JP4137845B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP4137845B2 JP4137845B2 JP2004160631A JP2004160631A JP4137845B2 JP 4137845 B2 JP4137845 B2 JP 4137845B2 JP 2004160631 A JP2004160631 A JP 2004160631A JP 2004160631 A JP2004160631 A JP 2004160631A JP 4137845 B2 JP4137845 B2 JP 4137845B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- jetty
- semiconductor device
- substrate
- electrode pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims description 63
- 239000000758 substrate Substances 0.000 claims description 50
- 230000001681 protective effect Effects 0.000 claims description 23
- 238000013459 approach Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 18
- 230000003071 parasitic effect Effects 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 238000001514 detection method Methods 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000002411 adverse Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00865—Multistep processes for the separation of wafers into individual elements
- B81C1/00896—Temporary protection during separation into individual elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Micromachines (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
Claims (4)
- ダイシングによって個々のチップに分割された半導体装置であって、
ダイシングラインに沿う辺を有する基板と、
絶縁層と、前記絶縁層上に形成される導電層を含んで前記基板上に形成される半導体素子と、
絶縁層と、前記絶縁層上に形成される導電層を含んで前記半導体素子と前記辺との間に位置する前記基板上に形成され、前記半導体素子の周囲を取り囲み、前記ダイシング時にその上に保護テープが密着して貼り付けられる突堤部と、
前記半導体素子の導電層上に形成され、前記突堤部の最外壁面よりも内側に形成される信号入出力のための入出力用電極パッドと、
前記突堤部の導電層上であってその最外壁面よりも内側に形成され、前記入出力用電極パッドに電気的に接続されて前記突堤部の導電層と前記半導体素子の導電層との電位差をゼロに近付ける突堤部用電極パッドとを備える、半導体装置。 - さらに、前記突堤部の導電層と前記半導体素子の導電層との電位差をゼロに近付ける同電位手段を含む、請求項1に記載の半導体装置。
- さらに、前記入出力用電極パッドに接続され、前記半導体素子の導電層と前記基板との間のインピーダンスの変化を検出するインピーダンス検出手段を含む、請求項1または2に記載の半導体装置。
- 前記突堤部よりも内側の領域の上部は開口されている、請求項1から3のいずれかに記載の半導体装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004160631A JP4137845B2 (ja) | 2004-02-27 | 2004-05-31 | 半導体装置 |
KR1020067002917A KR100788779B1 (ko) | 2004-02-27 | 2005-02-28 | 반도체 장치 |
EP05719630A EP1720201A4 (en) | 2004-02-27 | 2005-02-28 | SEMICONDUCTOR DEVICE |
US10/590,358 US20070278650A1 (en) | 2004-02-27 | 2005-02-28 | Semiconductor Device |
PCT/JP2005/003302 WO2005083765A1 (ja) | 2004-02-27 | 2005-02-28 | 半導体装置 |
TW094106161A TWI269437B (en) | 2004-02-27 | 2005-03-01 | Semiconductor device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004054711 | 2004-02-27 | ||
JP2004160631A JP4137845B2 (ja) | 2004-02-27 | 2004-05-31 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005277365A JP2005277365A (ja) | 2005-10-06 |
JP4137845B2 true JP4137845B2 (ja) | 2008-08-20 |
Family
ID=34914459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004160631A Expired - Fee Related JP4137845B2 (ja) | 2004-02-27 | 2004-05-31 | 半導体装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070278650A1 (ja) |
EP (1) | EP1720201A4 (ja) |
JP (1) | JP4137845B2 (ja) |
KR (1) | KR100788779B1 (ja) |
TW (1) | TWI269437B (ja) |
WO (1) | WO2005083765A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006297543A (ja) * | 2005-04-20 | 2006-11-02 | Sumitomo Precision Prod Co Ltd | Memsデバイス及びその製造方法 |
JP2007283470A (ja) * | 2006-04-20 | 2007-11-01 | Toyota Motor Corp | 半導体素子及び半導体素子の製造方法 |
WO2007131796A2 (de) * | 2006-05-17 | 2007-11-22 | Microgan Gmbh | Mikromechanische aktoren aus halbleiterverbindungen auf basis von nitriden von hauptgruppe-iii-elementen |
JPWO2010086952A1 (ja) * | 2009-01-30 | 2012-07-26 | パナソニック株式会社 | 半導体装置及びその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06347475A (ja) * | 1993-06-08 | 1994-12-22 | Murata Mfg Co Ltd | 加速度センサおよびその製造方法 |
US6953977B2 (en) * | 2000-02-08 | 2005-10-11 | Boston Microsystems, Inc. | Micromechanical piezoelectric device |
JP4258105B2 (ja) * | 2000-06-27 | 2009-04-30 | 株式会社デンソー | 半導体装置の製造方法 |
ITMI20022769A1 (it) * | 2002-12-24 | 2004-06-25 | St Microelectronics Srl | Metodo per realizzare un interruttore |
-
2004
- 2004-05-31 JP JP2004160631A patent/JP4137845B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-28 US US10/590,358 patent/US20070278650A1/en not_active Abandoned
- 2005-02-28 WO PCT/JP2005/003302 patent/WO2005083765A1/ja active Application Filing
- 2005-02-28 KR KR1020067002917A patent/KR100788779B1/ko not_active IP Right Cessation
- 2005-02-28 EP EP05719630A patent/EP1720201A4/en not_active Withdrawn
- 2005-03-01 TW TW094106161A patent/TWI269437B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20060055540A (ko) | 2006-05-23 |
EP1720201A4 (en) | 2008-05-07 |
EP1720201A1 (en) | 2006-11-08 |
TW200603399A (en) | 2006-01-16 |
KR100788779B1 (ko) | 2008-01-02 |
WO2005083765A1 (ja) | 2005-09-09 |
TWI269437B (en) | 2006-12-21 |
JP2005277365A (ja) | 2005-10-06 |
US20070278650A1 (en) | 2007-12-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6215123B1 (en) | Forming contacts on semiconductor substrates, radiation detectors and imaging devices | |
JP4947220B2 (ja) | 音響センサ及びマイクロフォン | |
JP5861497B2 (ja) | センサ装置 | |
WO2005083764A1 (ja) | 半導体装置の製造方法および半導体装置 | |
KR20110124702A (ko) | 음향 센서 및 그 제조 방법 | |
US6410922B1 (en) | Forming contacts on semiconductor substrates for radiation detectors and imaging devices | |
JP5818946B2 (ja) | 弾性波装置 | |
KR100788779B1 (ko) | 반도체 장치 | |
RU2220476C2 (ru) | Электронный компонент и применение содержащейся в нем защитной структуры | |
CN100442446C (zh) | 半导体装置 | |
JP4208172B2 (ja) | フォトダイオードおよびそれを用いた回路内蔵受光素子 | |
SE511826C2 (sv) | Dikesisolering | |
US7875954B2 (en) | Semiconductor chip | |
US20020158207A1 (en) | Forming contacts on semiconductor substrates for radiation detectors and imaging devices | |
CN216288383U (zh) | 一种半导体芯片的封装结构 | |
KR101323145B1 (ko) | 정전기 보호용 반도체 소자의 제조방법 | |
US10978249B2 (en) | Thin-film device and method of manufacturing thin-film device | |
CN108417591B (zh) | 高电性能的芯片封装结构及制作方法 | |
JP3463014B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2006041146A (ja) | 半導体基板及び半導体装置の製造方法 | |
TWI830885B (zh) | 微機電系統氣體感測器安裝體 | |
JP2018017558A (ja) | 半導体装置及び半導体装置の製造方法 | |
JP2017073227A (ja) | 磁気リードスイッチ | |
JP6611362B2 (ja) | 容量式湿度センサ | |
CN114038805A (zh) | 一种半导体芯片的封装结构及封装方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080115 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080205 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080304 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080409 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080520 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080604 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110613 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140613 Year of fee payment: 6 |
|
LAPS | Cancellation because of no payment of annual fees |