CN102205911B - Substrate processing apparatus and conversion method - Google Patents
Substrate processing apparatus and conversion method Download PDFInfo
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- CN102205911B CN102205911B CN2011100410661A CN201110041066A CN102205911B CN 102205911 B CN102205911 B CN 102205911B CN 2011100410661 A CN2011100410661 A CN 2011100410661A CN 201110041066 A CN201110041066 A CN 201110041066A CN 102205911 B CN102205911 B CN 102205911B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67793—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with orientating and positioning by means of a vibratory bowl or track
Abstract
The invention provides a substrate processing apparatus, a conversion method and a transferring method. The length of a part float supporting a substrate at the transportation direction during changing the supporting modes for the substrate can be suppressed and elevating rollers can be prevented from contacting with other components. A conversion portion 20 of the substrate processing apparatus 1 comprises a plurality of elevating rollers 21, a plurality of free rollers 24 and an entrance floating workbench 25. During changing the supporting mode for a substrate 9, the a part at the upstream of the substrate 9 along the transportation direction shifts load to the free rollers 24, so as to suppress the length of the entrance floating workbench 25 at the transportation direction and change the supporting mode of the substrate 9. Free roller 24 in a simple structure reliably supports the substrate 9 and can be arranged in a small region, so that free rollers 24 can be arranged at places without contacting the elevating rollers 21.
Description
Technical field
The method that the present invention relates to have the substrate board treatment of the mechanism of carrying substrate, the supporting way of substrate is changed and the method for shifting of transfer substrate.
Background technology
With in the manufacturing process of substrate, use the various substrate board treatments of the mechanism with carrying substrate with precision electronic devices such as substrates with substrate, used for solar batteries substrate, Electronic Paper with flexible base, board, base board for optical mask, colour filter with glass substrate, semiconductor wafer, film liquid crystal at liquid crystal indicator.Along with the variation in epoch, the size that becomes the substrate of processing object in such substrate board treatment has the trend of maximization.In recent years, for level and the substrate of carrying large stably, while proposed to make substrate to float the carrying mechanism of carrying at workbench.
While substrate is floated in the substrate board treatment of carrying at workbench, the supporting way of substrate need to be converted to the mechanism of floating supporting way from other supporting way.Technology as the supporting way of conversion baseplate has been put down in writing following substrate transfer apparatus in patent documentation 1, that is, this substrate transfer apparatus has from the carrying mechanism different from floating carrying and is converted to the mechanism of floating carrying.In patent documentation l, descend by the roller that makes supporting substrate, the substrate floating on the roller is remained on be configured to the floating with on the plate of curtain shape.
In addition, while substrate is floated in the substrate board treatment that the end edge portion that keeps substrate carries at workbench, need the end edge portion of the substrate that will be come by other carrying mechanisms carryings remain on mechanism on the maintaining part of regulation.Mechanism as the end edge portion that keeps substrate has put down in writing following mechanism in patent documentation 2, that is, this mechanism rises near substrate the absorption sucker by the sucker driver, and described absorption sucker is adsorbed on the lower surface of substrate by vacuum adsorption force.
Patent documentation 1:JP JP 2008-166348 communique;
Patent documentation 2:JP JP 2009-117571 communique.
Summary of the invention
(1) first purpose
In the substrate transfer apparatus of patent documentation 1, on the position of the supporting way of conversion baseplate, need length to use plate more than or equal to the floating of size of substrate on the carrying direction.In addition, in the substrate transfer apparatus of patent documentation 1, be configured to floating of curtain shape dispose in the gap with plate can lifting roller.Be difficult to like this, in design alternately dispose in mutually non-touching mode and float with plate, roller and make the mechanism of roller lifting.
Therefore, the first purpose provide in the converter section of the supporting way of conversion baseplate, suppress to float supporting substrate part on the carrying direction length and the substrate board treatment that can easily avoid dance roller to contact with other members.
(2) second purposes
In the substrate board treatment of patent documentation 2, make the absorption sucker near the lower surface of static substrate.Thus, need to be used for making the sucker driver of absorption sucker lifting moving.The result makes the structure complicated of the trucking department that comprises the sucker driver.
In addition, in the substrate board treatment of patent documentation 2, the height of substrate requires the sucker driver to have high positioning accuracy during for critically regulation carrying.In addition, expect also by long use that the reproducibility of sucker driver location can reduce.If will keep for a long time the reproducibility of sucker driver location, then also need the mechanism of the height and position of sucker driver supervision absorption sucker in addition.
Therefore, while the second purpose provides the dislocation that need not make the maintaining part lifting moving and can suppress substrate keeps substrate from lower face side technology.
In order to reach above-mentioned the first purpose, the first invention of the application is a kind of substrate board treatment, has the mechanism of carrying substrate, have: the first trucking department, its with board carrying to the assigned position of carrying on the path, the second trucking department, it is in the carrying direction downstream of described assigned position, substrate is floated on one side at workbench, one side carrying substrate, converter section, the supporting way of its conversion baseplate between described the first trucking department and described the second trucking department, control part, it controls described converter section; Described converter section has: dance roller, the one edge joint touches supporting substrate, one side active rotation, can be between normal place and down position lifting moving, free roll (free roller), it on one side is supported on substrate contacts the height and position between the upper end of described dance roller of the upper end of described dance roller of normal place and down position, one side is corresponding to the mobile and driven rotation of substrate, entrance floats workbench, it is configured in the carrying direction downstream of described free roll, make substrate floating at the low height of bearing height than the described dance roller supporting substrate that passes through normal place on one side, on one side supporting substrate; Described control part is controlled described converter section, so that be configured to after the described dance roller of normal place and described entrance float on the workbench at substrate, described dance roller descends to described down position, with the part of the carrying direction upstream side of substrate to described free roll transfer.
The second invention of the application for as the substrate board treatment of the first invention, wherein, described entrance floats workbench and is shorter in length than the length of substrate on the carrying direction in carrying on the direction.
The application's the 3rd invention for as the substrate board treatment of the first invention or the second invention, wherein, the zone that disposes described dance roller and described free roll is being shorter in length than the length of substrate on the carrying direction on the carrying direction.
The application's the 4th invention is the substrate board treatment such as the first invention or the second invention, wherein, described free roll comprises: a plurality of downstreams free roll, its lateral edge portion of floating the carrying direction upstream side of workbench along described entrance is arranged, a plurality of upstream side free rolls, it is arranged in the position of the carrying direction upstream side of described a plurality of downstreams free roll; Described a plurality of upstream side free roll is configured to the density that density is lower than described a plurality of downstreams free roll.
The application's the 5th invention is the substrate board treatment such as the first invention or the second invention, wherein, described converter section also has detent mechanism, this detent mechanism determines substrate position in the horizontal direction under substrate is configured to float across the described dance roller of normal place and described entrance state on the workbench.
The application's the 6th invention is the substrate board treatment such as the first invention or the second invention, wherein, to float the brace table of workbench different from supporting described entrance for the brace table that supports described dance roller and described free roll, and described dance roller and described free roll float workbench with described entrance and mutually be not connected.
The application's the 7th invention is the substrate board treatment such as the first invention or the second invention, and wherein, described free roll is that diameter is less than the roller of the diameter of described dance roller.
In addition, in order to reach above-mentioned the first purpose, the application's the 8th invention is conversion method, the supporting way of conversion baseplate between the first trucking department and the second trucking department, wherein, described the first trucking department with board carrying to the assigned position of carrying on the path, described the second trucking department is in the carrying direction downstream of described assigned position, substrate is floated on one side at workbench, one side carrying substrate, this conversion method is utilized dance roller, free roll and entrance float workbench, wherein, described dance roller contacts supporting substrate on one side, one side active rotation, can be between normal place and down position lifting moving, described free roll is supported on substrate contacts the height and position between the upper end of described dance roller of the upper end of described dance roller of normal place and down position on one side, one side is corresponding to the mobile and driven rotation of substrate, described entrance floats the carrying direction downstream that workbench is configured in described free roll, make on one side substrate floating to the low height of bearing height than the described dance roller supporting substrate of normal place, one side supporting substrate, this conversion method has: operation a, substrate is configured to float on the workbench across described dance roller and the described entrance of normal place, operation b, behind described operation a, described dance roller is descended to described down position, with the part of the carrying direction upstream side of substrate to described free roll transfer.
In addition, in order to reach above-mentioned the second purpose, the application's the 9th invention is substrate board treatment, has the mechanism of carrying substrate, has: the first trucking department, its from carrying direction upstream side with board carrying to assigned position, the second trucking department, it is from described assigned position to carrying direction downstream carrying substrate, transfer section, it transfers load to described second trucking department with substrate from described the first trucking department at described assigned position; Described transfer section has jacking mechanism, this jacking mechanism is touched in the situation of the state that is supported for flat-hand position in a part of keeping substrate, other parts of jack-up substrate, described the second trucking department has the maintaining part that keeps substrate to move in the carrying direction from lower face side on one side on one side, this substrate board treatment also has control part, described control part is controlled described jacking mechanism and described maintaining part, so that by described jacking mechanism partly the jack-up substrate and make described maintaining part enter substrate by the part of jack-up below after, by the jack-up of removing described jacking mechanism substrate is remained on the described maintaining part.
The application's the tenth invention as the substrate board treatment of the 9th invention, wherein, described transfer section also has the detent mechanism that substrate is carried out the location on the horizontal direction, described control part is controlled described detent mechanism and described jacking mechanism, so that after described detent mechanism positions substrate, by described jacking mechanism jack-up substrate.
The application's the 11 invention is the substrate board treatment such as the tenth invention, wherein, described detent mechanism has the align member with the end edge portion butt of substrate, described control part is controlled described jacking mechanism and described detent mechanism, so that after positioning by described detent mechanism, keep out of the way from substrate with the described align member of described other part butts of substrate, then, by described jacking mechanism jack-up substrate.
The application's the 12 invention for as the 9th invention each substrate board treatment to the 11 invention, wherein, described maintaining part has: maintenance face, the height and position of its lower surface of regulation substrate when keeping, the elastic absorption body, it can be flexible at above-below direction, and be adsorbed on the lower surface of substrate; Before described elastic absorption body was adsorbed on the substrate, the upper-end part of driving of described elastic absorption body was in the top of described maintenance face, and when described elastic absorption body was adsorbed on the substrate, the upper-end part of driving of described elastic absorption body was in the height identical with described maintenance face.
The application's the 13 invention for as the 9th invention each substrate board treatment to the 11 invention, wherein, described jacking mechanism with substrate perpendicular near the jack-up both ends on the direction of carrying direction.
In addition, in order to reach above-mentioned the second purpose, the application's the 14 invention is method for shifting, substrate is transferred load to the second trucking department from the first trucking department, comprise: operation a, Yi Bian keep the part of substrate be touched be supported for flat-hand position state, Yi Bian with other part jack-up of substrate; Operation b, behind described operation a, make maintaining part enter substrate by the below of the part of jack-up; Operation c behind described operation b, by removing the jack-up to substrate, remains on the described maintaining part substrate.
The application's the 15 invention for as the method for shifting of the 14 invention, wherein, also have operation d, described operation d carried out location on the horizontal direction to substrate before described operation a.
The application's the 16 invention is the method for shifting such as the 15 invention, wherein, in described operation d, make the end edge portion butt of align member and substrate, also have operation e between described operation d and described operation a, described operation e makes with the described align member of described other part butts of substrate and keeps out of the way from substrate.
According to the application first the invention to the 8th the invention, in converter section, the part of the carrying direction upstream side of substrate from the dance roller transfer to free roll.Thus, float the length of workbench on the carrying direction on one side can suppress entrance, Yi Bian the supporting way of conversion baseplate.Free roll can be by simple reliable in structure ground supporting substrate, and can be configured in the narrow and small zone.Thereby, be easy to free roll is configured in the position that does not contact with dance roller.
Especially, according to the application's the 3rd invention, can suppress to dispose the length of zone on the carrying direction of dance roller and free roll.
Especially, the 4th invention according to the application can suppress end edge portion and substrate contacts that entrance floats the carrying direction upstream side of workbench, and can suppress as a whole the quantity of free roll.
Especially, according to the application's the 5th invention, substrate is oriented to contact the state that is supported on the dance roller.Therefore, can be by the friction between dance roller and substrate, the substrate movement in the horizontal direction after suppressing to locate.
Especially, according to the application's the 6th invention, the mechanical oscillation that can suppress dance roller and free roll are transmitted to entrance and float workbench.
Especially, the 7th invention according to the application is easier to free roll is configured in the position that does not contact with dance roller.
According to the 9th invention the～the ten six invention of the application, by local jack-up substrate, can make maintaining part enter in the situation of lifting moving not substrate below.Thereby, on one side the fixing height and position of maintaining part, Yi Bian keep substrate from lower face side.In addition, with substrate jack-up the time, the part of substrate is touched and is supported for flat-hand position.The dislocation of the substrate in the time of therefore, can suppressing jack-up.
Especially, according to the application's the tenth invention or the 15 invention, maintaining part can keep the more accurate position of base lower surface.
Especially, the 11 invention or the 16 invention according to the application can prevent in substrate align member and substrate sliding contact during by jack-up.
Especially, according to the application's the 12 invention, by making the elastic absorption body be adsorbed on the lower surface of substrate and shrink, can be to the further lower surface of substrate of maintenance face.
Especially, according to the application's the 13 invention, with substrate jack-up the time, the power on the carrying direction is difficult for acting on substrate.Therefore, with substrate jack-up the time, can suppress the position skew of substrate on the carrying direction.
Description of drawings
Fig. 1 is the vertical view of substrate board treatment.
Fig. 2 is near the vertical view the first trucking department and the converter section.
Fig. 3 is near the end view the first trucking department and the converter section.
Fig. 4 is the figure that dance roller, lift drive mechanism, free roll and clamping mechanism are observed in the A-A position from Fig. 1.
Fig. 5 is the figure that dance roller, lift drive mechanism, free roll and clamping mechanism are observed in the A-A position from Fig. 1.
Fig. 6 is the block diagram of the electric connection structure between the each several part of expression control part and substrate board treatment.
Fig. 7 is the flow chart of flow process of the action of expression substrate board treatment.
Fig. 8 is near the end view the converter section of substrate when being configured to float on the workbench across dance roller and entrance.
Fig. 9 is near the end view of converter section when a plurality of lifter pins are risen.
Figure 10 is near the end view the converter section that makes after dance roller descends.
Figure 11 is near the end view converter section when clamping mechanism is configured in the downside at the both ends on the Width of substrate.
Near converter section when Figure 12 is the both ends that make on the Width of clamping mechanism absorption substrate end view.
Figure 13 is the vertical view of substrate board treatment.
Figure 14 is near the vertical view the first trucking department and the transfer section.
Figure 15 is near the end view the first trucking department and the transfer section.
Figure 16 is near the broken section enlarged drawing of upper surface of absorption maintaining part.
Figure 17 is near the broken section enlarged drawing of upper surface of absorption maintaining part.
Figure 18 is the block diagram of the electric connection structure between the each several part of expression control part and substrate board treatment.
Figure 19 is the flow chart of flow process of the action of expression substrate board treatment.
Figure 20 is near the end view the transfer section.
Figure 21 is the figure that near the structure the transfer section is observed in the B-B position from Figure 13.
Figure 22 is near the end view the transfer section.
Figure 23 is the figure that near the structure the transfer section is observed in the B-B position from Figure 13.
Figure 24 is near the end view the transfer section.
Figure 25 is the figure that near the structure the transfer section is observed in the B-B position from Figure 13.
Figure 26 is near the end view the transfer section.
Figure 27 is the figure that near the structure the transfer section is observed in the B-B position from Figure 13.
Figure 28 is near the end view the transfer section.
Figure 29 is the figure that near the structure the transfer section is observed in the B-B position from Figure 13.
Embodiment
Below, with reference to the description of drawings embodiments of the present invention.
＜1. the first execution mode 〉
The structure of＜1-1. substrate board treatment 〉
Fig. 1 is the vertical view of the substrate board treatment 1 of the first execution mode of the present invention.In the photo-mask process of the rectangle glass 9 that this substrate board treatment 1 is used for using at the etching liquid crystal device (below, only claim " substrate 9 ") at the upper surface coating anti-corrosion liquid (photoresist liquid) of substrate 9.Substrate board treatment 1 has the mechanism that substrate 9 is supported for flat-hand position one side carrying substrate 9 on one side.Below, the direction of carrying substrate 9 is called " carrying direction ", will be called " Width " perpendicular to the horizontal direction of carrying direction.In each figure of the application, represent to carry direction and Width with arrow.
As shown in Figure 1, substrate board treatment 1 has the first trucking department 10, converter section 20, the second trucking department 30, anti-corrosion liquid applying mechanism 40, takes out of section 50 and control part 60.Fig. 2 is near the vertical view the first trucking department 10 and the converter section 20.Fig. 3 is near the end view the first trucking department 10 and the converter section 20.In addition, Fig. 4 and Fig. 5 are the figure of A-A position observation dance roller 21, lift drive mechanism 23, free roll 24 and clamping mechanism 32 from Fig. 1.Below, see figures.1.and.2～Fig. 5.
The first trucking department 10 is the substrate 9 of will take out of from the device 2 of front operation is transported to converter section 20 along the carrying path positions.The first trucking department 10 has a plurality of conveying rollers 11 that are rotated centered by the rotating shaft 11a that extends along Width.In the present embodiment, on a plurality of rotating shaft 11a that uniformly-spaced arrange along its length, in equally spaced mode on the Width 4 conveying rollers 11 are installed respectively.A plurality of conveying rollers 11 are configured in single fixing height and position.
Connecting the rotary drive mechanism 12 that schematically represents among Fig. 2 at the rotating shaft 11a of conveying roller 11.Rotary drive mechanism 12 for example is the mechanism that the Timing Belt that will become the motor of drive source and transmission of drive force combines.If make rotary drive mechanism 12 actions, then a plurality of conveying rollers 11 are on one's own initiative to same direction rotation.Thus, contact the substrate 9 that is supported on the conveying roller 11 to the downstream carrying of carrying direction.
A plurality of dance rollers 21 are rollers of being arranged to be rotated centered by the rotating shaft 21a that extends along Width and can oscilaltion moving.In the present embodiment, on two rotating shaft 21a that arrange along its length respectively with Width on equally spaced mode 4 dance rollers 21 are installed.
Connecting the rotary drive mechanism 22 that schematically represents among Fig. 2 at rotating shaft 21a.Rotary drive mechanism 22 for example is the mechanism that the Timing Belt that will become the motor of drive source and transmission of drive force combines.If make rotary drive mechanism 22 actions, then a plurality of dance rollers 21 are on one's own initiative to same direction rotation.Thus, contact the substrate 9 that is supported on the dance roller 21 to the downstream carrying of carrying direction.
As shown in Figure 4 and Figure 5, the rotating shaft 21a at dance roller 21 is connecting lift drive mechanism 23.Lift drive mechanism 23 has: arm 23a, and it is via bearings rotating shaft 21a; Cylinder 23b, it makes arm 23a lifting moving.If make cylinder 23b action, a plurality of dance rollers 21 lifting moving between normal place shown in Figure 4 and down position shown in Figure 5 then.In addition, lift drive mechanism 23 also can utilize the driving mechanism (for example, motor) except cylinder.
The height and position of upper end that is configured in the height and position of upper end (with the position of the lower surface of substrate 9 contact) of the dance roller 21 of normal place and conveying roller 11 is roughly consistent.In addition, the height and position of upper end that is configured in the dance roller 21 of down position is positioned at the below of height and position of the upper end of free roll 24.
A plurality of free rolls 24 are the rollers that support for a part that replaces the carrying direction upstream side of 21 pairs of substrates 9 of dance roller when dance roller 21 has descended.A plurality of free rolls 24 rotate freely with respect to the intrinsic rotating shaft that is arranged on each roller.Under the part of substrate 9 was supported on state on the free roll 24, if substrate 9 side shifting downstream, then a plurality of free rolls 24 correspondinglyly and drivenly rotated with the movement of substrate 9.
A plurality of free rolls 24 are configured on the single fixing height and position.The height and position of the upper end of free roll 24, be in the dance roller 21 that is configured in normal place the upper end height and position the below and be in the top of height and position of the upper end of the dance roller 21 that is configured in down position.In addition, the height and position of the upper end of free roll 24 is in and is supported on entrance and floats the lower surface of the substrate 9 on the workbench 25 and the upper end height and position in the roughly same height of clamping mechanism described later 32.
In addition, as depicted in figs. 1 and 2, each free roll 24 is configured in overlooks down the position that does not overlap with the rotating shaft 21a of a plurality of dance rollers 21 and dance roller 21.Therefore, the rotating shaft 21a of a plurality of dance rollers 21 and dance roller 21 can not with situation that a plurality of free rolls 24 contact under lifting moving.
As shown in Figure 2, a plurality of free rolls 24 comprise a plurality of downstream free roll 24a and a plurality of upstream side free roll 24b.A plurality of downstream free roll 24a float between the workbench 25 at dance roller 21 and the entrance in the downstream that is disposed at the carrying direction, the broad ways arrangement.That is, a plurality of downstream free roll 24a float the end edge portion arrangement of the carrying direction upstream side of workbench 25 along entrance.On the other hand, a plurality of upstream side free roll 24b are arranged in the position of the carrying direction upstream side of downstream free roll 24a.
The interval on Width is narrow each other than adjacent upstream side free roll 24b at the interval on the Width each other for adjacent downstream free roll 24a.Therefore, substrate 9 in downwards bending between the free roll 24a of downstream less than substrate 9 downwards bending between upstream side free roll 24b.Thus, suppress the end edge portion of carrying direction upstream side and contacting of substrate 9 that entrance floats workbench 25.In addition, by with the density configuration upstream side free roll 24b less than downstream free roll 24a, come the quantity of whole minimizing free roll 24.
In addition, in the present embodiment, use diameter less than the free roll 24 of the diameter of dance roller 21.Therefore, guarantee the space of dance roller 21 lifting moving, and be easy to a plurality of free rolls 24 are configured in the position that does not contact with dance roller 21.Free roll 24 can disconnect fully with driving mechanism, as long as still can remove the transmission of power of self-driven mechanism, then can be connected with the driving mechanism of some.But the mode that does not connect driving mechanism on free roll 24 can more easily be guaranteed the space that dance roller 21 carries out lifting, thus preferred this mode.
As shown in Figure 3, the roller brace table 71 that shared of a plurality of conveying rollers 11, a plurality of dance roller 21 and a plurality of free roll 24 supports.On the other hand, entrance floats workbench 25, application job platform 31 described later and outlet described later and floats workbench 51 and supported by the worktable support platform 72 of the other setting different from roller brace table 71.
That is to say, in the present embodiment, the position by roller contact supporting substrate 9 and substrate 9 is floated be supported on position on the workbench by different brace table supports, and mutually do not connect.Thus, suppressing mechanical oscillation from conveying roller 11, dance roller 21 and free roll 24 is transmitted to entrance and floats workbench 25, application job platform 31 and outlet and float workbench 51.
Entrance floats the carrying direction downstream that workbench 25 is configured in a plurality of free rolls 24.Entrance floats workbench 25 with dance roller 21, free roll 24 or application job platform described later 31 supporting substrates 9.The upper surface that floats workbench 25 at entrance is provided be used to spraying compressed-air actuated a plurality of squit hole 25a.
When carrying substrate 9, never the compressed air of illustrated supply source supply sprays towards the top from a plurality of squit hole 25a.By the compressed air supporting substrate 9 from a plurality of squit hole 25a ejection, it is become from entrance float the state that the upper surface of workbench 25 floats.That is, entrance floats the mode supporting substrate 9 of workbench 25 not contact with the lower surface of substrate 9.
4 guide reels 26 are the mechanisms that on the carrying direction substrate 9 guided at converter section 20.4 guide reels 26 are configured in the both sides on the carrying path of substrate 9.Each guide reel 26 can be rotated centered by the rotating shaft of above downward-extension.If substrate 9 breaks away from the carrying path, then guide reel 26 contacts with the end edge portion of substrate 9 on one side, Yi Bian be rotated.Thus, revise substrate 9 towards, thereby carrying substrate 9 on the carrying direction correctly.
Can make 4 guide reel 26 lifting moving by not shown driving mechanism.During carrying substrate 9,4 guide reels 26 are in the state of the both sides on the carrying path that rises to substrate 9 in converter section 20.On the other hand, clamping mechanism 32 described later enter substrate 9 below the time, 4 guide reels 26 are in the state that drops to the height and position that does not contact with clamping mechanism 32.
When substrate 9 is configured to dance roller 21 on the normal place and entrance and floats on the workbench 25, the end edge portion butt of a plurality of alignment pin 27a and substrate 9.Thus, determined substrate 9 position and posture in the horizontal direction.On the other hand, when carrying substrate 9 and clamping mechanism 32 enter substrate 9 below the time, a plurality of alignment pin 27a keep out of the way not the position that contacts with clamping mechanism 32 with substrate 9.
A plurality of lifter pins 28 are the mechanisms for the both ends on the Width that temporarily lifts substrate 9 when the supporting way of converter section 20 conversion baseplate 9.A plurality of lifter pins 28 are configured in following position, that is, under substrate 9 was positioned the state that mechanism 27 located, the both ends from the Width of substrate 9 slightly relied on the inboard on the Width.In addition, by not shown driving mechanism, can make integratedly lifting moving of a plurality of lifter pins 28.When a plurality of lifter pins 28 are risen, the lower surface butt of lifter pin 28 and substrate 9, the both ends on the Width of substrate 9 are lifted by lifter pin 28.
In the present embodiment, it is inboard that a plurality of lifter pins 28 are configured in the Width at the both ends on the Width that entrance floats workbench 25.Therefore, clamping mechanism 32 described later can with in the situation that a plurality of lifter pins 28 contact not enter the position that entrance floats the Width outside of workbench 25.In addition, the part of being adsorbed by clamping mechanism 32 at least that needs only in the substrate 9 is exposed to the Width outside that entrance floats workbench 25.Therefore, can suppress substrate 9 and float the amount of exposing that workbench 25 exposes from entrance.
As shown in Figure 2, converter section 20 is set as the length (that is, slightly being longer than the degree of the length of substrate 9 on the carrying direction) that roughly can dispose a substrate 9 in the length L 1 on the carrying direction.The zone that disposes dance roller 21 and free roll 24 in the converter section 20 carrying on the direction length L 2 and entrance to float workbench 25 all short than the length of substrate 9 on the carrying direction in the length L 3 on the carrying direction.Thus, can suppress the length of converter section 20 on the carrying direction.
Float the workbench of supporting substrate 9 as entrance floats workbench 25, need high process technology at aspects such as forming squit hole 25a, manufacturing cost is also high.In the present embodiment, can suppress entrance as described above and float the length of workbench 25 on the carrying direction.Thus, the manufacturing of substrate board treatment 1 becomes easily, also can suppress manufacturing cost.In addition, can also suppress to float the compressed-air actuated amount that workbench 25 is supplied with to entrance.
The second trucking department 30 is to the position of carrying direction downstream carrying substrate 9 when the upper surface coating anti-corrosion liquid of substrate 9.As shown in Figure 1, the second trucking department 30 has application job platform 31 and a pair of clamping mechanism 32.
The Width outside at application job platform 31 disposes pair of right and left clamping mechanism 32.In each clamping mechanism 32, be provided with a pair of adsorption section 32a of lower surface for the end on the Width of absorption substrate 9 in the carrying direction.In addition, each clamping mechanism 32 can move by the guide rail 32b on the upper surface that is formed on worktable support platform 72 on the carrying direction by driving mechanisms such as linear motors.As shown in Figure 1, guide rail 32b position from the Width of free roll 24 outside on the carrying direction extends to the position that the Width outside of workbench 51 is floated in outlet described later.A pair of clamping mechanism 32 can adsorb on one side and keep substrate 9, on one side substrate 9 is transported to the section of taking out of 50 from converter section 20.
Anti-corrosion liquid applying mechanism 40 is for to the mechanism while the upper surface coating anti-corrosion liquid that is supported on the substrate 9 that is handled upside down on the application job platform 31.In Fig. 1, for application job platform 31 and clamping mechanism 32 clearly are shown, dot anti-corrosion liquid applying mechanism 40.Anti-corrosion liquid applying mechanism 40 has at the added bridge formation section 41 above application job platform 31 of Width and the gap nozzle 42 that is installed in the bridge formation section 41.Gap nozzle 42 is via the ejiction opening of the slit-shaped of extending along Width, to the upper surface ejection of substrate 9 anti-corrosion liquid supplied with of illustrated anti-corrosion liquid supply source never.
Take out of section 50 and be for the substrate 9 that will apply anti-corrosion liquid from position that substrate board treatment 1 is taken out of.As shown in Figure 1, taking out of section 50 has outlet and floats workbench 51 and a plurality of taking out of with pin 52.
The carrying direction downstream that workbench 51 is configured in application job platform 31 is floated in outlet.The upper surface that floats workbench 51 in outlet is provided be used to spraying compressed-air actuated a plurality of squit hole.Substrate 9 is being supported on outlet when floating on the workbench 51, never the compressed air supplied with of illustrated supply source sprays towards the top from a plurality of squit holes.By the compressed air supporting substrate 9 from the ejection of a plurality of squit holes, it is become from outlet float the state that the upper surface of workbench 51 floats.That is, the mode supporting substrate 9 of workbench 51 not contact with the lower surface of substrate 9 floated in outlet.
A plurality of taking out of with pin 52 in the surface of workbench 51 is floated in outlet equally spaced arranged along carrying direction and Width.A plurality of taking out of with the upper end contact supporting substrate 9 of pin 52 by them.In addition, can make a plurality of taking out of use integratedly lifting moving of pin 52 by not shown driving mechanism.Therefore, a plurality of taking out of used pin 52 supporting substrate 9 on one side, Yi Bian substrate 9 is moved up and down.
When floating workbench 51 carrying substrate 9 from application job platform 31 to outlet, contact with substrate 9 for fear of a plurality of taking out of with pins 52, a plurality of take out of to be in pin 52 keep out of the way the state of below that the upper surface of workbench 51 is floated in outlet.In addition, when floating workbench 51 from outlet and take out of substrate 9, a plurality of taking out of with pin 52 is projected into the top that the upper surface of workbench 51 is floated in outlet.Thus, lift substrate 9 to the top that workbench 51 is floated in outlet.Be supported on a plurality of taking out of with the substrate 9 on the pin 52 and be configured in the device 4 that the shifting mechanical arm 3 that exports the carrying direction downstream of floating workbench 51 is carried to the back operation.
The action of＜1-2. substrate board treatment 〉
The action of substrate board treatment 1 then, is described.Fig. 7 is the flow chart of flow process of the action of expression substrate board treatment 1.
In substrate board treatment 1 during treatment substrate 9, at first, the substrate 9 (step S1) of taking out of from the device 2 of front operation by 10 carryings of the first trucking department.Substrate 9 is transferred roller 11 contacts and supports, by the rotation of conveying roller 11, to carrying direction downstream carrying substrate 9.At this moment, dance roller 21 is configured in normal place, to the direction rotation identical with the direction of rotation of conveying roller 11.Therefore, continuously substrate 9 is transported to converter section 20 by conveying roller 11 and dance roller 21.
In addition, at this moment, 4 guide reels 26 are in the state of the both sides on the carrying path that rises to substrate 9.Substrate 9 is guided by these guide reels 26, thereby correctly carries to carrying direction downstream.
When substrate 9 arrived converter section 20, dance roller 21 stopped the rotation.Thus, substrate 9 stops (step S2) under the state that floats across dance roller 21 and entrance on the workbench 25.
Fig. 8 is near the end view the converter section 20 of substrate 9 when being configured to float on the workbench 25 across dance roller 21 and entrance.The part contact of the carrying direction upstream side of substrate 9 is supported on the dance roller 21 of normal place.On the other hand, the part in the carrying direction downstream of substrate 9 is floated and is supported on entrance and floats on the workbench 25.The height and position that entrance floats the part on the workbench 25 that is supported in the substrate 9 is lower than the height and position that is supported on the part on the dance roller 21.
Then, each end edge portion butt of the carrying direction upstream side of a plurality of alignment pin 27a and substrate 9, carrying direction downstream and Width both sides.Thus, determine substrate 9 position and posture (step S3) in the horizontal direction.
When the location of completing substrate 9,4 guide reels 26 descend and keep out of the way to the retreating position of regulation.In addition, the alignment pin 27a of two end edge portion butts among a plurality of alignment pin 27a and Width substrate 9 also leaves substrate 9 and keeps out of the way to the retreating position of regulation.After alignment pin 27a kept out of the way, the part of the carrying direction upstream side of substrate 9 was also supported by dance roller 21 contacts.Therefore, the static friction by 21 of substrate 9 and dance rollers prevents the dislocation of substrate 9 on Width.
Then, make a plurality of lifter pins 28 risings (step S4).The lower surface butt of lifter pin 28 and substrate 9 lifts the both ends on the Width of substrate 9.Fig. 9 is near the end view the converter section 20 when a plurality of lifter pins 28 are risen.As shown in Figure 9, the upper end of a plurality of lifter pins 28 rises to the top position of upper end of the dance roller 21 of normal place.
In addition, the substrate 9 of present embodiment is large-scale and have flexible.Therefore, in step S4, only be picked up near the both ends on the Width in the substrate 9.Middle body on the Width of substrate 9 is kept by dance roller 21 and entrance and is floated the state that workbench 25 supports.Thereby the static friction by 21 of substrate 9 and dance rollers prevents the dislocation of substrate 9 on Width.
In addition, in the present embodiment, after the alignment pin 27a of two end edge portion butts on the Width that makes with substrate 9 keeps out of the way, a plurality of lifter pins 28 are risen.Therefore, when lifter pin 28 was risen, the end edge portion on the Width of substrate 9 and alignment pin 27a can sliding contacts.Thus, can prevent from producing particle because of the sliding contact of substrate 9 and alignment pin 27a.
Then, make dance roller 21 descend from normal place to down position (step S5).Figure 10 is near the end view the converter section 20 that makes after dance roller 21 descends.The height and position of the upper end of dance roller 21 is positioned at the below of height and position of the upper end of free roll 24.At this moment, also constant by lifter pin 28 supports near the both ends on the Width of substrate 9, but near the central authorities on the Width, a plurality of free rolls 24 replace a plurality of dance rollers 21 to come the part of supporting substrate 9.
Then, as shown in Figure 11, clamping mechanism 32 is moved to carrying direction upstream side.Thus, make clamping mechanism 32 be configured in the downside at the both ends on the Width of substrate 9.Then, after making adsorption section 32a begin to attract action, as shown in Figure 12, a plurality of lifter pins 28 are descended.Thus, make both ends (step S6) on the Width of adsorption section 32a absorption substrate 9 of clamping mechanism 32.Substrate 9 is in following state, that is, the part contact of carrying direction upstream side is supported on the free roll 24, and the part in carrying direction downstream is floated and is supported on entrance and floats on the workbench 25, and the both ends absorption on the Width remains on the clamping mechanism 32.
In converter section 20, carry out during the action of step S3～S6 the end edge portion butt in the carrying direction upstream side of alignment pin 27a and substrate 9 and carrying direction downstream.Therefore, prevent the dislocation of substrate 9 on the carrying direction.In addition, during step S3～S6, substrate 9 is supported by dance roller 21 or free roll 24 contacts constantly.Therefore, can pass through the static friction of 9 of dance roller 21 or free roll 24 and substrates, prevent the dislocation of substrate 9 on Width.
In addition, in the present embodiment, utilize a plurality of lifter pins 28 temporarily to lift near the both ends on the Width of substrate 9, descend by making this lifter pin 28, make the lower surface of substrate 9 near clamping mechanism 32.Therefore, do not need to make the adsorption section 32a of clamping mechanism 32 to move up and down.Thereby, can simplify the structure of clamping mechanism 32.
When substrate 9 is kept by a pair of clamping mechanism 32, keep out of the way to the retreating position of regulation with the carrying direction upstream side of substrate 9 and the alignment pin 27a of the end edge portion butt in carrying direction downstream.Then, clamping mechanism 32 moves to carrying direction downstream along guide rail 32b, comes to carrying direction downstream carrying substrate 9.
In addition, in the present embodiment, before the lower position of gap nozzle 42 was closed in the end in the carrying direction downstream of substrate 9, the end portion supports of the carrying direction upstream side of substrate 9 was floated on the workbench 25 at entrance.That is, in the moment to the upper surface of substrate 9 coating anti-corrosion liquid, substrate 9 integral body are floated and are supported on entrance and float on workbench 25 and the application job platform 31.Therefore, the mechanical oscillation of inhibition free roll 24 are transmitted on the substrate 9 that applies in the anti-corrosion liquid.Thus, it is bad to suppress the coating of anti-corrosion liquid of upper surface of substrate 9.
The substrate 9 that has applied anti-corrosion liquid is moved to and stops after outlet is floated on the workbench 51.Then, a plurality of upper surfaces that float workbench 51 from outlet with pin 52 of taking out of are given prominence to.Thus, lift substrate 9 to the top that workbench 51 is floated in outlet.Then, shifting mechanical arm 3 is accepted by a plurality of substrates 9 that supporting with pin 52 of taking out of, from the shifting mechanical arm 3 device 4 transfer substrates 9 of operation rearwards.
As mentioned above, in the substrate board treatment 1 of present embodiment, in converter section 20, the part of the carrying direction upstream side of substrate 9 transfers load to a plurality of free rolls 24 from a plurality of dance rollers 21.Therefore, can suppress entrance and float workbench 25 in the length of carrying on the direction, and supporting way that can conversion baseplate 9.In addition, free roll 24 can be with simple reliable in structure ground supporting substrate 9, and is configured in the narrow and small zone.Thereby, be easy to a plurality of free rolls 24 are configured in the position that does not contact with a plurality of dance rollers 21.
＜1-3. variation 〉
More than, the first execution mode of the present invention has been described, but has the invention is not restricted to above-mentioned execution mode.
In the above-described embodiment, although the adsorption section 32a of clamping mechanism 32 is fixed on constant height and position, adsorption section 32a oscilaltion is moved.If can make adsorption section 32a lifting moving, then can make adsorption section 32a near the lower surface of substrate 9.Thereby, can omit the structure by the support of 28 pairs of substrates 9 of lifter pin.
In addition, in the above-described embodiment, clamping mechanism 32 is configured in lower surface one side of substrate 9, but clamping mechanism can be configured in upper surface one side of substrate 9.In addition, clamping mechanism 32 can keep substrate 9 from clipping up and down.In addition, the clamping mechanism 32 of above-mentioned execution mode has two adsorption section 32a in the carrying direction, but the quantity of adsorption section 32a both can be one, also can be more than 3.
In addition, in the above-described embodiment, show an example of conveying roller 11, dance roller 21 and free roll 24, the size of these rollers, quantity and arrangement can suitably be changed according to the kind that becomes the substrate of processing object and the relation of surrounding structure.
In addition, the first trucking department 10 of above-mentioned execution mode is by a plurality of conveying roller 11 carrying substrates 9, but the first trucking department of the present invention can pass through other mechanism's carrying substrates 9.For example, can on one side substrate 9 be supported on a plurality of free rolls, keep the both ends on the Width of substrate 9 on one side, to carrying direction downstream carrying substrate 9.In addition, substrate 9 can be loaded on the mobile member of some, substrate 9 is carried to carrying direction downstream with this mobile member.
In addition, " converter section " of the present invention if spatially or the temporal meaning be the part of between the first trucking department and the second trucking department, the supporting way of substrate being changed.For example, as long as in the time between carrying by the first trucking department and carrying by the second trucking department, the supporting way of conversion baseplate, the first trucking department, converter section and the configuration spatially of the second trucking department can have the part of mutual repetition.In addition, converter section spatially can separate with the first trucking department or the second trucking department.
In addition, above-mentioned substrate board treatment 1 is the device to the upper surface coating anti-corrosion liquid of substrate 9, but substrate board treatment of the present invention also can be the device to the treatment fluid of coating of substrates except anti-corrosion liquid.In addition, substrate board treatment of the present invention can also be the device that carries out the processing (for example, heat treatment or exposure-processed) except coating is processed.
In addition, the glass substrate 9 that aforesaid substrate processing unit 1 is used with liquid crystal indicator is as processing object, but processing substrate of the present invention dress can be with semiconductor wafer, film liquid crystal with flexible base, board, base board for optical mask, colour filter with substrate, used for solar batteries substrate, Electronic Paper with other substrates such as substrates as processing object.
＜2. the second execution mode 〉
The structure of＜2-1. substrate board treatment 〉
Figure 13 is the vertical view of the substrate board treatment 101 of the second execution mode of the present invention.In the photo-mask process of the rectangle glass 109 that this substrate board treatment 101 is used for using at the etching liquid crystal device (below, only claim " substrate 109 ") at the upper surface coating anti-corrosion liquid (photoresist liquid) of substrate 109.Substrate board treatment 101 has the mechanism that substrate 109 is supported for flat-hand position one side carrying substrate 109 on one side.Below, the direction of carrying substrate 109 is called " carrying direction ", will be called " Width " perpendicular to the horizontal direction of carrying direction.In each figure of the application, represent to carry direction and Width with arrow.
As shown in figure 13, substrate board treatment 101 has the first trucking department 110, transfer section 120, the second trucking department 130, anti-corrosion liquid applying mechanism 140, takes out of section 150 and control part 160.Figure 14 is near the vertical view the first trucking department 110 and the transfer section 120.Figure 15 is near the end view the first trucking department 110 and the transfer section 120.Below, with reference to Figure 13, Figure 14 and Figure 15.
The first trucking department 110 is to be transported to from the substrate 109 that the device 102 of carrying the direction upstream side is taken out of the position of transfer section 120 along the carrying path.The first trucking department 110 has a plurality of conveying rollers 111 that are rotated centered by the rotating shaft 111a that extends along Width.In the present embodiment, on a plurality of rotating shaft 111a that uniformly-spaced arrange along its length, in equally spaced mode on the Width 4 conveying rollers 111 are installed respectively.A plurality of conveying rollers 111 are configured in single fixing height and position.
Connecting the rotary drive mechanism 112 that schematically represents among Figure 14 at the rotating shaft 111a of conveying roller 111.Rotary drive mechanism 112 for example is to become the mechanism that the Timing Belt of the motor of drive source and transmission of drive force combines.If make rotary drive mechanism 112 actions, then a plurality of conveying rollers 111 are on one's own initiative to same direction rotation.Thus, contact the substrate 109 that is supported on the conveying roller 111 to the downstream carrying of carrying direction.
A plurality of dance rollers 121 are the rollers that can be rotated centered by the rotating shaft 121a that extends along Width and can oscilaltion move.In the present embodiment, on two rotating shaft 121a that arrange along its length, in equally spaced mode on Width 4 dance rollers 121 are installed respectively.
Connecting the rotary drive mechanism 122 that schematically represents among Figure 14 at rotating shaft 121a.Rotary drive mechanism 122 for example is the mechanism that the Timing Belt that will become the motor of drive source and transmission of drive force combines.If make rotary drive mechanism 122 actions, then a plurality of dance rollers 121 are on one's own initiative to same direction rotation.Thus, contact the substrate 109 that is supported on the dance roller 121 to the downstream carrying of carrying direction.
Figure 21, Figure 23, Figure 25, Figure 27 and Figure 29 are the figure that near the structure the transfer section 120 is observed in the B-B position from Figure 13.As shown in these figures, the rotating shaft 121a at dance roller 121 is connecting lift drive mechanism 123.Lift drive mechanism 123 has: arm 123a, and it is via bearings rotating shaft 121a; Cylinder 123b, it makes arm 123a lifting moving.If make cylinder 123b action, a plurality of dance rollers 121 lifting moving between Figure 21 and normal place shown in Figure 23 and Figure 25, Figure 27 and down position shown in Figure 29 then.In addition, lift drive mechanism 123 also can utilize the driving mechanism (for example, motor) except cylinder.
The height and position of upper end that is configured in the height and position of upper end (with the position of the lower surface of substrate 109 contact) of the dance roller 121 of normal place and conveying roller 111 is roughly consistent.In addition, the height and position of upper end that is configured in the dance roller 121 of down position is positioned at the below of height and position of the upper end of free roll 124.
A plurality of free rolls 124 are the rollers that support for a part that replaces the carrying direction upstream side of 121 pairs of substrates 109 of dance roller when dance roller 121 has descended.A plurality of free rolls 124 rotate freely with respect to the intrinsic rotating shaft that is arranged on each roller.Under the part of substrate 109 was supported on state on the free roll 124, if substrate 109 side shifting downstream, then a plurality of free rolls 124 correspondinglyly and drivenly rotated with the movement of substrate 109.
A plurality of free rolls 124 are configured in single fixing height and position.The height and position of the upper end of free roll 124, be in the dance roller 121 that is configured in normal place the upper end height and position the below and be in the top of height and position of the upper end of the dance roller 121 that is configured in down position.In addition, the height and position of the upper end of free roll 124 is in and is supported on entrance and floats the lower surface of the substrate 109 on the workbench 125 and the upper end height and position in the roughly same height of clamping mechanism described later 132.
In addition, such as Figure 13 and shown in Figure 14, each free roll 124 is configured in overlooks down the position that does not overlap with the rotating shaft 121a of a plurality of dance rollers 121 and dance roller 121.Therefore, the rotating shaft 121a of a plurality of dance rollers 121 and dance roller 121 can not with situation that a plurality of free rolls 124 contact under lifting moving.
As shown in figure 14, a plurality of free rolls 124 comprise a plurality of downstream free roll 124a and a plurality of upstream side free roll 124b.A plurality of downstream free roll 124a float between the workbench 125 at dance roller 121 and the entrance in the downstream that is disposed at the carrying direction, the broad ways arrangement.That is, a plurality of downstream free roll 124a float the end edge portion arrangement of the carrying direction upstream side of workbench 125 along entrance.On the other hand, a plurality of upstream side free roll 124b are arranged in the position of the carrying direction upstream side of downstream free roll 124a.
The interval on Width is narrow each other than adjacent upstream side free roll 124b at the interval on the Width each other for adjacent downstream free roll 124a.Therefore, substrate 109 in downwards bending between the free roll 124a of downstream less than substrate 109 downwards bending between upstream side free roll 124b.Thus, suppress the end edge portion of carrying direction upstream side and contacting of substrate 109 that entrance floats workbench 125.In addition, by disposing upstream side free roll 124b with the density less than downstream free roll 124a, the whole quantity that reduces free roll 124.
In addition, in the present embodiment, use diameter less than the free roll 124 of the diameter of dance roller 121.Therefore, guarantee the space of dance roller 121 lifting moving, and be easy to a plurality of free rolls 124 are configured in the position that does not contact with dance roller 121.Free roll 124 can disconnect fully with driving mechanism, as long as still can remove the transmission of power of self-driven mechanism, then can be connected with the driving mechanism of some.But the mode that does not connect driving mechanism on free roll 124 can more easily be guaranteed the space that dance roller 121 carries out lifting, thus preferred this mode.
As shown in figure 15, the roller brace table 171 that shared of a plurality of conveying rollers 111, a plurality of dance roller 121 and a plurality of free roll 124 supports.On the other hand, entrance floats workbench 125, application job platform 131 described later and outlet described later and floats workbench 151 and supported by the worktable support platform 172 of the other setting different from roller brace table 171.
That is to say, in the present embodiment, the position by roller contact supporting substrate 109 and substrate 109 is floated be supported on position on the workbench by different brace table supports, and mutually do not connect.Thus, suppressing mechanical oscillation from conveying roller 111, dance roller 121 and free roll 124 is transmitted to entrance and floats workbench 125, application job platform 131 and outlet and float workbench 151.
Entrance floats the carrying direction downstream that workbench 125 is configured in a plurality of free rolls 124.Entrance floats workbench 125 with dance roller 121, free roll 124 or application job platform described later 131 supporting substrates 109.The upper surface that floats workbench 125 at entrance is provided be used to spraying compressed-air actuated a plurality of squit hole 125a.
When carrying substrate 109, never the compressed air of illustrated supply source supply sprays towards the top from a plurality of squit hole 125a.By the compressed air supporting substrate 109 from a plurality of squit hole 125a ejection, it is become from entrance float the state that the upper surface of workbench 125 floats.That is, entrance floats the mode supporting substrate 109 of workbench 125 not contact with the lower surface of substrate 109.
4 guide reels 126 are the mechanisms that on the carrying direction substrate 109 guided in transfer section 120.4 guide reels 126 are configured in the both sides on the carrying path of substrate 109.Each guide reel 126 can be rotated centered by the rotating shaft of above downward-extension.If substrate 109 breaks away from the carrying path, then guide reel 126 contacts with the end edge portion of substrate 109 on one side, Yi Bian be rotated.Thus, revise substrate 109 towards, thereby carrying substrate 109 on the carrying direction correctly.
Can make 4 guide reel 126 lifting moving by not shown driving mechanism.During carrying substrate 109,4 guide reels 126 are in the state of the both sides on the carrying path that rises to substrate 109 in transfer section 120.On the other hand, clamping mechanism 132 described later enter substrate 109 below the time, 4 guide reels 126 are in the state that drops to the height and position that does not contact with clamping mechanism 132.
When substrate 109 is configured to dance roller 121 on the normal place and entrance and floats on the workbench 125, the end edge portion butt of a plurality of alignment pin 127a and substrate 109.Thus, determined substrate 109 position and posture in the horizontal direction.On the other hand, when carrying substrate 109 and clamping mechanism 132 enter substrate 109 below the time, a plurality of alignment pin 127a keep out of the way not the position that contacts with clamping mechanism 132 with substrate 109.
Jacking mechanism 128 is the mechanisms for the both ends on the Width of temporary transient jack-up substrate 109 when the transfer section 120 transfer substrate 109.Jacking mechanism 128 has a plurality of lifter pin 128a of upper downward-extension.A plurality of lifter pin 128a slightly rely on the position of Width inboard at the both ends from the Width of substrate 109 under substrate 109 is positioned the state that mechanism 127 located, arrange along its length.In addition, by not shown driving mechanism, can make integratedly lifting moving of a plurality of lifter pin 128a.When a plurality of lifter pin 128a are risen, the lower surface butt of lifter pin 128a and substrate 109, the both ends on the Width of substrate 109 are neighbouring by lifter pin 128a jack-up.
Near the state that Figure 23, Figure 25 and Figure 27 have shown the both ends of substrate 109 by jacking mechanism 128 jack-up.As shown in these figures, when a plurality of lifter pin 128a have been risen, substrate 109 bendings, thus only near the both ends on the Width of substrate 109 by jack-up.Middle body on the Width of substrate 109 is maintained by dance roller 121 or free roll 124 and contacts the state that is supported for flat-hand position.
In addition, such as Figure 13 and shown in Figure 14, it is inboard that a plurality of lifter pin 128a are configured in the Width at the both ends on the Width that entrance floats workbench 125.Therefore, when a plurality of lifter pin 128a had been risen, clamping mechanism 132 described later can with in the situation that a plurality of lifter pin 128a contact not enter the position that entrance floats the Width outside of workbench 125.In addition, the part of being adsorbed by clamping mechanism 132 at least that needs only in the substrate 109 is exposed to the Width outside that entrance floats workbench 125.Therefore, can suppress substrate 109 and float the amount of exposing that workbench 125 exposes from entrance.
As shown in figure 14, transfer section 120 is set as the length (that is, slightly being longer than the degree of the length of substrate 109 on the carrying direction) that roughly can dispose a substrate 109 in the length L 1 on the carrying direction.The zone that disposes dance roller 121 and free roll 124 in the transfer section 120 carrying on the direction length L 2 and entrance to float workbench 125 all short than the length of substrate 109 on the carrying direction in the length L 3 on the carrying direction.Thus, can suppress the length of transfer section 120 on the carrying direction.
Float the workbench of supporting substrate 109 as entrance floats workbench 125, need high process technology at aspects such as forming squit hole 125a, manufacturing cost is also high.In the present embodiment, suppress entrance as described above and float the length of workbench 125 on the carrying direction.Thus, the manufacturing of substrate board treatment 101 becomes easily, also can suppress manufacturing cost.In addition, can also suppress to float the compressed-air actuated amount that workbench 125 is supplied with to entrance.
The second trucking department 130 is to the position of carrying direction downstream carrying substrate 109 when the upper surface coating anti-corrosion liquid of substrate 109.As shown in figure 13, the second trucking department 130 has application job platform 131 and a pair of clamping mechanism 132.
The Width outside at application job platform 131 disposes pair of right and left clamping mechanism 132.In each clamping mechanism 132, be provided with for a pair of absorption maintaining part 132a that adsorbs the end on the Width that keeps substrate 109 from lower face side in the carrying direction.In addition, each clamping mechanism 132 can move by the guide rail 132b on the upper surface that is formed on worktable support platform 172 on the carrying direction by driving mechanisms such as linear motors.As shown in figure 13, guide rail 132b position from the Width of free roll 124 outside on the carrying direction extends to the position that the Width outside of workbench 151 is floated in outlet described later.A pair of clamping mechanism 132 can adsorb on one side and keep substrate 109, on one side substrate 109 is transported to the section of taking out of 150 from transfer section 120.
Figure 16 and Figure 17 are near the cutaway view Amplified images of the part of the upper surface of absorption maintaining part 132a.Shown in Figure 16 and Tu worker 7, absorption maintaining part 132a has the maintenance face 321 that contacts with the lower surface of substrate 109.The height and position of the lower surface of the part that is adsorbed maintaining part 132a maintenance in the substrate 109 is by maintenance face 321 regulations.In addition, be formed with the groove 322 that caves in from maintenance face 321 downwards and in the attraction hole 323 of the bottom opening of groove 322 at absorption maintaining part 132a.
At the flexible adsorbent 324 of the internal configurations of groove 322, this elastic absorption body 324 can be flexible at above-below direction, and the lower surface of absorption substrate 109.Elastic absorption body 324 forms the general cylindrical shape of the side with accordion-like.The peristome of elastic absorption body 324 downsides is communicated with attracting hole 323.In addition, the peristome of elastic absorption body 324 upsides is open towards the top.
Attract hole 323 to be connected with not shown asepwirator pump.If asepwirator pump is moved, then form negative pressure in the inside that attracts hole 323 and elastic absorption body 324.Thus, the air of absorption maintaining part 132a top is attracted to attraction hole 323 via elastic absorption body 324 as the arrow among Figure 16.
As shown in figure 16, before being adsorbed on the substrate 109, the upper end of elastic absorption body 324 is outstanding upward from maintenance face 321.If on one side carry out above-mentioned attraction, make substrate 109 approach the upper surfaces that adsorb maintaining part 132a on one side, then elastic absorption body 324 is adsorbed on the lower surface of substrate 109 and shrinks.Then, when absorption, as shown in figure 17, the upper-end part of driving of elastic absorption body 324 is in the height that equates with maintenance face 321.Thus, the lower surface of substrate 109 is held face 321 contact maintenances.
Like this, in the present embodiment, by making elastic absorption body 324 be adsorbed on the lower surface of substrate 109 and shrink, with the lower surface of the substrate 109 maintenance face 321 that furthers.Therefore, for example, even tilt a little make the end edge portion of substrate 109 because of the jack-up of lifter pin 128a near, also can the lower surface of substrate 109 be remained on the absorption maintaining part 132a with good reliability.
Preferably keeping all in an absorption of clamping mechanism 132,132a has a plurality of elastic absorption bodies 324.In that event, then can suppress the bending of the substrate 109 that the absorption itself because of elastic absorption body 324 produces.Therefore, can substrate 109 be remained on the absorption maintaining part 132a with better reliability.
In addition, as shown in figure 13, be provided with the dislocation transducer 325 that the dislocation to substrate 109 detects at absorption maintaining part 132a.Dislocation transducer 325 remains on when adsorbing on the maintaining part 132a on the position ground that substrate 109 departs from expectation the substrate 109 that exposes maintenance face 321 is detected.Control part 160 makes clamping mechanism 132 stop movement etc. when receiving detection signal from dislocation transducer 325, prevents that the coating of substrate 109 is bad.
Anti-corrosion liquid applying mechanism 140 is for to the mechanism while the upper surface coating anti-corrosion liquid that is supported on the substrate 109 that is handled upside down on the application job platform 131.In Figure 13, for application job platform 131 and clamping mechanism 132 clearly are shown, dot anti-corrosion liquid applying mechanism 140.Anti-corrosion liquid applying mechanism 140 has at the added bridge formation section 141 above application job platform 131 of Width and the gap nozzle 142 that is installed in the bridge formation section 141.Gap nozzle 142 is via the ejiction opening of the slit-shaped of extending along Width, to the upper surface ejection of substrate 109 anti-corrosion liquid supplied with of illustrated anti-corrosion liquid supply source never.
Take out of section 150 and be for the substrate 109 that will apply anti-corrosion liquid from position that substrate board treatment 101 is taken out of.As shown in figure 13, taking out of section 150 has outlet and floats workbench 151 and a plurality of taking out of with pin 152.
The carrying direction downstream that workbench 151 is configured in application job platform 131 is floated in outlet.The upper surface that floats workbench 151 in outlet is provided be used to spraying compressed-air actuated a plurality of squit hole.Substrate 109 is being supported on outlet when floating on the workbench 151, never the compressed air supplied with of illustrated supply source sprays towards the top from a plurality of squit holes.Compressed air supporting substrate 109 by from a plurality of squit hole ejections becomes from outlet it and floats the state that workbench 151 upper surfaces float.That is, the mode supporting substrate 109 of workbench 151 not contact with the lower surface of substrate 109 floated in outlet.
A plurality of taking out of with pin 152 in the surface of workbench 151 is floated in outlet equally spaced arranged along carrying direction and Width.A plurality of taking out of with the upper end contact supporting substrate 109 of pin 152 by them.In addition, can make a plurality of taking out of use integratedly lifting moving of pin 152 by not shown driving mechanism.Therefore, a plurality of taking out of with pin 152 can on one side be supported for flat-hand position with substrate 109, to top that outlet float workbench 151 lift substrate 109 on one side.
When floating workbench 151 carrying substrate 109 from application job platform 131 to outlet, contact with substrate 109 for fear of a plurality of taking out of with pins 152, a plurality of take out of to be in pin 152 keep out of the way the state of below that the upper surface of workbench 151 is floated in outlet.In addition, when floating workbench 151 from outlet and take out of substrate 109, a plurality of taking out of with pin 152 is projected into the top that the upper surface of workbench 151 is floated in outlet.Thus, lift substrate 109 to the top that workbench 151 is floated in outlet.Be supported on a plurality of taking out of with the substrate 109 on the pin 152 and be configured in the device 104 that the shifting mechanical arm 103 that exports the carrying direction downstream of floating workbench 151 is carried to the back operation.
The action of＜2-2. substrate board treatment 〉
The action of substrate board treatment 101 then, is described.Figure 19 is the flow chart of flow process of the action of expression substrate board treatment 101.Figure 20, Figure 22, Figure 24, Figure 26 and Figure 28 are near the end views the transfer section 120 among step S102～S108.In addition, as mentioned above, Figure 21, Figure 23, Figure 25, Figure 27 and Figure 29 are the figure that near the structure the transfer section 120 is observed in the B-B position from Figure 13.Figure 21, Figure 23, Figure 25, Figure 27 and Figure 29 be the state of expression and Figure 20, Figure 22, Figure 24, Figure 26 and Figure 28 synchronization respectively.
When substrate board treatment 101 treatment substrate 109, at first, carry the substrate 109 (step S101) of taking out of from the device 102 of front operation by the first trucking department 110.Substrate 109 contacts are supported on the conveying roller 111, by the rotation of conveying roller 111, to carrying direction downstream carrying substrate 109.At this moment, dance roller 121 is configured in normal place, to the direction rotation identical with the direction of rotation of conveying roller 111.Therefore, continuously substrate 109 is transported to transfer section 120 by conveying roller 111 and dance roller 121.
In addition, at this moment, 4 guide reels 126 are in the state of the both sides on the carrying path that rises to substrate 109.Substrate 109 is guided by these guide reels 126, thereby correctly carries to carrying direction downstream.
When substrate 109 arrived transfer section 120, dance roller 121 stopped the rotation.Thus, substrate 109 stops (step S102, the state among Figure 20 and Figure 21) under the state that floats across dance roller 121 and entrance on the workbench 125.As shown in figure 20, the contact of the part of the carrying direction upstream side of substrate 109 is supported on the dance roller 121 of normal place.On the other hand, the part in the carrying direction downstream of substrate 109 is floated and is supported on entrance and floats on the workbench 125.The height and position that entrance floats the part on the workbench 125 that is supported in the substrate 109 is lower than the height and position that is supported on the part on the dance roller 121.
Then, each end edge portion butt of the carrying direction upstream side of a plurality of alignment pin 127a and substrate 109, carrying direction downstream and Width both sides.Thus, determine substrate 109 position and posture (step S103) in the horizontal direction.Like this, by substrate 109 is positioned, the more accurate position that in step S108 described later, can make absorption maintaining part 132a keep substrate 109 lower surfaces.
When the location of completing substrate 109,4 guide reels 126 descend and keep out of the way the retreating position of regulation.In addition, the alignment pin 127a of two end edge portion butts among a plurality of alignment pin 127a and Width substrate 109 also leaves the retreating position (step S104) that substrate 109 is kept out of the way regulation.After alignment pin 127a kept out of the way, the part of the carrying direction upstream side of substrate 109 was also supported by dance roller 121 contacts.Therefore, the static friction by 121 of substrate 109 and dance rollers prevents the dislocation of substrate 109 on Width
Then, make a plurality of lifter pin 128a risings (step S105, the state of Figure 22 and Figure 23).The lower surface butt of lifter pin 128a and substrate 109 is near the both ends on the Width of jack-up substrate 109.Such as Figure 22 and shown in Figure 23, the upper end of a plurality of lifter pin 128a rises to the top position of upper end of the dance roller 121 of normal place.
The substrate 109 of present embodiment is large-scale and have flexible.Therefore, in step S105, only the both ends on the Width in the substrate 109 are neighbouring by local jack-up.Middle body on the Width of substrate 109 is kept by dance roller 121 and entrance and is floated the state that workbench 125 supports.Especially, the part of the carrying direction upstream side in the middle body on the Width of substrate 109 is still supported by dance roller 121 contacts.Thereby the static friction by 121 of substrate 109 and dance rollers prevents the dislocation of substrate 109 on Width.
In addition, in the present embodiment, after the alignment pin 127a of two end edge portion butts on the Width that makes with substrate 109 keeps out of the way, a plurality of lifter pin 128a are risen.Therefore, when lifter pin 128a was risen, the end edge portion on the Width of substrate 109 and alignment pin 127a can sliding contacts.Thus, can prevent from producing particle because of the sliding contact of substrate 109 and alignment pin 127a.
Then, make dance roller 121 drop to down position (step S106, the state of Figure 24 and Figure 25) from normal place.If dance roller 121 is descended, then the height and position of the upper end of dance roller 121 is in the below of height and position of the upper end of free roll 124.Therefore, a plurality of free rolls 124 replace a plurality of dance rollers 121 to come the part of the carrying direction upstream side in the middle body on the Width of supporting substrate 109.Be maintained the state that is supported by a plurality of lifter pin 128a near the both ends on the Width of substrate 109.
Then, a pair of clamping mechanism 132 is moved to carrying direction upstream side.Thus, make absorption maintaining part 132a enter substrate 109 by the below of the part of jack-up (step S107, the state of Figure 26 and Figure 27).Then, after the attraction action that has begun absorption maintaining part 132a, a plurality of lifter pin 128a are descended.That is, remove the jack-up of 128 pairs of substrates 109 of jacking mechanism.Thus, make both ends on the Width of substrate 109 near the absorption maintaining part 132a of clamping mechanism 132.
The elastic absorption body 324 of absorption maintaining part 132a is adsorbed on the lower surface of substrate 109, then, shrinks by negative pressure.Thus, the lower surface of substrate 109 is furthered to the maintenance face 321 of absorption maintaining part 132a.As a result, the absorption of the end on the Width of substrate 109 remains on absorption maintaining part 132a upper (step S 108, the state of Figure 28 and Figure 29).Substrate 109 is in following state, that is, the part contact of carrying direction upstream side is supported on the free roll 124, and the part in carrying direction downstream is floated and is supported on entrance and floats on the workbench 125, and the both ends absorption on the Width remains on the clamping mechanism 132.
In the present embodiment, in transfer section 120, carry out between the action of step S103～S108 the end edge portion butt in the carrying direction upstream side of alignment pin 127a and substrate 109 and carrying direction downstream.Thus, prevent the dislocation of substrate 109 on the carrying direction.In addition, as present embodiment, in the situation of jack-up, be difficult for the power on the substrate 109 effect carrying directions near with the both ends on the Width of substrate 109.Thereby, even when jack-up alignment pin 127a not with the end edge portion butt in the carrying direction upstream side of substrate 109 and carrying direction downstream, also be difficult for producing the dislocation of substrate 109 on the carrying direction.
In addition, between step S103～S108, substrate 109 is being supported by dance roller 121 or free roll 124 contacts constantly.Therefore, can pass through the static friction of 109 of dance roller 121 or free roll 124 and substrates, prevent the dislocation of substrate 109 on Width.
In addition, in the present embodiment, utilize a plurality of lifter pin 128a temporarily with near the jack-up both ends on the Width of substrate 109, descend by making this lifter pin 128a, make the lower surface of substrate 109 near the absorption maintaining part 132a of clamping mechanism 132.Thus, the height and position of absorption maintaining part 132a is fixed, and made absorption maintaining part 132a keep the lower surface of substrate 109.Therefore, remove be used to the mechanism that makes absorption maintaining part 132a lifting moving, can make clamping mechanism 132 form simple structure.
When substrate 109 is kept by a pair of clamping mechanism 132, keep out of the way to the retreating position of regulation with the carrying direction upstream side of substrate 109 and the alignment pin 127a of the end edge portion butt in carrying direction downstream.Then, clamping mechanism 132 moves to carrying direction downstream along guide rail 132b, thus to carrying direction downstream carrying substrate 109.
In addition, in the present embodiment, before the lower position of gap nozzle 142 was closed in the end in the carrying direction downstream of substrate 109, the end portion supports of the carrying direction upstream side of substrate 109 was floated on the workbench 125 at entrance.That is, in the moment to the upper surface of substrate 109 coating anti-corrosion liquid, substrate 109 integral body are floated and are supported on entrance and float on workbench 125 and the application job platform 131.Therefore, the mechanical oscillation of inhibition free roll 124 are transmitted to the substrate 109 in the coating anti-corrosion liquid.Thus, it is bad to suppress the coating of anti-corrosion liquid of upper surface of substrate 109.
The substrate 109 that has applied anti-corrosion liquid is moved to and stops after outlet is floated on the workbench 151.Then, the absorption maintaining part 132a of clamping mechanism 132 stops to attract action, thereby removes the absorption to substrate 109.After having removed absorption, because static friction effect between substrate 109 and elastic absorption body 324, so can suppress departing from of substrate 109.
When removing the absorption of passing through 132 pairs of substrates 109 of clamping mechanism, a plurality of upper surfaces that float workbench 151 from outlet with pin 152 of taking out of are given prominence to.Thus, lift substrate 109 to the top that workbench 151 is floated in outlet.Then, shifting mechanical arm 103 accepts to be supported on a plurality of taking out of with the substrates 109 on the pin 152, from the shifting mechanical arm 103 device 4 transfer substrates 9 of operation rearwards.
＜2-3. variation 〉
More than, the second execution mode of the present invention has been described, but has the invention is not restricted to above-mentioned execution mode.
The first trucking department 110 of above-mentioned execution mode utilizes a plurality of conveying roller 111 carrying substrates 109, but " the first trucking department " of the present invention can utilize other mechanism's carrying substrates 109.For example, can on one side substrate 109 be supported on a plurality of free rolls, Yi Bian utilize other devices that substrate 109 is applied to the thrust in carrying direction downstream, come to carrying direction downstream carrying substrate 109.In addition, can on one side substrate 109 be remained on the mobile member of some, on one side with this mobile member side carrying substrate 109 downstream.
In addition, in the above-described embodiment, in transfer section 120, float middle body on the Width that workbench 125 or free roll 124 and entrance float workbench 125 supporting substrates 109 by dance roller 121 and entrance, but the middle body on the Width of substrate 109 can support by other supporting way.For example, the middle body on the Width of substrate 109 can only be supported by roller.
In addition, the jacking mechanism 128 of above-mentioned execution mode is near the jack-up both ends on the Width of substrate 109, but other positions that " jacking mechanism " of the present invention can jack-up substrate 109.For example, near the both ends on also can the carrying direction of jack-up substrate 109, clamping mechanism 132 enters near the below these both ends.
In addition, in the above-described embodiment, enumerated the example of alignment pin 127a as " align member " of the present invention.But " align member " of the present invention can be the member with tabular other shapes such as grade as long as can position with substrate 109 butts.
In addition, aforesaid substrate processing unit 101 is the devices to the upper surface coating anti-corrosion liquid of substrate 109, but substrate board treatment of the present invention also can be the device to the treatment fluid of coating of substrates except anti-corrosion liquid.In addition, substrate board treatment of the present invention can also be the device that carries out the processing (clean, dry processing, heat treatment, exposure-processed, development treatment etc.) except coating is processed.
In addition, the glass substrate 109 that aforesaid substrate processing unit 101 is used with liquid crystal indicator is as processing object, but processing substrate of the present invention dress can be with semiconductor wafer, film liquid crystal with flexible base, board, base board for optical mask, colour filter with substrate, used for solar batteries substrate, Electronic Paper with other substrates such as substrates as processing object.
Claims (8)
1. substrate board treatment has the mechanism of carrying substrate, it is characterized in that having:
The first trucking department, its with board carrying to the assigned position of carrying on the path,
The second trucking department, it is in the carrying direction downstream of described assigned position, substrate is floated at workbench, and meanwhile carrying substrate,
Converter section, the supporting way of its conversion baseplate between described the first trucking department and described the second trucking department,
Control part, it controls described converter section;
Described converter section has:
Dance roller, the one edge joint touches supporting substrate, active rotation on one side, can be when the height and position of the height and position of the upper end of described dance roller and the upper end of described the first trucking department be roughly consistent described dance roller normal place and down position between lifting moving
Free roll, it on one side is supported on substrate contacts the height and position between the upper end of described dance roller of the upper end of described dance roller of described normal place and down position, on one side corresponding to the mobile and driven rotation of substrate,
Entrance floats workbench, and it is configured in the carrying direction downstream of described free roll, Yi Bian make substrate floating to the low height of bearing height than the described dance roller supporting substrate by described normal place, Yi Bian supporting substrate;
Described control part is controlled described converter section, so that be configured to after the described dance roller of described normal place and described entrance float on the workbench at substrate, described dance roller descends to described down position, with the part of the carrying direction upstream side of substrate to described free roll transfer.
2. substrate board treatment as claimed in claim 1 is characterized in that,
Described entrance floats workbench and is shorter in length than the length of substrate on the carrying direction in carrying on the direction.
3. substrate board treatment as claimed in claim 1 or 2 is characterized in that,
The zone that disposes described dance roller and described free roll is being shorter in length than the length of substrate on the carrying direction on the carrying direction.
4. such as claim l or 2 described substrate board treatments, it is characterized in that,
Described free roll comprises:
A plurality of downstreams free roll, its lateral edge portion of floating the carrying direction upstream side of workbench along described entrance is arranged,
A plurality of upstream side free rolls, it is arranged in the position of the carrying direction upstream side of described a plurality of downstreams free roll;
Described a plurality of upstream side free roll is configured to the density that density is lower than described a plurality of downstreams free roll.
5. such as claim l or 2 described substrate board treatments, it is characterized in that,
Described converter section also has detent mechanism, and this detent mechanism determines substrate position in the horizontal direction under substrate is configured to float across the described dance roller of described normal place and described entrance state on the workbench.
6. such as claim l or 2 described substrate board treatments, it is characterized in that,
To float the brace table of workbench different from supporting described entrance for the brace table that supports described dance roller and described free roll, and described dance roller and described free roll float workbench with described entrance and mutually be not connected.
7. such as claim l or 2 described substrate board treatments, it is characterized in that described free roll is that diameter is less than the roller of the diameter of described dance roller.
8. conversion method, the supporting way of conversion baseplate between the first trucking department and the second trucking department, wherein, described the first trucking department with board carrying to the assigned position of carrying on the path, described the second trucking department is in the carrying direction downstream of described assigned position, Yi Bian substrate is floated at workbench, Yi Bian carrying substrate, it is characterized in that
This conversion method utilizes dance roller, free roll and entrance to float workbench, wherein,
Described dance roller contacts supporting substrate on one side, one side active rotation, can be when the height and position of the height and position of the upper end of described dance roller and the upper end of described the first trucking department be roughly consistent described dance roller normal place and down position between lifting moving
Described free roll is supported on substrate contacts the height and position between the upper end of upper end and the described dance roller of down position of described dance roller of described normal place on one side, one side corresponding to the mobile and driven rotation of substrate,
Described entrance floats the carrying direction downstream that workbench is configured in described free roll, make substrate floating to the low height of bearing height than the described dance roller supporting substrate by described normal place, and meanwhile supporting substrate,
This conversion method has:
Operation a is configured to substrate to float on the workbench across described dance roller and the described entrance of described normal place,
Operation b behind described operation a, makes described dance roller descend to described down position, with the part of the carrying direction upstream side of substrate to described free roll transfer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310087413.3A CN103177991B (en) | 2010-03-29 | 2011-02-17 | Substrate board treatment and method for shifting |
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| JP2010074370A JP5254269B2 (en) | 2010-03-29 | 2010-03-29 | Substrate processing apparatus and transfer method |
| JP2010074259A JP5165718B2 (en) | 2010-03-29 | 2010-03-29 | Substrate processing equipment |
| JP2010-074259 | 2010-03-29 | ||
| JP2010-074370 | 2010-03-29 |
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| KR101365049B1 (en) * | 2012-08-02 | 2014-02-20 | 한국미쯔보시다이아몬드공업(주) | Rolling break apparatus for brittle material substrate |
| KR101794875B1 (en) * | 2015-01-30 | 2017-11-07 | 가부시키가이샤 하리즈 | Inspection apparatus for transparent plate, and inspection system including the same |
| KR102347409B1 (en) * | 2015-05-27 | 2022-01-05 | 세메스 주식회사 | Inkjet Printer |
| JP6595276B2 (en) * | 2015-09-18 | 2019-10-23 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus and substrate processing method |
| TWI630059B (en) * | 2015-12-25 | 2018-07-21 | 日商三星鑽石工業股份有限公司 | Substrate adsorption device and workbench |
| TWI800584B (en) * | 2018-01-11 | 2023-05-01 | 日商日本碍子股份有限公司 | Heat treatment furnace and manufacturing method thereof |
| CN114313431A (en) * | 2021-12-07 | 2022-04-12 | 深圳创视智能视觉技术股份有限公司 | Feed divider and intelligent bag arranging robot |
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| KR20110109784A (en) | 2011-10-06 |
| CN103177991A (en) | 2013-06-26 |
| TWI462215B (en) | 2014-11-21 |
| KR101226784B1 (en) | 2013-01-25 |
| CN103177991B (en) | 2017-07-14 |
| CN102205911A (en) | 2011-10-05 |
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Address after: Kyoto City, Kyoto Prefecture, Japan Patentee after: DAINIPPON SCREEN MFG Address before: Kyoto City, Kyoto Prefecture, Japan Patentee before: Dainippon Screen Mfg. Co., Ltd. |