CN102472969A - 感光性树脂组合物、感光性树脂层压体和抗蚀图案形成方法 - Google Patents

感光性树脂组合物、感光性树脂层压体和抗蚀图案形成方法 Download PDF

Info

Publication number
CN102472969A
CN102472969A CN2010800339345A CN201080033934A CN102472969A CN 102472969 A CN102472969 A CN 102472969A CN 2010800339345 A CN2010800339345 A CN 2010800339345A CN 201080033934 A CN201080033934 A CN 201080033934A CN 102472969 A CN102472969 A CN 102472969A
Authority
CN
China
Prior art keywords
compound
quality
photosensitive
photosensitive polymer
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010800339345A
Other languages
English (en)
Inventor
西泽豪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Original Assignee
Asahi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2009-176354 priority Critical
Priority to JP2009176354 priority
Application filed by Asahi Chemical Co Ltd filed Critical Asahi Chemical Co Ltd
Priority to PCT/JP2010/062623 priority patent/WO2011013664A1/ja
Publication of CN102472969A publication Critical patent/CN102472969A/zh
Pending legal-status Critical Current

Links