown in Fig. 30, the air bearing mechanism 260 may be used. The air bearing mechanism 260 includes a pair of guide members 261, a holding member 262 for holding the pair of guide members 261, (263).

The guide member 261 is formed of, for example, a porous member made of ceramics. The surface (guide surface) 261a of the guide member 261 is formed as a part (about 90 degrees) of the cylindrical surface. On the guide surface 261a, for example, air from the air supply unit 263 is jetted. The holding member 262 holds the pair of guide members 261. In the holding member 262, a pair of guide members 261 facing the guide surface 261a are held on the + X side and the -X side so as to be spaced apart in the X direction.

31 shows a configuration in which the air bearing mechanism 260 is used in the folded portion. 31, an air bearing mechanism 260 is used adjacent to the Z direction, but the size of the holding member 262 in the X direction differs for each folded portion. More specifically, the size of the holding member 262A of the air bearing mechanism 260 disposed at the most + Z side is the largest in the X direction, and the holding member 262B on the -Z side with respect to the holding member 262A, The member 262C and the holding member 262D are formed so that the dimension in the X direction gradually decreases in this order.

Thus, by adjusting the dimension of the holding member 262, the diameter at the folded portion can be changed. In addition, since the dimension in the Z direction is approximately half that in the case of using a roller, a compact structure can be obtained. Therefore, a large number of folded portions can be provided in the Z direction, and the size of the container in the Z direction can be reduced.

In the above-described embodiment, when the roller is used as the folding portion, the configuration in which the diameter of the roller in the Y direction is made constant is described as an example, but the present invention is not limited to this. For example, as shown in Fig. 32A, the outer diameter portion Rb may have a larger diameter as it reaches from the end portion in the Y direction to the central portion. As shown in Fig. 32 (B), the diameter may be reduced as the outer peripheral portion Rb reaches the central portion from the Y-direction end portion.

In the above embodiment, in the configuration using the roller as the folding portion, the configuration in which the diameter of the roller is gradually decreased from the roller row on the end side in the Z direction to the roller row on the center side of the accommodating chamber RM But the present invention is not limited to this. For example, as shown in Fig. 33, all the rollers may have the same diameter.

In this case, the pitch L3 in the X direction of the adjacent roller assemblies in the Z direction may be made larger than the corresponding pitch in the above embodiment. It is also preferable that the roller jaws adjacent in the Z direction are arranged at a predetermined distance L4 in the X direction. Thus, the present invention can be applied even when the diameters of the rollers are all the same.

CTR ... Board cartridge FB ... Sheet substrate
SYS ... Substrate processing system PR ... Substrate processing apparatus
CONT ... Control device CN ... Connection
Fh ... Tip 1 ... Receiving portion
2 … Inlets 3, 3A, 3B ... Exit
4 … Information section 5 ... The control unit
S ... Substrate Sa ... The first side
Sb ... The second surfaces S1, S21, T1, T21 ... The first part
S2, S22, T2, T22 ... The second part
S3, S23, T3, T23 ... Third part
S4, S24, T4, T24 ... Fourth part
CT ... Container CTa, CTb ... Wall
FL ... Floor surface RM ... Reception room
EN ... Substrate entrance EX ... Substrate exit port
Rn ... Carrying roller Rx ... Take-out roller
R1 to R15, R21 to R44, 244 ... roller
Ra ... Shaft Rb ... Outer periphery
231 ... Shaft 232 ... Flange portion
233 ... Disk roller 240 ... Fluid pad
240a ... The pad surface 240b ... Groove
248 ... The gas supply unit 250 ... Fluid layer
260 ... Air Bearing Mechanism 261 ... The guide member
261a ... Guide surface 262 ... Retaining member
263 ... Air supply units STR, STR2, STR3 ... Substrate storage device

Claims (7)

1. A substrate cartridge connectable to a processing apparatus for performing a predetermined process on a band-shaped sheet substrate having flexibility,
An accommodating portion having a space surrounded by a plurality of wall surfaces, the accommodating portion foldably holding the sheet substrate in the longitudinal direction at a plurality of times,
An exit port provided on a first wall surface of a plurality of wall surfaces of the accommodating portion opposed to the processing apparatus and configured to carry the sheet substrate along the longitudinal direction toward the processing apparatus,
An inlet port provided on the first wall surface of the accommodating portion for introducing the sheet substrate along the longitudinal direction in order to retrieve the sheet substrate from the processing apparatus,
A plurality of first guide members provided in the accommodating portion and spaced apart in the transport direction to hold the surface side of the sheet substrate,
A plurality of second guide members which are provided in the accommodating portion and are disposed between the plurality of first guide members at intervals in the transport direction so as to hold the back side of the sheet substrate,
And a third guide provided on a part of the guide path of the sheet substrate so as to guide the leading end of the sheet substrate, which is carried in through the inlet port, between the first guide member and the second guide member and to guide the sheet, &Lt; / RTI &gt;
The method according to claim 1,
Further comprising a moving mechanism for relatively moving the plurality of first guide members and the plurality of second guide members so that the sheet substrate is folded alternately by the first guide member and the second guide member Respectively.
The method of claim 2,
Wherein the third guide member is provided in the space of the accommodating portion so that the leading end portion of the sheet substrate that is carried into the accommodating portion from the refill opening is guided to the refill outlet, And a movable guide plate movable between a position along a part of the sheet substrate that becomes the guide path between the guide path and a position retracted from the guide path.
The method of claim 3,
Wherein the transfer port and the transfer port are disposed on the same wall surface or another wall surface of the plurality of wall surfaces of the accommodating portion.
The method according to any one of claims 1 to 4,
Wherein the first guide member or the second guide member is composed of a roller that supports the sheet substrate to bend in the longitudinal direction by contact.
The method according to any one of claims 1 to 4,
Wherein the first guide member or the second guide member comprises a guide member that sprays gas from a guide surface curved in a cylindrical shape along the longitudinal direction of the sheet substrate to support the sheet substrate by an air bearing mechanism Substrate cartridge.
The method according to any one of claims 1 to 4,
Wherein the first guide member or the second guide member includes a pair of rollers that are in contact with both ends in the width direction perpendicular to the longitudinal direction of the sheet substrate and a pair of rollers disposed between the pair of rollers, And a fluid pad for ejecting a gas from the fluid layer to support the sheet substrate by a fluid layer.
KR1020187008827A 2010-04-09 2011-04-11 Substrate cartridge, substrate storage device, and substrate processing system KR101892424B1 (en)

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US61/322,360 2010-04-09
US42320710P true 2010-12-15 2010-12-15
US61/423,207 2010-12-15
PCT/JP2011/059006 WO2011126133A1 (en) 2010-04-09 2011-04-11 Substrate cartridge, substrate storage device, and substrate processing system

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JPWO2011126133A1 (en) 2013-07-11
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CN102834340A (en) 2012-12-19
CN102834340B (en) 2015-09-16

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