CN102144250B

CN102144250B - Bonding apparatus

Info

Publication number: CN102144250B
Application number: CN200980134458.3A
Authority: CN
Inventors: 白川义广; 横田典之; 井田琢也
Original assignee: Shibaura Engineering Works Co Ltd
Current assignee: Shibaura Mechatronics Corp
Priority date: 2008-09-04
Filing date: 2009-09-04
Publication date: 2014-03-12
Anticipated expiration: 2029-09-04
Also published as: CN102937755B; CN102937754A; CN102144250A; TWI493516B; JPWO2010026768A1; KR101586111B1; KR20140107660A; JP2012230389A; JP5095876B2; KR101545458B1; JP2012190047A; TWI470595B; CN102937755A; JP5090535B2; JP5095875B2; KR20140099559A; TW201303817A; CN102937754B; KR20110065508A; TW201305989A

Abstract

Provided is a low-cost and small bonding apparatus which can efficiently align and bond works by using a turntable. A method for controlling the bonding apparatus is also provided. The bonding apparatus which bonds a pair of works (S1, S2) is provided with: a turntable (1) which intermittently rotates corresponding to a plurality of positions; a plurality of holding apparatuses (2) which are provided on the turntable (1) and hold the works (S1, S2); an aligning section (300) which is provided on the holding apparatuses (2) and aligns the work (S1); and a pressing apparatus (5) which bonds the work (S2) on the work (S1) by urging the work (S2) held by the holding apparatus (2). A driving section (400) which drives the aligning section (300) is provided independently from the turntable (1) and removably from the aligning section (300).

Description

Laminating apparatus

Technical field

The present invention relates to the technology of the so flat workpiece of fit for example Liquid Crystal Module and cover plate to carry out improved laminating apparatus.

Background technology

In general, liquid crystal panel by lamination Liquid Crystal Module, protect its surperficial screening glass and operation use the formations such as touch panel.These Liquid Crystal Modules, screening glass and touch panel etc. (hereinafter referred to as workpiece) are assembled in the framework of Liquid Crystal Module, for fear of the distortion by protection panel or touch panel, produce with the contacting of liquid-crystalline glasses, forming each other space.

But, when entering the layer of air between (hereinafter referred to as workpiece) such as Liquid Crystal Module, screening glass, touch panels, by external light reflection, the visibility of display surface is reduced.In order to address this problem, utilize the adhesive material of double sticky tape or bonding agent etc. to fit, to form, imbed the layer between workpiece.

For this reason, when manufacturing liquid crystal panel, at least one workpiece, prepare this adhesive material, also need the laminating apparatus of fitting.In addition, in order to prevent sneaking into bubble etc. between the workpiece of laminating, it is desirable to fit in a vacuum.Therefore, in laminating apparatus, also need to arrange vacuum chamber etc.

As the technology of such laminating workpiece, for example, proposed in the scheme shown in patent documentation 1～3.The technology that

patent documentation

1 and 2 is described is the method for workpiece of fitting in a vacuum.The technology that patent documentation 3 is described is the technology that makes the device of holding workpiece move and process successively in order to fit efficiently, by the rotary table of intermittent rotary.

Prior art document

Patent documentation

Patent documentation 1: TOHKEMY 2004-170974 communique

Patent documentation 2: TOHKEMY 2004-170975 communique

Patent documentation 3: No. 3595125 communique of Jap.P.

Summary of the invention

The problem that invention will solve

But for workpiece is accurately located, it is desirable to arrange in the plane can be at the X-Y-θ worktable of orthogonal directions (X-Y direction) and sense of rotation (θ direction) displacement.But, when this X-Y-θ worktable comprises the drive source etc. that drives it, can become main equipment.For this reason, when X-Y-θ worktable is equipped on to rotary table, can involve the maximization of device integral body, the processing of power supply and control line simultaneously also becomes complicated.And then, when comprising drive source etc., interiorly X-Y-θ worktable integral body is accommodated in vacuum chamber, will guarantees that when airtight, it is large that vacuum chamber also can become.The result maximizing like this can increase the manufacturing cost of device.

The present invention proposes in order to solve the problem of above-mentioned prior art, and its fundamental purpose is to provide can use rotary table to carry out efficiently the location of workpiece and laminating, cheap and small-sized laminating apparatus again simultaneously.

In addition, another object of the present invention is to provide the laminating apparatus that can realize steady operation, can not sneak into bubble or dust etc., can carry out high precision laminating.

Solve the means of problem

For achieving the above object, laminating apparatus of the present invention, its laminating forms the pair of workpieces of display device, it is characterized in that, have: corresponding to the rotary table of a plurality of positions intermittent rotary, a plurality of, to keep pair of workpieces holding devices is set on described rotary table, is arranged on described holding device, at least one location division positioning in pair of workpieces, by the fit pressing device of pair of workpieces of at least one application of force in the pair of workpieces in described holding device; Drive the drive division of described location division to be arranged to free with described rotary work platform independent and relative described location division removable.

In above the present invention, when rotary table rotates, can holding device from drive part from, it is moved along with the rotation of rotary table.For this reason, drive division be needn't on rotary table, carry, power supply and control line do not needed yet.In addition, owing to can carrying many holding devices, so can realize at a high speed and efficiently, fit.In addition, owing to can only at a place, drive division being set, so can form at an easy rate.And then, owing to fitting on the holding device behind location, so can carry out the laminating that precision is high.

Another program is characterised in that, at least one position removable of described rotary table, is freely provided with stripping off device, and this stripping off device is peeled off the peeling paper that is attached to the double sticky tape at least one workpiece.

In above invention because stripping off device is freely set with respect to rotary table removable, so the applying device that can change bonding agent for example like that for preparing the device of other kind of adhesive material, thus can corresponding multiple product.

Another program is characterised in that, there is stripping off device at least one position at described rotary table, this stripping off device is peeled off the peeling paper that is attached to the double sticky tape at least one workpiece, described stripping off device has: to the stripping head of peeling paper pushing splicing tape, to described stripping head, supply with the supply unit of splicing tape, winding, from the wound portion of the splicing tape of described stripping head, is supplied with the mode of described splicing tape, the change portion of the direction of the supply of change splicing tape with the direction that the length direction of the described splicing tape from from described stripping head is different by described supply unit.

In above invention, since different from the length direction of splicing tape in stripping head from the direction of the supply of the splicing tape of supply unit, so can dwindle the device space of this length direction.

Another program is characterised in that, from described supply unit to described stripping head and from described stripping head to being provided with the guide member that moves of guiding splicing tape described wound portion, corresponding to the position of peeling off the workpiece of peeling paper, the different a plurality of unit of the configuration of described stripping head and described guide member can form with changing.

In above invention, can be by change portion at the different position configuration supply unit of the length direction of splicing tape in stripping head.For this reason, supply unit and wound portion can be kept intact and be prepared the different a plurality of unit of configuration of stripping head and guide member, by it is changed, and the peeling off of peeling paper that can the corresponding workpiece for diverse location.

Another program is characterised in that, in at least one position of described rotary table, be provided with the pick-up unit in 3, the square bight detected respectively in pair of workpieces, have: the center of gravity calculation portion that the mid point of 2 that forms square cornerwise two ends is calculated as the center of gravity of workpiece, 2 inclination calculating parts that calculate the inclination of workpiece based on forming square limit, calculate the location operational part of the controlled quentity controlled variable of described location division based on described center of gravity and described inclination.

In above invention, because location amount is determined in center of gravity and the inclination that can calculate pair of workpieces by detecting each square 3, so processing load can be suppressed, for Min., can locate accurately.

Another program is characterised in that, the pick-up unit of the position of detecting pair of workpieces is set at least one position of described rotary table, described pick-up unit has: the first camera that a workpiece is made a video recording, be inserted in second camera of making a video recording between pair of workpieces, to another workpiece, in described the second camera, with described the first camera face in opposite directions, reflecting part be set.

In above invention, even owing to bending at workpiece etc., from the irradiation light of the first photograph pusher side, can be reflected by the reflecting surface of the second camera, in the first camera, be subject to light, so can detect effectively.

Another program is characterised in that, described pressing device has can take in independently with described drive division the vacuum chamber of the part of the holding workpiece in described location division.

In above invention, owing to taking in the part of holding workpiece of the location division of holding device for carrying out vacuum abutted vacuum chamber, do not take in drive division passable, so can reach miniaturization yet.

Another program is characterised in that to have the ventilation path being communicated with vacuum source, has: make a workpiece vacuum suction in the adsorption section of described location division, and described ventilation path is switched to the valve of vacuum source and vacuum chamber side.

In above invention, owing to forming vacuum in reduced vacuum chamber by transfer valve, can be identical with vacuum chamber inside be arranged to pressure for the ventilation path of vacuum suction workpiece, so can prevent that workpiece from coming off.

Another program is characterised in that, have: the vacuum meter of the magnitude of voltage that output is corresponding with pressure in described vacuum chamber, storage is from the magnitude of voltage of described vacuum meter output with for calculating the storage part of a plurality of multinomial approximate expressions of the pressure corresponding with it, formula selection portion based on being stored in magnitude of voltage in described storage part and multinomial approximate expression and selecting the multinomial approximate expression corresponding with magnitude of voltage from described vacuum meter, the pressure operational part based on selected multinomial approximate expression calculating pressure value.

In above invention, owing to selecting suitable multinomial approximate expression corresponding to the magnitude of voltage being detected by vacuum meter, so the approximate function of available low number of times carries out high-precision calculation of pressure.In addition, owing to always only carrying out by a simple calculation process that function forms, so can alleviate processing load.

Another program is characterised in that, in described location division and described pushing portion, at least one party and surface of contact workpiece, is arranged on the guard block that is pasted with Porous sheet on elastomeric element.

In above invention, owing to forming guard block by attach Porous sheet on elastomeric element, so the impact to workpiece in the time of can being absorbed in laminating prevents that workpiece from attaching to elastomeric element simultaneously.

Another program is characterised in that, at least one position of described rotary table, removable is freely arranged on the applying device of adhesive-applying at least one workpiece.

In above invention, because applying device is freely set with respect to rotary table removable, thus can change for preparing the device of other kind of adhesive material, so can corresponding multiple product.

The effect of invention

As described above, according to the present invention, can provide and can use rotary table to carry out efficiently the location of workpiece and laminating and cheap and small-sized laminating apparatus.

In addition, according to the present invention, can provide and can realize stable operation, can not sneak into bubble or dust etc., can reach the laminating apparatus of high-precision laminating.

Accompanying drawing explanation

Fig. 1 means the general view that the integral body of an embodiment of the invention forms.

Fig. 2 means the longitudinal diagram of the holding device in the embodiment of Fig. 1.

Fig. 3 means maintaining part in the holding device of Fig. 2 and the stereographic map of adsorption section.

Fig. 4 means the longitudinal diagram of the location division in the embodiment of Fig. 1.

Fig. 5 means the planimetric map of the location of directions X in the location division of Fig. 4 and Y-direction.

Fig. 6 means the planimetric map of the location of the θ direction in the location division of Fig. 4.

Longitudinal diagram when Fig. 7 means the latch-release of the sticking department in the location division of Fig. 4.

Longitudinal diagram when Fig. 8 means the locking of Fig. 7.

Fig. 9 is the planimetric map of Fig. 7.

Longitudinal diagram when Figure 10 means the absorption of the pressure contact portion in the embodiment of Fig. 1.

Figure 11 means the longitudinal diagram when absorption of the pressure contact portion of Figure 10 is opened.

Figure 12 means the 3-way valve (A) of Figure 10, the longitudinal diagram of the 3-way valve (B) of Figure 11.

Figure 13 means the outboard profile of the stripping off device (first module) in the embodiment of Fig. 1.

Figure 14 is the planimetric map of Figure 13.

Figure 15 is the back view of Figure 13.

Figure 16 means the outboard profile of the stripping off device (second unit) in the embodiment of Fig. 1.

Figure 17 means the key diagram of peeling off that the stripping off device by Figure 13 carries out.

Figure 18 means the key diagram of peeling off that the stripping off device by Figure 16 carries out.

Figure 19 mean downside that the stripping off device by prior art carries out peel off (A) (B), upside peels off (C) key diagram (D).

Figure 20 means the stereographic map of the pick-up unit in the embodiment of Fig. 1.

Figure 21 means the outboard profile of the pick-up unit of Figure 20.

Figure 22 means the key diagram that is subject to light of the coaxial indirect illumination in the pick-up unit of Figure 20.

Figure 23 means the longitudinal diagram when vacuum chamber of the pressing device in the embodiment of Fig. 1 rises.

Figure 24 means the longitudinal diagram when vacuum chamber of the pressing device of Figure 23 declines.

Figure 25 means the longitudinal diagram when polishing head of the pressing device of Figure 23 declines.

Figure 26 means the functional-block diagram of control device of the embodiment of Fig. 1.

Figure 27 means the functional-block diagram of the vacuum operational part of Figure 26.

Figure 28 means the process flow diagram of the location order in the embodiment of Fig. 1.

Figure 29 means the key diagram of the location order in the embodiment of Fig. 1.

Figure 30 means the process flow diagram of the laminating order in the embodiment of Fig. 1.

Figure 31 means the key diagram of form of the relation of detection voltage that the vacuum meter by prior art obtains and pressure.

Figure 32 means the key diagram of the table curve of Figure 31.

Figure 33 means the key diagram of curve of the relation of detection voltage that the vacuum meter in present embodiment obtains and pressure.

Figure 34 mean Figure 33 curve (1) section key diagram.

Figure 35 mean Figure 33 curve (2) section key diagram.

Figure 36 mean Figure 33 curve (3) section key diagram.

The simple planimetric map of embodiment when Figure 37 means the applying device that uses bonding agent of the present invention.

Figure 38 means the longitudinal diagram of an example of another pick-up unit.

Figure 39 means the longitudinal diagram of an example of another pick-up unit.

Figure 40 means the stereographic map of an example of the workpiece of laminating.

Figure 41 means the key diagram of the contraposition example of Figure 40.

Figure 42 means the key diagram of the location order in the embodiment of Figure 40.

Embodiment

Lower surface, is specifically described embodiments of the present invention (hereinafter referred to as embodiment) with reference to accompanying drawing.

[A. formation]

[1. whole formation]

First, the integral body of the laminating apparatus of present embodiment (hereinafter referred to as this device) is formed and described.As shown in Figure 1, this device is the equipment of four holding devices 2 that carries on rotary table 1.Rotary table 1 is configured to, by indexing mechanism 11 with put into extracting position 1A, adhesive material ready position 1B, position location 1C and vacuum abutted position 1D intermittent rotary accordingly.

As shown in FIG. 2 and 3, holding device 2 is devices that workpiece S1 and workpiece S2 are kept it up and down opposite to each other.In the present embodiment, as workpiece S1, S2, for example, use the so OBL substrate of Liquid Crystal Module and cover plate.On workpiece S1, S2, corresponding to imaginary rectangle or foursquare four summits, the mark M1, the M2 that detect use are set.This holding device 2 has the location division 300 of the position contraposition that makes workpiece S1, S2 etc.

At adhesive material ready position 1B, removable freely arranges stripping off device 3 or applying device.As shown in Figure 13～19, stripping off device 3 is devices that the peeling paper that sticks in advance the double sticky tape T1 on workpiece S1 (stripping film etc. are not considered material) F is peeled off.Applying device is diagram not, is the device of adhesive-applying on workpiece S1.As applying device, can use known device.

As shown in Figure 20 and Figure 21, at position location 1C, the pick-up unit 4 of the position of detecting workpiece S1, S2 is set.Value based on being detected by this pick-up unit 4, determines that the location of the relative workpiece S2 of workpiece S1 in location division 300 is measured.

As shown in Fig. 2, Figure 23～25, at vacuum abutted position 1D, pressing device 5 is set.In the pressure reduction space of this pressing device 5 in vacuum chamber 51, workpiece S2 is pressed to workpiece S1 thruster and press, both can be fit together thus.

[2. holding device]

Then, each several part is elaborated.First, as shown in Fig. 2～9, holding device 2 possesses maintaining part 100, column sections 200, location division 300, drive division 400, sticking department 350, adsorption section 500.

[2-1. maintaining part]

As shown in Figure 3, maintaining part 100 is frames of cardinal principle コ font of the left and right edges of holding workpiece S2.

[2-2. column sections]

Column sections 200 is two columnar parts erectting in the vertical direction.By this column sections 200, liftably support maintaining part 100.Maintaining part 100 is position in the early stage, is positioned at the top of leaving workpiece S1, and workpiece S2 is remained on to horizontal direction.In addition, in when laminating, by pressing device 5, maintaining part 100 is pushed downwards together with workpiece S2 and decline, carry out the laminating of workpiece S1 and workpiece S2.

[2-3. location division]

As shown in Figure 4, location division 300 has by mounting portion 310, X-axis portion 320, Y-axis portion 330 and the θ axial region 340 etc. that are fixed on the pallet 1a supporting on rotary table 1.

[2-3-1. mounting portion]

Mounting portion 310 has X-Y-θ worktable 311, axial region 312, movable table 313, corrugated tube 314 and belt wheel 315 etc.

X-Y-θ worktable 311 is the worktable for the level of positioning workpieces S1.This X-Y-θ worktable 311 is arranged in can be mobile in the rectilinear direction (directions X and Y-direction) of quadrature on surface level, and can centered by axial region 312, rotate (θ direction).

Axial region 312 is columnar parts of vertical direction.The upper end of axial region 312 links with X-Y-θ worktable 311 rotationally.The lower end of axial region 312 is run through rotary table 1 and is fixed in movable table 313.As narration below, movable table 313 is arranged in X-axis and Y direction, to be moved by X-axis portion 320 and Y-axis portion 330.

Between movable table 313 and rotary table 1, the corrugated tube 314 that covers axial region 312 is installed.The airtight of the installation end of corrugated tube 314 guaranteed.In addition, corrugated tube 314 is flexible owing to having, thus can be corresponding to the movement of movable table 313, flexibly displacement under the airtight state of maintenance.Belt wheel 315 is fixed on X-Y-θ worktable 311.On this belt wheel 315, be linked with Timing Belt 343 described later.

[2-3-2.X axial region]

X-axis portion 320 has turning axle 321, eccentric roller 322 and armature 323 etc.Turning axle 321 is parts of the vertical direction that can be rotated by drive division 400.Eccentric roller 322 is arranged on the upper end of turning axle 321.As shown in Figure 5, this eccentric roller 322 is inserted in the groove 313a of the Y-direction that is formed at movable table 313.

For this reason, eccentric roller 322 is followed the rotation of turning axle 321 and the inwall application of force to groove 313a can make movable table 313 move at directions X.Now, axial region 312 and X-Y-θ worktable 311 move at directions X together with movable table 313.

Armature 323 is arranged on the lower end of turning axle 321.This armature 323 can be located to removable on clutch coupling 420 described later.By armature 323, be connected with clutch coupling 420, can realize the driving by 400 pairs of turning axles 321 of drive division.

[2-3-3.Y axial region]

Y-axis portion 330 has turning axle 331, eccentric roller 332 and armature 333 etc.Turning axle 331 is parts of the vertical direction that can be rotated by drive division 400.Eccentric roller 332 is arranged on the upper end of turning axle 331.As shown in Figure 5, this eccentric roller 332 is inserted in the groove 313b of the directions X that is formed at movable table 313.

For this reason, eccentric roller 332 is followed the inwall application of force of the rotation of turning axle 331 to groove 313b, can make movable table 313 move in Y-direction.Now, axial region 312 and X-Y-θ worktable 311 move in Y-direction together with movable table 313.

Armature 333 is arranged on the lower end of turning axle 331.This armature 333 can be located to removable on clutch coupling 430 described later.By armature 333, be connected with clutch coupling 430, can realize the driving by 400 pairs of turning axles 331 of drive division.

[2-3-4. θ axial region]

θ axial region 340 has upper turning axle 341, belt wheel 342, Timing Belt 343, corrugated pipe connector 344, Shaft 345 and armature 346 etc.Upper turning axle 341 is parts of vertical direction, and fixed pulley 342 in the top.On belt wheel 342, hanging Timing Belt 343.Thus, as shown in Figure 6, when upper turning axle 341 rotates, its rotation passes to belt wheel 315 via Timing Belt 343, so X-Y-θ worktable 311 rotates.

The upper end of the lower end of upper turning axle 341 and corrugated pipe connector 344 links.This corrugated pipe connector 344 is the connecting members that consist of the flexible corrugated pipe that absorbs the dislocation of directions X and Y-direction.Lower end at corrugated pipe connector 344 links Shaft 345.Shaft 345 is parts of vertical direction, and its rotation passes to upper turning axle 341 via corrugated pipe connector 344.

Armature 346 is arranged on the lower end of Shaft 345.This armature 346 can be located to removable on clutch coupling 440 described later.By armature 346, be connected with clutch coupling 420, can realize the driving by 400 pairs of Shafts 345 of drive division, upper turning axle 341.

[2-4. drive division]

Drive division 400 has stationary work-table 410, clutch coupling 420,430,440, motor 450,460,470 etc.Stationary work-table 410 is the worktable that are fixed on the bottom of rotary table 1.On position corresponding to X-axis portion 320, Y-axis portion 330, θ axial region 340 in this stationary work-table 410, fixed clutch 420,430,440.In addition, on clutch coupling 420,430,440, connect respectively the motor 450,460,470 that transmits rotation.

When to coil 421,431,441 energising, clutch coupling 420,430,440, by the magnetic flux producing between rotor 422,432,442 and armature 323,333,346, adsorbs armature 323,333,346.Thus, the driving force of motor 450,460,470 can pass to X-axis portion 320, Y-axis portion 330, θ axial region 340.

[2-5. sticking department]

As shown in Fig. 4, Fig. 7～Fig. 9, sticking department 350 has detent plate 351, detent 352, lifting shaft 353, spring 354, is urged portion 355,356 etc.Detent plate 351 is for example steel spring plates that are fixed in movable table 313.Detent 352 be by and a part of pallet 1a between clip detent plate 351 and carry out the parts that crimping locks movable table 313.For detent 352 and surface of contact detent plate 351, such as the slip-proofing device that uses rubber lining etc.

Lifting shaft 353 is arranged to run through pallet 1a and is carried out lifting.Detent plate 351 is installed in upper end at lifting shaft 353.Spring 354 is to lifting shaft 353 force application part of the spring etc. of the application of force downwards.Be urged the lower end that portion 355 is arranged on lifting shaft 353.Cylinder 356 is to be fixed on stationary work-table 410, by the mechanism unlocking to coming the portion that is urged 355 application of forces on its top.In addition, illustrated sticking department 350 is parts corresponding with X-axis portion 320, though other diagram is not respectively arranged with the sticking department of same structure accordingly with Y-axis portion 330, θ axial region 340.

[2-6. adsorption section]

As shown in Figure 10 and Figure 11, adsorption section 500 has adsorption plate 510,3-way valve 520, adsorption pump 530 (with reference to Figure 26) etc.Adsorption plate 510 is fixed on X-Y-θ worktable 311.On adsorption plate 510, be provided with on the surface of the elastomeric element of rubber etc. note attached the guard block 511 of sheet of polyurethane multiple aperture plasma membrane system.At adsorption plate 510 and guard block 511, be formed with not shown adsorption hole.This adsorption hole is connected with one end of pipe arrangement 512 via the ventilation path being formed in adsorption plate 510.

3-way valve 520 is fixed on rotary table 1.This 3-way valve 520 has inner tube portion 521, upper side valve 522, lower side valve 523, bar 524 and is urged portion 525 etc.Inner tube portion 521 is continuous in the vertical direction pipes.Rotary table 1 ground is run through in this inner tube portion 521, and face side and lower face side are outstanding thereon.

The other end that connects above-mentioned pipe arrangement 512 in the outstanding inner tube portion 521 of the upper surface side of left-hand tools worktable 1.Thus, the adsorption hole of X-Y-θ worktable 311 and inner tube portion 521 are communicated with via ventilation path.One end of the side connecting pipings 526 of the inner tube portion 521 that the lower face side of left-hand tools worktable 1 is outstanding.The other end of this pipe arrangement 526 is connected with the adsorption pump 530 as vacuum source.In addition, even also can guarantee with rotary table 1 rotation the mode that adsorption pump 530 and pipe arrangement 526 are communicated with, between adsorption pump 530 and pipe arrangement 526, via not shown swivel adapter head, connect.

Upper side valve 522 is by lifting, to open and close the valve of the upper end of inner tube portion 521.Lower side valve 523 is by open and close the valve being communicated with adsorption pump 530 in the interior lifting of inner tube portion 521.Bar 524 is arranged to can be in the interior lifting of inner tube portion 521.This bar 524 links upper side valve 522 and lower side valve 523.Be urged the lower end that portion 525 is located at bar 524.This be urged portion 525 by the pushing portion 527 that formed by cylinder etc. by the application of force upward.Pushing portion 527 is fixed on stationary work-table 410.

Such 3-way valve 520, when absorption workpiece S1, connects the circuit (with reference to black arrow line) of adsorption hole and adsorption pump 530 connections as shown in Figure 12 (A).In addition, as shown in Figure 12 (B), when by pushing portion 527 pushing lower ends be urged portion 525 time, because upper side valve 522 is opened, lower side valve 523 is closed, so, be configured to adsorption hole and become same pressure around, closing be communicated with (with reference to black arrow line) with adsorption pump 530 simultaneously.

[3. stripping off device]

Stripping off device 3 is that peeling paper F note that note is attached to the double sticky tape T1 on workpiece S1 or workpiece S2 is attached to the upper and device peeled off of splicing tape T2.As shown in Figure 13～15, this stripping off device 3 has supply unit 31, change portion 32, stripping portion 33 and wound portion 34 etc.

Supply unit 31 has the spool of sending 31a and spool rotating mechanism 31b (with reference to Figure 26).Sending spool 31a is the spool that is wound around the splicing tape T2 supplying with.Spool rotating mechanism 31b is the mechanism that controls the not shown braking of sending spool 31a.As shown in figure 14, change portion 32 is the rectangular pin of going direction changing or the rollers from supply unit 31 splicing tape T2.

Stripping portion 33 has stripping head 33a, cylinder 33b, guide reel 33c～33e etc.Stripping head 33a be back side pushing by the attaching face of the splicing tape T2 from being supplied with by supply unit 31 it and be pressed to the roller of the peeling paper F workpiece S1.The mode that stripping head 33a starts crimping splicing tape T2 with the end from workpiece S1 arranges obliquely.Cylinder 33b is the mechanism that makes stripping head 33a forward direction (in figure left to) mobile, when this moves, can remove the braking of supply unit 31a, pulls out splicing tape T2.Guide reel 33c～33e be guiding splicing tape T2 from change portion 32 to stripping head 33a, the roller (guide member) that moves to wound portion 34 from stripping head 33b.

Wound portion 34 has the spool of winding 34a, spool elevating mechanism 34b, spool rotating mechanism 34c (with reference to Figure 26) etc.Being wound around spool 34a is the spool being wound around from the splicing tape T2 of stripping head 33a.The axle of this winding spool 34a is arranged in the direction with the axle quadrature of supply unit 31.Spool elevating mechanism 34b makes to be wound around the mechanism of spool 34a lifting such as rotation by feed screw etc.Spool rotating mechanism 34c has not shown drive source etc., controls and be wound around the rotation of spool 34a and the mechanism of braking.

In addition, above-mentioned stripping off device 3 is that the device of peeling off the first module U1 of peeling paper F for the workpiece S1 from downside is installed.In this stripping off device 3, as shown in figure 16, the second unit U2 that first module U1 is arranged to peel off with the workpiece S2 from upside peeling paper F changes.

As shown in Figure 13 and Figure 17, first module U1 is provided with guide reel 33c～33e, to supply with the splicing tape T2 from change portion 32 from the downside of stripping head 33a, it is guided to being wound around spool 34a through upside.Guide reel 33e in first module U1 is below the going direction changing of the splicing tape T2 through stripping head 33a.

On the other hand, as shown in Figure 16 and Figure 18, second unit U2 is provided with

guide reel

33f, 33g, to supply with the splicing tape T2 from change portion 32 from the upside of stripping head 33a, it is guided to being wound around spool 34a through downside.Guide reel 33g in second unit U2 is below the going direction changing of the splicing tape T2 through stripping head 33a.

And then first module U1 and second unit U2 are arranged to can be by cylinder 35 liftings.First module U1, when declining, can press to the splicing tape T2 in stripping head 33a the peeling paper F of workpiece S1.Second unit U2, when rising, can press to the splicing tape T2 in stripping head 33a the peeling paper F of workpiece S2.

Peeling off as follows of being undertaken by this stripping off device 3 carried out.; as shown in Figure 17 (A), Figure 18 (A); by cylinder 33b, stripping head 33a is forwards moved; splicing tape T2 is pulled out from supply unit 31a simultaneously; by cylinder 35, make first module U1 decline or make second unit U2 increase; thereby splicing tape T2 is pressed to peeling paper F, at spool

rotating mechanism

31b, 34c, make to send spool 31a and be wound around under the state of rotation brake of spool 34a, by spool elevating mechanism 34b, make to be wound around spool 34a and decline.

Like this, as shown in Figure 17 (B), Figure 18 (B), splicing tape T2 is pulled to below, and stripping head 33a presses to splicing tape T2 peeling paper F and retreats simultaneously.Thus, it is upper that peeling paper F is attached to splicing tape T2, from workpiece S1 or S2, peels off.

[4. pick-up unit]

As shown in Figure 20 and Figure 21, pick-up unit 4 has two

CCD cameras

41,42, supports their

arm

45,46, camera driving mechanism 49 (with reference to Figure 26) etc.The CCD camera 41 that is configured in top is cameras (the first camera) that camera lens is made a video recording towards below, to the bight of the workpiece S2 of top or mark M2.The CCD camera 42 that is configured in below is cameras (the second camera) that camera lens is made a video recording towards below, to the bight of the workpiece S1 of below or mark M1.

Camera driving mechanism 49 is mechanisms' (for example X-Y axle driving mechanism) with not shown drive source etc., actuating arm 45,46.Arm 45 is arranged to, by by camera driving mechanism 49 (direction all around) movement in the horizontal direction, can make the top of CCD camera 41 relative workpiece S2 come in and go out.Equally, arm 46 is also arranged to, by by camera driving mechanism 49 (direction all around) movement in the horizontal direction, can make the top of CCD camera 42 relative workpiece S1 come in and go out.

Each CCD camera the 41, the 42nd, the camera of detected object being made a video recording by detecting the reflected light of built-in light source (coaxial indirect illumination).The shooting of each

CCD camera

41,42 as described later, is controlled by imaging control part 662.And then, at the upper surface of the CCD of bottom camera 42, be provided for reflection from the reflection of light face 42a of the CCD camera 41 on top.This reflecting surface 42a is such as being made by the simple and easy parts of aluminium strip etc.

[5. pressing device]

As shown in Fig. 2, Figure 23～25, pressing device 5 has vacuum chamber 51, polishing head 52, elevating mechanism 53 and cylinder 54 etc.Vacuum chamber 51 is chambeies of the holding device 2 on covering airtight rotary table 1.Polishing head 52 is to be located at the mechanism of workpiece S2 being pressurizeed in vacuum chamber 51, downwards.

Elevating mechanism 53 is by not shown drive source etc., to be made the mechanism of vacuum chamber 51 and polishing head 52 1 liftings.Cylinder 54 is by the driving stem of advancing and retreat, to be made the mechanism of polishing head 52 liftings.In addition, on polishing head 52, the surface that is arranged on rubber has attached the guard block 52a of the sheet of polyurethane multiple aperture plasma membrane system.

And then, at vacuum chamber 51, via pipe arrangement, connect the drawdown pump 55 as vacuum source, be provided for detecting the vacuum meter 56 (with reference to Figure 26) of internal pressure simultaneously.

[6. control device]

Drive source separately of the component parts such as rotary table 1, holding device 2, stripping off device 3, pick-up unit 4, pressing device 5, switch, power supply etc., move and controlled by the control device 6 by shown in Figure 26.This control device 6 can consist of the circuit by such as special or each following function of the realizations such as computing machine of moving with established procedure.

Below, with reference to the Figure 26 as imaginary functional-block diagram, this control device 6 is described.In addition, for the input media of the switch for for staff operating control device 6, touch panel, keyboard, mouse etc., for confirming the output unit of display, signal lamp, instrument etc. of the state of control device 6, description thereof is omitted.

That is, control device 6 has worktable control part 610, storage part 620, timing control part 630, I/O Interface 640, peels off the function of control part 650, position detection part 660, positioning control portion 670, vacuum control portion 680 etc.

[6-1. worktable control part]

Worktable control part 610 is the mechanisms that control the intermittent rotary action of indexing mechanism 11.

[6-2. storage part]

Storage part 620 is mechanisms of the various settings such as storage action timing, calculating formula, result of calculation or data etc.

[6-3. timing control part]

Timing control part 630 is with the action of each portion of predefined timing controlled mechanism regularly.

[6-4. I/O Interface]

I/O Interface 640 is to control as the change of signal between each portion of control object or the mechanism of input and output.

[6-5. peels off control part]

Peeling off control part 650 is the mechanisms that control the action of stripping off device 3.This is peeled off control part 650 and has a control part 651, rotation control part 652, elevating control portion 653 etc.

Control part 651 be control drive stripping head 33a cylinder 33b, drive the mechanism of the cylinder 35 of first module U1 or second unit U2.Rotation control part 652 is to control the spool rotating mechanism 31b of supply unit 31, the mechanism of the spool rotating mechanism 34c of wound portion 34.Elevating control portion 653 is the mechanisms that control spool elevating mechanism 34b.

[6-6. position detection part]

Position detection part 660 is the mechanisms that control pick-up unit 4.This position detection part 660 has camera drive division 661,

imaging control part

662,3 extracting part 663, center of gravity calculation portion 664, inclination calculating part 665 etc.Camera drive division 661 is to control the mechanism make the camera driving mechanism 49 that arm 45～48 moves.Imaging control part 662 is to control the mechanism of the shooting of being undertaken by CCD camera 41～44.

3 extracting part 663 are the bight of image contract workpiece S1, S2 or 3 the mechanisms of mark M1, M2 from being obtained by 41,42 shootings of CCD camera.The mechanism of center of gravity is calculated by center of gravity calculation portion 664 by the point with 3 extracting part 663 extract.Inclination calculating part 665 is to calculate the mechanism of inclination by the point extracting by 3 extracting part 663.

[6-7. positioning control portion]

Positioning control portion 670 is the mechanisms that control location division 300.This positioning control portion 670 has Clutch Control portion 671, location operational part 672, motor control portion 673 etc.Clutch Control portion 671 makes armature 323,333,346 and clutch coupling 420,430,440 carry out the mechanism of removable by controlling to the energising of coil 421,431,441.In addition, Clutch Control portion 671, by moving with the energising of coil 421,431,441 synchronously being made to cylinder 356, also carries out the locking of being undertaken by sticking department 350.Location operational part 672 is the center of gravity of workpiece S1, S2 based on being calculated by center of gravity calculation portion 664 and inclination calculating part 665 and the mechanism of tilting to calculate the amount of movement of X-Y-θ worktable 311.

[6-8. vacuum control portion]

Vacuum control portion 680 is the mechanisms that control adsorption section 500 and pressing device 5.This vacuum control portion 680 has chamber control part 681, Decompression Controlling portion 682, vacuum operational part 683, valve control part 684, pushing control part 685 and absorption and control portion 686 etc.Chamber control part 681 is the mechanisms that control the elevating mechanism 53 that makes vacuum chamber 51 liftings.

Decompression Controlling portion 682 is the mechanisms that control the drawdown pump 55 reducing pressure in vacuum chamber 51.Vacuum operational part 683 is mechanisms that the detected value based on vacuum meter calculates the pressure in vacuum chamber 51.

As shown in figure 27, vacuum operational part 683 has voltage detection unit 683a, formula selection portion 683b, pressure operational part 683c etc.Voltage detection unit 683a is which the mechanism of judging simulation output (magnitude of voltage) from vacuum meter 56 voltage range in being set in storage part 620.Formula selection portion 683b is that voltage range and the multinomial approximate expression corresponding with it based on being set in storage part 620 selected the mechanism corresponding to the multinomial approximate expression of the voltage range of being judged by voltage detection unit 683a.Pressure operational part 683c is the mechanism that the multinomial approximate expression of magnitude of voltage based on judging and selection is carried out calculating pressure value.

Valve control part 684 is mechanisms that the result of calculation based on vacuum operational part 683 is controlled the pushing portion 527 of switching 3-way valve 520 switchings.Pushing control part 685 is the mechanisms that control the cylinder 54 that makes polishing head 52 liftings.Absorption and control portion 686 controls for adsorb the mechanism of the adsorption pump 530 of workpiece S1 on adsorption plate 510.

At this, with reference to Figure 31～36 pair, by the calculated example that above-mentioned vacuum operational part 683 carries out, describe.That is, consider the situation that simulation output and indicated pressure from general vacuum meter have the such relation of Figure 31.In this case, as derived the method for pressure by the analogue value, have in advance to storing the such form of Figure 31 (simulated data form), the method for this form and the current analogue value relatively successively in memory storage.But, in the method, need to successively retrieve this data, it is large that computing program becomes, and the processing time is also elongated.

In addition, have the variable quantity between each data in form is seen to linear method of carrying out computing.But, in order to improve pressure, derive the precision of result, when increase is stored in the data bulk of form of memory storage, the processing in calculation processing apparatus is slack-off.Otherwise when suppressing data bulk, although pressure is derived the deterioration in accuracy of result, computing accelerates.That is, precision and calculating treatmenting time are inverse relationship.

As other method, there is the method for using multinomial approximate expression to calculate.But under form complicated situation, when foundation meets the multinomial approximate expression of claimed accuracy, the number of times of approximate function also increases, computing spends a large amount of time.For example, when above-mentioned table curve, shown in figure 32, the relation of voltage and pressure is nonlinear, and being based upon gamut, to obtain high-precision multinomial approximate expression be difficult.In addition, Figure 32 is also corresponding with Figure 33～36, in order to represent more widely pressure limit, becomes single logarithmic curve.

In the present embodiment, form is divided into any number of intervals, sets up the multinomial approximate expression corresponding to each interval.In addition, according to the magnitude of voltage detecting, select any one in multinomial approximate expression, carry out calculation of pressure computing.

For example,, in the situation that the curved line relation that has Figure 33 from detection magnitude of voltage and its indicated pressure of the simulation of vacuum meter 56 is divided into following three sections the scope of magnitude of voltage.

(1) 0V above～not enough 3V

(2) 3V above～not enough 8V

(3) 8V above～below 10V

In addition, corresponding to the scope of these (1)～(3), set following three multinomial approximate expressions.

(a)PL＝-36.837V3+320.94V2-1104.9V+1724.7[Pa]

(b)Pm＝-0.8021V3+23.787V2-240.08V+832.07[Pa]

(c)Ph＝-0.6572V3+21.162V2-231.87V+859.72[Pa]

The multinomial approximate expression of each scope can meet sufficient precision with cubic function.That is, as shown in figure 34, when to take the curve of curve that the scope of (1) is benchmark and operation result while comparing, become line unanimous on the whole.This in the scope of (2) (3) shown in Figure 35 and Figure 36 too.

In addition, as shown in figure 27, in storage part 620, set force value valve for become for switched the threshold value of 3-way valves 520 by valve control part 684, become for made the pushing force value of the threshold value of polishing head 52 declines by pushing control part 685., when the force value of being calculated by pressure operational part 683c becomes valve and uses force value, cut for 3-way valve 520 for this reason, when becoming pushing and use force value, polishing head 52 declines.

[B. effect]

Have above formation present embodiment effect as shown below.In addition, by the order of following explanation, controlling the method for laminating apparatus and make the computer program of control device action is also an embodiment of the invention.

[the 1. installation of workpiece]

First, workpiece S1, S2 are described to the installation of holding device 2.In addition, at workpiece S1, attach a binding face of double sticky tape T1.Now, on the another side of double sticky tape T1, attaching to former state peeling paper F.

That is, shown in Fig. 1, putting into extracting position 1A, as shown in Fig. 2～4, staff, being stained with facing up of double sticky tape T1, is placed in workpiece S1 on the guard block 511 of adsorption plate 510.Now, absorption and control portion 686 makes adsorption pump 530 actions, by the adsorption hole absorption workpiece S1 of adsorption plate 510 and guard block 511.In addition, staff is located at maintaining part 100 workpiece S2.In addition, also can put into workpiece without staff, but automatically put into by the feed mechanism of autoloader etc. the workpiece that will process etc.

[2. peeling paper peels off]

As mentioned above, the holding device 2 of holding workpiece S1, S2 is come adhesive material ready position 1B by the rotation of rotary table 1.At this, stripping off device 3 is peeled off the peeling paper F of workpiece S1.; as shown in Figure 13 and Figure 17 (A); control part 651 forwards moves stripping head 33a by driving cylinder 33b, makes first module U1 increase by driving cylinder 35 simultaneously, makes to peel off the edge butt of the peeling paper F of the splicing tape T2 of use and the double sticky tape T1 of workpiece S1.

By controlling spool

rotating mechanism

31b, 34c by rotation control part 652, to sending spool 31a and being wound around spool 34a, applying under the state of braking, elevating control portion 653 makes spool elevating mechanism 34b action, makes to be wound around spool 34a and declines.Like this, below splicing tape T2 is pulled in, stripping head 33a retreats.Now, as shown in Figure 17 (B), the peeling paper F engaging with splicing tape T2 is attached to double sticky tape T1 and is above stripped from.

In addition, rotation control part 652 makes spool rotating mechanism 34c action and makes to be wound around spool 34a rotation, and elevating control portion 653 makes spool elevating mechanism 34b action simultaneously, makes to be wound around spool 34a to rise, thereby returns to the state of peeling off peeling paper F from next workpiece S1.

In addition, illustrated in the above and used first module U1 from the workpiece S1 of downside, to peel off the situation of peeling paper F, but in the situation that use second unit U2 to peel off peeling paper F from the workpiece S2 of upside, its basic running order is also same (with reference to Figure 18 (A) (B)).

[the 3. location of workpiece]

Then, the holding device 2 of holding workpiece S1, S2 is come position location 1C by the rotation of rotary table 1.Now, by 356 pairs, the cylinder by sticking department 350, be urged portion's 355 application of forces, remove the locking (X, Y, θ axle whole) of location division 300.Like this, carry out the position probing of being undertaken by pick-up unit 4, the location of being undertaken by location division 300.According to the flow process of Figure 28, in the time of with reference to Figure 20～22, Figure 29, this order is described below.

[3-1. position probing]

Camera drive division 661 is by making 49 actions of camera driving mechanism carry out transfer arm 45,46.Thus, as shown in Figure 20 and Figure 21, CCD camera 41 moves to the top of workpiece S2, and CCD camera 42 moves (step 101) between workpiece S1 and workpiece S2.

In addition,

CCD camera

41,42 stops at the position (step 102) corresponding with the bight of workpiece S1, S2 or mark M1, M2 successively.Imaging control part 662 at CCD camera 41 successively to the bight of workpiece S1 and workpiece S2 or mark M1, M2 make a video recording (step 103).The image that shooting obtains is transfused to control device 6 (step 104).

In addition, when above-mentioned shooting, at workpiece S2, be in normal situation, as shown in Figure 22 (A), because the reflected light from workpiece S2 being formed by coaxial indirect illumination is got back to CCD camera 41, so can make a video recording no problemly.But as shown in Figure 3, workpiece S2 is adsorbed by adsorption plate 510 as workpiece S1, but is remained in the air by maintaining part 100.Therefore, as shown in Figure 22 (B), workpiece S2 easily produces bending, distortion etc., now, from the reflected light of workpiece S2, likely returns less than CCD camera 41.

In the present embodiment, even in this case, as shown in Figure 22 (C), because the illumination from CCD camera 41 is reflected by the reflecting surface 42a being arranged on CCD camera 42, getting back to effectively CCD camera 41, so, can make a video recording.In addition, when using mark M1, M2 as detected object, in order to accept reflected light, the part that it is desirable to be equivalent in workpiece S2 mark M1, M2 has the position of printing opacity.

As mentioned above, after 3 are made a video recording (step 105), 3 bight of image contract workpiece S1 or 3 points of identification marking M1 that extracting part 663 is obtained by shooting extract the bight of workpiece S2 or three points (step 106) of mark M2 corresponding with it simultaneously.In addition, because can realize with the general pattern treatment technology of prior art from the processing of image contract point, so description thereof is omitted.

As shown in Figure 29 (A), barycentric coordinates G1, the G2 of center of gravity calculation portion 664 using the mid point at 2, the diagonal angle in 3 points of each workpiece S1, S2 (point impaling with single dashdotted circle) as workpiece S1, S2 calculates (step 107).In addition, inclination calculating part 665 calculates (step 108) using the inclination of the straight line of 2 of the long limit of the link in each workpiece S1, S2 3 or minor face as the inclination of workpiece S1, S2.

Then, the location operational part 672 in positioning control portion 670 calculates the amount of movement of workpiece S1, so that the center of gravity of two workpiece S1, S2 and tilt consistent (step 109).That is, calculate the amount of movement (amount of spin of turning axle 321,331) for the X-Y direction of involutory center of gravity, calculate the amount of spin (amount of spin of Shaft 345) for the θ direction of involutory inclination simultaneously.

Clutch Control portion 671, by coil 421,431,441 energisings, connects rotor 422,432,442 and armature 323,333,346 (step 110).In addition, motor control portion 673 makes motor 450,460,470 actions, makes turning axle 321,331,345 rotate (step 111).When turning axle 321,331,345 rotates with the amount of spin of calculating, motor 450,460,470 stops (step 112).

And then Clutch Control portion 671, by making cylinder 356 action of sticking department 350, removes being urged the application of force of portion 355, by the elastic force of spring 354, detent 352 is declined, clip detent plate 351 and lock (step 113).This all substantially carries out on X, Y, θ axle simultaneously.In addition, Clutch Control portion 671 stops, to coil 421,431,441 energisings, removing by X-axis portion 320, Y-axis portion 330 and the θ axial region 340 of clutch coupling 420～440 generations and being connected of drive division 400.

Thus, be the position of involutory two workpiece S1, S2, regulate the position of X-Y-θ worktable 311.For example, when the dislocation shown in Figure 29 (A) appears in workpiece S1, S2, as shown in Figure 29 (B), can be made by the movement to X-Y direction center of gravity G1, G2 consistent, as shown in Figure 29 (C), can be made by rotation consistent.

In addition, the detected object of bight or mark etc. is in the situation that the deviation of each workpiece is little, if detect 2 points at diagonal angle, by making, center of gravity is consistent with cornerwise inclination just can carry out contraposition.Therefore, in the present embodiment, also can detect 2 points at the diagonal angle of workpiece S1, S2, by the movement to X-Y direction, make mutual center of gravity G1, G2 involutory, by rotation, make cornerwise inclination consistent.Thus, can alleviate the burden of calculation process.

[4. vacuum abutted]

Then, the holding device 2 of holding workpiece S1, S2 is come vacuum abutted position 1D by the rotation of rotary table 1.Like this, by pressing device 5, undertaken vacuum abutted.According to the flow process of Figure 30, with reference to Fig. 2, Figure 10～12, Figure 23～25 pair this order, describe.

That is,, as shown in Figure 23 and Figure 24, chamber control part 681, by making elevating mechanism 53 actions, declines vacuum chamber 51, surrounding's (step 201) of airtight holding device 2.In addition, Decompression Controlling portion 682 makes drawdown pump 55 actions, to the interior decompression of vacuum chamber 51 (step 202).

The magnitude of voltage (step 203) that vacuum meter 56 arrives to control device output detections.At vacuum operational part 683, voltage detection unit 683a judges within the scope of which in above-mentioned (1)～(3) of the magnitude of voltage detected by vacuum meter 56 (step 204).According to this result of determination, formula selection portion 683b selects multinomial approximate expression (step 205-1～3).The multinomial approximate expression calculating pressure (step 206) of pressure operational part 683c based on detected magnitude of voltage and selection.

Valve control part 684, determining the force value that calculates when the valve of regulation is following with pressure (step 207), rises pushing portion 527, the portion that is urged 525 application of forces to 3-way valve 520.Like this, as shown in Figure 11 and Figure 12 (B), the bar 524 of 3-way valve 520 rises, the upper end of the open inner tube of upper side valve 522 portion 521, and lower side valve 523 becomes closed condition (step 208).Thus, in adsorption plate 510 and in vacuum chamber 51, become uniform pressure, prevent from discharging from adsorption hole.

And then pushing control part 685, determining pushing that the force value that calculates is regulation when following with pressure (step 209), as shown in figure 25, makes cylinder 54 actions, and polishing head 52 is declined, and workpiece S2 is pushed to workpiece S1 (step 210).Thereafter, Decompression Controlling portion 682 makes drawdown pump 55 stop (step 211), and chamber control part 681 rises polishing head 52 and vacuum chamber 51, to atmosphere opening (step 212,213).

[the 5. taking-up of workpiece]

As mentioned above, keeping the holding device 2 of the workpiece S1, the S2 that fit together when the rotation by rotary table 1, to come while putting into extracting position 1A, staff takes out workpiece S1, S2 from maintaining part 100.In addition, this operation also can realize robotization by taking out of mechanism etc.

[C. effect]

According to above present embodiment, can obtain following effect.That is,, owing to carrying out the supply of pair of workpieces S1, S2 a position, the taking-up of workpiece S1, the S2 after laminating simultaneously also can be carried out at same position, so working space is little also passable.

Because the stripping head 33a in stripping off device 3 tilts, so, can start from the end of workpiece S1, S2 the crimping of splicing tape T2, can conscientiously peel off peeling paper F.In addition, because stripping head 33a tilts, the length direction of the splicing tape T2 by change portion 32 from stripping portion 33 is thrown off supply unit 31, and the moving direction that is wound around spool 34a is upper and lower, so, can make the requisite space of depth direction reduce.The advantage of such stripping off device 3, for example, be wound around spool L1 with configuration as shown in Figure 19 (A)～(D), send spool L2, stripping head L3 and be configured to that to be wound around that prior art example that spool L1 moves at the length direction of splicing tape T2 compares be apparent.

In addition, stripping off device 3 is by changing unit U1, U2, and easily correspondence is from peeling off of the peeling paper F of downside workpiece S1 and peeling off from the peeling paper F of upside workpiece S2.Because the example of the prior art for downside workpiece S1 at for example Figure 19 (A) shown in (B) and Figure 19 (C) prior art example for upside workpiece S2 shown in (D), must change and be wound around spool L1, send the configuration of spool L2 itself and be difficult to blocking, so the advantage of stripping off device 3 as described above is apparent.In addition, for example, by being arranged to the device with roller 33c～33g as shown in Figure 17, Figure 18, even if forming unit is changed formula, also can as shown in Figure 17 or Figure 18, more bring and make the corresponding upside of splicing tape T2 peel off purposes and downside is peeled off purposes.

In addition, because stripping off device 3 forms, can form with the independent of laminating apparatus removable, and not need transfer machine etc., so can prevent adhesive dust etc.And then, due to replaceable stripping off device 3 and applying device, so can corresponding multiple product.

By clutch coupling 420,430,440, can, the X-Y-θ worktable 311 on rotary table 1 from motor 450,460,470 separation, be moved with keeping intact.For this reason, on rotary table 1, needn't carry drive source etc., also not need power supply and control line, available simple formation realizes stable operation.In addition, owing to many holding devices 2 can being carried on rotary table 1, so can realize at a high speed and efficiently, fit.

In addition, because only drive source etc. is set at a place, so can form at an easy rate.In addition, because X-Y-θ worktable 311 is small-sized just passable, so be also easily received in vacuum, can prevent from simply sneaking into bubble etc.And then, due to can fit on the X-Y-θ worktable 311 behind location workpiece S1, S2, so can carry out the laminating that precision is high.

Particularly, because pick-up unit 4 carries out the center of gravity of workpiece S1, S2 and the detection of inclination at 3, so processing load can be made as to Min., detect accurately.In addition, even exist crooked etc. in the situation that at workpiece S1, S2, because the reflecting surface 42a of the irradiation light from CCD camera 41 sides by CCD camera 42 reflects, so can accurately detect.Therefore, can realize the high-precision laminating based on accurate detection.

Due to can a position on rotary table 1 carry out vacuum abutted, so can save space.In addition, due to need to not be in the interior location of vacuum chamber 51, so can make device diminish and simplify.In addition, while reducing pressure, can utilize the absorption circuit in 3-way valve 520 blocking adsorption sections 500 in to vacuum chamber 51, can make pressure interior identical with vacuum chamber 51 simultaneously, so can prevent coming off of the workpiece S1 that caused by the discharge from adsorption hole, can realize stable operation.In addition, owing to can utilizing single 3-way valve 520 to switch, so can manufacture small-sized and at an easy rate.

During due to pressure in detecting vacuum chamber 51, select the suitable approximate expression of corresponding voltage value to carry out calculating pressure, so the approximate function of available low number of times calculates high-precision pressure.In addition, owing to always only carrying out by a simple calculation process that function forms, so can alleviate processing load.

As the guard block 511 of adsorption section 500 and the guard block 52a of pressing device 5; due to the formation of using at elastomeric element laminating Porous sheet; so can absorb the impact to workpiece S1, S2; prevent that workpiece S1, S2 are attached to guard block 511,52a is upper simultaneously, can realize stable laminating.In addition, and the surface of rubber is made it to coarse situation by machining compare, sliding is good, is difficult to abrasion.In addition, compare with the situation of rubber being carried out to low-yield treatment with irradiation, cheap.And then, when generation is aging, compare with the situation of changing rubber integral body, easily carry out the replacing of sheet.

[D. other embodiment]

The invention is not restricted to above-mentioned embodiment.For example, as mentioned above, when substituting stripping off device and use the applying device of bonding agent, as bonding agent, can use now or the bonding agent of available all materials in the future.Can be suitable for as UV cured type or radioactive ray hardening resin the type of hardening from the electromagnetic wave of external irradiation broad sense or the type of hardening by changing temperature as thermmohardening type resin.As applying device, as mentioned above, can use known device.For example, can consider to spray applying device, filament plate printing equipment, extrusion coating device, blending nozzle applying device etc., but be not limited to these.

As shown in figure 37, when with applying device adhesive-applying, as the stop position of rotary table 1, consider to arrange the sclerosis position 1E of bonding agent.Now, the device of the electromagnetic device of irradiation, heating etc. is set at sclerosis position 1E, when the workpiece after laminating is come sclerosis position 1E, by irradiating electromagnetic wave or heating, makes adhesive hardens.

In addition, the formation of the thin portion in stripping off device is not limited to the formation shown in above-mentioned embodiment.For example, stripping head is so long as removable splicing tape can be pressed to the formation on peeling paper simultaneously, and its driving mechanism is also so long as can make it be connected separated formation with peeling paper.In addition, the allocation position of guide reel or number are also freely.And then the change angle of change portion is so long as unloading part, from the angle of the length direction disengaging of the splicing tape of stripping head, is also not limited to right angle.In addition, as stripping off device, also can be suitable for other known devices.

Location division and drive division are carried out to the applicable known all parts of removable parts of removable.For example, can be also the mechanical clutch that does not utilize coil magnetization.As unitor, corrugated tube, so long as allow the link of the structure of axial translation, can use known all parts.

The material of guard block, thickness, hardness etc. are also freely.For example, as polishing head side, consider to use on the urethane rubber of hardness 40, with double sticky tape, to mount the type of the sheet of polyurethane multiple aperture plasma membrane system, as adsorption plate side, consider to use on the urethane rubber of hardness 80, to mount the type of the sheet of polyurethane multiple aperture plasma membrane system, but be not limited to these.

The number of the camera in pick-up unit is also not limited to above-mentioned number.Also can only establish one, also can only establish in the horizontal direction two, or establish in the horizontal direction three to four, it is moved successively at upside and downside.In addition, also can, respectively establishing up and down two, make it to move forward and backward.And then, also can, respectively establishing up and down three to four, upper and lower 3 be made a video recording simultaneously.First, two of diagonal angle are made a video recording, when there is the point that can not extract thus, also can make a video recording to other point.After being made a video recording in four places, also can from can extract or image is good three extracts 3 points.The number of camera is more, just more also can simplify driving mechanism, also can carry out high-speed camera.

In addition, also can at the CCD of downside camera 42, adopt forming of the light from light source can being irradiated up and down by prism as shown in figure 38, by CCD camera 41 receptions of upside, be irradiated to the light of top.Also can be as shown in figure 39, the CCD camera 42 that is configured to downside can be to making a video recording up and down, and can irradiate up and down the light from light source, by the light of reflecting surface 42a reflection top.In addition, as the material of reflecting surface, consider metal, glass, resin etc., but so long as material that can reflected illumination light, which type of material all can.And then, also the framework of reflecting surface and camera can be formed as one.

For the workpiece that becomes laminating object, cover plate and Liquid Crystal Module (workpiece of display panel, lamination back of the body lamp) are typical case, but can extensively be suitable for as the device of laminating display device component parts.Therefore, for example also go for the fitting situation of touch panel and Liquid Crystal Module.

Also can be according to the style appropriate change of workpiece for the detected object of locating.For example, as shown in figure 40, when laminating is as the workpiece S2 of cover plate on the workpiece S1 as Liquid Crystal Module, also can detect the bight that is formed on the frame H on workpiece S2 by modes such as printings.Now, as shown in figure 41, it is desirable to position so that workpiece S1 the limit of (or can show field, below same) consistent with the limit of frame H.Particularly because the limit of frame H is the part of user depending on recognizing of buying product, so when the relative workpiece S1 of frame H produces inclination, the possibility that becomes substandard products uprises.

In order to prevent this situation, according to following reason, more effective with 2 location of detecting with 3 contrast locatings that detect.That is,, for the size of frame H or shape are formed by printing etc., at each workpiece S2, produce deviation sometimes.For example, as shown in Figure 42 (A), when the shape of workpiece S1 and frame H is inconsistent, even detect 2 of diagonal angle separately make center of gravity and cornerwise inclination consistent, as shown in Figure 42 (B), the state that also or relatively workpiece S1 tilts with frame H completes location.

To this, same with above-mentioned embodiment, when detecting 3 and while making the inclination on center of gravity and long limit consistent, as shown in Figure 42 (C), workpiece S1 is parallel with the limit of frame H.Thus, buy product user depending on the frame H that recognizes can be not relatively can viewing area run-off the straight, can prevent the appearance of substandard products.

Description of reference numerals

1... rotary table, 1a... pallet, 2... holding device, 3... stripping off device, 4... pick-up unit, 5... pressing device, 6... control device, 11... indexing mechanism, 31... supply unit, 31a... sends spool, 31b, 34c... spool rotating mechanism, 32... change portion, 33... stripping portion, 33a... stripping head, 33b, 35, 54, 356... cylinder, 33c～33g... guide reel, 34... wound portion, 34a... is wound around spool, 34b... spool elevating mechanism, 41～44...CCD camera, 43a, 44a... reflecting surface, 45～48... arm, 49... camera driving mechanism, 51... vacuum chamber, 52... polishing head, 52a, 511... guard block, 53... elevating mechanism, 55... drawdown pump, 56... vacuum meter, 100... maintaining part, 200... column sections, 300... location division, 310... mounting portion, 311...X-Y-θ worktable, 312, 320, 330, 340... axial region, 313... movable table, 313a, 313b... groove, 314... corrugated tube, 315... belt wheel, 321, 331, 345... turning axle, 322, 332... eccentric roller, 323, 333, 346... armature, 341... go up turning axle, 342... belt wheel, 343... Timing Belt, 344... corrugated pipe connector, 345... Shaft, 350... sticking department, 351... detent plate, 352... detent, 353... lifting shaft, 354... spring, 355, 525... be urged portion, 400... drive division, 410... stationary work-table, 420, 430, 440... clutch coupling, 421, 431, 441... coil, 422, 432, 442... rotor, 450, 460, 470... motor, 500... adsorption section, 510... adsorption plate, 512, 526... pipe arrangement, 520... 3-way valve, 521... inner tube portion, 522... go up side valve, 523... descend side valve, 524... bar, 527... pushing portion, 530... adsorption pump, 610... worktable control part, 620... storage part, 624... calculating part, 630... timing control part, 640... I/O Interface, 650... peel off control part, 651... a control part, 652... rotate control part, 653... elevating control portion, 660... position detection part, 661... camera drive division, 662... imaging control part, 663... 3 extracting part, 664... center of gravity calculation portion, 665... calculating part tilts, 670... positioning control portion, 671... Clutch Control portion, 672... locate operational part, 673... motor control portion, 680... vacuum control portion, 681... chamber control part, 682... Decompression Controlling portion, 683... vacuum operational part, 683a... voltage detection unit, 683b... formula selection portion, 683c... pressure operational part, 684... valve control part, 685... push control part.

Claims

1. a laminating apparatus, this laminating apparatus fits together the pair of workpieces that forms display device, it is characterized in that having:

Rotary table, this rotary table carries out intermittent rotary corresponding to a plurality of positions,

Holding device, this holding device arranges a plurality of on described rotary table, keeps pair of workpieces,

，Gai location division, location division is arranged at described holding device, when described holding device is come the position location in described a plurality of position by the rotation of rotary table, at least one workpiece in pair of workpieces positioned, and

Pressing device, this pressing device passes through at least one the workpiece application of force in the pair of workpieces in described holding device, laminating pair of workpieces;

Drive the drive division of described location division to be freely arranged on the position corresponding with described position location with described rotary work platform independent and relative described location division removable.

2. laminating apparatus as claimed in claim 1, is characterized in that, at least one position removable of described rotary table, is freely provided with stripping off device, and this stripping off device is peeled off the peeling paper that is attached to the double sticky tape at least one workpiece.

3. laminating apparatus as claimed in claim 1, is characterized in that, at least one position of described rotary table, is provided with stripping off device, and this stripping off device is peeled off the peeling paper that is attached to the double sticky tape at least one workpiece,

Described stripping off device has:

Stripping head, this stripping head is pressed to peeling paper by splicing tape,

Supply unit, this supply unit is supplied with splicing tape to described stripping head,

Wound portion, this wound portion is wound around the splicing tape from described stripping head, and

Change portion, this change portion is supplied with the mode of described splicing tape with the different direction of the length direction of the described splicing tape from from described stripping head by described supply unit, change the direction of the supply of splicing tape.

4. laminating apparatus as claimed in claim 3, is characterized in that, from described supply unit to described stripping head and from described stripping head to described wound portion, is provided with the guide member that guiding splicing tape moves,

Be configured to and can, corresponding to the position of the workpiece that peeling paper is peeled off, change the different a plurality of unit of configuration of described stripping head and described guide member.

5. laminating apparatus as claimed in claim 1, is characterized in that, in described position location, is provided with pick-up unit, and this pick-up unit detects respectively square bight 3 points in pair of workpieces,

Described laminating apparatus has:

Center of gravity calculation portion, this center of gravity calculation portion is calculated the mid point of 2 that forms square cornerwise two ends as the center of gravity of workpiece,

Inclination calculating part, two inclinations of calculating workpiece of this inclination calculating part based on forming square limit, and

Location operational part, this location operational part calculates the controlled quentity controlled variable of described location division based on described center of gravity and described inclination.

6. laminating apparatus as claimed in claim 1, is characterized in that, is provided with the pick-up unit of the position of detecting pair of workpieces in described position location,

Described pick-up unit has:

The first camera, this first camera is made a video recording to a workpiece, and

The second camera, this second camera is inserted between pair of workpieces, and another workpiece is made a video recording;

In described the second camera with described the first camera face in opposite directions on be provided with reflecting part.

7. laminating apparatus as claimed in claim 1, is characterized in that, described pressing device has vacuum chamber, and this vacuum chamber can be taken in independently with described drive division the part of the holding workpiece in described location division.

8. laminating apparatus as claimed in claim 7, is characterized in that, has the ventilation path being communicated with vacuum source,

Have: a workpiece vacuum suction, in the adsorption section of described location division, and is switched to described ventilation path to the valve of vacuum source and vacuum chamber side.

9. laminating apparatus as claimed in claim 7 or 8, is characterized in that having:

Vacuum meter, the magnitude of voltage that the output of this vacuum meter is corresponding with pressure in described vacuum chamber,

Storage part, this storage portion stores magnitude of voltage and for calculating a plurality of multinomial approximate expression of the pressure corresponding with this magnitude of voltage,

Formula selection portion, magnitude of voltage and the multinomial approximate expression of this formula selection portion based on being stored in described storage part, selects the multinomial approximate expression corresponding with the magnitude of voltage of exporting from described vacuum meter, and

Pressure operational part, this pressure operational part is based on selected multinomial approximate expression calculating pressure value.

10. laminating apparatus as claimed in claim 1, is characterized in that, in described location division and described pressing device, at least one party's the surface of contact contacting with workpiece, is provided with the guard block that has attached Porous sheet on elastomeric element.

11. laminating apparatus as claimed in claim 1, is characterized in that, at least one position of described rotary table, removable is freely provided with the applying device at least one workpiece adhesive-applying.