CN102275234A - 单晶/多晶硅片多线切割自动脱胶方法及其装置 - Google Patents
单晶/多晶硅片多线切割自动脱胶方法及其装置 Download PDFInfo
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CN201110179343.5A CN102275234B (zh) | 2011-06-29 | 2011-06-29 | 单晶/多晶硅片多线切割自动脱胶方法及其装置 |
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CN201110179343.5A CN102275234B (zh) | 2011-06-29 | 2011-06-29 | 单晶/多晶硅片多线切割自动脱胶方法及其装置 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103991140A (zh) * | 2014-04-28 | 2014-08-20 | 阳光硅谷电子科技有限公司 | 一种金刚石线切割硅棒的切割工艺 |
CN104193151A (zh) * | 2014-08-22 | 2014-12-10 | 济源石晶光电频率技术有限公司 | 晶片、护边玻璃分离装置 |
CN106409972A (zh) * | 2016-09-27 | 2017-02-15 | 张家港市港威超声电子有限公司 | 硅片多线切割后的脱胶工装 |
CN109484002A (zh) * | 2018-09-26 | 2019-03-19 | 东莞华清光学科技有限公司 | 一种脱防爆膜工艺 |
CN113306270A (zh) * | 2021-04-27 | 2021-08-27 | 江西沃格光电股份有限公司 | 超薄玻璃减薄去胶分离装置 |
CN114853325A (zh) * | 2022-06-06 | 2022-08-05 | 安徽光智科技有限公司 | 硫系玻璃的隔离粘接方法 |
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US4477112A (en) * | 1980-06-30 | 1984-10-16 | Heraeus Quarzschmelze Gmbh | Semiconductor substrate handling tray |
WO1997002905A1 (en) * | 1995-07-13 | 1997-01-30 | Memc Electronic Materials, Inc. | Method and apparatus for washing silicon ingot with water to remove particulate matter |
CN101386156A (zh) * | 2008-10-14 | 2009-03-18 | 浙江华友电子有限公司 | 硅片清洗定位装置 |
CN101474832A (zh) * | 2009-01-24 | 2009-07-08 | 无锡市奥曼特科技有限公司 | 一种改良的硅棒夹具的放置结构 |
CN201302990Y (zh) * | 2008-11-19 | 2009-09-02 | 高佳太阳能(无锡)有限公司 | 硅片清洗脱胶夹具 |
CN201350670Y (zh) * | 2008-12-31 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | 多线锯切割后硅片脱胶保护装置 |
CN201784066U (zh) * | 2010-11-02 | 2011-04-06 | 宇骏(潍坊)新能源科技有限公司 | 一种硅片脱胶治具 |
CN201862609U (zh) * | 2010-10-09 | 2011-06-15 | 常州益鑫新能源科技有限公司 | 单晶硅切片中的清洗装置 |
CN202151885U (zh) * | 2011-06-29 | 2012-02-29 | 浙江光益硅业科技有限公司 | 单晶/多晶硅片多线切割自动脱胶装置 |
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2011
- 2011-06-29 CN CN201110179343.5A patent/CN102275234B/zh not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4477112A (en) * | 1980-06-30 | 1984-10-16 | Heraeus Quarzschmelze Gmbh | Semiconductor substrate handling tray |
WO1997002905A1 (en) * | 1995-07-13 | 1997-01-30 | Memc Electronic Materials, Inc. | Method and apparatus for washing silicon ingot with water to remove particulate matter |
CN101386156A (zh) * | 2008-10-14 | 2009-03-18 | 浙江华友电子有限公司 | 硅片清洗定位装置 |
CN201302990Y (zh) * | 2008-11-19 | 2009-09-02 | 高佳太阳能(无锡)有限公司 | 硅片清洗脱胶夹具 |
CN201350670Y (zh) * | 2008-12-31 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | 多线锯切割后硅片脱胶保护装置 |
CN101474832A (zh) * | 2009-01-24 | 2009-07-08 | 无锡市奥曼特科技有限公司 | 一种改良的硅棒夹具的放置结构 |
CN201862609U (zh) * | 2010-10-09 | 2011-06-15 | 常州益鑫新能源科技有限公司 | 单晶硅切片中的清洗装置 |
CN201784066U (zh) * | 2010-11-02 | 2011-04-06 | 宇骏(潍坊)新能源科技有限公司 | 一种硅片脱胶治具 |
CN202151885U (zh) * | 2011-06-29 | 2012-02-29 | 浙江光益硅业科技有限公司 | 单晶/多晶硅片多线切割自动脱胶装置 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103991140A (zh) * | 2014-04-28 | 2014-08-20 | 阳光硅谷电子科技有限公司 | 一种金刚石线切割硅棒的切割工艺 |
CN104193151A (zh) * | 2014-08-22 | 2014-12-10 | 济源石晶光电频率技术有限公司 | 晶片、护边玻璃分离装置 |
CN106409972A (zh) * | 2016-09-27 | 2017-02-15 | 张家港市港威超声电子有限公司 | 硅片多线切割后的脱胶工装 |
CN109484002A (zh) * | 2018-09-26 | 2019-03-19 | 东莞华清光学科技有限公司 | 一种脱防爆膜工艺 |
CN113306270A (zh) * | 2021-04-27 | 2021-08-27 | 江西沃格光电股份有限公司 | 超薄玻璃减薄去胶分离装置 |
CN113306270B (zh) * | 2021-04-27 | 2023-01-10 | 江西沃格光电股份有限公司 | 超薄玻璃减薄去胶分离装置 |
CN114853325A (zh) * | 2022-06-06 | 2022-08-05 | 安徽光智科技有限公司 | 硫系玻璃的隔离粘接方法 |
CN114853325B (zh) * | 2022-06-06 | 2023-09-05 | 安徽光智科技有限公司 | 硫系玻璃的隔离粘接方法 |
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