CN102373032B - 热膨胀抑制部件和抗热膨胀性部件 - Google Patents

热膨胀抑制部件和抗热膨胀性部件 Download PDF

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Publication number
CN102373032B
CN102373032B CN201110226208.1A CN201110226208A CN102373032B CN 102373032 B CN102373032 B CN 102373032B CN 201110226208 A CN201110226208 A CN 201110226208A CN 102373032 B CN102373032 B CN 102373032B
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China
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thermal expansion
metal
present
solid
linear expansion
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Chinese (zh)
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CN102373032A (zh
Inventor
久保田纯
三浦薫
薮田久人
松村喜彦
岛川祐一
东正树
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Canon Inc
Kyoto University NUC
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Canon Inc
Kyoto University NUC
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/027—Thermal properties
    • B32B7/028—Heat-shrinkability
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G53/00—Compounds of nickel
    • C01G53/40—Complex oxides containing nickel and at least one other metal element
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/50—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/50—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds
    • C04B35/505—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare-earth compounds based on yttrium oxide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H10W40/259—Ceramics or glasses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/732—Dimensional properties
    • B32B2307/734—Dimensional stability
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/06—Thermal details
    • H05K2201/068—Thermal details wherein the coefficient of thermal expansion is important
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0058—Laminating printed circuit boards onto other substrates, e.g. metallic substrates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Ceramic Products (AREA)
CN201110226208.1A 2010-08-12 2011-08-09 热膨胀抑制部件和抗热膨胀性部件 Active CN102373032B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2010180885 2010-08-12
JP2010-180885 2010-08-12
JP2011-097851 2011-04-26
JP2011097851A JP5781824B2 (ja) 2010-08-12 2011-04-26 熱膨張抑制部材および対熱膨張性部材

Publications (2)

Publication Number Publication Date
CN102373032A CN102373032A (zh) 2012-03-14
CN102373032B true CN102373032B (zh) 2014-08-06

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Country Link
US (2) US8753749B2 (https=)
EP (1) EP2418923B1 (https=)
JP (1) JP5781824B2 (https=)
CN (1) CN102373032B (https=)

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JP5795187B2 (ja) 2010-08-12 2015-10-14 キヤノン株式会社 対熱膨張性樹脂および対熱膨張性金属
JP5781824B2 (ja) * 2010-08-12 2015-09-24 キヤノン株式会社 熱膨張抑制部材および対熱膨張性部材
WO2013147856A1 (en) * 2012-03-30 2013-10-03 Intel Corporation Process and material for preventing deleterious expansion of high aspect ratio copper filled through silicon vias (tsvs)
DE102012212898A1 (de) * 2012-07-24 2014-01-30 Carl Zeiss Smt Gmbh Spiegelanordnung für eine EUV-Projektionsbelichtungsanlage, Verfahren zum Betreiben derselben, sowie EUV-Projektionsbelichtungsanlage
WO2014030293A1 (ja) * 2012-08-21 2014-02-27 国立大学法人東京工業大学 負熱膨張性材料
JP6555473B2 (ja) * 2015-08-31 2019-08-07 国立大学法人東京工業大学 負熱膨張性材料、及び複合体
US10676371B2 (en) 2016-02-12 2020-06-09 National University Corporation Nagoya University Ruthenium oxide having a negative thermal expansion coefficient, and useable as a thermal expansion inhibitor
JP6998051B2 (ja) * 2018-06-08 2022-01-18 地方独立行政法人神奈川県立産業技術総合研究所 負熱膨張性材料、複合体、及び使用方法
CN110335854B (zh) * 2019-06-17 2020-12-11 中国科学院微电子研究所 一种强制对流微流道散热结构、制造方法及电子器件
JP7351477B2 (ja) 2019-07-23 2023-09-27 国立大学法人東京工業大学 樹脂組成物およびその樹脂成形体
CN111254388B (zh) * 2020-03-30 2022-06-10 昆山国显光电有限公司 掩膜外框和掩膜组件
JP7796390B2 (ja) * 2022-04-28 2026-01-09 国立大学法人東北大学 結晶体、相変化メモリ、結晶体の製造方法及び相変化メモリの製造方法

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US5694503A (en) 1996-09-09 1997-12-02 Lucent Technologies Inc. Article comprising a temperature compensated optical fiber refractive index grating
US20050191515A1 (en) 2000-07-20 2005-09-01 Shipley Company, L.L.C. Very low thermal expansion composite
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Also Published As

Publication number Publication date
JP5781824B2 (ja) 2015-09-24
CN102373032A (zh) 2012-03-14
US10124558B2 (en) 2018-11-13
US8753749B2 (en) 2014-06-17
EP2418923B1 (en) 2019-01-23
US20120040196A1 (en) 2012-02-16
JP2012056830A (ja) 2012-03-22
EP2418923A1 (en) 2012-02-15
US20140234643A1 (en) 2014-08-21

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