TW200717640A - Polishing method and polishing apparatus, and program for controlling polishing apparatus - Google Patents
Polishing method and polishing apparatus, and program for controlling polishing apparatusInfo
- Publication number
- TW200717640A TW200717640A TW095134182A TW95134182A TW200717640A TW 200717640 A TW200717640 A TW 200717640A TW 095134182 A TW095134182 A TW 095134182A TW 95134182 A TW95134182 A TW 95134182A TW 200717640 A TW200717640 A TW 200717640A
- Authority
- TW
- Taiwan
- Prior art keywords
- polishing
- stand
- completion
- polishing apparatus
- preparatory process
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title abstract 15
- 238000000034 method Methods 0.000 title abstract 6
- 239000007788 liquid Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
A polishing method can bring a polishing surface to the optimum condition for polishing, without using a dummy wafer or the like, before resuming polishing, thereby eliminating the cost of dummy wafer or the like. The polishing method comprises: carrying out a stand-by operation during a polishing-resting time period; carrying out a preparatory process to polishing, after completion of the stand-by operation, by dressing a polishing surface while supplying a polishing liquid to the polishing surface; and starting polishing of a workpiece after completion of the preparatory process to polishing. Determination as to whether to carry out the preparatory process to polishing after completion of the stand-by operation may be made based on the total operating time of the stand-by operation or the total effective number of the stand-by operations.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005269843A JP4757580B2 (en) | 2005-09-16 | 2005-09-16 | Polishing method, polishing apparatus, and program for controlling polishing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200717640A true TW200717640A (en) | 2007-05-01 |
TWI423316B TWI423316B (en) | 2014-01-11 |
Family
ID=37865100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095134182A TWI423316B (en) | 2005-09-16 | 2006-09-15 | Polishing method and polishing apparatus, and program for controlling polishing apparatus |
Country Status (6)
Country | Link |
---|---|
US (1) | US8332064B2 (en) |
JP (1) | JP4757580B2 (en) |
KR (1) | KR101276715B1 (en) |
CN (1) | CN101262981B (en) |
TW (1) | TWI423316B (en) |
WO (1) | WO2007032519A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI795449B (en) * | 2017-10-25 | 2023-03-11 | 日商荏原製作所股份有限公司 | Non-transitory computer-readable storage medium storing a program of stretching operation of elastic membrane, method of stretching operation of elastic membrane, and polishing apparatus |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5311178B2 (en) * | 2007-10-15 | 2013-10-09 | 株式会社ニコン | Polishing apparatus and polishing pad dressing method in polishing apparatus |
US8734661B2 (en) * | 2007-10-15 | 2014-05-27 | Ebara Corporation | Flattening method and flattening apparatus |
JP5392483B2 (en) * | 2009-08-31 | 2014-01-22 | 不二越機械工業株式会社 | Polishing equipment |
CN102479266B (en) * | 2010-11-26 | 2014-10-22 | 香港理工大学 | Method for generating structural surface by polishing |
CN102528653B (en) * | 2010-12-30 | 2014-11-05 | 中芯国际集成电路制造(上海)有限公司 | Fixed type particle grinding device and grinding method thereof |
JP6209088B2 (en) | 2013-01-25 | 2017-10-04 | 株式会社荏原製作所 | Polishing method and apparatus |
JP5534488B2 (en) * | 2013-06-24 | 2014-07-02 | 株式会社ニコン | Polishing apparatus and polishing pad dressing method in polishing apparatus |
CN104669032B (en) * | 2013-11-30 | 2017-12-12 | 东莞市远方物流设备有限公司 | logistics system |
SG10201508329UA (en) * | 2014-10-10 | 2016-05-30 | Ebara Corp | Buffing apparatus and substrate processing apparatus |
CN105014524B (en) * | 2015-05-27 | 2017-09-26 | 苏州德锐朗智能科技有限公司 | A kind of grinding technics of face lapping mill |
JP6376085B2 (en) * | 2015-09-03 | 2018-08-22 | 信越半導体株式会社 | Polishing method and polishing apparatus |
JP2017087407A (en) * | 2015-11-17 | 2017-05-25 | アルバック成膜株式会社 | Polishing method and polishing device |
CN106002510B (en) * | 2016-07-14 | 2018-08-24 | 吴江佳亿电子科技有限公司 | The production line for sorting and reprocessing for high voltage ceramic capacitor ceramic dielectric chip thickness |
JP6938262B2 (en) * | 2017-07-24 | 2021-09-22 | 株式会社ディスコ | Wafer processing method |
WO2020048311A1 (en) * | 2018-09-07 | 2020-03-12 | 杭州众硅电子科技有限公司 | Chemical-mechanical planarization device, wafer transfer method and wafer planarization unit |
CN109465738A (en) * | 2018-12-10 | 2019-03-15 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | A kind of polishing pedestal and polissoir |
US11691241B1 (en) * | 2019-08-05 | 2023-07-04 | Keltech Engineering, Inc. | Abrasive lapping head with floating and rigid workpiece carrier |
JP7296849B2 (en) * | 2019-10-21 | 2023-06-23 | 株式会社ディスコ | Cutting device and cutting blade dressing method |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0850956A (en) | 1994-08-08 | 1996-02-20 | Sumitomo Wiring Syst Ltd | Fixing structure of rubber plug for sealing |
JP3724869B2 (en) | 1995-10-09 | 2005-12-07 | 株式会社荏原製作所 | Polishing apparatus and method |
JP2862073B2 (en) * | 1995-12-08 | 1999-02-24 | 日本電気株式会社 | Wafer polishing method |
JP3164045B2 (en) * | 1997-11-27 | 2001-05-08 | 日本電気株式会社 | Semiconductor wafer mounting base |
JPH11294503A (en) | 1998-04-06 | 1999-10-29 | Shinko Electric Co Ltd | Positioning device of automated guided vehicle |
JP2000153445A (en) * | 1998-11-19 | 2000-06-06 | Seiko Epson Corp | Dresser for polishing device |
US6722964B2 (en) * | 2000-04-04 | 2004-04-20 | Ebara Corporation | Polishing apparatus and method |
JP2001345298A (en) * | 2000-05-31 | 2001-12-14 | Ebara Corp | Apparatus and method for polishing |
JP2003117816A (en) * | 2001-10-03 | 2003-04-23 | Hitachi Ltd | Method and device for dressing polishing pad, and method of polishing work by using the device |
JP2003117823A (en) * | 2001-10-09 | 2003-04-23 | Kohan Kogyo Kk | Dresser for polishing pad |
US6733368B1 (en) * | 2003-02-10 | 2004-05-11 | Seh America, Inc. | Method for lapping a wafer |
US7105446B2 (en) * | 2003-09-04 | 2006-09-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for pre-conditioning CMP polishing pad |
JP2005203729A (en) * | 2003-12-19 | 2005-07-28 | Ebara Corp | Substrate polishing apparatus |
KR101078007B1 (en) * | 2004-06-21 | 2011-10-28 | 가부시키가이샤 에바라 세이사꾸쇼 | Polishing apparatus and polishing method |
-
2005
- 2005-09-16 JP JP2005269843A patent/JP4757580B2/en active Active
-
2006
- 2006-09-12 KR KR1020087009041A patent/KR101276715B1/en active IP Right Grant
- 2006-09-12 CN CN2006800336016A patent/CN101262981B/en active Active
- 2006-09-12 WO PCT/JP2006/318461 patent/WO2007032519A1/en active Application Filing
- 2006-09-12 US US11/991,064 patent/US8332064B2/en active Active
- 2006-09-15 TW TW095134182A patent/TWI423316B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI795449B (en) * | 2017-10-25 | 2023-03-11 | 日商荏原製作所股份有限公司 | Non-transitory computer-readable storage medium storing a program of stretching operation of elastic membrane, method of stretching operation of elastic membrane, and polishing apparatus |
Also Published As
Publication number | Publication date |
---|---|
US8332064B2 (en) | 2012-12-11 |
JP2007075973A (en) | 2007-03-29 |
WO2007032519A1 (en) | 2007-03-22 |
CN101262981A (en) | 2008-09-10 |
TWI423316B (en) | 2014-01-11 |
JP4757580B2 (en) | 2011-08-24 |
CN101262981B (en) | 2013-05-15 |
KR101276715B1 (en) | 2013-06-19 |
US20090264052A1 (en) | 2009-10-22 |
KR20080046737A (en) | 2008-05-27 |
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