CN102164854B - 生产具有可控宽粒径分布和最小粒径的硅石溶胶的方法 - Google Patents
生产具有可控宽粒径分布和最小粒径的硅石溶胶的方法 Download PDFInfo
- Publication number
- CN102164854B CN102164854B CN2009801377248A CN200980137724A CN102164854B CN 102164854 B CN102164854 B CN 102164854B CN 2009801377248 A CN2009801377248 A CN 2009801377248A CN 200980137724 A CN200980137724 A CN 200980137724A CN 102164854 B CN102164854 B CN 102164854B
- Authority
- CN
- China
- Prior art keywords
- particle size
- reactor
- component
- colloidal silica
- size distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
- C01B33/141—Preparation of hydrosols or aqueous dispersions
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Colloid Chemistry (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/237,047 US8052788B2 (en) | 2005-08-10 | 2008-09-24 | Method of producing silica sols with controllable broad size distribution and minimum particle size |
| US12/237,047 | 2008-09-24 | ||
| PCT/US2009/058216 WO2010036797A1 (en) | 2008-09-24 | 2009-09-24 | Method of producing silica sols with controllable broad size distribution and minimum particle size |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102164854A CN102164854A (zh) | 2011-08-24 |
| CN102164854B true CN102164854B (zh) | 2013-11-20 |
Family
ID=41382418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801377248A Active CN102164854B (zh) | 2008-09-24 | 2009-09-24 | 生产具有可控宽粒径分布和最小粒径的硅石溶胶的方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8052788B2 (enExample) |
| EP (1) | EP2346784A1 (enExample) |
| JP (1) | JP2012503586A (enExample) |
| KR (1) | KR20110069025A (enExample) |
| CN (1) | CN102164854B (enExample) |
| MY (1) | MY158518A (enExample) |
| TW (1) | TWI491563B (enExample) |
| WO (1) | WO2010036797A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050234136A1 (en) | 2004-04-19 | 2005-10-20 | Holland Brian T | Colloidal compositions and methods of preparing same |
| US20140057532A1 (en) * | 2012-08-24 | 2014-02-27 | Ecolab Usa Inc. | Methods of polishing sapphire surfaces |
| WO2014136039A1 (en) * | 2013-03-05 | 2014-09-12 | Jawaharlal Nehru Centre For Advanced Scientific Research | Composition, substrates and methods thereof |
| EP2969391B1 (en) | 2013-03-15 | 2018-04-25 | Ecolab USA Inc. | Methods of polishing sapphire surfaces |
| CN103311106B (zh) * | 2013-05-14 | 2015-12-23 | 中国科学院半导体研究所 | 低表面粗糙度的硅基砷化镓材料的制备方法 |
| JP6179418B2 (ja) * | 2014-02-13 | 2017-08-16 | 三菱ケミカル株式会社 | 窒化物半導体基板の製造方法 |
| US9302228B2 (en) | 2014-02-28 | 2016-04-05 | Pall Corporation | Charged porous polymeric membrane with high void volume |
| US9446355B2 (en) | 2014-02-28 | 2016-09-20 | Pall Corporation | Porous polymeric membrane with high void volume |
| US9309126B2 (en) | 2014-02-28 | 2016-04-12 | Pall Corporation | Rapidly dissolvable nanoparticles |
| US9737860B2 (en) | 2014-02-28 | 2017-08-22 | Pall Corporation | Hollow fiber membrane having hexagonal voids |
| US9610548B2 (en) | 2014-02-28 | 2017-04-04 | Pall Corporation | Composite porous polymeric membrane with high void volume |
| US9764292B2 (en) | 2014-02-28 | 2017-09-19 | Pall Corporation | Porous polymeric membrane with high void volume |
| US9776142B2 (en) | 2014-02-28 | 2017-10-03 | Pall Corporation | Porous polymeric membrane with high void volume |
| US9561473B2 (en) | 2014-02-28 | 2017-02-07 | Pall Corporation | Charged hollow fiber membrane having hexagonal voids |
| CN106044786B (zh) * | 2016-06-01 | 2019-05-07 | 上海新安纳电子科技有限公司 | 多分散大粒径硅溶胶及其制备方法 |
| US10377014B2 (en) | 2017-02-28 | 2019-08-13 | Ecolab Usa Inc. | Increased wetting of colloidal silica as a polishing slurry |
| JP7003849B2 (ja) * | 2018-06-14 | 2022-01-21 | 日本製鉄株式会社 | キャスタブル耐火物の製造方法 |
| KR102670426B1 (ko) | 2020-01-15 | 2024-06-03 | 오씨아이 주식회사 | 흄드 실리카로부터 단일 응집체를 분리 및 포집하는 방법 및 단일 응집체의 형상 분류 방법 |
| WO2024237073A1 (ja) * | 2023-05-12 | 2024-11-21 | 日揮触媒化成株式会社 | 研磨用シリカ微粒子分散液、研磨用組成物、および研磨用シリカ微粒子分散液の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5964693A (en) * | 1992-06-03 | 1999-10-12 | Bayer Aktiengesellschaft | Continuous preparation of silica sols which contain large particles |
| US20070034116A1 (en) * | 2005-08-10 | 2007-02-15 | Mac Donald Dennis L | Silica sols with controlled minimum particle size and preparation thereof |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT649599A (enExample) * | 1960-04-13 | |||
| US3650977A (en) * | 1969-03-27 | 1972-03-21 | Philadelphia Quartz Co | Method of preparing silica sol and product thereof |
| US3789009A (en) * | 1971-07-15 | 1974-01-29 | Du Pont | Process for the preparation of large particle silica sols |
| US5221497A (en) * | 1988-03-16 | 1993-06-22 | Nissan Chemical Industries, Ltd. | Elongated-shaped silica sol and method for preparing the same |
| US4996084A (en) | 1989-06-30 | 1991-02-26 | Pfizer Hospital Products Group, Inc. | Colloidal silica water based slurry system for investment casting shell backup coats |
| US5100581A (en) * | 1990-02-22 | 1992-03-31 | Nissan Chemical Industries Ltd. | Method of preparing high-purity aqueous silica sol |
| JPH05170424A (ja) * | 1991-12-24 | 1993-07-09 | Nittetsu Mining Co Ltd | シリカゾルの製造方法 |
| DE4216119C2 (de) | 1992-05-15 | 1995-08-10 | Bayer Ag | Verfahren zur Herstellung und Konzentrierung von Kieselsolen |
| CO5070714A1 (es) | 1998-03-06 | 2001-08-28 | Nalco Chemical Co | Proceso para la preparacion de silice coloidal estable |
| JP4113288B2 (ja) | 1998-09-04 | 2008-07-09 | スピードファム株式会社 | 研磨用組成物およびそれを用いたシリコンウェーハの加工方法 |
| US6906109B2 (en) | 2000-09-01 | 2005-06-14 | Chemical Products Corp. | Method for controling uniformity of colloidal silica particle size |
| US6747065B1 (en) * | 2000-09-01 | 2004-06-08 | Chemical Products Corporation | System and method for producing high purity colloidal silica and potassium hydroxide |
| JP2002275274A (ja) | 2001-03-19 | 2002-09-25 | Dokai Chemical Industries Co Ltd | 鱗片状シリカ粒子を含有する高い保存安定性を有する硬化性組成物及びその製造方法 |
| US6918820B2 (en) | 2003-04-11 | 2005-07-19 | Eastman Kodak Company | Polishing compositions comprising polymeric cores having inorganic surface particles and method of use |
| US6939211B2 (en) | 2003-10-09 | 2005-09-06 | Micron Technology, Inc. | Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutions |
| US20050234136A1 (en) | 2004-04-19 | 2005-10-20 | Holland Brian T | Colloidal compositions and methods of preparing same |
| US20060283095A1 (en) | 2005-06-15 | 2006-12-21 | Planar Solutions, Llc | Fumed silica to colloidal silica conversion process |
| JP5137521B2 (ja) * | 2006-10-12 | 2013-02-06 | 日揮触媒化成株式会社 | 金平糖状シリカ系ゾルおよびその製造方法 |
-
2008
- 2008-09-24 US US12/237,047 patent/US8052788B2/en active Active
-
2009
- 2009-07-09 TW TW098123178A patent/TWI491563B/zh active
- 2009-09-24 KR KR1020117006851A patent/KR20110069025A/ko not_active Ceased
- 2009-09-24 CN CN2009801377248A patent/CN102164854B/zh active Active
- 2009-09-24 JP JP2011528099A patent/JP2012503586A/ja active Pending
- 2009-09-24 EP EP09792952A patent/EP2346784A1/en not_active Ceased
- 2009-09-24 WO PCT/US2009/058216 patent/WO2010036797A1/en not_active Ceased
- 2009-09-24 MY MYPI2011001291A patent/MY158518A/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5964693A (en) * | 1992-06-03 | 1999-10-12 | Bayer Aktiengesellschaft | Continuous preparation of silica sols which contain large particles |
| US20070034116A1 (en) * | 2005-08-10 | 2007-02-15 | Mac Donald Dennis L | Silica sols with controlled minimum particle size and preparation thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110069025A (ko) | 2011-06-22 |
| MY158518A (en) | 2016-10-14 |
| TWI491563B (zh) | 2015-07-11 |
| TW201012752A (en) | 2010-04-01 |
| EP2346784A1 (en) | 2011-07-27 |
| CN102164854A (zh) | 2011-08-24 |
| US20090018219A1 (en) | 2009-01-15 |
| WO2010036797A1 (en) | 2010-04-01 |
| US8052788B2 (en) | 2011-11-08 |
| JP2012503586A (ja) | 2012-02-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |