CN102725843A - 用于处理基材的装置与方法 - Google Patents
用于处理基材的装置与方法 Download PDFInfo
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- CN102725843A CN102725843A CN2010800521422A CN201080052142A CN102725843A CN 102725843 A CN102725843 A CN 102725843A CN 2010800521422 A CN2010800521422 A CN 2010800521422A CN 201080052142 A CN201080052142 A CN 201080052142A CN 102725843 A CN102725843 A CN 102725843A
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
- H01L2924/1816—Exposing the passive side of the semiconductor or solid-state body
- H01L2924/18162—Exposing the passive side of the semiconductor or solid-state body of a chip with build-up interconnect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/36—Material effects
- H01L2924/364—Polymers
- H01L2924/3641—Outgassing
Abstract
Description
Claims (23)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410361067.8A CN104091777B (zh) | 2009-11-17 | 2010-11-17 | 用于处理基材的设备 |
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US26180509P | 2009-11-17 | 2009-11-17 | |
US61/261,805 | 2009-11-17 | ||
PCT/IB2010/055226 WO2011061695A2 (en) | 2009-11-17 | 2010-11-17 | Apparatus and method for processing a substrate |
Related Child Applications (1)
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CN201410361067.8A Division CN104091777B (zh) | 2009-11-17 | 2010-11-17 | 用于处理基材的设备 |
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CN102725843A true CN102725843A (zh) | 2012-10-10 |
CN102725843B CN102725843B (zh) | 2017-03-01 |
Family
ID=43875307
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CN201080052142.2A Active CN102725843B (zh) | 2009-11-17 | 2010-11-17 | 用于处理基材的装置与方法 |
CN201410361067.8A Expired - Fee Related CN104091777B (zh) | 2009-11-17 | 2010-11-17 | 用于处理基材的设备 |
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CN201410361067.8A Expired - Fee Related CN104091777B (zh) | 2009-11-17 | 2010-11-17 | 用于处理基材的设备 |
Country Status (7)
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US (2) | US9627324B2 (zh) |
EP (1) | EP2502268B1 (zh) |
JP (1) | JP5702796B2 (zh) |
KR (1) | KR101739606B1 (zh) |
CN (2) | CN102725843B (zh) |
TW (1) | TWI446450B (zh) |
WO (1) | WO2011061695A2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106505017A (zh) * | 2016-10-25 | 2017-03-15 | 通富微电子股份有限公司 | 用于面板级扇出表面处理的工艺系统及方法 |
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KR101903199B1 (ko) | 2010-12-08 | 2018-10-01 | 에바텍 아크티엔게젤샤프트 | 기판 상에 레이어를 증착하는 방법 및 장치 |
JP6188051B2 (ja) * | 2012-12-25 | 2017-08-30 | 国立研究開発法人産業技術総合研究所 | 部品製造方法、接合剥離装置、および複合キャリア |
JP6125317B2 (ja) | 2013-05-09 | 2017-05-10 | 東京応化工業株式会社 | モールド材の処理方法及び構造体の製造方法 |
TWI612300B (zh) * | 2016-02-25 | 2018-01-21 | 國立清華大學 | 感測器及其製造方法 |
TWI644383B (zh) * | 2016-08-29 | 2018-12-11 | 因特瓦克公司 | 線內扇出系統 |
TWI804369B (zh) * | 2017-07-14 | 2023-06-01 | 荷蘭商Asm Ip控股公司 | 用於將自組裝單層沈積於基板之表面上的設備 |
US11348816B2 (en) * | 2018-07-31 | 2022-05-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for die container warehousing |
JP7058239B2 (ja) * | 2019-03-14 | 2022-04-21 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置およびプログラム |
CN111564414B (zh) | 2019-12-12 | 2021-09-24 | 奥特斯(中国)有限公司 | 部件承载件及制造部件承载件的方法 |
JP2021118323A (ja) * | 2020-01-29 | 2021-08-10 | Hoya株式会社 | 静電チャッククリーナー及び静電チャックのクリーニング方法 |
CN113707786B (zh) * | 2020-05-20 | 2022-09-27 | 重庆康佳光电技术研究院有限公司 | 一种转移方法及显示装置 |
JP2022178406A (ja) * | 2021-05-20 | 2022-12-02 | 東京エレクトロン株式会社 | 温度制御方法及び温度制御装置 |
TW202326907A (zh) * | 2021-11-03 | 2023-07-01 | 美商蘭姆研究公司 | 具有水蒸氣及氧分壓之快速與選擇性控制的基板處理工具 |
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2010
- 2010-11-17 WO PCT/IB2010/055226 patent/WO2011061695A2/en active Application Filing
- 2010-11-17 CN CN201080052142.2A patent/CN102725843B/zh active Active
- 2010-11-17 US US12/947,912 patent/US9627324B2/en active Active
- 2010-11-17 TW TW099139537A patent/TWI446450B/zh active
- 2010-11-17 EP EP10805314.1A patent/EP2502268B1/en active Active
- 2010-11-17 CN CN201410361067.8A patent/CN104091777B/zh not_active Expired - Fee Related
- 2010-11-17 KR KR1020127012214A patent/KR101739606B1/ko active IP Right Grant
- 2010-11-17 JP JP2012538459A patent/JP5702796B2/ja active Active
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2017
- 2017-03-06 US US15/450,212 patent/US20170200695A1/en not_active Abandoned
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JPH09275139A (ja) * | 1996-04-04 | 1997-10-21 | Sony Corp | 半導体装置の配線形成方法及びスパッタ装置 |
US6908561B1 (en) * | 2001-11-06 | 2005-06-21 | Lockhead Martin Corporation | Polymide-to-substrate adhesion promotion in HDI |
US20050106855A1 (en) * | 2002-05-17 | 2005-05-19 | Farnworth Warren M. | Method for fabricating a semiconductor component using contact printing |
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Also Published As
Publication number | Publication date |
---|---|
CN104091777A (zh) | 2014-10-08 |
US9627324B2 (en) | 2017-04-18 |
KR20120101653A (ko) | 2012-09-14 |
US20110117702A1 (en) | 2011-05-19 |
KR101739606B1 (ko) | 2017-05-24 |
WO2011061695A2 (en) | 2011-05-26 |
CN104091777B (zh) | 2017-09-12 |
EP2502268A2 (en) | 2012-09-26 |
CN102725843B (zh) | 2017-03-01 |
TWI446450B (zh) | 2014-07-21 |
JP2013511145A (ja) | 2013-03-28 |
US20170200695A1 (en) | 2017-07-13 |
TW201137979A (en) | 2011-11-01 |
EP2502268B1 (en) | 2018-10-24 |
JP5702796B2 (ja) | 2015-04-15 |
WO2011061695A3 (en) | 2011-07-14 |
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