CN102473699A - 具有降低的编程电压的鳍片反熔丝 - Google Patents
具有降低的编程电压的鳍片反熔丝 Download PDFInfo
- Publication number
- CN102473699A CN102473699A CN2010800342719A CN201080034271A CN102473699A CN 102473699 A CN102473699 A CN 102473699A CN 2010800342719 A CN2010800342719 A CN 2010800342719A CN 201080034271 A CN201080034271 A CN 201080034271A CN 102473699 A CN102473699 A CN 102473699A
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- China
- Prior art keywords
- fin
- conductor
- insulator
- length dimension
- fuse structures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
- H01L23/5252—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising anti-fuses, i.e. connections having their state changed from non-conductive to conductive
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/62—Protection against overvoltage, e.g. fuses, shunts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Fuses (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (25)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/538,381 US8030736B2 (en) | 2009-08-10 | 2009-08-10 | Fin anti-fuse with reduced programming voltage |
US12/538,381 | 2009-08-10 | ||
PCT/US2010/044385 WO2011019562A2 (en) | 2009-08-10 | 2010-08-04 | Fin anti-fuse with reduced programming voltage |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102473699A true CN102473699A (zh) | 2012-05-23 |
CN102473699B CN102473699B (zh) | 2014-07-09 |
Family
ID=43534176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080034271.9A Active CN102473699B (zh) | 2009-08-10 | 2010-08-04 | 具有降低的编程电压的鳍片反熔丝 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8030736B2 (zh) |
JP (1) | JP5480382B2 (zh) |
CN (1) | CN102473699B (zh) |
DE (1) | DE112010003252B4 (zh) |
GB (1) | GB2484634B (zh) |
TW (1) | TWI478310B (zh) |
WO (1) | WO2011019562A2 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103456711A (zh) * | 2012-06-05 | 2013-12-18 | 中芯国际集成电路制造(上海)有限公司 | 鳍型反熔丝结构及其制造方法 |
CN104508818A (zh) * | 2012-07-10 | 2015-04-08 | 索泰克公司 | 反熔丝 |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8569116B2 (en) * | 2011-06-28 | 2013-10-29 | GlobalFoundries, Inc. | Integrated circuit with a fin-based fuse, and related fabrication method |
US8969999B2 (en) * | 2011-10-27 | 2015-03-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fin-like field effect transistor (FinFET) based, metal-semiconductor alloy fuse device and method of manufacturing same |
US8759184B2 (en) | 2012-01-09 | 2014-06-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFETs and the methods for forming the same |
US8609499B2 (en) | 2012-01-09 | 2013-12-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFETs and the methods for forming the same |
US9431497B2 (en) | 2013-05-21 | 2016-08-30 | Globalfoundries Singapore Pte. Ltd. | Transistor devices having an anti-fuse configuration and methods of forming the same |
KR102109793B1 (ko) | 2013-11-04 | 2020-05-13 | 삼성전자주식회사 | 반도체 소자 |
US20150194433A1 (en) * | 2014-01-08 | 2015-07-09 | Broadcom Corporation | Gate substantial contact based one-time programmable device |
US9165936B2 (en) * | 2014-01-14 | 2015-10-20 | Broadcom Corporation | Dummy end-gate based anti-fuse device for finFET technologies |
KR102150869B1 (ko) | 2014-04-03 | 2020-09-02 | 삼성전자 주식회사 | 퓨즈 구조체 및 이를 포함하는 반도체 장치 |
CN104979362B (zh) | 2014-04-10 | 2019-11-19 | 三星电子株式会社 | 具有翅片式有源图案和栅极节点的半导体装置 |
US9293221B1 (en) | 2015-02-26 | 2016-03-22 | International Business Machines Corporation | Three terminal fuse with FinFET |
US9768276B2 (en) | 2015-04-23 | 2017-09-19 | International Business Machines Corporation | Method and structure of forming FinFET electrical fuse structure |
EP3205491B1 (en) * | 2016-02-09 | 2020-07-08 | Airbus Defence and Space SA | Method for manufacturing a stiffened panel made from composite material |
US10008507B2 (en) | 2016-04-14 | 2018-06-26 | International Business Machines Corporation | Metal FinFET anti-fuse |
US9852982B1 (en) | 2016-06-22 | 2017-12-26 | Globalfoundries Inc. | Anti-fuses with reduced programming voltages |
US9754875B1 (en) | 2016-07-20 | 2017-09-05 | International Business Machines Corporation | Designable channel FinFET fuse |
US9929091B2 (en) | 2016-08-25 | 2018-03-27 | International Business Machines Corporation | Vertical fuse structures |
US9831254B1 (en) | 2016-09-22 | 2017-11-28 | International Business Machines Corporation | Multiple breakdown point low resistance anti-fuse structure |
US11843035B2 (en) * | 2020-12-21 | 2023-12-12 | Micron Technology, Inc. | Transistor interface between gate and active region |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040023441A1 (en) * | 2002-08-01 | 2004-02-05 | Trivedi Jigish D. | Edge intensive antifuse and method for making the same |
CN1694262A (zh) * | 2004-01-28 | 2005-11-09 | 国际商业机器公司 | 使用finfet技术形成多种器件宽度的方法和结构 |
CN1714439A (zh) * | 2002-12-20 | 2005-12-28 | 国际商业机器公司 | 用于finfet和cmos器件的集成反熔断器结构 |
CN1758434A (zh) * | 2004-10-08 | 2006-04-12 | 国际商业机器公司 | 鳍片型反熔丝 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5166556A (en) * | 1991-01-22 | 1992-11-24 | Myson Technology, Inc. | Programmable antifuse structure, process, logic cell and architecture for programmable integrated circuits |
WO1993005514A1 (en) * | 1991-09-04 | 1993-03-18 | Vlsi Technology, Inc. | Anti-fuse structures and methods for making same |
US5783467A (en) * | 1995-12-29 | 1998-07-21 | Vlsi Technology, Inc. | Method of making antifuse structures using implantation of both neutral and dopant species |
US6069064A (en) * | 1996-08-26 | 2000-05-30 | Micron Technology, Inc. | Method for forming a junctionless antifuse |
US6156588A (en) * | 1998-06-23 | 2000-12-05 | Vlsi Technology, Inc. | Method of forming anti-fuse structure |
DE10043215C1 (de) * | 2000-09-01 | 2002-04-18 | Infineon Technologies Ag | Verfahren zur Herstellung einer Antifuse, Antifuse zur selektiven elektrischen Verbindung von benachbarten leitenden Bereichen und integrierte Schaltung mit einer Antifuse |
JP2004185091A (ja) * | 2002-11-29 | 2004-07-02 | Matsushita Electric Ind Co Ltd | 携帯端末装置 |
US7087499B2 (en) * | 2002-12-20 | 2006-08-08 | International Business Machines Corporation | Integrated antifuse structure for FINFET and CMOS devices |
JP4668711B2 (ja) * | 2004-07-14 | 2011-04-13 | オセ−テクノロジーズ ビーブイ | カスタマイズ可能なプリントメディアの定義 |
CN2766380Y (zh) | 2004-12-10 | 2006-03-22 | 富士康(昆山)电脑接插件有限公司 | 电连接器 |
KR100668962B1 (ko) | 2004-12-30 | 2007-01-12 | 동부일렉트로닉스 주식회사 | 전압 분배 저항 및 이를 구비한 반도체 소자 |
KR100620705B1 (ko) * | 2004-12-31 | 2006-09-13 | 동부일렉트로닉스 주식회사 | 유전체의 두께가 균일한 안티퓨즈 및 그 제조 방법 |
US20070029576A1 (en) * | 2005-08-03 | 2007-02-08 | International Business Machines Corporation | Programmable semiconductor device containing a vertically notched fusible link region and methods of making and using same |
US7265013B2 (en) * | 2005-09-19 | 2007-09-04 | International Business Machines Corporation | Sidewall image transfer (SIT) technologies |
US7763932B2 (en) * | 2006-06-29 | 2010-07-27 | International Business Machines Corporation | Multi-bit high-density memory device and architecture and method of fabricating multi-bit high-density memory devices |
JP2008172103A (ja) * | 2007-01-12 | 2008-07-24 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2008311409A (ja) * | 2007-06-14 | 2008-12-25 | Elpida Memory Inc | 半導体装置及びその製造方法 |
US8274132B2 (en) * | 2008-02-14 | 2012-09-25 | Infineon Technologies Ag | Electrical device and fabrication method |
-
2009
- 2009-08-10 US US12/538,381 patent/US8030736B2/en active Active
-
2010
- 2010-07-30 TW TW099125385A patent/TWI478310B/zh active
- 2010-08-04 CN CN201080034271.9A patent/CN102473699B/zh active Active
- 2010-08-04 DE DE112010003252.1T patent/DE112010003252B4/de active Active
- 2010-08-04 GB GB1202057.4A patent/GB2484634B/en not_active Expired - Fee Related
- 2010-08-04 JP JP2012524746A patent/JP5480382B2/ja not_active Expired - Fee Related
- 2010-08-04 WO PCT/US2010/044385 patent/WO2011019562A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040023441A1 (en) * | 2002-08-01 | 2004-02-05 | Trivedi Jigish D. | Edge intensive antifuse and method for making the same |
CN1714439A (zh) * | 2002-12-20 | 2005-12-28 | 国际商业机器公司 | 用于finfet和cmos器件的集成反熔断器结构 |
CN1694262A (zh) * | 2004-01-28 | 2005-11-09 | 国际商业机器公司 | 使用finfet技术形成多种器件宽度的方法和结构 |
CN1758434A (zh) * | 2004-10-08 | 2006-04-12 | 国际商业机器公司 | 鳍片型反熔丝 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103456711A (zh) * | 2012-06-05 | 2013-12-18 | 中芯国际集成电路制造(上海)有限公司 | 鳍型反熔丝结构及其制造方法 |
CN103456711B (zh) * | 2012-06-05 | 2016-03-23 | 中芯国际集成电路制造(上海)有限公司 | 鳍型反熔丝结构及其制造方法 |
CN104508818A (zh) * | 2012-07-10 | 2015-04-08 | 索泰克公司 | 反熔丝 |
CN104508818B (zh) * | 2012-07-10 | 2018-06-12 | 索泰克公司 | 反熔丝 |
Also Published As
Publication number | Publication date |
---|---|
CN102473699B (zh) | 2014-07-09 |
GB201202057D0 (en) | 2012-03-21 |
JP5480382B2 (ja) | 2014-04-23 |
WO2011019562A2 (en) | 2011-02-17 |
GB2484634B (en) | 2014-02-05 |
GB2484634A (en) | 2012-04-18 |
TW201133760A (en) | 2011-10-01 |
DE112010003252T5 (de) | 2013-01-03 |
TWI478310B (zh) | 2015-03-21 |
US8030736B2 (en) | 2011-10-04 |
WO2011019562A3 (en) | 2011-05-05 |
DE112010003252B4 (de) | 2015-12-03 |
US20110031582A1 (en) | 2011-02-10 |
JP2013502073A (ja) | 2013-01-17 |
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C14 | Grant of patent or utility model | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20171024 Address after: Grand Cayman, Cayman Islands Patentee after: GLOBALFOUNDRIES INC. Address before: American New York Patentee before: Core USA second LLC Effective date of registration: 20171024 Address after: American New York Patentee after: Core USA second LLC Address before: American New York Patentee before: International Business Machines Corp. |
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