CN102308202B - Tft阵列检查方法以及tft阵列检查装置 - Google Patents

Tft阵列检查方法以及tft阵列检查装置 Download PDF

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Publication number
CN102308202B
CN102308202B CN200980156196.0A CN200980156196A CN102308202B CN 102308202 B CN102308202 B CN 102308202B CN 200980156196 A CN200980156196 A CN 200980156196A CN 102308202 B CN102308202 B CN 102308202B
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CN
China
Prior art keywords
voltage
pixel
mentioned
tft array
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200980156196.0A
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English (en)
Chinese (zh)
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CN102308202A (zh
Inventor
西原隆治
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Shimadzu Corp
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Shimadzu Corp
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Publication of CN102308202A publication Critical patent/CN102308202A/zh
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Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3648—Control of matrices with row and column drivers using an active matrix

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN200980156196.0A 2009-02-04 2009-02-04 Tft阵列检查方法以及tft阵列检查装置 Expired - Fee Related CN102308202B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2009/051855 WO2010089856A1 (ja) 2009-02-04 2009-02-04 Ｔｆｔアレイ検査方法およびｔｆｔアレイ検査装置

Publications (2)

Publication Number Publication Date
CN102308202A CN102308202A (zh) 2012-01-04
CN102308202B true CN102308202B (zh) 2014-07-09

Family

ID=42541780

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980156196.0A Expired - Fee Related CN102308202B (zh) 2009-02-04 2009-02-04 Tft阵列检查方法以及tft阵列检查装置

Country Status (3)

Country Link
JP (1) JP5224194B2 (ja)
CN (1) CN102308202B (ja)
WO (1) WO2010089856A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5408540B2 (ja) * 2009-10-28 2014-02-05 株式会社島津製作所 Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
JP5532442B2 (ja) * 2011-03-17 2014-06-25 株式会社島津製作所 Ｔｆｔアレイの欠陥検出方法およびｔｆｔアレイの欠陥検出装置
CN103874256B (zh) * 2014-01-24 2015-12-09 南京第壹有机光电有限公司 一种用于oled照明器件的驱动电路
CN104090437B (zh) * 2014-06-26 2016-08-17 京东方科技集团股份有限公司 一种阵列基板、显示装置、母板及其检测方法
CN106601159A (zh) * 2016-10-26 2017-04-26 京东方科技集团股份有限公司 阵列基板检测装置及检测方法
CN109243343B (zh) * 2018-09-12 2024-04-05 江西兴泰科技股份有限公司 一种电子纸用tft玻璃基板检测方法及装置
CN110176200B (zh) * 2019-06-11 2023-03-21 苏州华兴源创科技股份有限公司 一种面板检测信号的产生方法和系统
WO2024083769A1 (en) * 2022-10-17 2024-04-25 Asml Netherlands B.V. Electrical connection testing

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002260569A (ja) * 2001-02-27 2002-09-13 Shimadzu Corp Ｅｚフィルタ分光方法及びその装置
JP2007227807A (ja) * 2006-02-24 2007-09-06 Shimadzu Corp Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
JP2007232979A (ja) * 2006-02-28 2007-09-13 Shimadzu Corp Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
CN101107534A (zh) * 2005-05-02 2008-01-16 株式会社岛津制作所 Tft阵列基板检查装置
JP2008089476A (ja) * 2006-10-03 2008-04-17 Shimadzu Corp Ｔｆｔアレイ検査における電子線走査方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2758105B2 (ja) * 1992-04-28 1998-05-28 シャープ株式会社 アクティブマトリクス基板の検査方法及び検査装置
US5982190A (en) * 1998-02-04 1999-11-09 Toro-Lira; Guillermo L. Method to determine pixel condition on flat panel displays using an electron beam
US6873175B2 (en) * 2003-03-04 2005-03-29 Shimadzu Corporation Apparatus and method for testing pixels arranged in a matrix array
JP5034382B2 (ja) * 2006-09-01 2012-09-26 株式会社島津製作所 Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002260569A (ja) * 2001-02-27 2002-09-13 Shimadzu Corp Ｅｚフィルタ分光方法及びその装置
CN101107534A (zh) * 2005-05-02 2008-01-16 株式会社岛津制作所 Tft阵列基板检查装置
JP2007227807A (ja) * 2006-02-24 2007-09-06 Shimadzu Corp Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
JP2007232979A (ja) * 2006-02-28 2007-09-13 Shimadzu Corp Ｔｆｔアレイの検査方法及びｔｆｔアレイ検査装置
JP2008089476A (ja) * 2006-10-03 2008-04-17 Shimadzu Corp Ｔｆｔアレイ検査における電子線走査方法

Also Published As

Publication number Publication date
WO2010089856A1 (ja) 2010-08-12
CN102308202A (zh) 2012-01-04
JP5224194B2 (ja) 2013-07-03
JPWO2010089856A1 (ja) 2012-08-09

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Granted publication date: 20140709

Termination date: 20180204