CN102394199B - 具有布置成传导开关电流的衬底的mems开关阵列 - Google Patents

具有布置成传导开关电流的衬底的mems开关阵列 Download PDF

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Publication number
CN102394199B
CN102394199B CN201110175517.0A CN201110175517A CN102394199B CN 102394199 B CN102394199 B CN 102394199B CN 201110175517 A CN201110175517 A CN 201110175517A CN 102394199 B CN102394199 B CN 102394199B
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China
Prior art keywords
mems
substrate
mechanical system
electro mechanical
micro electro
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CN201110175517.0A
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English (en)
Chinese (zh)
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CN102394199A (zh
Inventor
K·V·S·R·基肖尔
M·艾米
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General Electric Co
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General Electric Co
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
CN201110175517.0A 2010-06-17 2011-06-17 具有布置成传导开关电流的衬底的mems开关阵列 Active CN102394199B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/817,578 US8576029B2 (en) 2010-06-17 2010-06-17 MEMS switching array having a substrate arranged to conduct switching current
US12/817578 2010-06-17

Publications (2)

Publication Number Publication Date
CN102394199A CN102394199A (zh) 2012-03-28
CN102394199B true CN102394199B (zh) 2015-11-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110175517.0A Active CN102394199B (zh) 2010-06-17 2011-06-17 具有布置成传导开关电流的衬底的mems开关阵列

Country Status (4)

Country Link
US (1) US8576029B2 (https=)
EP (1) EP2398028B1 (https=)
JP (1) JP5802060B2 (https=)
CN (1) CN102394199B (https=)

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US9573801B2 (en) * 2011-09-13 2017-02-21 Texas Instruments Incorporated MEMS electrostatic actuator device for RF varactor applications
US8659326B1 (en) 2012-09-28 2014-02-25 General Electric Company Switching apparatus including gating circuitry for actuating micro-electromechanical system (MEMS) switches
US9583294B2 (en) * 2014-04-25 2017-02-28 Analog Devices Global MEMS swtich with internal conductive path
US9362608B1 (en) * 2014-12-03 2016-06-07 General Electric Company Multichannel relay assembly with in line MEMS switches
WO2016092475A1 (en) * 2014-12-10 2016-06-16 Okulov Paul D Micro electro-mechanical strain displacement sensor and usage monitoring system
US10640363B2 (en) 2016-02-04 2020-05-05 Analog Devices Global Active opening MEMS switch device
EP3654358B1 (en) 2018-11-15 2025-12-31 Infineon Technologies Austria AG MEMS POWER RELAY CIRCUIT
DE102019211460A1 (de) 2019-07-31 2021-02-04 Siemens Aktiengesellschaft Anordnung von MEMS-Schaltern
EP3929960A1 (de) * 2020-06-26 2021-12-29 Siemens Aktiengesellschaft Mems-schalter, verfahren zur herstellung eines mems-schalters und vorrichtung
EP3979291A1 (de) * 2020-09-30 2022-04-06 Siemens Aktiengesellschaft Elektronikmodul und anlage
US12365579B2 (en) 2021-12-29 2025-07-22 Menlo Microsystems, Inc. Distributed MEMS switch array design with multiple input/output ports
US20240274388A1 (en) * 2023-02-14 2024-08-15 Texas Instruments Incorporated Electromechanical switch

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Also Published As

Publication number Publication date
US20110308924A1 (en) 2011-12-22
JP2012004112A (ja) 2012-01-05
JP5802060B2 (ja) 2015-10-28
CN102394199A (zh) 2012-03-28
EP2398028A3 (en) 2012-09-05
EP2398028B1 (en) 2015-08-12
EP2398028A2 (en) 2011-12-21
US8576029B2 (en) 2013-11-05

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