ITMI20022769A1 - Metodo per realizzare un interruttore - Google Patents

Metodo per realizzare un interruttore

Info

Publication number
ITMI20022769A1
ITMI20022769A1 IT002769A ITMI20022769A ITMI20022769A1 IT MI20022769 A1 ITMI20022769 A1 IT MI20022769A1 IT 002769 A IT002769 A IT 002769A IT MI20022769 A ITMI20022769 A IT MI20022769A IT MI20022769 A1 ITMI20022769 A1 IT MI20022769A1
Authority
IT
Italy
Prior art keywords
switch
making
Prior art date
Application number
IT002769A
Other languages
English (en)
Inventor
Chantal Combi
Benedetto Vigna
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT002769A priority Critical patent/ITMI20022769A1/it
Priority to US10/746,868 priority patent/US7022542B2/en
Publication of ITMI20022769A1 publication Critical patent/ITMI20022769A1/it
Priority to US11/343,400 priority patent/US7242066B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
IT002769A 2002-12-24 2002-12-24 Metodo per realizzare un interruttore ITMI20022769A1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT002769A ITMI20022769A1 (it) 2002-12-24 2002-12-24 Metodo per realizzare un interruttore
US10/746,868 US7022542B2 (en) 2002-12-24 2003-12-24 Manufacturing method of a microelectromechanical switch
US11/343,400 US7242066B2 (en) 2002-12-24 2006-01-31 Manufacturing method of a microelectromechanical switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT002769A ITMI20022769A1 (it) 2002-12-24 2002-12-24 Metodo per realizzare un interruttore

Publications (1)

Publication Number Publication Date
ITMI20022769A1 true ITMI20022769A1 (it) 2004-06-25

Family

ID=32800684

Family Applications (1)

Application Number Title Priority Date Filing Date
IT002769A ITMI20022769A1 (it) 2002-12-24 2002-12-24 Metodo per realizzare un interruttore

Country Status (2)

Country Link
US (2) US7022542B2 (it)
IT (1) ITMI20022769A1 (it)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4137845B2 (ja) * 2004-02-27 2008-08-20 東京エレクトロン株式会社 半導体装置
KR100761476B1 (ko) * 2004-07-13 2007-09-27 삼성전자주식회사 반도체를 이용한 멤스 ｒｆ-스위치
US7528529B2 (en) 2005-10-17 2009-05-05 Semiconductor Energy Laboratory Co., Ltd. Micro electro mechanical system, semiconductor device, and manufacturing method thereof
KR100744543B1 (ko) * 2005-12-08 2007-08-01 한국전자통신연구원 미세전자기계적 구조 스위치 및 그 제조방법
CN100389474C (zh) * 2006-04-17 2008-05-21 东南大学 射频微电子机械双膜桥并联电容式开关及其制造方法
JP2008132583A (ja) * 2006-10-24 2008-06-12 Seiko Epson Corp Ｍｅｍｓデバイス
KR100799722B1 (ko) * 2006-12-12 2008-02-01 삼성전자주식회사 메모리 소자 및 그 제조 방법
US8633552B1 (en) * 2007-03-01 2014-01-21 Micrel, Incorporated ESD protection for MEMS resonator devices
US9343242B2 (en) * 2007-06-22 2016-05-17 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method of making contact posts for a microelectromechanical device
WO2009067222A1 (en) * 2007-11-19 2009-05-28 Xcom Wireless, Inc. Microfabricated cantilever slider with asymmetric spring constant
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US9019756B2 (en) * 2008-02-14 2015-04-28 Cavendish Kinetics, Ltd Architecture for device having cantilever electrode
US7943410B2 (en) * 2008-12-10 2011-05-17 Stmicroelectronics, Inc. Embedded microelectromechanical systems (MEMS) semiconductor substrate and related method of forming
US7998775B2 (en) * 2009-02-09 2011-08-16 Taiwan Semiconductor Manufacturing Company, Ltd. Silicon undercut prevention in sacrificial oxide release process and resulting MEMS structures
US8304274B2 (en) * 2009-02-13 2012-11-06 Texas Instruments Incorporated Micro-electro-mechanical system having movable element integrated into substrate-based package
DE102010012607B4 (de) * 2010-03-24 2012-01-26 Eads Deutschland Gmbh HF-MEMS-Schalter
US8576029B2 (en) * 2010-06-17 2013-11-05 General Electric Company MEMS switching array having a substrate arranged to conduct switching current
US8635765B2 (en) * 2011-06-15 2014-01-28 International Business Machines Corporation Method of forming micro-electrical-mechanical structure (MEMS)
EP2751022B1 (en) 2011-09-02 2019-04-17 Cavendish Kinetics Inc. Mems device anchoring
DE102012219550B4 (de) 2012-10-25 2024-04-18 Robert Bosch Gmbh Hybrid integriertes Bauteil
US9123492B2 (en) * 2012-12-19 2015-09-01 International Business Machines Corporation Three-dimensional inter-chip contact through vertical displacement MEMS
CN110853985B (zh) * 2019-11-01 2021-04-16 北京邮电大学 一种并联式电容开关
EP3979298A1 (en) * 2020-09-30 2022-04-06 Infineon Technologies Austria AG Device for controlling trapped ions and method of manufacturing the same
DE102022212184A1 (de) 2022-11-16 2024-05-16 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Vorrichtung mit Kaverne und elektrisch isolierender Stützstruktur und Verfahren zur Herstellung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
US20020096421A1 (en) * 2000-11-29 2002-07-25 Cohn Michael B. MEMS device with integral packaging
DE10291877B4 (de) * 2001-04-26 2009-01-02 Advantest Corp. Mikroschalter und Verfahren zum Herstellen eines Mikroschalters

Also Published As

Publication number Publication date
US7242066B2 (en) 2007-07-10
US20040157364A1 (en) 2004-08-12
US20060134821A1 (en) 2006-06-22
US7022542B2 (en) 2006-04-04

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