CN102937754A

CN102937754A - Bonding apparatus and method for controlling same

Info

Publication number: CN102937754A
Application number: CN2012103320411A
Authority: CN
Inventors: 白川义广; 横田典之; 井田琢也
Original assignee: Shibaura Engineering Works Co Ltd
Current assignee: Shibaura Mechatronics Corp
Priority date: 2008-09-04
Filing date: 2009-09-04
Publication date: 2013-02-20
Anticipated expiration: 2029-09-04
Also published as: KR101586111B1; JPWO2010026768A1; JP2012190047A; KR20140099559A; KR20140107660A; JP5090535B2; TWI457876B; JP2012230389A; JP5095875B2; TWI493516B; KR20110065508A; KR101545458B1; CN102144250A; TW201303817A; TW201027479A; CN102937754B; TW201305989A; JP5095876B2; CN102937755A; CN102937755B

Abstract

Provided is a low-cost and small bonding apparatus which can efficiently align and bond works by using a turntable. A method for controlling the bonding apparatus is also provided. The bonding apparatus which bonds a pair of works (S1, S2) is provided with: a turntable (1) which intermittently rotates corresponding to a plurality of positions; a plurality of holding apparatuses (2) which are provided on the turntable (1) and hold the works (S1, S2); an aligning section (300) which is provided on the holding apparatuses (2) and aligns the work (S1); and a pressing apparatus (5) which bonds the work (S2) on the work (S1) by urging the work (S2) held by the holding apparatus (2). A driving section (400) which drives the aligning section (300) is provided independently from the turntable (1) and removably from the aligning section (300).

Description

Laminating apparatus with and control method

Patented claim of the present invention is that national applications number is 200980134458.3, and international application no is PCT/JP2009/004373, international filing date the dividing an application for the application for a patent for invention of " laminating apparatus with and control method " that be on September 4th, 2009, denomination of invention.

Technical field

The present invention relates to the technology of the so flat workpiece of fit for example Liquid Crystal Module and cover plate carry out improved laminating apparatus with and control method.

Background technology

In general, liquid crystal panel by the lamination Liquid Crystal Module, protect its surperficial screening glass and the operation usefulness the formations such as touch panel.(hereinafter referred to as workpiece) such as these Liquid Crystal Modules, screening glass and touch panels is assembled in the framework of Liquid Crystal Module, produce for fear of the distortion by protection panel or touch panel with the contacting of liquid-crystalline glasses, forming each other the space.

But, when between (hereinafter referred to as workpiece) such as Liquid Crystal Module, screening glass, touch panels, entering the layer of air, by external light reflection the visibility of display surface is reduced.In order to address this problem, utilize the adhesive material of double sticky tape or bonding agent etc. to fit, in order to form the layer of imbedding between workpiece.

For this reason, when making liquid crystal panel, at least one workpiece, prepare this adhesive material, also need the laminating apparatus of fitting.In addition, in order to prevent between the workpiece of fitting, sneaking into bubble etc., it is desirable to fit in a vacuum.Therefore, in laminating apparatus, also need to arrange vacuum chamber etc.

As the technology of such applying workpiece, for example proposed in the scheme shown in the patent documentation 1 ~ 3.The technology that

patent documentation

1 and 2 is recorded and narrated is the method for workpiece of fitting in a vacuum.The technology that patent documentation 3 is recorded and narrated is the technology in order to fit efficiently, to make the device of holding workpiece move and process successively by the rotary table of intermittent rotary.

The prior art document

Patent documentation

Patent documentation 1: TOHKEMY 2004-170974 communique

Patent documentation 2: TOHKEMY 2004-170975 communique

Patent documentation 3: No. 3595125 communique of Jap.P.

Summary of the invention

The problem that invention will solve

But, accurately locate in order to make workpiece, it is desirable to arrange in the plane can be at the X-Y-θ worktable of orthogonal directions (X-Y direction) and sense of rotation (θ direction) displacement.But, when this X-Y-θ worktable comprises the drive source that drives it etc., can become main equipment.For this reason, when X-Y-θ worktable is equipped on rotary table, can involve the maximization of device integral body, the simultaneously processing of power supply and control line is complicated also.And then, interiorly X-Y-θ worktable integral body is accommodated in the vacuum chamber, will guarantees that when airtight, it is large that vacuum chamber also can become when comprising drive source etc.The result who maximizes like this can increase the manufacturing cost of device.

The present invention proposes for the problem that solves above-mentioned prior art, its fundamental purpose provide can use rotary table carry out efficiently the location of workpiece and applying, simultaneously again cheap and small-sized laminating apparatus with and control method.

In addition, another object of the present invention provide and can realize steady operation, can not sneak into bubble or dust etc., can carry out laminating apparatus that high precision fits with and control method.

Solve the means of problem

For achieving the above object, laminating apparatus of the present invention, it is fitted and consists of the pair of workpieces of display device, it is characterized in that, have: corresponding to the rotary table of a plurality of positions intermittent rotary, at described rotary table a plurality of, as to keep pair of workpieces holding devices is set, is arranged on the described holding device, at least one location division that positions in the pair of workpieces, by the pressing device of pair of workpieces that at least one application of force in the pair of workpieces in the described holding device is fitted; The drive division that drives described location division is arranged to free with described rotary work platform independent and relative described location division removable.

In above the present invention, when rotary table rotates, can holding device from drive part from, it is moved along with the rotation of rotary table.For this reason, needn't carry drive division at rotary table, also not need power supply and control line.In addition, owing to can carry many holding devices, can realize fitting at a high speed and efficiently.In addition, owing to can only at a place drive division be set, so can consist of at an easy rate.And then, owing to can fit by the holding device behind the location, so can carry out the high applying of precision.

Another program is characterised in that, freely is provided with stripping off device at least one position removable of described rotary table, and this stripping off device is peeled off the peeling paper that is attached to the double sticky tape at least one workpiece.

In above invention, because with respect to the rotary table removable stripping off device is set freely, thus can change the device that the applying device of bonding agent for example is used for preparing other kind of adhesive material like that, thus can corresponding multiple product.

Another program is characterised in that, there is stripping off device at least one position at described rotary table, this stripping off device is peeled off the peeling paper that is attached to the double sticky tape at least one workpiece, described stripping off device has: to the stripping head of peeling paper pushing splicing tape, supply with the supply unit of splicing tape to described stripping head, winding is from the wound portion of the splicing tape of described stripping head, with from the direction different from the length direction of described splicing tape the described stripping head by described supply unit supply with described splicing tape mode, change the change section of the direction of the supply of splicing tape.

In above invention, since different from the length direction of the splicing tape in the direction of the supply of the splicing tape of supply unit and the stripping head, so can dwindle the device space of this length direction.

Another program is characterised in that, from described supply unit to the described stripping head and from described stripping head to being provided with the guide member that moves of guiding splicing tape the described wound portion, corresponding to the position of the workpiece of peeling off peeling paper, the different a plurality of unit of the configuration of described stripping head and described guide member can consist of with changing.

In above invention, can be by change section at the position configuration supply unit different from the length direction of splicing tape in the stripping head.For this reason, supply unit and wound portion can be prepared the different a plurality of unit of configuration of stripping head and guide member with keeping intact, by it is changed, can be corresponding peeling off for the peeling paper of the workpiece of diverse location.

Another program is characterised in that, be provided with the pick-up unit in 3 in the square bight detected respectively in the pair of workpieces at least one position of described rotary table, have: the center of gravity calculation section that 2 the mid point that consists of square cornerwise two ends is calculated as the center of gravity of workpiece, based on 2 inclination calculating parts that calculate the inclination of workpiece that consist of square limit, calculate the location operational part of the controlled quentity controlled variable of described location division based on described center of gravity and described inclination.

Another program is the control method of laminating apparatus, it is by the pair of workpieces of being fitted by computing machine or circuit control laminating apparatus, this laminating apparatus has: corresponding to the rotary table of a plurality of positions intermittent rotary, at described rotary table a plurality of, as to keep the pair of workpieces of formation display device holding devices is set, be arranged on the described holding device, at least one location division that positions in the pair of workpieces, by the pressing device of pair of workpieces that at least one application of force in the pair of workpieces in the described holding device is fitted; It is characterized in that, described computing machine or circuit have: test section, center of gravity calculation section, inclination calculating part and location operational part, described test section detects square bight 3 points in the pair of workpieces, described center of gravity calculation section is calculated 2 the mid point that consists of square diagonal line two ends as the center of gravity of workpiece, described inclination calculating part is based on 2 inclinations of calculating workpiece that consist of square limit, and described location operational part calculates the controlled quentity controlled variable of described location division based on described center of gravity and described inclination.

In above invention, because the location amount is determined in center of gravity and the inclination that can calculate pair of workpieces by detecting each square 3, so processing load can be suppressed to locate accurately for Min..

Another program is characterised in that, the pick-up unit of the position of detecting pair of workpieces is set at least one position of described rotary table, described pick-up unit has: the first camera that a workpiece is made a video recording, the second camera that is inserted between the pair of workpieces, another workpiece is made a video recording arranges reflecting part with described the first camera face in opposite directions in described the second camera.

In above invention, even owing to bend when waiting at workpiece, can be reflected by the reflecting surface of the second camera from the irradiation light of the first photograph pusher side, in the first camera, be subjected to light, so can detect effectively.

Another program is characterised in that described pressing device has can take in independently with described drive division the vacuum chamber of the part of the holding workpiece in the described location division.

In above invention, owing to be used for carrying out the part of holding workpiece that vacuum abutted vacuum chamber is taken in the location division of holding device, it is also passable not take in drive division, so can reach miniaturization.

Another program is characterised in that to have the ventilation path that is communicated with vacuum source, has: make a workpiece vacuum suction in the adsorption section of described location division, and described ventilation path is switched to the valve of vacuum source and vacuum chamber side.

In above invention, by transfer valve, it is identical with vacuum chamber inside to be arranged to pressure to the ventilation path that is used for the vacuum suction workpiece, so can prevent that workpiece from coming off owing to forming vacuum in the reduced vacuum chamber.

Another program is characterised in that, have: be located at the vacuum meter in the described vacuum chamber, storage voltage value and be used for to calculate the storage part of a plurality of multinomial approximate expressions of the pressure corresponding with it, select and formula selection portion from multinomial approximate expression corresponding to the magnitude of voltage of described vacuum meter based on being stored in magnitude of voltage in the described storage part and multinomial approximate expression, based on the pressure operational part of selected multinomial approximate expression calculating pressure.

Another program is a kind of control method of laminating apparatus, it is by the pair of workpieces of being fitted by control device control laminating apparatus, this laminating apparatus has the rotary table corresponding to a plurality of positions intermittent rotary, arrange a plurality of at described rotary table, the holding device that keeps the pair of workpieces of formation display device, be located on the described holding device, to at least one location division that positions in the pair of workpieces, pressing device by pair of workpieces that at least one application of force in the pair of workpieces in the described holding device is fitted, be located at described pressing device, can independently take in described drive division the vacuum chamber of the part of the workpiece that keeps described location division, be located at the vacuum meter in the described vacuum chamber; It is characterized in that, described control device has storage part, formula selection portion and pressure operational part, described storage portion stores magnitude of voltage and be used for to calculate a plurality of multinomial approximate expression of the pressure corresponding with it, described formula selection portion based on be stored in magnitude of voltage in the described storage part and multinomial approximate expression select with from multinomial approximate expression corresponding to the magnitude of voltage of described vacuum meter, described pressure operational part is based on selected multinomial approximate expression calculating pressure.

In above invention, owing to can select suitable multinomial approximate expression corresponding to the magnitude of voltage that is detected by vacuum meter, so the approximate function of available low number of times carries out high-precision calculation of pressure.In addition, owing to always only carry out being got final product by the calculation process that a simple function forms, so can alleviate processing load.

Another program is characterised in that, at least one party and surface of contact workpiece, is arranged on the guard block that is pasted with the Porous sheet on the elastomeric element in described location division and described pushing section.

In above invention, owing to consist of guard block by attach the Porous sheet at elastomeric element, so can be absorbed in when fitting the impact of workpiece, prevent that simultaneously workpiece from attaching to elastomeric element.

Another program is characterised in that at least one position of described rotary table, removable freely is arranged on the applying device of adhesive-applying at least one workpiece.

In above invention, because with respect to the rotary table removable applying device is set freely, thus can change device for other kind of preparing adhesive material, so can corresponding multiple product.

The effect of invention

As described above, according to the present invention, can provide can use rotary table carry out efficiently the location of workpiece and applying and cheap and small-sized laminating apparatus with and control method.

In addition, the laminating apparatus that according to the present invention, can provide and can realize stable operation, can not sneak into bubble or dust etc., can reach high-precision applying with and control method.

Description of drawings

Fig. 1 is the general view that the integral body of expression an embodiment of the invention consists of.

Fig. 2 is the longitudinal diagram of the holding device in the embodiment of presentation graphs 1.

Fig. 3 is maintaining part in the holding device of presentation graphs 2 and the stereographic map of adsorption section.

Fig. 4 is the longitudinal diagram of the location division in the embodiment of presentation graphs 1.

Fig. 5 is the planimetric map of the location of directions X in the location division of presentation graphs 4 and Y-direction.

Fig. 6 is the planimetric map of the location of the θ direction in the location division of presentation graphs 4.

Longitudinal diagram when Fig. 7 is the latch-release of the sticking department in the location division of presentation graphs 4.

Longitudinal diagram when Fig. 8 is the locking of presentation graphs 7.

Fig. 9 is the planimetric map of Fig. 7.

Longitudinal diagram when Figure 10 is the absorption of the pressure contact portion in the embodiment of presentation graphs 1.

Figure 11 is the longitudinal diagram of the absorption of pressure contact portion of expression Figure 10 when open.

Figure 12 is the longitudinal diagram of 3-way valve (B) of 3-way valve (A), Figure 11 of expression Figure 10.

Figure 13 is the outboard profile of the stripping off device (first module) in the embodiment of presentation graphs 1.

Figure 14 is the planimetric map of Figure 13.

Figure 15 is the back view of Figure 13.

Figure 16 is the outboard profile of the stripping off device (second unit) in the embodiment of presentation graphs 1.

Figure 17 is the key diagram of peeling off that expression is undertaken by the stripping off device of Figure 13.

Figure 18 is the key diagram of peeling off that expression is undertaken by the stripping off device of Figure 16.

Figure 19 be downside that expression is undertaken by the stripping off device of prior art peel off (A) (B), upside peels off (C) key diagram (D).

Figure 20 is the stereographic map of the pick-up unit in the embodiment of presentation graphs 1.

Figure 21 is the outboard profile of the pick-up unit of expression Figure 20.

Figure 22 is the key diagram that is subjected to light of coaxial indirect illumination in the pick-up unit of expression Figure 20.

Figure 23 is the longitudinal diagram of the vacuum chamber of the pressing device in the embodiment of presentation graphs 1 when rising.

Figure 24 is the longitudinal diagram of the vacuum chamber of the pressing device of expression Figure 23 when descending.

Figure 25 is the longitudinal diagram of the polishing head of the pressing device of expression Figure 23 when descending.

Figure 26 is the functional-block diagram of control device of the embodiment of presentation graphs 1.

Figure 27 is the functional-block diagram of the vacuum operational part of expression Figure 26.

Figure 28 is the process flow diagram of the location order in the embodiment of presentation graphs 1.

Figure 29 is the key diagram of the location order in the embodiment of presentation graphs 1.

Figure 30 is the process flow diagram of the applying order in the embodiment of presentation graphs 1.

The key diagram of the form of the relation of Figure 31 detection voltage that to be expression obtained by the vacuum meter of prior art and pressure.

Figure 32 is that expression is with the key diagram of the table curve of Figure 31.

Figure 33 is the key diagram of curve of the relation of the detection voltage that obtained by the vacuum meter in the present embodiment of expression and pressure.

Figure 34 be the expression Figure 33 curve (1) section key diagram.

Figure 35 be the expression Figure 33 curve (2) section key diagram.

Figure 36 be the expression Figure 33 curve (3) section key diagram.

Figure 37 is the simple planimetric map of the embodiment of expression when using the applying device of bonding agent of the present invention.

Figure 38 is the longitudinal diagram of an example of another pick-up unit of expression.

Figure 39 is the longitudinal diagram of an example of another pick-up unit of expression.

Figure 40 is the stereographic map of an example of the expression workpiece of fitting.

Figure 41 is the key diagram of the contraposition example of expression Figure 40.

Figure 42 is the key diagram of location order in the embodiment of expression Figure 40.

Embodiment

Lower surface carries out embodiments of the present invention (hereinafter referred to as embodiment) with reference to accompanying drawing

Specify.

[A. formation]

[1. whole formation]

At first, the integral body of the laminating apparatus (hereinafter referred to as this device) of present embodiment is consisted of describe.As shown in Figure 1, this device is the equipment that carries four holding devices 2 at rotary table 1.Rotary table 1 constitutes, by indexing mechanism 11 with put into accordingly intermittent rotary of extracting position 1A, adhesive material ready position 1B, position location 1C and vacuum abutted position 1D.

Such as Fig. 2 and shown in Figure 3, holding device 2 is to make workpiece S1 and workpiece S2 up and down opposite to each other to its device that keeps.In the present embodiment, as workpiece S1, S2, for example use the so OBL substrate of Liquid Crystal Module and cover plate.On workpiece S1, S2, corresponding to imaginary rectangle or foursquare four summits, the mark M1, the M2 that detect usefulness are set.This holding device 2 has the location division 300 of the position contraposition that makes workpiece S1, S2 etc.

At adhesive material ready position 1B, removable freely arranges stripping off device 3 or applying device.Shown in Figure 13 ~ 19, stripping off device 3 is devices that peeling paper (stripping film etc. are not the considered material) F that will stick in advance the double sticky tape T1 on the workpiece S1 peels off.Applying device is diagram not, is the device of adhesive-applying on workpiece S1.As applying device, can use known device.

Such as Figure 20 and shown in Figure 21, at position location 1C, the pick-up unit 4 of the position of detecting workpiece S1, S2 is set.Based on the value that is detected by this pick-up unit 4, determine the location amount of the relative workpiece S2 of workpiece S1 in the location division 300.

Shown in Fig. 2, Figure 23 ~ 25, at vacuum abutted position 1D, pressing device 5 is set.In the pressure reduction space of this pressing device 5 in vacuum chamber 51, workpiece S2 is pressed to workpiece S1 thruster press, can fit together both thus.

[2. holding device]

Then, each several part is elaborated.At first, shown in Fig. 2 ~ 9, holding device 2 possesses maintaining part 100, column sections 200, location division 300, drive division 400, sticking department 350, adsorption section 500.

[2-1. maintaining part]

As shown in Figure 3, maintaining part 100 is frames of cardinal principle コ font of the left and right edges of holding workpiece S2.

[2-2. column sections]

Column sections 200 is two columnar parts erectting in the vertical direction.Liftably support maintaining part 100 by this column sections 200.Maintaining part 100 is the position in the early stage, is positioned at the top of leaving workpiece S1, and workpiece S2 is remained on horizontal direction.In addition, when fitting, maintaining part 100 is pushed downwards with workpiece S2 and descend by pressing device 5, carry out the applying of workpiece S1 and workpiece S2.

[2-3. location division]

As shown in Figure 4, location division 300 has by mounting section 310, X-axis section 320, Y-axis section 330 and the θ axial region 340 etc. that are fixed on the pallet 1a supporting on the rotary table 1.

[2-3-1. mounting section]

Mounting section 310 has X-Y-θ worktable 311, axial region 312, movable table 313, corrugated tube 314 and belt wheel 315 etc.

X-Y-θ worktable 311 is the worktable for the level of positioning workpieces S1.This X-Y-θ worktable 311 is arranged in can be mobile in the rectilinear direction (directions X and Y-direction) of quadrature on the surface level, and can rotate (θ direction) centered by axial region 312.

Axial region 312 is columnar parts of vertical direction.The upper end of axial region 312 links with X-Y-θ worktable 311 rotationally.The lower end of axial region 312 is run through rotary table 1 and is fixed on the movable table 313.Such as the back narration, movable table 313 is arranged to and can be moved in X-axis and Y direction by X-axis section 320 and Y-axis section 330.

Between movable table 313 and rotary table 1, the corrugated tube 314 that covers axial region 312 is installed.The airtight of the installation end of corrugated tube 314 guaranteed.In addition, corrugated tube 314 is flexible owing to having, thus can be corresponding to the movement of movable table 313, flexibly displacement under the airtight state of maintenance.Belt wheel 315 is fixed on the X-Y-θ worktable 311.Be linked with Timing Belt 343 described later at this belt wheel 315.

[2-3-2.X axial region]

X-axis section 320 has turning axle 321, eccentric roller 322 and armature 323 etc.Turning axle 321 is can be by the parts of the vertical direction of drive division 400 rotation.Eccentric roller 322 is installed in the upper end of turning axle 321.As shown in Figure 5, this eccentric roller 322 is inserted among the groove 313a of the Y-direction that is formed at movable table 313.

For this reason, eccentric roller 322 is followed the rotation of turning axle 321 and to the inwall application of force of groove 313a, movable table 313 moved at directions X.At this moment, axial region 312 and X-Y-θ worktable 311 move at directions X with movable table 313.

Armature 323 is installed in the lower end of turning axle 321.But be located on the clutch coupling 420 described later to these armature 323 removables.Be connected with clutch coupling 420 by armature 323, can realize the driving by 400 pairs of turning axles 321 of drive division.

[2-3-3.Y axial region]

Y-axis section 330 has turning axle 331, eccentric roller 332 and armature 333 etc.Turning axle 331 is can be by the parts of the vertical direction of drive division 400 rotation.Eccentric roller 332 is installed in the upper end of turning axle 331.As shown in Figure 5, this eccentric roller 332 is inserted among the groove 313b of the directions X that is formed at movable table 313.

For this reason, eccentric roller 332 is followed the rotation of turning axle 331 to the inwall application of force of groove 313b, and movable table 313 is moved in Y-direction.At this moment, axial region 312 and X-Y-θ worktable 311 move in Y-direction with movable table 313.

Armature 333 is installed in the lower end of turning axle 331.But be located on the clutch coupling 430 described later to these armature 333 removables.Be connected with clutch coupling 430 by armature 333, can realize the driving by 400 pairs of turning axles 331 of drive division.

[2-3-4. θ axial region]

θ axial region 340 has upper turning axle 341, belt wheel 342, Timing Belt 343, corrugated pipe connector 344, Shaft 345 and armature 346 etc.Upper turning axle 341 is parts of vertical direction, and fixed pulley 342 in the top.Hanging Timing Belt 343 at belt wheel 342.Thus, as shown in Figure 6, when upper turning axle 341 rotated, its rotation passed to belt wheel 315 via Timing Belt 343, so X-Y-θ worktable 311 rotates.

The upper end of the lower end of upper turning axle 341 and corrugated pipe connector 344 links.This corrugated pipe connector 344 is connecting members that the flexible corrugated pipe by the dislocation that absorbs directions X and Y-direction consists of.Lower end at corrugated pipe connector 344 links Shaft 345.Shaft 345 is parts of vertical direction, and its rotation passes to upper turning axle 341 via corrugated pipe connector 344.

Armature 346 is installed in the lower end of Shaft 345.But be located on the clutch coupling 440 described later to these armature 346 removables.Be connected with clutch coupling 420 by armature 346, can realize the driving by 400 pairs of Shafts 345 of drive division, upper turning axle 341.

[2-4. drive division]

Drive division 400 has stationary work-table 410, clutch coupling 420,430,440, motor 450,460,470 etc.Stationary work-table 410 is the worktable that are fixed in the bottom of rotary table 1.On the position corresponding to X-axis section 320, Y-axis section 330, θ axial region 340 in this stationary work-table 410, fixed clutch 420,430,440.In addition, on clutch coupling 420,430,440, connect respectively the motor 450,460,470 that transmits rotation.

When to coil 421,431,441 whens energising, clutch coupling 420,430,440 by rotor 422,432,442 and armature 323,333,346 between the magnetic flux that produces, absorption armature 323,333,346.Thus, motor 450,460,470 driving force can pass to X-axis section 320, Y-axis section 330, θ axial region 340.

[2-5. sticking department]

Such as Fig. 4, Fig. 7 ~ shown in Figure 9, sticking department 350 has detent plate 351, detent 352, lifting shaft 353, spring 354, is urged section 355, cylinder 356 etc.Detent plate 351 is for example steel spring plates that are fixed on the movable table 313.Detent 352 be by and the part of pallet 1a between clip detent plate 351 and carry out the parts that crimping locks movable table 313.For detent 352 and surface of contact detent plate 351, such as the slip-proofing device that uses rubber lining etc.

Lifting shaft 353 is arranged to run through pallet 1a ground and is carried out lifting.Detent plate 351 is installed in upper end at lifting shaft 353.Spring 354 is to lifting shaft 353 force application part of the spring etc. of the application of force downwards.Be urged the lower end that section 355 is installed in lifting shaft 353.Cylinder 356 is the mechanisms that are fixed on the stationary work-table 410, by the section that is urged 355 application of forces of coming its top are unlocked.In addition, illustrated sticking department 350 is parts corresponding with X-axis section 320, though other diagram not is respectively arranged with the sticking department of same structure accordingly with Y-axis section 330, θ axial region 340.

[2-6. adsorption section]

Such as Figure 10 and shown in Figure 11, adsorption section 500 has adsorption plate 510,3-way valve 520, adsorption pump 530(with reference to Figure 26) etc.Adsorption plate 510 is fixed on the X-Y-θ worktable 311.On adsorption plate 510, be equipped with on the surface of the elastomeric element of rubber etc. note attached the guard block 511 of sheet of polyurethane multiple aperture plasma membrane system.At adsorption plate 510 and guard block 511, be formed with not shown adsorption hole.This adsorption hole is connected with an end of pipe arrangement 512 via the ventilation path that is formed in the adsorption plate 510.

3-way valve 520 is fixed on rotary table 1.This 3-way valve 520 has inner tube section 521, upper side valve 522, lower side valve 523, bar 524 and is urged section 525 etc.Inner tube section 521 is continuous in the vertical direction pipes.Rotary table 1 ground is run through in this inner tube section 521, and face side and lower face side are outstanding thereon.

The other end that connects above-mentioned pipe arrangement 512 in the inner tube section 521 that the upper surface side of left-hand tools worktable 1 is given prominence to.Thus, the adsorption hole of X-Y-θ worktable 311 and inner tube section 521 are communicated with via ventilation path.One end of the side connecting pipings 526 of the inner tube section 521 that the lower face side of left-hand tools worktable 1 is outstanding.The other end of this pipe arrangement 526 is connected with adsorption pump 530 as vacuum source.In addition, even also can guarantee the mode that adsorption pump 530 and pipe arrangement 526 are communicated with rotary table 1 rotation, between adsorption pump 530 and pipe arrangement 526, connect via not shown swivel adapter head.

Upper side valve 522 is the valves that open and close the upper end of inner tube section 521 by lifting.Lower side valve 523 is by open and close the valve that is communicated with adsorption pump 530 in the 521 interior liftings of inner tube section.Bar 524 is arranged to can be in the 521 interior liftings of inner tube section.This bar 524 links upper side valve 522 and lower side valve 523.Be urged the lower end that section 525 is located at bar 524.This be urged section 525 by the pushing section 527 that consisted of by cylinder etc. by the application of force upward.Pushing section 527 is fixed on the stationary work-table 410.

Such 3-way valve 520 connects the circuit (with reference to black arrow line) with adsorption hole and adsorption pump 530 connections shown in Figure 12 (A) when absorption workpiece S1.In addition, shown in Figure 12 (B), when by pushing section 527 pushing lower ends be urged section 525 time, because upper side valve 522 is opened, lower side valve 523 is closed, so, constitute adsorption hole and become same pressure on every side, close simultaneously be communicated with (with reference to the black arrow line) with adsorption pump 530.

[3. stripping off device]

Stripping off device 3 is that the peeling paper F note that note is attached to the double sticky tape T1 on workpiece S1 or the workpiece S2 is attached to the upper and device peeled off of splicing tape T2.Shown in Figure 13 ~ 15, this stripping off device 3 has supply unit 31, change section 32, stripping portion 33 and wound portion 34 etc.

Supply unit 31 has the spool of sending 31a and spool rotating mechanism 31b(with reference to Figure 26).Sending spool 31a is the spool that twines the splicing tape T2 that supplies with.Spool rotating mechanism 31b is the mechanism of the not shown braking of sending spool 31a of control.As shown in figure 14, change section 32 is from the rectangular pin of the going direction changing of supply unit 31 or roller splicing tape T2.

Stripping portion 33 has stripping head 33a, cylinder 33b, guide reel 33c ~ 33e etc.Stripping head 33a be by from the back side pushing of the attaching face of the splicing tape T2 that supplied with by supply unit 31 it and it is pressed to the roller of the peeling paper F on the workpiece S1.Stripping head 33a arranges obliquely in the mode that the end from workpiece S1 begins crimping splicing tape T2.Cylinder 33b is the mechanism that makes stripping head 33a forward direction (scheming left direction) mobile, when this moves, can remove the braking of supply unit 31a, pulls out splicing tape T2.Guide reel 33c ~ 33e be guiding splicing tape T2 from change section 32 to stripping head 33a, from stripping head 33b to wound portion 34 rollers that move (guide member).

Wound portion 34 has the spool of winding 34a, spool elevating mechanism 34b, spool rotating mechanism 34c(with reference to Figure 26) etc.Twining spool 34a is the spool that twines from the splicing tape T2 of stripping head 33a.The axle of this winding spool 34a is arranged on the direction with the axle quadrature of supply unit 31.Spool elevating mechanism 34b makes the mechanism of twining spool 34a lifting such as the rotation by feed screw etc.Spool rotating mechanism 34c be have not shown drive source etc., the rotation of spool 34a and the mechanism of braking are twined in control.

In addition, above-mentioned stripping off device 3 is the devices that are equipped with for peel off the first module U1 of peeling paper F from the workpiece S1 of downside.In this stripping off device 3, as shown in figure 16, the second unit U2 that first module U1 is arranged to peel off with the workpiece S2 from upside peeling paper F changes.

Such as Figure 13 and shown in Figure 17, first module U1 is provided with guide reel 33c ~ 33e, in order to supply with splicing tape T2 from change section 32 from the downside of stripping head 33a, makes it through upside and guides to twining spool 34a.Guide reel 33e among the first module U1 is the going direction changing of the splicing tape T2 of process stripping head 33a the below.

On the other hand, such as Figure 16 and shown in Figure 180, second unit U2 is provided with

guide reel

33f, 33g, in order to supply with splicing tape T2 from change section 32 from the upside of stripping head 33a, makes it through downside and guides to twining spool 34a.Guide reel 33g among the second unit U2 is the going direction changing of the splicing tape T2 of process stripping head 33a the below.

And then first module U1 and second unit U2 are arranged to can be by cylinder 35 liftings.First module U1 can be pressed to the splicing tape T2 among the stripping head 33a peeling paper F of workpiece S1 when descending.Second unit U2 can be pressed to the splicing tape T2 among the stripping head 33a peeling paper F of workpiece S2 when rising.

Undertaken by peeling off as follows of carrying out of this stripping off device 3.Namely, shown in Figure 17 (A), Figure 18 (A), make stripping head 33a forwards mobile by cylinder 33b, simultaneously splicing tape T2 is pulled out from supply unit 31a, make first module U1 decline or second unit U2 is risen by cylinder 35, thereby splicing tape T2 is pressed to peeling paper F, make at spool

rotating mechanism

31b, 34c under the state of the rotation brake of sending spool 31a and twining spool 34a, made by spool elevating mechanism 34b and twine spool 34a decline.

Like this, shown in Figure 17 (B), Figure 18 (B), splicing tape T2 is pulled to the below, and stripping head 33a is pressed to peeling paper F to splicing tape T2 and retreated simultaneously.Thus, peeling paper F is attached on the splicing tape T2, peels off from workpiece S1 or S2.

[4. pick-up unit]

Such as Figure 20 and shown in Figure 21, pick-up unit 4 has two

CCD cameras

41,42, supports their

arm

45,46, camera driving mechanism 49(is with reference to Figure 26) etc.The CCD camera 41 that is configured in the top is that camera lens is towards the below, to the bight of the workpiece S2 of top or the camera (the first camera) that mark M2 makes a video recording.The CCD camera 42 that is configured in the below is that camera lens is towards the below, to the bight of the workpiece S1 of below or the camera (the second camera) that mark M1 makes a video recording.

Camera driving mechanism 49 is to have not shown drive source etc., actuating arm 45, mechanism's (for example X-Y axle driving mechanism) of 46.Arm 45 is arranged to by by in the horizontal direction (direction all around) movement of camera driving mechanism 49 come in and gone out in the top of CCD camera 41 relative workpiece S2.Equally, arm 46 also is arranged to by by in the horizontal direction (direction all around) movement of camera driving mechanism 49 come in and gone out in the top of CCD camera 42 relative workpiece S1.

Each CCD camera 41, the 42nd comes the camera that detected object is made a video recording by the reflected light that detects built-in light source (coaxial indirect illumination).Each

CCD camera

41,42 shooting as described later, by imaging control part 662 controls.And then, at the upper surface of the CCD of bottom camera 42, be provided for reflecting the reflection of light face 42a from the CCD camera 41 on top.This reflecting surface 42a is such as being made by the simple and easy parts of aluminium strip etc.

[5. pressing device]

Shown in Fig. 2, Figure 23 ~ 25, pressing device 5 has vacuum chamber 51, polishing head 52, elevating mechanism 53 and cylinder 54 etc.Vacuum chamber 51 is chambeies of the holding device 2 on covering and the airtight rotary table 1.Polishing head 52 is to be located at the mechanism of workpiece S2 being pressurizeed in the vacuum chamber 51, downwards.

Elevating mechanism 53 is the mechanisms that made vacuum chamber 51 and polishing head 52 1 liftings by not shown drive source etc.Cylinder 54 is the mechanisms that made polishing head 52 liftings by the driving stem of advance and retreat.In addition, on polishing head 52, the surface that is installed in rubber has attached the guard block 52a of the sheet of polyurethane multiple aperture plasma membrane system.

And then, at vacuum chamber 51, via the drawdown pump 55 of pipe arrangement connection as vacuum source, be provided for simultaneously detecting the vacuum meter 56(of internal pressure with reference to Figure 26).

[6. control device]

Separately drive source of the component parts such as rotary table 1, holding device 2, stripping off device 3, pick-up unit 4, pressing device 5, switch, power supply etc., controlled by being moved by control device shown in Figure 26 6.This control device 6 can be by being made of each following function of the realizations such as computing machine of moving such as special circuit or with established procedure.

Below, with reference to the Figure 26 as imaginary functional-block diagram this control device 6 is described.In addition, description thereof is omitted for the output unit for the input media of the switch that supplies staff's operating control device 6, touch panel, keyboard, mouse etc., the display that is used for the state of affirmation control device 6, signal lamp, instrument etc.

That is, control device 6 has worktable control part 610, storage part 620, timing control part 630, I/O Interface 640, peels off the function of control part 650, position detection part 660, positioning control section 670, vacuum control section 680 etc.

[6-1. worktable control part]

Worktable control part 610 is mechanisms of the intermittent rotary action of control indexing mechanism 11.

[6-2. storage part]

Storage part 620 is mechanisms of the various settings such as storage action timing, calculating formula, result of calculation or data etc.

[6-3. timing control part]

Timing control part 630 is the action mechanisms regularly with each one of predefined timing controlled.

[6-4. I/O Interface]

I/O Interface 640 is that control is as the change of the signal between each one of control object or the mechanism of input and output.

[6-5. peels off control part]

Peeling off control part 650 is mechanisms of the action of control stripping off device 3.This is peeled off control part 650 and has a control part 651, rotation control part 652, elevating control section 653 etc.

Control part 651 is the control cylinder 33b that drives stripping head 33a, the mechanism that drives the cylinder 35 of first module U1 or second unit U2.Rotation control part 652 is mechanisms of spool rotating mechanism 34c of spool rotating mechanism 31b, the wound portion 34 of control supply unit 31.Elevating control section 653 is mechanisms of control spool elevating mechanism 34b.

[6-6. position detection part]

Position detection part 660 is mechanisms of control pick-up unit 4.This position detection part 660 has camera drive division 661,

imaging control part

662,3 extracting part 663, center of gravity calculation section 664, inclination calculating part 665 etc.Camera drive division 661 is mechanisms that control makes the camera driving mechanism 49 that arm 45 ~ 48 moves.Imaging control part 662 is to control the mechanism of the shooting of being undertaken by CCD camera 41 ~ 44.

3 extracting part 663 are from the bight of image contract workpiece S1, the S2 that is obtained by

CCD camera

41,42 shootings or 3 the mechanism of mark M1, M2.Center of gravity calculation section 664 is mechanisms of being calculated center of gravity by the point that extracts with 3 extracting part 663.Inclination calculating part 665 is to calculate the mechanism of inclination by the point that extracts with 3 extracting part 663.

[6-7. positioning control section]

Positioning control section 670 is mechanisms of control location division 300.This positioning control section 670 has Clutch Control section 671, location operational part 672, motor control section 673 etc.Clutch Control section 671 be by control to coil 421,431,441 energising make armature 323,333,346 and clutch coupling 420,430,440 carry out the mechanism of removable.In addition, Clutch Control section 671 by with coil 421,431,441 energising are synchronously made cylinder 356 actions, also carry out the locking of being undertaken by sticking department 350.Location operational part 672 is based on the center of gravity of the workpiece S1, the S2 that are calculated by center of gravity calculation section 664 and inclination calculating part 665 and the mechanism of tilting to calculate the amount of movement of X-Y-θ worktable 311.

[6-8. vacuum control section]

Vacuum control section 680 is mechanisms of control adsorption section 500 and pressing device 5.This vacuum control section 680 has chamber control part 681, Decompression Controlling section 682, vacuum operational part 683, valve control part 684, pushing control part 685 and absorption and control section 686 etc.Chamber control part 681 is mechanisms that control makes the elevating mechanism 53 of vacuum chamber 51 liftings.

Decompression Controlling section 682 is the mechanisms that control the drawdown pump 55 that reduces pressure in the vacuum chamber 51.The detected value that vacuum operational part 683 is based on vacuum meter calculates the mechanism of the pressure in the vacuum chamber 51.

As shown in figure 27, vacuum operational part 683 has voltage detection unit 683a, formula selection portion 683b, pressure operational part 683c etc.Voltage detection unit 683a judges that simulation output (magnitude of voltage) from vacuum meter 56 is in which mechanism of the voltage range that is set in the storage part 620.Formula selection portion 683b is based on the voltage range that is set in the storage part 620 and the multinomial approximate expression corresponding with it and selects mechanism corresponding to the multinomial approximate expression of the voltage range of being judged by voltage detection unit 683a.The multinomial approximate expression that pressure operational part 683c is based on the magnitude of voltage of judgement and selection is come the mechanism of calculating pressure value.

The mechanism of the pushing section 527 that 3-way valve 520 opens and closes is switched in the result of calculation control that valve control part 684 is based on vacuum operational part 683.Pushing control part 685 is mechanisms that control makes the cylinder 54 of polishing head 52 liftings.Absorption and control section 686 is that control is used for the mechanism at the adsorption pump 530 of adsorption plate 510 absorption workpiece S1.

At this, describe with reference to Figure 31 ~ 36 pair calculated example of carrying out with above-mentioned vacuum operational part 683.That is, consider the situation that simulation output and indicated pressure from general vacuum meter have the such relation of Figure 31.In this case, as the method that is derived pressure by the analogue value, the such form (simulated data form) of in memory storage storage Figure 31, the method for this form and the current analogue value are relatively one by one arranged in advance.But, in the method, need to retrieve one by one this data, it is large that the computing program becomes, and the processing time is also elongated.

In addition, have the variable quantity between each data in the form is seen linear method of carrying out computing.But, derive result's precision in order to improve pressure, when increase was stored in the data bulk of form of memory storage, the processing in the calculation processing apparatus was slack-off.Otherwise when suppressing data bulk, although pressure is derived result's deterioration in accuracy, computing accelerates.That is, precision and calculating treatmenting time are inverse relationship.

As other method, the method for using multinomial approximate expression to calculate is arranged.But under the form complicated situation, when the multinomial approximate expression of claimed accuracy was satisfied in foundation, the number of times of approximate function also increased, the time that the computing cost is a large amount of.For example, above-mentioned table curve the time, shown in figure 32, the relation of voltage and pressure is nonlinear, and being based upon gamut, to obtain high-precision multinomial approximate expression be difficult.In addition, Figure 32 is also corresponding with Figure 33 ~ 36, in order to represent more widely pressure limit, becomes single logarithmic curve.

In the present embodiment, form is divided into any a plurality of interval, sets up the multinomial approximate expression corresponding to each interval.In addition, according to the magnitude of voltage that detects, select in the multinomial approximate expression each, carry out the calculation of pressure computing.

For example, in the situation of the curved line relation that detection magnitude of voltage and its indicated pressure from the simulation of vacuum meter 56 have Figure 33, the scope of magnitude of voltage is divided into following three sections.

(1) 0V above ~ not enough 3V

(2) 3V above ~ not enough 8V

(3) 8V above ~ below the 10V

In addition, corresponding to the scope of these (1) ~ (3), set following three multinomial approximate expressions.

（a）PL=-36.837V3+320.94V2-1104.9V+1724.7[Pa]

（b）Pm=-0.8021V3+23.787V2-240.08V+832.07[Pa]

（c）Ph=-0.6572V3+21.162V2-231.87V+859.72[Pa]

The multinomial approximate expression of each scope can satisfy sufficient precision with cubic function.That is, as shown in figure 34, when the curve to the curve take the scope of (1) as benchmark and operation result compares, become line unanimous on the whole.This in the scope of Figure 35 and (2) (3) shown in Figure 36 too.

In addition, as shown in figure 27, in storage part 620, set the valve become for the threshold value of being switched 3-way valves 520 by valve control part 684 with force value, become for the pushing force value that is made the threshold value of polishing head 52 declines by pushing control part 685., when the force value of being calculated by pressure operational part 683c becomes valve and uses force value, cut for 3-way valve 520 for this reason, when becoming pushing and use force value, polishing head 52 declines.

[B. effect]

Have above formation present embodiment effect as shown below.In addition, controlling the method for laminating apparatus and make the computer program of control device action by the order of following explanation also is an embodiment of the invention.

[the 1. installation of workpiece]

At first, workpiece S1, S2 are described to the installation of holding device 2.In addition, attach the binding face of double sticky tape T1 at workpiece S1.At this moment, on the another side of double sticky tape T1, attaching to former state peeling paper F.

That is, at the extracting position 1A that puts into shown in Figure 1, shown in Fig. 2 ~ 4, the staff places workpiece S1 on the guard block 511 of adsorption plate 510 being stained with facing up of double sticky tape T1.At this moment, absorption and control section 686 makes adsorption pump 530 actions, by the adsorption hole absorption workpiece S1 of adsorption plate 510 and guard block 511.In addition, the staff is located at maintaining part 100 to workpiece S2.In addition, also can put into workpiece without staff, but automatically put into the workpiece that to process etc. by the feed mechanism of autoloader etc.

[2. peeling paper peels off]

As mentioned above, the holding device 2 of holding workpiece S1, S2 is come adhesive material ready position 1B by the rotation of rotary table 1.At this, stripping off device 3 is peeled off the peeling paper F of workpiece S1.Namely, shown in Figure 13 and Figure 17 (A), control part 651 makes stripping head 33a forwards mobile by driving cylinder 33b, by driving cylinder 35 first module U1 is risen simultaneously, makes the edge butt of peeling paper F of the double sticky tape T1 of the splicing tape T2 that peels off usefulness and workpiece S1.

By by rotation control part 652 control

spool rotating mechanism

31b, 34c, applying under the state of braking sending spool 31a and twining spool 34a, elevating control section 653 makes spool elevating mechanism 34b action, and winding spool 34a is descended.Like this, below splicing tape T2 is pulled in, stripping head 33a retreats.At this moment, shown in Figure 17 (B), the peeling paper F that engages with splicing tape T2 is attached to double sticky tape T1 and upward is stripped from.

In addition, rotation control part 652 makes spool rotating mechanism 34c action and makes winding spool 34a rotation, and elevating control section 653 makes spool elevating mechanism 34b action simultaneously, makes to twine spool 34a rising, thereby returns to the state of peeling off peeling paper F from next workpiece S1.

In addition, illustrated in the above and used first module U1 to peel off the situation of peeling paper F from the workpiece S1 of downside, but peel off in the situation of peeling paper F at the workpiece S2 that uses second unit U2 from upside, its basic running order also is same (with reference to Figure 18 (A) (B)).

[the 3. location of workpiece]

Then, the holding device 2 of holding workpiece S1, S2 is come position location 1C by the rotation of rotary table 1.At this moment, be urged section's 355 application of forces by 356 pairs in cylinder by sticking department 350, remove the locking (X, Y, θ axle whole) of location division 300.The position probing of like this, carrying out being undertaken by pick-up unit 4, the location of being undertaken by location division 300.Below according to the flow process of Figure 28, in the time of with reference to Figure 20 ~ 22, Figure 29 this order is described.

[3-1. position probing]

Camera drive division 661 is by making 49 actions of camera driving mechanism come transfer arm 45,46.Thus, such as Figure 20 and shown in Figure 21, CCD camera 41 moves to the top of workpiece S2, and CCD camera 42 is mobile (step 101) between workpiece S1 and workpiece S2.

In addition,

CCD camera

41,42 stops at the position (step 102) corresponding with the bight of workpiece S1, S2 or mark M1, M2 successively.Imaging control part 662 at CCD camera 41 successively to the bight of workpiece S1 and workpiece S2 or mark M1, M2 make a video recording (step 103).The image that shooting obtains is transfused to control device 6(step 104).

In addition, when above-mentioned shooting, be in the normal situation at workpiece S2, shown in Figure 22 (A), owing to the reflected light from workpiece S2 that is formed by coaxial indirect illumination is got back to CCD camera 41, so can make a video recording no problemly.But as shown in Figure 3, workpiece S2 is adsorbed by adsorption plate 510 as workpiece S1, but is remained in the air by maintaining part 100.Therefore, shown in Figure 22 (B), workpiece S2 produces bending, distortion etc. easily, at this moment, might return less than CCD camera 41 from the reflected light of workpiece S2.

In the present embodiment, even in this case, shown in Figure 22 (C), owing to reflected by the reflecting surface 42a that is installed on the CCD camera 42 from the illumination of CCD camera 41, getting back to effectively CCD camera 41, so, can make a video recording.In addition, mark M1, M2 during as detected object, in order to accept reflected light, the part that it is desirable to be equivalent among the workpiece S2 mark M1, M2 has the position of printing opacity.

As mentioned above, after 3 are made a video recording (step 105), the bight of the image contract workpiece S1 that 3 extracting part 663 are obtained by shooting or 3 points of identification marking M1 extract the bight of the workpiece S2 corresponding with it or 3 points (step 106) of mark M2 simultaneously.In addition, because can realize with the general pattern treatment technology of prior art from the processing of image contract point, so description thereof is omitted.

Shown in Figure 29 (A), center of gravity calculation section 664 calculates (step 107) to the mid point at 2 at the diagonal angle in 3 points of each workpiece S1, S2 (point that impales with single dashdotted circle) as barycentric coordinates G1, the G2 of workpiece S1, S2.In addition, inclination calculating part 665 calculates (step 108) to the inclination of 2 straight line of the long limit of the binding among each workpiece S1, S2 3 or minor face as the inclination of workpiece S1, S2.

Then, the location operational part 672 in the positioning control section 670 calculates the amount of movement of workpiece S1, so that the center of gravity of two workpiece S1, S2 and tilt consistent (step 109).That is, calculate to be used for the amount of movement (turning axle 321,331 amount of spin) of the X-Y direction of involutory center of gravity, to calculate simultaneously the amount of spin (amount of spin of Shaft 345) of the θ direction that is used for involutory inclination.

Clutch Control section 671 is by to coil 421,431,441 energisings, connect rotor 422,432,442 and armature 323,333,346(step 110).In addition, motor control section 673 makes motor 450,460,470 actions, makes turning axle 321,331,345 rotate (step 111).When turning axle 321,331,345 rotated with the amount of spin of calculating, motor 450,460,470 stopped (step 112).

And then cylinder 356 actions of Clutch Control section 671 by making sticking department 350 are removed being urged the application of force of section 355, by the elastic force of spring 354 detent 352 are descended, and clip detent plate 351 and lock (step 113).This all carries out on X, Y, θ axle substantially simultaneously.In addition, Clutch Control section 671 stops to remove by X-axis section 320, Y-axis section 330 and the θ axial region 340 of clutch coupling 420 ~ 440 generations and being connected of drive division 400 to coil 421,431,441 energisings.

Thus, be the position of involutory two workpiece S1, S2, regulate the position of X-Y-θ worktable 311.For example, when dislocation shown in Figure 29 (A) appears in workpiece S1, S2, shown in Figure 29 (B), can be made by the movement to the X-Y direction center of gravity G1, G2 consistent, shown in Figure 29 (C), can be made by rotation consistent.

In addition, the detected object of bight or mark etc. is in the little situation of the deviation of each workpiece, if detect 2 points at diagonal angle, then center of gravity is consistent with cornerwise inclination just can carry out contraposition by making.Therefore, in the present embodiment, also can detect 2 points at the diagonal angle of workpiece S1, S2, by the movement to the X-Y direction, make mutual center of gravity G1, G2 involutory, by rotation, make cornerwise inclination consistent.Thus, can alleviate the burden of calculation process.

[4. vacuum abutted]

Then, the holding device 2 of holding workpiece S1, S2 is come vacuum abutted position 1D by the rotation of rotary table 1.Like this, undertaken vacuum abutted by pressing device 5.According to the flow process of Figure 30, describe with reference to Fig. 2, Figure 10 ~ 12, Figure 23 ~ 25 pair this order.

That is, such as Figure 23 and shown in Figure 24, chamber control part 681 descends vacuum chamber 51, around the airtight holding device 2 (step 201) by making elevating mechanism 53 actions.In addition, Decompression Controlling section 682 makes drawdown pump 55 actions, to vacuum chamber 51 interior decompressions (step 202).

The magnitude of voltage (step 203) that vacuum meter 56 arrives to the control device output detections.At vacuum operational part 683, voltage detection unit 683a judges in which scope of magnitude of voltage in above-mentioned (1) ~ (3) that is detected by vacuum meter 56 (step 204).According to this result of determination, formula selection portion 683b selects multinomial approximate expression (step 205-1 ~ 3).Pressure operational part 683c is based on the multinomial approximate expression calculating pressure (step 206) of detected magnitude of voltage and selection.

Valve control part 684 rises pushing section 527, to the section that is urged 525 application of forces of 3-way valve 520 determining the force value that calculates when the valve of regulation is following with pressure (step 207).Like this, shown in Figure 11 and Figure 12 (B), the bar 524 of 3-way valve 520 rises, and upper side valve 522 is opened the upper end of inner tube section 521, and lower side valve 523 becomes closed condition (step 208).Thus, become uniform pressure in the adsorption plate 510 and in the vacuum chamber 51, prevent from discharging from adsorption hole.

And then pushing control part 685 is the pushing of regulation when following with pressure (step 209) determining the force value that calculates, as shown in figure 25, makes cylinder 54 actions, and polishing head 52 is descended, and workpiece S2 is pushed to workpiece S1(step 210).Thereafter, Decompression Controlling section 682 makes drawdown pump 55 stop (step 211), and chamber control part 681 rises polishing head 52 and vacuum chamber 51, to atmosphere opening (step 212,213).

[the 5. taking-up of workpiece]

As mentioned above, the holding device 2 that is keeping the workpiece S1, the S2 that fit together is when being come by the rotation of rotary table 1 when putting into extracting position 1A, and the staff takes out workpiece S1, S2 from maintaining part 100.In addition, this operation also can realize robotization by taking out of mechanism etc.

[C. effect]

According to above present embodiment, can obtain following effect.That is, owing to can carry out the supply of pair of workpieces S1, S2 a position, the taking-up of workpiece S1, S2 after fitting simultaneously also can be carried out at same position, so working space is little also passable.

Because the stripping head 33a in the stripping off device 3 tilts, so, can begin from the end of workpiece S1, S2 the crimping of splicing tape T2, can conscientiously peel off peeling paper F.In addition, because stripping head 33a tilts, by the length direction of the splicing tape T2 of change section 32 from stripping portion 33 supply unit 31 is thrown off, the moving direction that twines spool 34a is up and down, so, the requisite space of depth direction is reduced.The advantage of such stripping off device 3 is for example twined spool L1 with configuration shown in Figure 19 (A) ~ (D), is sent spool L2, stripping head L3 and constitute that to twine that prior art example that spool L1 moves at the length direction of splicing tape T2 compares be apparent.

In addition, stripping off device 3 is by changing unit U1, U2, and correspondence is from peeling off of the peeling paper F of downside workpiece S1 and peeling off from the peeling paper F of upside workpiece S2 easily.Because in the prior art example that be used for downside workpiece S1 of for example Figure 19 (A) shown in (B) and Figure 19 (C) prior art example for upside workpiece S2 shown in (D), must change and twine spool L1, send the configuration of spool L2 itself and be difficult to blocking, so the advantage of stripping off device 3 as described above is apparent.In addition, for example by being arranged to such as Figure 17, the device with roller 33c ~ 33g shown in Figure 180, even do not form the unit replacement formula, also can make the corresponding upside of splicing tape T2 peel off purposes and downside is peeled off purposes such as Figure 17 or shown in Figure 180 more bringing.

In addition, can consist of with the independent of laminating apparatus removable because stripping off device 3 forms, and not need transfer machine etc., so can prevent adhesive dust etc.And then, because replaceable stripping off device 3 and applying device, so can corresponding multiple product.

Can be separated the X-Y-θ worktable 311 on the rotary table 1 from motor 450,460,470 by clutch coupling 420,430,440, mobile with keeping intact.For this reason, needn't carry drive source etc. on rotary table 1, also not need power supply and control line, available simple formation realizes stable operation.In addition, owing to can carry many holding devices 2 on rotary table 1, can realize fitting at a high speed and efficiently.

In addition, because only being set at a place, drive source etc. gets final product, so can consist of at an easy rate.In addition, because X-Y-θ worktable 311 is small-sized just passable, so also be received into easily in the vacuum, can prevent from simply sneaking into bubble etc.And then, because on the X-Y-θ worktable 311 behind the location, can fit workpiece S1, S2, so can carry out the high applying of precision.

Particularly because pick-up unit 4 carries out the center of gravity of workpiece S1, S2 and the detection of inclination at 3, detect accurately so can be made as Min. to processing load.In addition, even exist in crooked etc. the situation at workpiece S1, S2, because from the reflecting surface 42a reflection by CCD camera 42 of the irradiation light of CCD camera 41 sides, so can accurately detect.Therefore, can realize high-precision applying based on accurate detection.

Since can a position on rotary table 1 carry out vacuum abutted, so can save the space.In addition, because need to be in vacuum chamber 51 interior location, so device is diminished and simplify.In addition, when in to vacuum chamber 51, reducing pressure, can utilize the absorption circuit in the 3-way valve 520 blocking adsorption sections 500, can make pressure interior identical with vacuum chamber 51 simultaneously, so can prevent coming off of the workpiece S1 that caused by the discharge from adsorption hole, can realize stable operation.In addition, owing to can utilize single 3-way valve 520 to switch, so can make small-sized and at an easy rate.

Owing to during the pressure in detecting vacuum chamber 51, select the suitable approximate expression of corresponding voltage value to come calculating pressure, so the approximate function of available low number of times calculates high-precision pressure.In addition, owing to always only carry out being got final product by the calculation process that a simple function forms, so can alleviate processing load.

As the guard block 511 of adsorption section 500 and the guard block 52a of pressing device 5; owing to use the formation at elastomeric element applying Porous sheet; so can absorb the impact to workpiece S1, S2; prevent that simultaneously workpiece S1, S2 are attached on guard block 511, the 52a, can realize stable applying.In addition, and the surface of rubber is made it coarse situation with machining compare, sliding is good, is difficult to abrasion.In addition, compare with the situation of rubber being carried out low-yield treatment with irradiation, cheap.And then, when occuring to wear out, compare with the situation of changing rubber integral body, carry out easily the replacing of sheet.

[D. other embodiment]

The invention is not restricted to above-mentioned embodiment.For example, as mentioned above, when substituting stripping off device and use the applying device of bonding agent, as bonding agent, can use now or the bonding agent of available all materials in the future.Can be suitable for as UV cured type or radioactive ray hardening resin the type of hardening from the electromagnetic wave of external irradiation broad sense or the type of as thermmohardening type resin, hardening by changing temperature.As applying device, as mentioned above, can use known device.For example, can consider to spray applying device, filament plate printing equipment, extrusion coating device, blending nozzle applying device etc., but be not limited to these.

As shown in figure 37, with the applying device adhesive-applying time, as the stop position of rotary table 1, consider to arrange the sclerosis position 1E of bonding agent.At this moment, the device of the electromagnetic device of irradiation, heating etc. is set at sclerosis position 1E, when the workpiece after applying is come sclerosis position 1E, by shining electromagnetic wave or heating, makes adhesive hardens.

In addition, the formation of the thin section in the stripping off device is not limited to the formation shown in the above-mentioned embodiment.For example, stripping head is so long as the formation that removable splicing tape can be pressed to it on peeling paper simultaneously gets final product, and its driving mechanism is also so long as can make it be connected the formation of separating with peeling paper to get final product.In addition, the allocation position of guide reel or number also are freely.And then the change angle of change section is so long as unloading part from the angle of the length direction disengaging of the splicing tape of stripping head, then also is not limited to the right angle.In addition, as stripping off device, also can be suitable for other known devices.

Location division and drive division are carried out applicable all known parts of removable parts of removable.For example, also can be the mechanical clutch that does not utilize coil magnetization.As unitor, corrugated tube, so long as allow the link of the structure of axial translation, then can use all known parts.

The material of guard block, thickness, hardness etc. also are freely.For example, as the polishing head side, consider to use the type that on the urethane rubber of hardness 40, mounts the sheet of polyurethane multiple aperture plasma membrane system with double sticky tape, as the adsorption plate side, consider to use to mount the type of the sheet of polyurethane multiple aperture plasma membrane system at the urethane rubber of hardness 80, but be not limited to these.

The number of the camera in the pick-up unit also is not limited to above-mentioned number.Also can only establish one, also can only establish in the horizontal direction two, or establish in the horizontal direction three to four, make it mobile successively at upside and downside.In addition, also can respectively establishing up and down two, make it to move forward and backward.And then, also can respectively establish up and down three to four, to up and down 3 make a video recording simultaneously.At first, 2 of diagonal angle are made a video recording, when having the point that can not extract thus, also can make a video recording to other point.After being made a video recording in four places, also can from can extract or image is good three extracts 3 points.The number of camera is more, just more also can simplify driving mechanism, also can carry out high-speed camera.

In addition, also can be as shown in figure 38, adopt by prism consisting of that the light from light source can shine up and down at the CCD of downside camera 42, receive the light that shines the top by the CCD camera 41 of upside.Also can be as shown in figure 39, the CCD camera 42 that constitutes downside can be to making a video recording up and down, and can shine up and down the light from light source, by the light of reflecting surface 42a reflection top.In addition, as the material of reflecting surface, consider metal, glass, resin etc., but so long as material that can reflected illumination light, then which type of material all can.And then, also can form as one the framework of reflecting surface and camera.

For the workpiece that becomes the applying object, cover plate and Liquid Crystal Module (workpiece of display panel, lamination back of the body lamp) are typical case, but can extensively be suitable for as the device of applying display device component parts.Therefore, for example also go for the fitting situation of touch panel and Liquid Crystal Module.

The detected object that is used for the location also can be according to the style appropriate change of workpiece.For example, as shown in figure 40, when the workpiece S2 that fits as the workpiece S1 of Liquid Crystal Module as cover plate, also can detect the bight that is formed on the frame H on the workpiece S2 by modes such as printings.At this moment, as shown in figure 41, it is desirable to position so that workpiece S1(or can show the field, below same) the limit consistent with the limit of frame H.Particularly because the limit of frame H is that the user who buys product looks the part of recognizing, so when the relative workpiece S1 of frame H produced, the possibility that becomes substandard products uprised.

In order to prevent this situation, according to following reason, more effective with 2 location of detecting with 3 contrast locatings that detect.That is, for being waited by printing, the size that makes frame H or shape form, sometimes in each workpiece S2 generation deviation.For example, shown in Figure 42 (A), when the shape of workpiece S1 and frame H is inconsistent, make center of gravity and cornerwise inclination consistent even detect 2 of separately diagonal angle, shown in Figure 42 (B), also or relatively workpiece S1 finishes the location with the state that frame H tilts.

To this, same with above-mentioned embodiment, when detecting 3 and when making the inclination on center of gravity and long limit consistent, shown in Figure 42 (C), workpiece S1 is parallel with the limit of frame H.Thus, but the user who buys product looks the not relatively viewing area run-off the straight of frame H of recognizing, and can prevent the appearance of substandard products.

Description of reference numerals

1 ... rotary table; 1a ... pallet; 2 ... holding device; 3 ... stripping off device; 4 ... pick-up unit; 5 ... pressing device; 6 ... control device; 11 ... indexing mechanism; 31 ... supply unit; 31a ... send spool; 31b; 34c ... the spool rotating mechanism; 32 ... change section; 33 ... stripping portion; 33a ... stripping head; 33b; 35; 54; 356 ... cylinder, 33c ~ 33g ... guide reel, 34 ... wound portion; 34a ... twine spool; 34b ... the spool elevating mechanism, 41 ~ 44 ... the CCD camera, 43a; 44a ... reflecting surface; 45 ~ 48 ... arm; 49 ... the camera driving mechanism, 51 ... vacuum chamber, 52 ... polishing head; 52a; 511 ... guard block; 53 ... elevating mechanism, 55 ... drawdown pump, 56 ... vacuum meter; 100 ... maintaining part; 200 ... column sections, 300 ... the location division, 310 ... mounting section; 311 ... X-Y-θ worktable; 312; 320; 330; 340 ... axial region, 313 ... movable table, 313a; 313b ... groove; 314 ... corrugated tube; 315 ... belt wheel, 321; 331; 345 ... turning axle, 322; 332 ... eccentric roller; 323; 333; 346 ... armature; 341 ... upper turning axle, 342 ... belt wheel, 343 ... Timing Belt; 344 ... corrugated pipe connector; 345 ... Shaft, 350 ... sticking department, 351 ... detent plate; 352 ... detent; 353 ... lifting shaft, 354 ... spring, 355; 525 ... be urged section; 400 ... drive division; 410 ... stationary work-table, 420; 430; 440 ... clutch coupling, 421; 431; 441 ... coil; 422; 432; 442 ... rotor; 450; 460; 470 ... motor, 500 ... the adsorption section, 510 ... adsorption plate; 512; 526 ... pipe arrangement; 520 ... 3-way valve, 521 ... inner tube section, 522 ... upper side valve; 523 ... lower side valve; 524 ... bar, 527 ... pushing section, 530 ... adsorption pump; 610 ... the worktable control part; 620 ... storage part, 624 ... calculating part, 630 ... timing control part; 640 ... I/O Interface; 650 ... peel off control part, 651 ... control part, 652 ... the rotation control part; 653 ... elevating control section; 660 ... position detection part, 661 ... the camera drive division, 662 ... imaging control part; 663 ... 3 extracting part; 664 ... center of gravity calculation section, 665 ... the inclination calculating part, 670 ... positioning control section; 671 ... Clutch Control section; 672 ... the location operational part, 673 ... motor control section, 680 ... vacuum control section; 681 ... the chamber control part; 682 ... Decompression Controlling section, 683 ... the vacuum operational part, 683a ... the voltage detection unit; 683b ... the formula selection portion; 683c ... the pressure operational part, 684 ... the valve control part, 685 ... the pushing control part.

Claims

1. laminating apparatus, the pair of workpieces that this laminating apparatus will consist of display device fits together, and it is characterized in that, and described laminating apparatus has:

Rotary table, this rotary table carries out intermittent rotary corresponding to a plurality of positions,

Holding device, this holding device arranges a plurality of at described rotary table, keep pair of workpieces,

The location division, this location division is arranged at described holding device, the workpiece of at least one party in the pair of workpieces positioned, and

Pressing device, this pressing device is by the workpiece application of force at least one party in the pair of workpieces in the described holding device, applying pair of workpieces;

Described pressing device has vacuum chamber, and this vacuum chamber can be taken in the part of the holding workpiece in the described location division;

Described laminating apparatus also has:

Vacuum meter, magnitude of voltage corresponding to pressure that the output of this vacuum meter and described vacuum chamber are interior,

Storage part, this storage portion stores magnitude of voltage and be used for to calculate a plurality of multinomial approximate expressions of the force value corresponding with this magnitude of voltage,

Formula selection portion, this formula selection portion be based on the magnitude of voltage and the multinomial approximate expression that are stored in the described storage part, select with from multinomial approximate expression corresponding to the magnitude of voltage of described vacuum meter, and

The pressure operational part, this pressure operational part is based on selected multinomial approximate expression calculating pressure value.

2. laminating apparatus as claimed in claim 1 is characterized in that, described storage part is stored multinomial approximate expression for each interval of the magnitude of voltage that is divided into a plurality of intervals.

3. laminating apparatus as claimed in claim 1 is characterized in that, described location division has:

Adsorption plate, this adsorption plate has the ventilation path that is connected with vacuum source,

Adsorption hole, this adsorption hole are located at described adsorption plate in order to be communicated with described ventilation path, and the workpiece vacuum suction that makes a side by described vacuum source is to described adsorption plate, and

Valve, this valve switch the state that state that described ventilation path is communicated with vacuum source and described ventilation path are communicated with vacuum chamber;

Described holding device with described adsorption plate on workpiece position in opposite directions have the maintaining part of the workpiece that keeps the opposing party.

4. laminating apparatus as claimed in claim 3 is characterized in that, described laminating apparatus has the valve control part, and this valve control part is controlled the switching of described valve based on the force value that is calculated by described pressure operational part.

5. laminating apparatus as claimed in claim 4 is characterized in that, described valve control part has valve force value storage part, and this valve becomes valve force value be used to the threshold value of switching described valve with the force value storage portion stores.

6. laminating apparatus as claimed in claim 3 is characterized in that, described valve has:

The inner tube section of vertical direction,

Be arranged to can lifting in described inner tube section bar,

Be located at the valve that is communicated with that described bar and the lifting by described bar open and close described vacuum source and described ventilation path, and

Be located at the valve that is communicated with that described bar and the lifting by described bar open and close described vacuum chamber and described ventilation path.

7. laminating apparatus as claimed in claim 6 is characterized in that, described laminating apparatus has:

The stationary work-table that arranges independently with described rotary table, and

The pushing section that is located at described stationary work-table and carries out the switching of described valve by pushing.

8. laminating apparatus as claimed in claim 3 is characterized in that, in described adsorption plate and the face that workpiece contacts, is provided with the guard block that is pasted with the Porous sheet at elastomeric element.

9. the control method of a laminating apparatus, by the pair of workpieces of being fitted by control device control laminating apparatus, this laminating apparatus has the rotary table that carries out intermittent rotary corresponding to a plurality of positions, be provided with the holding device of the pair of workpieces of a plurality of and maintenance formation display device at described rotary table, the location division of being located at described holding device and the workpiece of at least one party in the pair of workpieces being positioned, pressing device by pair of workpieces that the workpiece application of force of at least one party in the pair of workpieces in the described holding device is fitted, be located at described pressing device and can take in the vacuum chamber of the part of the holding workpiece in the described location division, with the vacuum meter that is located in the described vacuum chamber; It is characterized in that,

Described control device has storage part, formula selection portion and pressure operational part,

Described storage portion stores magnitude of voltage and be used for to calculate a plurality of multinomial approximate expressions of the force value corresponding with this magnitude of voltage,

Described formula selection portion is based on the magnitude of voltage and the multinomial approximate expression that are stored in the described storage part, select with from multinomial approximate expression corresponding to the magnitude of voltage of described vacuum meter,

Described pressure operational part is based on selected multinomial approximate expression calculating pressure value.

10. the control method of laminating apparatus as claimed in claim 9 is characterized in that, described storage part is stored multinomial approximate expression for each interval of the magnitude of voltage that is divided into a plurality of intervals.

11. the control method of laminating apparatus as claimed in claim 9, it is characterized in that, described laminating apparatus has adsorption section, valve and valve control part, this adsorption section has the ventilation path that is communicated with vacuum source and vacuum chamber and the workpiece workpiece in opposite directions in vacuum suction and the described location division, described valve switches the state that state that described ventilation path is communicated with vacuum source and described ventilation path are communicated with vacuum chamber, described valve control part is controlled described valve

Described valve control part is controlled the switching of described valve based on the force value that is calculated by described pressure operational part.

12. the control method of laminating apparatus as claimed in claim 11, it is characterized in that, described valve control part is controlled described valve, so that in the force value that is calculated by described pressure operational part be become pre-stored threshold value valve with in the situation of force value, form the state that described ventilation path is communicated with vacuum chamber.