CN102808995A - 闸门装置 - Google Patents
闸门装置 Download PDFInfo
- Publication number
- CN102808995A CN102808995A CN2012102448244A CN201210244824A CN102808995A CN 102808995 A CN102808995 A CN 102808995A CN 2012102448244 A CN2012102448244 A CN 2012102448244A CN 201210244824 A CN201210244824 A CN 201210244824A CN 102808995 A CN102808995 A CN 102808995A
- Authority
- CN
- China
- Prior art keywords
- described device
- magnet
- gate opening
- locking mechanism
- flapper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2007—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member specially adapted operating means therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2028—Details of bearings for the axis of rotation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
- F16K1/2057—Special features or arrangements of the sealing the sealing being arranged on the valve seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
- F16K31/082—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet using a electromagnet and a permanent magnet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
- F16K31/084—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet the magnet being used only as a holding element to maintain the valve in a specific position, e.g. check valves
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7069—With lock or seal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T70/00—Locks
- Y10T70/50—Special application
- Y10T70/5611—For control and machine elements
- Y10T70/5615—Valve
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Sliding Valves (AREA)
- Lift Valve (AREA)
- Details Of Valves (AREA)
- Gasket Seals (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200410027752 DE102004027752A1 (de) | 2004-06-08 | 2004-06-08 | Schleusenvorrichtung |
DE102004027752.4 | 2004-06-08 | ||
CNA2005800187144A CN1973157A (zh) | 2004-06-08 | 2005-05-31 | 闸门装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2005800187144A Division CN1973157A (zh) | 2004-06-08 | 2005-05-31 | 闸门装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102808995A true CN102808995A (zh) | 2012-12-05 |
CN102808995B CN102808995B (zh) | 2015-07-22 |
Family
ID=34971392
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2005800187144A Pending CN1973157A (zh) | 2004-06-08 | 2005-05-31 | 闸门装置 |
CN201210244824.4A Active CN102808995B (zh) | 2004-06-08 | 2005-05-31 | 闸门装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2005800187144A Pending CN1973157A (zh) | 2004-06-08 | 2005-05-31 | 闸门装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8678028B2 (zh) |
EP (1) | EP1753990B1 (zh) |
JP (1) | JP5038895B2 (zh) |
KR (1) | KR101183566B1 (zh) |
CN (2) | CN1973157A (zh) |
DE (1) | DE102004027752A1 (zh) |
WO (1) | WO2005121621A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109519549A (zh) * | 2017-09-20 | 2019-03-26 | 科佩西西班牙集团有限公司 | 电磁气体阀、气体调节阀以及燃气烹饪用具 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110229660A1 (en) * | 2010-03-22 | 2011-09-22 | Timothy Ray Reynolds | Ion beam assisted deposition of ophthalmic lens coatings |
DE102014008170A1 (de) | 2014-06-10 | 2015-12-17 | Mecatronix Ag | Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer |
DE102015016081A1 (de) | 2015-12-10 | 2017-06-14 | Applied Materials, Inc. (N.D.Ges.D. Staates Delaware) | Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer |
US10711901B2 (en) * | 2016-10-10 | 2020-07-14 | Waleed Sami Haddad | Magnetic self-centering valve |
JP6648280B2 (ja) * | 2017-06-08 | 2020-02-14 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 閉鎖装置、閉鎖装置付き真空システム、及び閉鎖装置の操作方法 |
DK180249B1 (da) * | 2018-11-14 | 2020-09-15 | Danhydra As | Skydeventil |
DE102018129960A1 (de) * | 2018-11-27 | 2020-05-28 | Vat Holding Ag | Schleusenvorrichtung, Schleusensystem und Verfahren zu einem Betrieb einer Schleusenvorrichtung |
JP2022543570A (ja) * | 2019-07-31 | 2022-10-13 | アプライド マテリアルズ インコーポレイテッド | 分離バルブ |
KR102638692B1 (ko) * | 2021-10-15 | 2024-02-20 | 에스브이에스 주식회사 | 회전 코팅 장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3665658A (en) * | 1970-12-09 | 1972-05-30 | David W Warwick | Device and method for sharpening rotary mower blades |
DE3724465A1 (de) * | 1986-07-23 | 1988-01-28 | Boc Group Inc | Absperrschieber mit magnetverschluss zur verwendung bei vakuumgeraet |
JP2001004052A (ja) * | 1999-06-21 | 2001-01-09 | Pacific Ind Co Ltd | 電磁パイロット式四方弁 |
WO2001023741A1 (de) * | 1999-09-30 | 2001-04-05 | Robert Bosch Gmbh | Ventil zum steuern von flüssigkeiten |
US20020017324A1 (en) * | 2000-08-11 | 2002-02-14 | Tetsuya Hisamura | Magnet valve |
CN1346031A (zh) * | 2000-09-18 | 2002-04-24 | 速睦喜股份有限公司 | 真空排气阀 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2556225A (en) * | 1946-03-21 | 1951-06-12 | Joseph J Day | Magnetic valve |
US2952802A (en) * | 1957-12-10 | 1960-09-13 | Michelson Carlyle | Electromagnetic release mechanism |
GB1064679A (en) * | 1962-12-03 | 1967-04-05 | Ass Eng Ltd | Fuel injectors for internal combustion engines |
US3550717A (en) * | 1968-09-09 | 1970-12-29 | Gulf Oil Corp | Automotive safety devices |
US3665958A (en) | 1968-09-16 | 1972-05-30 | Gpe Controls Inc | Vent closure device |
JPS53137334U (zh) * | 1977-04-05 | 1978-10-30 | ||
JPS5824623B2 (ja) | 1977-05-09 | 1983-05-23 | 日産自動車株式会社 | 燃料供給装置 |
JPS6280378A (ja) * | 1985-10-02 | 1987-04-13 | Kanbishi Denki Seizo Kk | 流体弁装置 |
JPS62283282A (ja) | 1986-06-02 | 1987-12-09 | Nippon Kokan Kk <Nkk> | 真空装置の仕切弁 |
JPH01100965U (zh) | 1987-12-25 | 1989-07-06 | ||
JP2714833B2 (ja) | 1988-12-18 | 1998-02-16 | 日本真空技術株式会社 | 仕込・取出室 |
US5057841A (en) | 1989-07-07 | 1991-10-15 | U.S. Philips Corporation | Analog-to-digital converter |
JPH0346414U (zh) * | 1989-09-11 | 1991-04-30 | ||
DE4203473A1 (de) * | 1992-02-07 | 1993-08-12 | Leybold Ag | Drehschleuse zum ein- und/oder ausbringen eines substrats aus der einen in eine benachbarte behandlungskammer |
US5379984A (en) * | 1994-01-11 | 1995-01-10 | Intevac, Inc. | Gate valve for vacuum processing system |
DE19601541A1 (de) * | 1995-01-27 | 1996-08-01 | Seiko Seiki Kk | In einer Vakuumumgebung einsetzbares Vertikaltransfersystem sowie dazugehöriges Absperrventilsystem |
JP2897178B2 (ja) | 1997-05-30 | 1999-05-31 | 株式会社竹村製作所 | 逆止弁 |
JPH11173443A (ja) | 1997-12-11 | 1999-06-29 | Kubota Corp | 逆止弁 |
JPH11193872A (ja) | 1998-01-05 | 1999-07-21 | Kubota Corp | 逆止弁 |
US6263542B1 (en) * | 1999-06-22 | 2001-07-24 | Lam Research Corporation | Tolerance resistant and vacuum compliant door hinge with open-assist feature |
NL1015690C2 (nl) * | 2000-07-12 | 2002-01-15 | Otb Group Bv | Sluis voor vacu³mkamer. |
JP4027653B2 (ja) | 2001-12-03 | 2007-12-26 | 愛知時計電機株式会社 | ガスメータ用の開閉弁 |
-
2004
- 2004-06-08 DE DE200410027752 patent/DE102004027752A1/de not_active Ceased
-
2005
- 2005-05-31 CN CNA2005800187144A patent/CN1973157A/zh active Pending
- 2005-05-31 KR KR1020077000352A patent/KR101183566B1/ko active IP Right Grant
- 2005-05-31 CN CN201210244824.4A patent/CN102808995B/zh active Active
- 2005-05-31 EP EP20050756092 patent/EP1753990B1/de not_active Not-in-force
- 2005-05-31 JP JP2007526242A patent/JP5038895B2/ja active Active
- 2005-05-31 US US11/596,787 patent/US8678028B2/en active Active
- 2005-05-31 WO PCT/EP2005/005825 patent/WO2005121621A1/de active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3665658A (en) * | 1970-12-09 | 1972-05-30 | David W Warwick | Device and method for sharpening rotary mower blades |
DE3724465A1 (de) * | 1986-07-23 | 1988-01-28 | Boc Group Inc | Absperrschieber mit magnetverschluss zur verwendung bei vakuumgeraet |
JP2001004052A (ja) * | 1999-06-21 | 2001-01-09 | Pacific Ind Co Ltd | 電磁パイロット式四方弁 |
WO2001023741A1 (de) * | 1999-09-30 | 2001-04-05 | Robert Bosch Gmbh | Ventil zum steuern von flüssigkeiten |
US20020017324A1 (en) * | 2000-08-11 | 2002-02-14 | Tetsuya Hisamura | Magnet valve |
CN1346031A (zh) * | 2000-09-18 | 2002-04-24 | 速睦喜股份有限公司 | 真空排气阀 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109519549A (zh) * | 2017-09-20 | 2019-03-26 | 科佩西西班牙集团有限公司 | 电磁气体阀、气体调节阀以及燃气烹饪用具 |
CN109519549B (zh) * | 2017-09-20 | 2022-03-08 | 科佩西西班牙集团有限公司 | 电磁气体阀、气体调节阀以及燃气烹饪用具 |
Also Published As
Publication number | Publication date |
---|---|
EP1753990B1 (de) | 2014-08-20 |
US8678028B2 (en) | 2014-03-25 |
KR20070030267A (ko) | 2007-03-15 |
EP1753990A1 (de) | 2007-02-21 |
CN102808995B (zh) | 2015-07-22 |
JP2008501913A (ja) | 2008-01-24 |
JP5038895B2 (ja) | 2012-10-03 |
CN1973157A (zh) | 2007-05-30 |
WO2005121621A1 (de) | 2005-12-22 |
DE102004027752A1 (de) | 2006-01-05 |
US20080271501A1 (en) | 2008-11-06 |
KR101183566B1 (ko) | 2012-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: MECATRONIX AG Free format text: FORMER OWNER: LEYBOLD OPTICS GMBH Effective date: 20150603 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150603 Address after: Darmstadt Applicant after: Mai Kachuan Knicks joint-stock company Address before: In Germany Applicant before: Leybold Optics GmbH |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170424 Address after: American California Patentee after: Applied Materials Inc. Address before: Darmstadt Patentee before: Mai Kachuan Knicks joint-stock company |