CN102753493A - 用于生产石英玻璃坩埚的方法 - Google Patents

用于生产石英玻璃坩埚的方法 Download PDF

Info

Publication number
CN102753493A
CN102753493A CN2011800098057A CN201180009805A CN102753493A CN 102753493 A CN102753493 A CN 102753493A CN 2011800098057 A CN2011800098057 A CN 2011800098057A CN 201180009805 A CN201180009805 A CN 201180009805A CN 102753493 A CN102753493 A CN 102753493A
Authority
CN
China
Prior art keywords
quartz glass
mold
crucible
pellets
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011800098057A
Other languages
English (en)
Chinese (zh)
Inventor
W.莱曼
T.凯泽
M.许纳曼
C.纳萨罗夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Original Assignee
Heraeus Quarzglas GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas GmbH and Co KG filed Critical Heraeus Quarzglas GmbH and Co KG
Publication of CN102753493A publication Critical patent/CN102753493A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/09Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/06Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C03B19/066Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CN2011800098057A 2010-02-16 2011-02-15 用于生产石英玻璃坩埚的方法 Pending CN102753493A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010008162.0 2010-02-16
DE102010008162.0A DE102010008162B4 (de) 2010-02-16 2010-02-16 Verfahren für die Herstellung von Quarzglas für einen Quarzglastiegel
PCT/EP2011/052177 WO2011101327A1 (de) 2010-02-16 2011-02-15 Verfahren zur herstellung eines quarzglastiegels

Publications (1)

Publication Number Publication Date
CN102753493A true CN102753493A (zh) 2012-10-24

Family

ID=43857631

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011800098057A Pending CN102753493A (zh) 2010-02-16 2011-02-15 用于生产石英玻璃坩埚的方法

Country Status (4)

Country Link
JP (1) JP2013519624A (https=)
CN (1) CN102753493A (https=)
DE (1) DE102010008162B4 (https=)
WO (1) WO2011101327A1 (https=)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108779015A (zh) * 2015-12-18 2018-11-09 贺利氏石英玻璃有限两合公司 从二氧化硅粉末制备石英玻璃体
CN111936678A (zh) * 2018-04-06 2020-11-13 信越石英株式会社 石英玻璃坩埚及其制造方法
US11053152B2 (en) 2015-12-18 2021-07-06 Heraeus Quarzglas Gmbh & Co. Kg Spray granulation of silicon dioxide in the preparation of quartz glass
TWI736724B (zh) * 2016-12-23 2021-08-21 德商何瑞斯廓格拉斯公司 製造不透明石英玻璃的方法及由不透明石英玻璃製得的坯體
CN113423669A (zh) * 2019-01-11 2021-09-21 胜高股份有限公司 二氧化硅玻璃坩埚的制造装置及制造方法
CN113415978A (zh) * 2021-07-03 2021-09-21 四川神光石英科技有限公司 一种耐辐照石英玻璃的制备方法及制备用坩埚和料架
US11236002B2 (en) 2015-12-18 2022-02-01 Heraeus Quarzglas Gmbh & Co. Kg Preparation of an opaque quartz glass body
US11299417B2 (en) 2015-12-18 2022-04-12 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body in a melting crucible of refractory metal
US11339076B2 (en) 2015-12-18 2022-05-24 Heraeus Quarzglas Gmbh & Co. Kg Preparation of carbon-doped silicon dioxide granulate as an intermediate in the preparation of quartz glass
US11492285B2 (en) 2015-12-18 2022-11-08 Heraeus Quarzglas Gmbh & Co. Kg Preparation of quartz glass bodies from silicon dioxide granulate
US11492282B2 (en) 2015-12-18 2022-11-08 Heraeus Quarzglas Gmbh & Co. Kg Preparation of quartz glass bodies with dew point monitoring in the melting oven
US11708290B2 (en) 2015-12-18 2023-07-25 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body in a multi-chamber oven
US11952303B2 (en) 2015-12-18 2024-04-09 Heraeus Quarzglas Gmbh & Co. Kg Increase in silicon content in the preparation of quartz glass

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011113130B3 (de) * 2011-09-14 2013-01-24 Heraeus Quarzglas Gmbh & Co. Kg Solarstrahlungsempfänger mit einem Eintrittsfenster aus Quarzglas
JP6025278B2 (ja) 2013-05-31 2016-11-16 株式会社Sumco シリコン単結晶引き上げ用シリカガラスルツボ及びその製造方法
JP6208080B2 (ja) * 2014-05-22 2017-10-04 クアーズテック株式会社 石英ガラスルツボ
US10676388B2 (en) 2015-12-18 2020-06-09 Heraeus Quarzglas Gmbh & Co. Kg Glass fibers and pre-forms made of homogeneous quartz glass
TWI794149B (zh) 2015-12-18 2023-03-01 德商何瑞斯廓格拉斯公司 石英玻璃粉粒、不透明成型體及彼等之製備方法
JP6941042B2 (ja) 2017-12-12 2021-09-29 信越石英株式会社 モールド及び石英ガラスるつぼの製造方法
CN115246704A (zh) * 2021-04-27 2022-10-28 新沂市中鑫光电科技有限公司 一种石英坩埚透明层消除杂质元素方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001046077A1 (de) * 1999-12-22 2001-06-28 Heraeus Quarzglas Gmbh & Co. Kg Quarzglastiegel und verfahren für seine herstellung
CN1486946A (zh) * 2002-08-15 2004-04-07 �ձ�������ʽ���� 石英玻璃坩埚的重整方法
DE102007049158A1 (de) * 2007-10-13 2009-04-16 Evonik Degussa Gmbh Verwendung von Kieselglasgranulaten

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2578110A (en) * 1942-04-13 1951-12-11 Owens Corning Fiberglass Corp Production of glass
JPS6246904A (ja) * 1985-08-23 1987-02-28 Sintokogio Ltd 複酸化物粉末の製造方法
JPS6451333A (en) * 1987-08-17 1989-02-27 Nippon Sheet Glass Co Ltd Production of granulated material for raw glass material
JPH01107999A (ja) * 1987-10-21 1989-04-25 Kawasaki Heavy Ind Ltd 粉体成形機
JP2933404B2 (ja) * 1990-06-25 1999-08-16 信越石英 株式会社 シリコン単結晶引き上げ用石英ガラスルツボとその製造方法
DE19600299A1 (de) * 1996-01-05 1997-07-10 Gruenzweig & Hartmann Formlinge sowie Verfahren und Vorrichtung zu deren Herstellung
DE10114484C2 (de) * 2001-03-24 2003-10-16 Heraeus Quarzglas Verfahren für die Herstellung eines Komposit-Werkstoffs mit einem SiO¶2¶-Gehalt von mindestens 99 Gew.-%, und Verwendung des nach dem Verfahren erhaltenen Komposit-Werkstoffs
DE10243953B4 (de) 2002-09-21 2005-11-17 Heraeus Quarzglas Gmbh & Co. Kg Verfahren für die Herstellung eines Bauteils aus opakem Quarzglas
JP2006096616A (ja) * 2004-09-29 2006-04-13 Toshiba Ceramics Co Ltd シリカガラスルツボ、シリカガラスルツボの製造方法
JP5080764B2 (ja) * 2005-08-08 2012-11-21 信越石英株式会社 石英ガラス坩堝の製造方法
EP1813574A1 (de) 2006-01-25 2007-08-01 Degussa GmbH Zu Schülpen kompaktiertes pyrogen hergestelltes Siliciumdioxid
EP2014622B1 (de) 2007-07-06 2017-01-18 Evonik Degussa GmbH Verfahren zur Herstellung eines Kieselglasgranulats
DE102007031633A1 (de) 2007-07-06 2009-01-08 Evonik Degussa Gmbh Verfahren zur Herstellung von hochreinem Siliciumdioxidgranulat
DE102008030310B3 (de) 2008-06-30 2009-06-18 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Quarzglastiegels
DE102008033945B4 (de) * 2008-07-19 2012-03-08 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von mit Stickstoff dotiertem Quarzglas sowie zur Durchführung des Verfahrens geeignete Quarzglaskörnung, Verfahren zur Herstellung eines Quarzglasstrangs und Verfahren zur Herstellung eines Quarzglastiegels
JP2011157260A (ja) * 2010-01-07 2011-08-18 Mitsubishi Materials Corp 合成非晶質シリカ粉末及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001046077A1 (de) * 1999-12-22 2001-06-28 Heraeus Quarzglas Gmbh & Co. Kg Quarzglastiegel und verfahren für seine herstellung
CN1341080A (zh) * 1999-12-22 2002-03-20 赫罗伊斯石英玻璃股份有限两合公司 石英玻璃坩埚及其制造方法
CN1486946A (zh) * 2002-08-15 2004-04-07 �ձ�������ʽ���� 石英玻璃坩埚的重整方法
DE102007049158A1 (de) * 2007-10-13 2009-04-16 Evonik Degussa Gmbh Verwendung von Kieselglasgranulaten

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11492282B2 (en) 2015-12-18 2022-11-08 Heraeus Quarzglas Gmbh & Co. Kg Preparation of quartz glass bodies with dew point monitoring in the melting oven
US11339076B2 (en) 2015-12-18 2022-05-24 Heraeus Quarzglas Gmbh & Co. Kg Preparation of carbon-doped silicon dioxide granulate as an intermediate in the preparation of quartz glass
TWI728018B (zh) * 2015-12-18 2021-05-21 德商何瑞斯廓格拉斯公司 自二氧化矽粉末製備石英玻璃體
US11053152B2 (en) 2015-12-18 2021-07-06 Heraeus Quarzglas Gmbh & Co. Kg Spray granulation of silicon dioxide in the preparation of quartz glass
US11952303B2 (en) 2015-12-18 2024-04-09 Heraeus Quarzglas Gmbh & Co. Kg Increase in silicon content in the preparation of quartz glass
US11708290B2 (en) 2015-12-18 2023-07-25 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body in a multi-chamber oven
CN108779015A (zh) * 2015-12-18 2018-11-09 贺利氏石英玻璃有限两合公司 从二氧化硅粉末制备石英玻璃体
US11299417B2 (en) 2015-12-18 2022-04-12 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body in a melting crucible of refractory metal
US11236002B2 (en) 2015-12-18 2022-02-01 Heraeus Quarzglas Gmbh & Co. Kg Preparation of an opaque quartz glass body
CN108779015B (zh) * 2015-12-18 2021-10-26 贺利氏石英玻璃有限两合公司 从二氧化硅粉末制备石英玻璃体
US11492285B2 (en) 2015-12-18 2022-11-08 Heraeus Quarzglas Gmbh & Co. Kg Preparation of quartz glass bodies from silicon dioxide granulate
TWI736724B (zh) * 2016-12-23 2021-08-21 德商何瑞斯廓格拉斯公司 製造不透明石英玻璃的方法及由不透明石英玻璃製得的坯體
CN111936678A (zh) * 2018-04-06 2020-11-13 信越石英株式会社 石英玻璃坩埚及其制造方法
CN113423669B (zh) * 2019-01-11 2023-05-23 胜高股份有限公司 二氧化硅玻璃坩埚的制造装置及制造方法
CN113423669A (zh) * 2019-01-11 2021-09-21 胜高股份有限公司 二氧化硅玻璃坩埚的制造装置及制造方法
CN113415978A (zh) * 2021-07-03 2021-09-21 四川神光石英科技有限公司 一种耐辐照石英玻璃的制备方法及制备用坩埚和料架

Also Published As

Publication number Publication date
DE102010008162B4 (de) 2017-03-16
JP2013519624A (ja) 2013-05-30
WO2011101327A1 (de) 2011-08-25
DE102010008162A1 (de) 2011-08-18

Similar Documents

Publication Publication Date Title
CN102753493A (zh) 用于生产石英玻璃坩埚的方法
TWI589537B (zh) 用於產製二氧化矽粒子之合成石英玻璃的方法及適用於該方法之二氧化矽粒子
US6849242B1 (en) Porous silica granule, method for producing the same, and method for producing synthetic quartz glass powder using the porous silica granule
JP6129293B2 (ja) 電気溶融された合成石英ガラスから成形体を製造する方法
CN104245609B (zh) 用于制备合成石英玻璃粒料的方法
JP5801407B2 (ja) 合成石英ガラス顆粒の製造方法
JP6231074B2 (ja) 合成石英ガラス粒体の製造法
JP5724881B2 (ja) 合成非晶質シリカ粉末及びその製造方法
CN107417071B (zh) 制造含孔隙的不透明石英玻璃的方法
JP2020523278A (ja) 石英ガラス体の調製
JP2012211070A (ja) 合成非晶質シリカ粉末及びその製造方法
JP2010083690A (ja) シリカ容器及びその製造方法
CN101137585A (zh) 制备超高纯度的光学玻璃物品的方法
JP5829686B2 (ja) 合成石英ガラスから成る透明な内層を備えた石英ガラスるつぼを製造する方法
JP7567316B2 (ja) 造粒シリカ粉体及び造粒シリカ粉体の製造方法
US8387413B2 (en) Method for producing a component with a layer of transparent quartz glass
JPH0517180A (ja) シリカ発泡体の製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20121024