TWI491563B - 製造具有可控制寬粒徑分布和最小粒徑之矽溶膠的方法 - Google Patents
製造具有可控制寬粒徑分布和最小粒徑之矽溶膠的方法 Download PDFInfo
- Publication number
- TWI491563B TWI491563B TW098123178A TW98123178A TWI491563B TW I491563 B TWI491563 B TW I491563B TW 098123178 A TW098123178 A TW 098123178A TW 98123178 A TW98123178 A TW 98123178A TW I491563 B TWI491563 B TW I491563B
- Authority
- TW
- Taiwan
- Prior art keywords
- particle size
- reactor
- component
- particles
- size distribution
- Prior art date
Links
- 239000002245 particle Substances 0.000 title claims description 124
- 238000009826 distribution Methods 0.000 title claims description 35
- 238000000034 method Methods 0.000 title claims description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title description 7
- 239000000377 silicon dioxide Substances 0.000 title description 3
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 29
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 29
- TUSDEZXZIZRFGC-UHFFFAOYSA-N 1-O-galloyl-3,6-(R)-HHDP-beta-D-glucose Natural products OC1C(O2)COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC1C(O)C2OC(=O)C1=CC(O)=C(O)C(O)=C1 TUSDEZXZIZRFGC-UHFFFAOYSA-N 0.000 claims description 16
- 239000001263 FEMA 3042 Substances 0.000 claims description 16
- LRBQNJMCXXYXIU-PPKXGCFTSA-N Penta-digallate-beta-D-glucose Natural products OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-PPKXGCFTSA-N 0.000 claims description 16
- LRBQNJMCXXYXIU-NRMVVENXSA-N tannic acid Chemical compound OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-NRMVVENXSA-N 0.000 claims description 16
- 229940033123 tannic acid Drugs 0.000 claims description 16
- 235000015523 tannic acid Nutrition 0.000 claims description 16
- 229920002258 tannic acid Polymers 0.000 claims description 16
- 229910052684 Cerium Inorganic materials 0.000 claims description 12
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 10
- 230000006911 nucleation Effects 0.000 claims description 8
- 238000010899 nucleation Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000010924 continuous production Methods 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 239000010955 niobium Substances 0.000 claims description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 42
- 229910000420 cerium oxide Inorganic materials 0.000 description 17
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 17
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 15
- 239000000047 product Substances 0.000 description 13
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 239000000243 solution Substances 0.000 description 8
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 6
- 238000005498 polishing Methods 0.000 description 6
- 229960003975 potassium Drugs 0.000 description 6
- 229910052700 potassium Inorganic materials 0.000 description 6
- 239000011591 potassium Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000084 colloidal system Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000007790 solid phase Substances 0.000 description 3
- 238000004448 titration Methods 0.000 description 3
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003921 particle size analysis Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000001509 sodium citrate Substances 0.000 description 2
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000004931 aggregating effect Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000003729 cation exchange resin Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- XMHIUKTWLZUKEX-UHFFFAOYSA-N hexacosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCCCCCCCC(O)=O XMHIUKTWLZUKEX-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000001508 potassium citrate Substances 0.000 description 1
- 229960002635 potassium citrate Drugs 0.000 description 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 1
- 235000011082 potassium citrates Nutrition 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
- C01B33/141—Preparation of hydrosols or aqueous dispersions
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Colloid Chemistry (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/237,047 US8052788B2 (en) | 2005-08-10 | 2008-09-24 | Method of producing silica sols with controllable broad size distribution and minimum particle size |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201012752A TW201012752A (en) | 2010-04-01 |
| TWI491563B true TWI491563B (zh) | 2015-07-11 |
Family
ID=41382418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098123178A TWI491563B (zh) | 2008-09-24 | 2009-07-09 | 製造具有可控制寬粒徑分布和最小粒徑之矽溶膠的方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8052788B2 (enExample) |
| EP (1) | EP2346784A1 (enExample) |
| JP (1) | JP2012503586A (enExample) |
| KR (1) | KR20110069025A (enExample) |
| CN (1) | CN102164854B (enExample) |
| MY (1) | MY158518A (enExample) |
| TW (1) | TWI491563B (enExample) |
| WO (1) | WO2010036797A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050234136A1 (en) | 2004-04-19 | 2005-10-20 | Holland Brian T | Colloidal compositions and methods of preparing same |
| JP6273281B2 (ja) * | 2012-08-24 | 2018-01-31 | エコラブ ユーエスエイ インク | サファイア表面を研磨する方法 |
| WO2014136039A1 (en) * | 2013-03-05 | 2014-09-12 | Jawaharlal Nehru Centre For Advanced Scientific Research | Composition, substrates and methods thereof |
| JP6291026B2 (ja) | 2013-03-15 | 2018-03-14 | エコラボ ユーエスエー インコーポレイティド | サファイアの表面を研磨する方法 |
| CN103311106B (zh) * | 2013-05-14 | 2015-12-23 | 中国科学院半导体研究所 | 低表面粗糙度的硅基砷化镓材料的制备方法 |
| JP6179418B2 (ja) * | 2014-02-13 | 2017-08-16 | 三菱ケミカル株式会社 | 窒化物半導体基板の製造方法 |
| US9776142B2 (en) | 2014-02-28 | 2017-10-03 | Pall Corporation | Porous polymeric membrane with high void volume |
| US9561473B2 (en) | 2014-02-28 | 2017-02-07 | Pall Corporation | Charged hollow fiber membrane having hexagonal voids |
| US9610548B2 (en) | 2014-02-28 | 2017-04-04 | Pall Corporation | Composite porous polymeric membrane with high void volume |
| US9309126B2 (en) | 2014-02-28 | 2016-04-12 | Pall Corporation | Rapidly dissolvable nanoparticles |
| US9737860B2 (en) | 2014-02-28 | 2017-08-22 | Pall Corporation | Hollow fiber membrane having hexagonal voids |
| US9446355B2 (en) | 2014-02-28 | 2016-09-20 | Pall Corporation | Porous polymeric membrane with high void volume |
| US9302228B2 (en) | 2014-02-28 | 2016-04-05 | Pall Corporation | Charged porous polymeric membrane with high void volume |
| US9764292B2 (en) | 2014-02-28 | 2017-09-19 | Pall Corporation | Porous polymeric membrane with high void volume |
| CN106044786B (zh) * | 2016-06-01 | 2019-05-07 | 上海新安纳电子科技有限公司 | 多分散大粒径硅溶胶及其制备方法 |
| US10377014B2 (en) | 2017-02-28 | 2019-08-13 | Ecolab Usa Inc. | Increased wetting of colloidal silica as a polishing slurry |
| JP7003849B2 (ja) * | 2018-06-14 | 2022-01-21 | 日本製鉄株式会社 | キャスタブル耐火物の製造方法 |
| KR102670426B1 (ko) | 2020-01-15 | 2024-06-03 | 오씨아이 주식회사 | 흄드 실리카로부터 단일 응집체를 분리 및 포집하는 방법 및 단일 응집체의 형상 분류 방법 |
| WO2024237073A1 (ja) * | 2023-05-12 | 2024-11-21 | 日揮触媒化成株式会社 | 研磨用シリカ微粒子分散液、研磨用組成物、および研磨用シリカ微粒子分散液の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070034116A1 (en) * | 2005-08-10 | 2007-02-15 | Mac Donald Dennis L | Silica sols with controlled minimum particle size and preparation thereof |
| TW200831407A (en) * | 2006-10-12 | 2008-08-01 | Catalysts & Chem Ind Co | Spinous silica-based sol and method of producing the same |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT649599A (enExample) * | 1960-04-13 | |||
| US3650977A (en) * | 1969-03-27 | 1972-03-21 | Philadelphia Quartz Co | Method of preparing silica sol and product thereof |
| US3789009A (en) * | 1971-07-15 | 1974-01-29 | Du Pont | Process for the preparation of large particle silica sols |
| US5221497A (en) * | 1988-03-16 | 1993-06-22 | Nissan Chemical Industries, Ltd. | Elongated-shaped silica sol and method for preparing the same |
| US4996084A (en) * | 1989-06-30 | 1991-02-26 | Pfizer Hospital Products Group, Inc. | Colloidal silica water based slurry system for investment casting shell backup coats |
| US5100581A (en) * | 1990-02-22 | 1992-03-31 | Nissan Chemical Industries Ltd. | Method of preparing high-purity aqueous silica sol |
| JPH05170424A (ja) * | 1991-12-24 | 1993-07-09 | Nittetsu Mining Co Ltd | シリカゾルの製造方法 |
| DE4216119C2 (de) * | 1992-05-15 | 1995-08-10 | Bayer Ag | Verfahren zur Herstellung und Konzentrierung von Kieselsolen |
| DE4218306C2 (de) * | 1992-06-03 | 1995-06-22 | Bayer Ag | Verfahren zur kontinuierlichen Herstellung großpartikulärer Kieselsole |
| CO5070714A1 (es) * | 1998-03-06 | 2001-08-28 | Nalco Chemical Co | Proceso para la preparacion de silice coloidal estable |
| JP4113288B2 (ja) * | 1998-09-04 | 2008-07-09 | スピードファム株式会社 | 研磨用組成物およびそれを用いたシリコンウェーハの加工方法 |
| US6906109B2 (en) * | 2000-09-01 | 2005-06-14 | Chemical Products Corp. | Method for controling uniformity of colloidal silica particle size |
| US6747065B1 (en) * | 2000-09-01 | 2004-06-08 | Chemical Products Corporation | System and method for producing high purity colloidal silica and potassium hydroxide |
| JP2002275274A (ja) * | 2001-03-19 | 2002-09-25 | Dokai Chemical Industries Co Ltd | 鱗片状シリカ粒子を含有する高い保存安定性を有する硬化性組成物及びその製造方法 |
| US6918820B2 (en) * | 2003-04-11 | 2005-07-19 | Eastman Kodak Company | Polishing compositions comprising polymeric cores having inorganic surface particles and method of use |
| US6939211B2 (en) * | 2003-10-09 | 2005-09-06 | Micron Technology, Inc. | Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutions |
| US20050234136A1 (en) * | 2004-04-19 | 2005-10-20 | Holland Brian T | Colloidal compositions and methods of preparing same |
| US20060283095A1 (en) * | 2005-06-15 | 2006-12-21 | Planar Solutions, Llc | Fumed silica to colloidal silica conversion process |
-
2008
- 2008-09-24 US US12/237,047 patent/US8052788B2/en active Active
-
2009
- 2009-07-09 TW TW098123178A patent/TWI491563B/zh active
- 2009-09-24 CN CN2009801377248A patent/CN102164854B/zh active Active
- 2009-09-24 JP JP2011528099A patent/JP2012503586A/ja active Pending
- 2009-09-24 MY MYPI2011001291A patent/MY158518A/en unknown
- 2009-09-24 EP EP09792952A patent/EP2346784A1/en not_active Ceased
- 2009-09-24 KR KR1020117006851A patent/KR20110069025A/ko not_active Ceased
- 2009-09-24 WO PCT/US2009/058216 patent/WO2010036797A1/en not_active Ceased
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070034116A1 (en) * | 2005-08-10 | 2007-02-15 | Mac Donald Dennis L | Silica sols with controlled minimum particle size and preparation thereof |
| TW200831407A (en) * | 2006-10-12 | 2008-08-01 | Catalysts & Chem Ind Co | Spinous silica-based sol and method of producing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2346784A1 (en) | 2011-07-27 |
| TW201012752A (en) | 2010-04-01 |
| JP2012503586A (ja) | 2012-02-09 |
| US20090018219A1 (en) | 2009-01-15 |
| CN102164854A (zh) | 2011-08-24 |
| CN102164854B (zh) | 2013-11-20 |
| US8052788B2 (en) | 2011-11-08 |
| MY158518A (en) | 2016-10-14 |
| KR20110069025A (ko) | 2011-06-22 |
| WO2010036797A1 (en) | 2010-04-01 |
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