TW201305989A - Bonding apparatus and method for controlling same - Google Patents

Abstract

Provided is a low-cost and small bonding apparatus which can efficiently align and bond works by using a turntable. A method for controlling the bonding apparatus is also provided. The bonding apparatus which bonds a pair of works (S1, S2) is provided with: a turntable (1) which intermittently rotates corresponding to a plurality of positions; a plurality of holding apparatuses (2) which are provided on the turntable (1) and hold the works (S1, S2); an aligning section (300) which is provided on the holding apparatuses (2) and aligns the work (S1); and a pressing apparatus (5) which bonds the work (S2) on the work (S1) by urging the work (S2) held by the holding apparatus (2). A driving section (400) which drives the aligning section (300) is provided independently from the turntable (1) and removably from the aligning section (300).

Description

Laminating device and control method thereof

The present invention relates to an improved bonding apparatus and a control method thereof for a technique of bonding a liquid crystal module and a flat-plate-like workpiece.

In general, a liquid crystal panel is formed by laminating a liquid crystal module, a protective sheet for protecting a surface thereof, and a touch panel for operation. These liquid crystal modules, protective sheets, touch panels, and the like (hereinafter referred to as workpieces) are assembled in the casing of the liquid crystal module, and are in contact with the liquid crystal glass in order to avoid deformation of the protective panel or the touch panel. There is space between each other.

However, when the air layer enters between the liquid crystal module, the protective sheet, and the touch panel (hereinafter referred to as a workpiece), the visibility of the display surface is lowered due to the reflection of the external light. In this case, the bonding is performed by forming a layer between the workpieces by a bonding material such as a double-sided tape or an adhesive.

Therefore, in the production of a liquid crystal panel, it is necessary to have a bonding apparatus that prepares a bonding material and bonds at least one of the workpieces. Further, in order to prevent air bubbles or the like from being mixed between the bonded workpieces, the bonding is preferably carried out in a vacuum. Therefore, the bonding apparatus must also have a vacuum processing chamber or the like.

The technique of bonding the workpiece in this way is, for example, those disclosed in Patent Documents 1 to 3. The techniques described in Patent Documents 1 and 2 are methods for bonding a workpiece in a vacuum. The technique described in Patent Document 3 is for efficient labeling. In combination, a technique for sequentially holding a device while holding the workpiece while moving it by intermittently rotating the rotary table.

Prior technical literature Patent literature

Patent Document 1: Japanese Laid-Open Patent Publication No. 2004-170974

Patent Document 2: Japanese Laid-Open Patent Publication No. 2004-170975

Patent Document 3: Japanese Patent No. 3595125

In order to accurately position the workpiece, it is preferable to have an X-Y-θ platform which is displaceable in the orthogonal direction (X-Y direction) and the rotational direction (θ direction) on the plane. However, if the X-Y-θ platform includes a driving source for driving the same, it will become large. Therefore, when the X-Y-θ platform is mounted on the rotary table, the size of the entire device is increased, and the processing of the power supply and the control line is complicated. In addition, when the entire X-Y-θ platform including the driving source or the like is to be housed in the vacuum processing chamber and sealed, the vacuum processing chamber is also increased in size. Such a large increase will increase the manufacturing cost of the device.

The present invention has been made to solve the above problems of the prior art, and a main object thereof is to provide a laminating apparatus capable of efficiently performing positioning and lamination of a workpiece using a rotary table, and which is an inexpensive and compact laminating apparatus and Control Method.

Furthermore, another object of the present invention is to provide a stable environment In the operation, the bonding device and the control method thereof can be bonded without causing the incorporation of air bubbles, impurities, and the like with high precision.

In order to achieve the above object, the present invention provides a laminating apparatus for laminating a workpiece to a workpiece, characterized in that it has a rotary table that intermittently rotates in response to a plurality of working positions, and a plurality of rotary tables are provided on the rotating table. And a holding device for holding a pair of workpieces; and a positioning portion provided on the holding device to position at least one of the pair of workpieces; and fitting at least one of the workpieces by one of the holding devices A pressing device for the pair of workpieces; a driving portion for driving the positioning portion is detachably provided to the positioning portion independently of the rotating table.

In the invention described above, when the rotary table is rotated, the holding device can be separated from the driving portion and moved in accordance with the rotation of the rotary table. Therefore, it is not necessary to mount the drive unit on the rotary table, and it is not necessary to have a power supply and a control line. In addition, since a plurality of holding devices can be mounted, high speed and efficient bonding can be achieved. Further, since it is only necessary to provide the driving portion at one place, it can be configured inexpensively. Further, since the bonding can be performed on the positioning holding device, it is possible to perform bonding with high precision.

The other type is characterized in that a peeling device for peeling paper for peeling off a double-sided tape attached to at least one of the workpieces is detachably provided at at least one working position of the turntable.

In the invention described above, since the peeling device is detachably provided on the rotary table, it can be replaced as a coating device for the adhesive to prepare the sticker. Other types of devices are available, and thus can correspond to a variety of articles.

Another aspect is characterized in that a peeling device for peeling paper for peeling off a double-sided tape attached to at least one of the workpieces is provided at at least one working position of the turntable; and the peeling device has a bonding device a peeling head that presses the tape against the release paper; and a supply portion that supplies the adhesive tape to the peeling head; and a take-up portion that winds the adhesive tape from the peeling head; and the adhesive tape from the peeling head and the adhesive tape The longitudinal direction is a different direction, and the conversion portion of the adhesive tape in the supply direction is switched in accordance with the supply of the adhesive tape by the supply unit.

In the above invention, since the direction in which the adhesive tape is supplied from the supply portion is different from the longitudinal direction of the adhesive tape of the peeling head, the device space in the longitudinal direction can be shortened.

Another aspect is characterized in that a guiding member for guiding movement of the adhesive tape is provided between the supply portion and the peeling head and between the peeling head and the winding portion; corresponding to peeling off the release paper The working position of the workpiece is such that the plurality of units are different in configuration in which the peeling head and the guiding member are arranged to be replaceable.

In the above invention, the supply portion can be disposed at a position where the longitudinal direction of the peeling head and the adhesive tape are different by the conversion portion. Therefore, the supply unit and the winding unit are maintained in the original shape, and a plurality of units in which the separation head and the guide member are disposed are prepared and replaced, whereby the peeling of the release paper with respect to the workpiece at different positions can be performed.

Other types are characterized in that at least one working position of the rotating table is provided with detection of a 3-point angle 分别 which respectively detects a square of a pair of workpieces And a center-of-gravity calculation unit that calculates a center point of two points on both ends of a diagonal line forming a square as a center of gravity of the workpiece; and a slope calculation unit that calculates a slope of the workpiece based on two points of the side forming the square; And a positioning calculation unit that calculates the control amount of the positioning unit based on the center of gravity and the slope.

The other type is a control method of a bonding device, and is a control method for bonding a pair of workpieces by controlling a bonding device by a computer or an electronic circuit, the bonding device having: a plurality of working positions a rotating table that rotates intermittently; and a plurality of holding means on the rotating table, and holding a holding device constituting one of the display devices; and being disposed on the holding device, and positioning at least one of the pair of workpieces a positioning unit; and a pressing device for bonding a pair of workpieces by at least one of the workpieces being biased by one of the holding devices; wherein the computer or the electronic circuit has a detecting unit, a center of gravity calculating unit, and a slope calculation And a positioning calculation unit that detects a square point of a pair of workpieces; the center of gravity calculation unit calculates a midpoint of two points on both ends of a diagonal line forming the square as a center of gravity of the workpiece; The slope calculating unit calculates a slope of the workpiece based on two points of the side forming the square; the positioning calculating unit calculates the front based on the center of gravity and the slope The control amount of the positioning unit.

In the above-described invention, the center of gravity and the slope of the pair of workpieces can be calculated by detecting the three points of each square, and the amount of positioning can be determined. Therefore, the amount of processing can be minimized and the correct alignment can be performed.

Another type of feature is: at least one working position of the rotating table, a detecting device for detecting a position of a pair of workpieces; the detecting The apparatus includes: a first camera that images one workpiece; a second camera that is inserted between the pair of workpieces and that images the other workpiece; and a surface of the second camera that faces the first camera , a reflection portion is provided.

In the above-described invention, even if the workpiece has a curved portion or the like, the illumination light from the first camera side can be reflected by the reflection surface of the second camera and can be detected by the first camera, so that it can be reliably detected.

In another aspect, the pressing device includes a vacuum processing chamber in which a portion of the positioning portion that holds the workpiece is separately detached from the driving portion.

In the above-described invention, the vacuum processing chamber for vacuum bonding can accommodate the portion of the positioning portion of the holding device that holds the workpiece, and does not need to be housed by the driving portion, so that the size can be reduced.

The other type is characterized in that it has a ventilation path connected to the vacuum source, and has: an adsorption portion that vacuum-adsorbs one workpiece to the positioning portion; and switches the ventilation path to the vacuum source side and the vacuum processing chamber side. valve.

In the above-described invention, when the vacuum processing chamber is depressurized to form a vacuum, the ventilation path for vacuum-adsorbing the workpiece can be configured to be the same pressure as the vacuum processing chamber by switching the valve, so that the deviation of the workpiece can be prevented.

The other type is characterized by: a vacuum gauge disposed in the vacuum processing chamber; and a memory voltage value and a memory portion for calculating a plurality of multiple approximations corresponding to the pressure; and storing the memory according to the foregoing The voltage value of the part and a plurality of approximations, the selection corresponding to the vacuum gauge from the foregoing a formula selection unit that approximates a plurality of approximations of voltage values; and a pressure calculation unit that calculates a pressure based on the selected plurality of approximation formulas.

The other type is a control method of a bonding apparatus, and is a control method of a bonding apparatus for bonding a pair of workpieces by controlling a bonding apparatus by a control apparatus, the bonding apparatus having: intermittently responding to a plurality of working positions a rotating table that rotates on the ground; and a plurality of holding means for holding the one of the display devices on the rotating table; and a positioning portion provided on the holding device and positioning at least one of the pair of workpieces And a pressing device that bonds the pair of workpieces by at least one of the workpieces by one of the holding devices; and the pressing device is provided, and the portion of the positioning portion that holds the workpiece can be separated from the driving portion And a vacuum processing chamber stored therein; and a vacuum gauge installed in the vacuum processing chamber; wherein the control device includes: a memory unit, a formula selection unit, and a pressure calculation unit; and the memory unit, the memory voltage value and the Calculating a plurality of multiple approximations corresponding to the pressures; the equation selection unit is based on the voltage value stored in the memory portion and Item approximate expression, the number of voltage values corresponding to the gauge from the approximate expression; the pressure calculating unit, based on the selection of the polynomial approximate expression to calculate the pressure.

In the invention described above, since an appropriate multiple approximation formula is selected in response to the voltage value detected by the vacuum gauge, a high-precision pressure can be calculated by a lower-order approximation function. In addition, it is often only necessary to perform arithmetic processing based on a simple function, so that the processing load can be reduced.

In another aspect, the contact surface of at least one of the positioning portion and the pressing portion with the workpiece is provided with a porous sheet attached to the bomb. Protective member of a component.

In the invention described above, since the protective member is formed by attaching the porous sheet to the elastic member, it is possible to absorb the impact on the workpiece at the time of bonding and prevent the workpiece from being attached to the elastic member.

The other type is characterized in that a coating device that applies an adhesive to at least one of the workpieces is detachably provided at at least one working position of the turntable.

In the invention described above, since the coating device is detachably provided on the rotary table, other types of devices for preparing the attached material can be exchanged, and thus it is possible to correspond to a plurality of products.

As described above, according to the present invention, it is possible to provide a bonding apparatus and a control method thereof which are capable of efficiently performing positioning and bonding of a workpiece using a rotary table, and which are inexpensive and small.

Further, according to the present invention, it is possible to provide a bonding apparatus capable of achieving stable operation without mixing bubbles or impurities, and capable of bonding with high precision and a control method therefor.

Next, an embodiment (hereinafter referred to as an embodiment) of the present invention will be specifically described with reference to the drawings.

[A. Composition] [1. Overall composition]

First, the overall configuration of the bonding apparatus (hereinafter referred to as the present apparatus) of the present embodiment will be described. As shown in Fig. 1, the apparatus is equipped with four holding devices 2 mounted on the rotary table 1. The turntable 1 is configured to be intermittently rotated by the indexing mechanism 11 in cooperation with the input and take-out work position 1A, the sticking material preparation work position 1B, the positioning work position 1C, and the vacuum sticking cooperative position 1D.

As shown in FIGS. 2 and 3, the holding device 2 is a device for holding the workpiece S1 and the workpiece S2 up and down. In the present embodiment, the workpiece S1 and the workpiece S2 are, for example, a liquid crystal module and a rectangular substrate such as a cover panel. The workpieces S1 and S2 are provided with detection marks M1 and M2 corresponding to four vertices of a virtual rectangle or a square. This holding device 2 has a positioning unit 300 that aligns the positions of the workpiece S1 and the workpiece S2, and the like.

At the sticking material preparation work position 1B, the peeling device 3 or the coating device is detachably provided. As shown in FIGS. 13 to 19, the peeling device 3 is a device for peeling off a release paper (a peeling sheet or the like regardless of the material) F of the double-sided tape T1 that has been attached to the workpiece S1 in advance. The coating device, although not shown in the drawings, is a device for applying an adhesive to the workpiece S1. As the coating device, a generally known device can be used.

At the positioning work position 1C, as shown in Figs. 20 and 21, a detecting device 4 that detects the positions of the workpiece S1 and the workpiece S2 is provided. Based on the value detected by the detecting device 4, the amount of positioning of the workpiece S1 of the positioning portion 300 with respect to the workpiece S2 is determined.

In the vacuum paste cooperation industry position 1D, as shown in Figure 2, Figure 23 ~ 25 As shown in the figure, a pressing device 5 is provided. The pressing device 5 can press the workpiece S2 toward the workpiece S1 side in the decompression space in the vacuum processing chamber 51 to bond the two.

[2. Holding device]

Next, the details of each part will be explained. First, the holding device 2 includes a holding portion 100, a pillar portion 200, a positioning portion 300, a driving portion 400, a locking portion 350, and an adsorption portion 500.

[2-1. Holding Department]

As shown in FIG. 3, the holding portion 100 is a substantially sinuous frame that holds the left and right edges of the workpiece S2.

[2-2. Pillars]

The pillar portion 200 is a columnar member that is lifted in the vertical direction. The support portion 100 can be supported by the pillar portion 200 so as to be movable up and down. The holding portion 100 is located above the workpiece S1 in the initial position and holds the workpiece S2 in the horizontal direction. Then, at the time of bonding, the workpiece S2 is pressed downward by the pressing device 5 together with the holding portion 100, and the workpiece S1 and the workpiece S2 are bonded together.

[2-3. Positioning Department]

As shown in FIG. 4, the positioning unit 300 has a mounting portion 310, an X-axis portion 320, a Y-axis portion 330, a θ-axis portion 340, and the like supported by the gantry 1a fixed to the turntable 1.

[2-3-1. Mounting Department]

The placing unit 310 includes an X-Y-θ stage 311, a shaft portion 312, a movable table 313, a bellows 314, a pulley 315, and the like.

The X-Y-θ platform 311 is a platform for positioning the level of the workpiece S1. The X-Y-θ stage 311 is provided to be movable in a straight line direction (X direction and Y direction) on a horizontal plane, and is rotatable (θ direction) around the shaft portion 312.

The shaft portion 312 is a columnar member in the vertical direction. The upper end of the shaft portion 312 is rotatably coupled to the X-Y-θ stage 311. The lower end of the shaft portion 312 passes through the turntable 1 and is fixed to the movable table 313. The movable table 313 can be provided to move in the X-axis direction and the Y-axis direction by the X-axis portion 320 and the Y-axis portion 330 as will be described later.

A bellows 314 covering the shaft portion 312 is attached between the movable table 313 and the turntable 1. The mounting end of the bellows 314 ensures airtightness. Further, since the bellows 314 is flexible, it can be flexibly displaced in a state of being kept airtight in response to the movement of the movable table 313. The pulley 315 is fixed to the X-Y-θ stage 311. On the pulley 315, a timing belt 343 to be described later is attached.

[2-3-2. X-axis section]

The X-axis portion 320 has a rotating shaft 321 , an eccentric roller 322 , an armature 323 , and the like. The rotating shaft 321 is a member that can be rotated in the vertical direction by the driving portion 400. The eccentric roller 322 is attached to the upper end of the rotating shaft 321 . As shown in Fig. 5, the eccentric roller 322 is inserted into a groove 313a formed in the Y direction of the movable table 313.

Therefore, the eccentric roller 322 can move the movable table 313 in the X direction by pressing the inner wall of the groove 313a in accordance with the rotation of the rotating shaft 321. At this time, the shaft portion 312 and the X-Y-θ stage 311 are together with the movable table 313 at X. Move in the direction.

The armature 323 is attached to the lower end of the rotating shaft 321. The armature 323 is detachably provided to a clutch 420 which will be described later. By connecting the armature 323 to the clutch 420, the rotating shaft 321 can be driven in accordance with the driving portion 400.

[2-3-3. Y-axis section]

The Y-axis portion 330 has a rotating shaft 331, an eccentric roller 332, an armature 333, and the like. The rotating shaft 331 is a member that can be rotated in the vertical direction by the driving portion 400. The eccentric roller 332 is attached to the upper end of the rotating shaft 331. As shown in Fig. 5, the eccentric roller 332 is inserted into a groove 313b formed in the X direction of the movable table 313.

Therefore, the eccentric roller 332 can move the movable table 313 in the Y direction by pressing the inner wall of the groove 313b in accordance with the rotation of the rotating shaft 331. At this time, the shaft portion 312 and the X-Y-θ stage 311 move together with the movable table 313 in the Y direction.

The armature 333 is attached to the lower end of the rotating shaft 331. The armature 333 is detachably provided to a clutch 430 which will be described later. By connecting the armature 333 to the clutch 430, the rotating shaft 331 can be driven in accordance with the driving portion 400.

[2-3-4. θ axis part]

The θ-axis portion 340 includes an upper rotating shaft 341, a pulley 342, a timing belt 343, a bellows coupling 344, a lower rotating shaft 345, an armature 346, and the like. The upper rotating shaft 341 is a member in the vertical direction, and a pulley 342 is fixed to the upper end thereof. A timing belt 343 is hung on the pulley 342. Thereby, as shown in Fig. 6, when the upper rotary shaft 341 is rotated, since the rotation is transmitted to the pulley 315 via the timing belt 343, the X-Y-θ stage 311 is rotated.

The lower end of the upper rotating shaft 341 is coupled to the upper end of the bellows coupling 344. The bellows coupling 344 is a connecting member formed of a flexible bellows that can absorb the offset in the X direction and the Y direction. A lower rotating shaft 345 is coupled to the lower end of the bellows coupling 344. The lower rotating shaft 345 is a member in the vertical direction, and the rotation is transmitted to the upper rotating shaft 341 via the bellows coupling 344.

The armature 346 is attached to the lower end of the lower rotating shaft 345. The armature 346 is detachably provided to a clutch 440 which will be described later. By connecting the armature 346 to the clutch 440, the lower rotating shaft 345 and the upper rotating shaft 341 can be driven in accordance with the driving unit 400.

[2-4. Drive Department]

The drive unit 400 has a fixed platform 410, clutches 420, 430, 440, motors 450, 460, 470, and the like. The fixed platform 410 is a platform fixed to the lower portion of the rotary table 1. The clutches 420, 430, and 440 are fixed to the fixed platform 410 at positions corresponding to the X-axis portion 320, the Y-axis portion 330, and the θ-axis portion 340. Further, motors 460, 460, and 470 that transmit rotation are connected to the clutches 420, 430, and 440, respectively.

The clutches 420, 430, 440, when energizing the coils 421, 431, 441, armatures 323, 333, by magnetic flux generated between the rotors 422, 432, 442 and the armatures 323, 333, 346, 346 adsorption. Thereby, the driving force of the motors 450, 460, and 470 can be transmitted to the X-axis portion 320, the Y-axis portion 330, and the θ-axis portion 340.

[2-5. Locking Department]

The locking portion 350, as shown in FIG. 4 and FIG. 7 to FIG. The brake plate 351, the brake 352, the lift shaft 353, the spring 354, the pressed portion 355, the pressure cylinder 356, and the like. The brake plate 351 is, for example, a spring steel plate fixed to the movable table 313. The brake 352 is a member that locks the movable table 313 by pressing and pressing the brake plate 351 between a portion of the gantry 1a. A slip preventing member such as a rubber lining is formed on the contact surface of the brake 352 and the brake plate 351, for example.

The lifting shaft 353 is provided so as to be movable up and down through the gantry 1a. A brake plate 351 is attached to the upper end of the lift shaft 353. The spring 354 is a spring member such as a spring that biases the lift shaft 353 downward. The pressed portion 355 is attached to the lower end of the lifting shaft 353. The pressure cylinder 356 is fixed to the fixed platform 410, and is a means for releasing the lock by pressing the pressed portion 355 which comes to the upper portion thereof. The lock portion 350 shown in the figure corresponds to the X-axis portion 320. Others, although not shown in the drawings, are also provided with lock portions having the same structure corresponding to the Y-axis portion 330 and the θ-axis portion 340.

[2-6. Adsorption section]

As shown in FIGS. 10 and 11 , the adsorption unit 500 includes an adsorption plate 510 , a three-way valve 520 , an adsorption pump 530 (see FIG. 26 ), and the like. The adsorption plate 510 is fixed to the X-Y-θ stage 311. A protective member 511 for attaching a sheet made of a porous polyurethane film to the surface of an elastic member such as rubber is attached to the adsorption flat plate 510. Adsorption holes (not shown) are formed on the adsorption plate 510 and the protective member 511. The adsorption hole is connected to one end of the pipe 512 via a vent path formed in the adsorption plate 510.

The three-way valve 520 is fixed to the rotary table 1. The three-way valve 520 has The inner tube portion 521, the upper side valve 522, the lower side valve 523, the link 524, the pressed portion 525, and the like. The inner tube portion 521 is a tube that is continuous in the vertical direction. The inner tube portion 521 protrudes through the turntable 1 toward the upper surface side and the lower surface side thereof.

The other end of the pipe 512 is connected to the inner pipe portion 521 that protrudes toward the upper surface side of the turntable 1. Thereby, the adsorption hole of the X-Y-θ stage 311 and the inner tube portion 521 are communicated via the ventilation path. One end of the pipe 526 is connected to the side surface of the inner pipe portion 521 that protrudes toward the lower surface side of the turntable 1. The other end of this pipe 526 is connected to the adsorption pump 530 of the vacuum source. The adsorption pump 530 and the pipe 526 are connected to each other via a swivel joint (not shown) so that the flow between the adsorption pump 530 and the pipe 526 can be ensured even if the rotary table 1 rotates.

The upper side valve 522 is a valve that opens and closes the upper end of the inner tube portion 521 by lifting. The lower valve 523 is a valve that is opened and closed by communicating with the adsorption pump 530 by moving up and down in the inner tube portion 521. The link 524 is provided to be movable up and down in the inner tube portion 521. This link 524 connects the upper side valve 522 and the lower side valve 523. The pressed portion 525 is provided at the lower end of the link 524. The pressed portion 525 is biased upward by a pressing portion 527 formed of a pressure cylinder or the like. The pressing portion 527 is fixed to the fixed platform 410.

The three-way valve 520 is connected to the line of the adsorption pump 530 (refer to the black arrow line) as shown in Fig. 12(A) when the workpiece S1 is adsorbed. Then, as shown in FIG. 12(B), when the pressed portion 525 of the lower end is lifted up by the pressing portion 527, the upper side valve 522 is opened and the lower side valve 523 is closed, so that the adsorption hole becomes the same air pressure as the surroundings, and The communication with the adsorption pump 530 is closed to form (refer to the black arrow line) ).

[3. Stripping device]

The peeling device 3 is a device in which the release paper F attached to the double-sided tape T1 of the workpiece S1 or the workpiece S2 is attached to the adhesive tape T2 and peeled off. As shown in FIGS. 13 to 15 , the peeling device 3 includes a supply unit 31 , a conversion unit 32 , a peeling unit 33 , a winding unit 34 , and the like.

The supply unit 31 has a delivery reel 31a and a reel rotation mechanism 31b (see Fig. 26). The delivery reel 31a is a reel that winds the supplied adhesive tape T2. The reel rotating mechanism 31b is a mechanism that controls the braking of the delivery reel 31a (not shown). As shown in Fig. 14, the converting portion 32 converts the traveling direction of the adhesive tape T2 from the supply portion 31 into a pin or roller having a right angle.

The peeling portion 33 has a peeling head 33a, a pressure cylinder 33b, guide rollers 33c to 33e, and the like. The peeling head 33a presses the adhesive tape T2 supplied from the supply unit 31 from the inner surface of the adhering surface, thereby pressing against the release paper F on the workpiece S1. The peeling head 33a is formed to have an inclination so as to press the adhesive tape T2 from one end of the workpiece S1. The pressure cylinder 33b is a mechanism that moves the peeling head 33a in the forward direction (the left direction in the drawing). During this operation, the brake of the delivery spool 31a can be released and the adhesive tape T2 can be pulled out. The guide rollers 33c to 33e are rollers (guide members) that guide the movement of the adhesive tape T2 from the conversion portion 32 to the peeling head 33a and from the peeling head 33a to the winding portion 34.

The winding unit 34 has a take-up reel 34a, a reel elevating mechanism 34b, a reel rotating mechanism 34c (see Fig. 26), and the like. The take-up reel 34a is The reel of the adhesive tape T2 is taken up from the peeling head 33a. The shaft of the take-up reel 34a is disposed in a direction orthogonal to the axis of the supply portion 31. The reel lifting mechanism 34b is a mechanism that elevates and lowers the take-up reel 34a by, for example, rotation of a conveying screw. The reel rotating mechanism 34c has a driving source or the like not shown, and is a mechanism for controlling the rotation and braking of the take-up reel 34a.

The peeling device 3 is provided with a first unit U1 for peeling the release paper F from the lower workpiece S1. In the peeling device 3, as shown in Fig. 16, the first unit U1 is provided so as to be replaceable with the second unit U2 for peeling off the release paper F from the upper workpiece S2.

As shown in FIGS. 13 and 17, the first unit U1 is such that the adhesive tape T2 from the conversion unit 32 is supplied from the lower side of the peeling head 33a and guided to the take-up reel 34a by the upper side. Guide rollers 33c to 33e are provided. The guide roller 33e of the first unit U1 converts the traveling direction of the adhesive tape T2 passing through the peeling head 33a downward.

On the other hand, as shown in FIGS. 16 and 18, the second unit U2 is such that the adhesive tape T2 from the conversion unit 32 is supplied from the upper side of the peeling head 33a, and is guided to the take-up reel by the lower side. Guide rollers 33f, 33g are provided in the manner of 34a. The guide roller 33g of the second unit U2 converts the traveling direction of the adhesive tape T2 passing through the peeling head 33a downward.

Further, the first unit U1 and the second unit U2 are provided to be vertically movable by the pressure cylinder 35. The first unit U1 can press the adhesive tape T2 of the peeling head 33a against the release paper F of the workpiece S1 when descending. The second unit U2 can press the adhesive tape T2 of the peeling head 33a against the release paper F of the workpiece S2 when rising.

The peeling according to the peeling device 3 was carried out in the following manner. That is, as shown in Figs. 17(A) and 18(A), the peeling head 33a is moved forward by the pressure cylinder 33b, and the adhesive tape T2 is pulled out from the delivery reel 31a by pressing The cylinder 35 lowers the first unit U1 or raises the second unit U2, thereby pressing the adhesive tape T2 against the release paper F, and applies a brake to the rotation of the delivery reel 31a and the take-up reel 34a by the reel rotating mechanisms 31b and 34c. In this state, the take-up reel 34a is lowered by the reel lifting mechanism 34b.

As described above, as shown in FIGS. 17(B) and 18(B), the adhesive tape T2 is pulled downward, and the peeling head 33a is retracted while pressing the adhesive tape T2 against the release paper F. Thereby, the release paper F is attached to the adhesive tape T2, and is peeled off from the workpiece S1 or the workpiece S2.

[4. Detection device]

As shown in Figs. 20 and 21, the detecting device 4 has two CCD cameras 41 and 42, arms 45 and 46 for supporting the cameras, a camera driving mechanism 49, and the like. The CCD camera 41 disposed above is a camera (first camera) in which the lens surface faces downward and the upper workpiece S2 is angled or marked with M2. The CCD camera 42 disposed below is a camera (second camera) in which the lens surface faces downward and the lower surface of the workpiece S1 or the mark M1 is imaged.

The camera drive mechanism 49 has a drive source or the like (not shown) and is a mechanism for driving the arms 45 and 46. (for example, X-Y axis drive mechanism). The arm 45 is arranged to be movable in the horizontal direction (front, rear, left and right directions) by the camera driving mechanism 49, and thereby the CCD camera 41 can enter and exit the workpiece S2. Above. Similarly, the arm 46 is also arranged to be movable in the horizontal direction (front, rear, left and right directions) by the camera drive mechanism 49, and thereby the CCD camera 42 can be moved in and out of the workpiece S1.

Each of the CCD cameras 41 and 42 is a camera that detects an object to be detected by detecting reflected light from a built-in light source (coaxial illumination). The imaging of each of the CCD cameras 41 and 42 is controlled by the imaging control unit 662 as will be described later. Further, on the lower CCD camera 42, a reflecting surface 42a for reflecting the light from the upper CCD camera 41 is provided. This reflecting surface 42a can be constituted by a simple member such as an aluminum tape.

[5. Pressing device]

As shown in FIG. 2 and FIG. 23 to FIG. 25, the pressing device 5 includes a vacuum processing chamber 51, a pressurizing head 52, a lifting mechanism 53, a pressure cylinder 54, and the like. The vacuum processing chamber 51 is a processing chamber that covers the holding device 2 on the turntable 1 and is sealed. The pressurizing head 52 is provided in the vacuum processing chamber 51 and is a means for pressurizing the workpiece S2 downward.

The elevating mechanism 53 is a mechanism that elevates and lowers the vacuum processing chamber 51 together with the pressurizing head 52 by a driving source or the like not shown. The pressure cylinder 54 is a mechanism for moving the pressure head 52 up and down by the drive link that advances and retracts. Further, a protective member 52a for attaching a sheet made of a porous polyurethane film to the surface of the rubber is attached to the pressurizing head 52.

Further, in the vacuum processing chamber 51, a vacuum pump 55 of a vacuum source is connected via a pipe, and a vacuum gauge 56 for detecting the internal pressure is provided (see Fig. 26).

[6. Control device]

The components of the turntable 1, the holding device 2, the peeling device 3, the detecting device 4, and the pressing device 5 are controlled by the control device 6 shown in Fig. 26 by operating the respective driving source, switch, power source, and the like. . The control device 6 can be realized by, for example, a computer operating in a dedicated electronic circuit or a specific program.

This control device 6 will be described below with reference to Fig. 26 of the virtual functional block diagram. The input device for operating the switch, the touch panel, the keyboard, the mouse, and the like of the control device 6, and the output device such as a display, a lamp, and a meter for confirming the state of the control device 6 are omitted.

That is, the control device 6 has functions of the platform control unit 610, the storage unit 620, the sequence control unit 630, the input/output interface 640, the peeling control unit 650, the position detecting unit 660, the positioning control unit 670, and the vacuum control unit 680.

[6-1. Platform Control Department]

The platform control unit 610 is a means for controlling the intermittent rotation operation of the indexing unit 11.

[6-2. Memory Department]

The memory unit 620 is a means for storing various settings, data, and the like of the operation timing, the calculation formula, and the calculation result.

[6-3. Timing Control Department]

The sequence control unit 630 is a means for controlling the operation timing of each unit at a predetermined timing.

[6-4. Input and output interface]

The input/output interface 640 is a means for controlling the conversion or output of signals between the units to be controlled.

[6-5. Stripping Control Department]

The peeling control unit 650 is a means for controlling the operation of the peeling device 3. The peeling control unit 650 includes a head control unit 651, a rotation control unit 652, a lift control unit 653, and the like.

The head control unit 651 is a means for controlling the pressure cylinder 33b for driving the peeling head 33a and the pressure cylinder 35 for driving the first unit U1 or the second unit U2. The rotation control unit 652 is a means for controlling the reel rotation mechanism 31b of the supply unit 31 and the reel rotation mechanism 34c of the winding unit 34. The elevation control unit 653 is a means for controlling the reel lifting mechanism 34b.

[6-6. Position Detection Department]

The position detecting unit 660 is a means for controlling the detecting device 4. The position detecting unit 660 includes a camera driving unit 661, an imaging control unit 662, a three-point extracting unit 663, a centroid calculating unit 664, a slope calculating unit 665, and the like. The camera drive unit 661 is a means for controlling the camera drive mechanism 49 that moves the arms 45 to 48. The imaging control unit 662 is a means for controlling imaging by the CCD cameras 41 to 44.

The three-point extracting unit 663 is a means for extracting the corners of the workpieces S1 and S2 or the three points of the marks M1 and M2 from the images captured by the CCD cameras 41 and 42. The center of gravity calculation unit 664 is a means for calculating the center of gravity from the point extracted by the three-point extraction unit 663. The slope calculating unit 665 is a means for calculating the slope from the point extracted by the three-point extracting unit 663.

[6-7. Positioning Control Department]

The positioning control unit 670 is a means for controlling the positioning unit 300. The positioning control unit 670 includes a clutch control unit 671, a positioning calculation unit 672, a motor control unit 673, and the like. The clutch control unit 671 performs attachment and detachment of the armatures 323, 333, and 346 and the clutches 420, 430, and 440 by controlling energization of the coils 421, 431, and 441. The clutch control unit 671 can also operate the cylinder 356 in synchronization with the energization of the coils 421, 431, and 441, and can be locked in accordance with the lock portion 350. The positioning calculation unit 672 is a means for calculating the amount of movement of the X-Y-θ stage 311 based on the center of gravity and the slope of the workpieces S1 and S2 calculated by the center of gravity calculation unit 664 and the slope calculation unit 665.

[6-8. Vacuum Control Department]

The vacuum control unit 680 is a means for controlling the adsorption unit 500 and the pressing unit 5. The vacuum control unit 680 includes a processing chamber control unit 681, a pressure reduction control unit 682, a vacuum calculation unit 683, a valve control unit 684, a pressing control unit 685, an adsorption control unit 686, and the like. The processing chamber control unit 681 is a means for controlling the elevating mechanism 53 that elevates and lowers the vacuum processing chamber 51.

The pressure reduction control unit 682 is a means for controlling the pressure reduction pump 55 for decompressing the inside of the vacuum processing chamber 51. The vacuum calculation unit 683 is a means for calculating the pressure in the vacuum processing chamber 51 based on the detected value of the vacuum gauge.

As shown in Fig. 27, the vacuum calculation unit 683 includes a voltage determination unit 683a, a formula selection unit 683b, a pressure calculation unit 683c, and the like. The voltage determination unit 683a is a means for determining whether or not the analog output (voltage value) from the vacuum gauge 56 is within the voltage range set in the memory unit 620. Selection department 683b is a means for selecting a plurality of approximate expressions of the voltage range determined by the voltage determining unit 683a based on the voltage range set in the memory unit 620 and a plurality of approximate expressions corresponding thereto. The pressure calculation unit 683c is a means for calculating the pressure value based on the determined voltage value and the selected multiple approximation formula.

The valve control unit 684 controls a pressing portion 527 for switching the opening and closing of the three-way valve 520 based on the calculation result of the vacuum calculation unit 683. The pressing control unit 685 is a means for controlling the pressure cylinder 54 for moving the pressing head 52 up and down. The adsorption control unit 686 is a means for controlling the adsorption pump 530 for adsorbing the workpiece S1 on the adsorption plate 510.

Here, an example of calculation of the vacuum calculation unit 683 will be described with reference to FIGS. 31 to 36. That is, the case where the analog output from the general vacuum gauge and the indicated pressure have the relationship shown in Fig. 31 are considered. In this case, the method of deriving the pressure from the analog value has a method in which the table (analog data table) as shown in Fig. 31 is stored in advance in the memory device, and the table and the current analog value are successively compared. However, in this method, the data must be searched sequentially, so the arithmetic processing program will increase and the processing time will increase.

Further, there is a method of performing arithmetic processing by considering the amount of change between each data in the table as linear. However, if the number of data stored in the table of the memory device is increased in order to increase the accuracy of the pressure derivation result, the processing in the arithmetic processing device becomes slow. Conversely, if the number of data is reduced, the accuracy of the pressure derivation result is deteriorated, but the calculation speed is faster.

Other methods have methods that use multiple approximations to perform operations. However, when the table is more complex, if you create a multiple approximation that satisfies the necessary accuracy Then, the order of the approximation function is also increased, which makes the calculation process take a lot of time. For example, when the above table is graphed, as shown in Fig. 32, the relationship between voltage and electric power is nonlinear, and it is difficult to establish a multi-approximation formula that can obtain high precision over the entire range. Fig. 32 also corresponds to Fig. 33 to Fig. 36, but in order to broadly show the pressure range, a uniaxial logarithmic graph is employed.

In the present embodiment, the table is divided into an arbitrary plurality of sections, and a plurality of approximate expressions corresponding to the respective sections are established. Then, according to the detected voltage value, one of the multiple approximations is selected to perform the pressure calculation operation.

For example, when the analog detection voltage value from the vacuum gauge 56 has the graph relationship of Fig. 33 with the pressure indicated thereto, the range of the voltage value is divided into the following three items.

(1) above 0V~ less than 3V

(2) 3V or more ~ less than 8V

(3) 8V or more and below 10V

The following three polynomial approximations are set corresponding to the ranges of (1) to (3).

(a)PL=-36.837V3+320.94V2-1104.9V+1724.7[Pa]

(b) Pm=-0.8021V3+23.787V2-240.08V+832.07[Pa]

(c) Ph=-0.6572V3+21.162V2-231.87V+859.72[Pa]

A multiple approximation of each range can satisfy sufficient accuracy with a cubic function. That is, as shown in Fig. 34, when the graph of the reference in the range of (1) and the graph of the calculation result are compared, they can be almost uniform lines. This result is also the same in the range of (2) (3) shown in Fig. 35 and Fig. 36.

As shown in Fig. 27, the memory unit 620 is provided with a valve pressure value for causing the valve control unit 684 to switch the threshold value of the three-way valve 520, and the pressing control unit 685 for lowering the pressure head 52. The pressure value for pressing the threshold value. Therefore, when the pressure value calculated by the pressure calculation unit 683c is the valve pressure value, the three-way valve 520 is switched, and when the pressure value for pressing is set, the pressure head 52 is lowered,

[B. Function]

The action of the present embodiment having the above configuration is as follows. The method of controlling the bonding apparatus and the computer program for operating the control apparatus by the steps described below are also one aspect of the present invention.

[1. Loading of the workpiece]

First, the attachment of the workpieces S1, S2 to the holding device 2 will be described. The adhesive surface is set to attach one of the double-sided tapes T1 to the workpiece S1. At this time, the other surface of the double-sided tape T1 is in a state in which the release paper F is attached.

That is, in the input/extraction work position 1A shown in Fig. 1, as shown in Figs. 2 to 4, the worker places the workpiece S1 so that the surface of the double-sided adhesive tape T1 faces upward. The protective member 511 of the flat plate 510 is adsorbed. At this time, the adsorption control unit 686 operates the adsorption pump 530 to adsorb the workpiece S1 by the adsorption holes of the adsorption plate 510 and the protective member 511. Further, the worker places the workpiece S2 on the holding portion 100. It is also possible to automatically put the processed workpiece into the workpiece by automatically loading the workpiece without the input of the workpiece.

[2. Stripping of release paper]

As described above, the holding device 2 for holding the workpieces S1 and S2 comes to the bonding material preparation working position 1B by the rotation of the rotary table 1. Here, the peeling device 3 peels off the release paper F of the workpiece S1. That is, as shown in Fig. 13 and Fig. 17(A), the head control unit 651 moves the peeling head 33a forward by the driving cylinder 33b, and raises the first unit U1 by driving the cylinder 35. And the adhesive tape T2 for peeling is abutted on the edge of the peeling paper F of the double-sided tape T1 of the workpiece S1.

When the rotation control unit 652 brakes the rotation of the delivery reel 31a and the take-up reel 34a by the control reel rotation mechanisms 31b and 34c, the elevation control unit 653 operates the reel elevating mechanism 34b to lower the take-up reel 34a. As described above, the adhesive tape T2 is pulled downward, and the peeling head 33a is retracted. At this time, as shown in Fig. 17 (B), the release paper F that the adhesive tape T2 contacts is attached to the double-sided tape T1 and peeled off.

Then, the rotation control unit 652 operates the reel rotation mechanism 34c to rotate the take-up reel 34a, and the elevating control unit 653 moves the reel elevating mechanism 34b to raise the take-up reel 34a, thereby returning to the next workpiece S1. The state in which the release paper F is peeled off.

In the above description, the peeling paper F is peeled off from the lower workpiece S1 by using the first unit U1. However, the basic operation steps are the same when the second paper U2 is used to peel the release paper F from the upper workpiece S2 (see Figure 18 (A) (B)).

[3. Positioning of workpiece]

Next, the holding device 2 for holding the workpieces S1, S2 is brought to the positioning work position 1C by the rotation of the rotary table 1. At this time, by the locking portion 350 The cylinder 356 presses the pressed portion 355 to release the lock of the positioning portion 300 (all X, Y, and θ axes). In this way, the position detection according to the detecting device 4 and the positioning according to the positioning unit 300 are performed. This step can be explained as follows in accordance with the flowchart of Fig. 28 and with reference to Figs. 20 to 22 and Fig. 29.

[3-1. Position Detection]

The camera drive unit 661 moves the arms 45 and 46 by operating the camera drive mechanism 49. Thereby, as shown in FIGS. 20 and 21, the CCD camera 41 moves above the workpiece S2, and the CCD camera 42 moves between the workpiece S1 and the workpiece S2 (step 101).

Then, the CCD cameras 41, 42 are sequentially stopped at positions corresponding to the corners or marks M1, M2 of the workpieces S1 and S2 (step 102). The imaging control unit 662 sequentially causes the CCD camera 41 to image the corners 工件 or the marks M1 and M2 of the workpieces S1 and S2 (step 103). The image after imaging is input to the control device 6 (step 104).

In the above imaging, when the workpiece S2 is normal, as shown in Fig. 22(A), the reflected light from the workpiece S2 formed by the coaxial illumination illumination is returned to the CCD camera 41, so that imaging can be performed without any problem. However, as shown in FIG. 3, the workpiece S2 is not adsorbed to the adsorption flat plate 510 as the workpiece S1, but is held in the air by the holding portion 100. Therefore, as shown in Fig. 22(B), the bending, twisting, and the like of the workpiece S2 are likely to occur, and at this time, the reflected light from the workpiece S2 may not be returned to the CCD camera 41.

In this embodiment, as shown in Fig. 22(C), The illumination from the CCD camera 41 is reflected to the reflection surface 42a attached to the CCD camera 42, and is surely returned to the CCD camera 41, so that imaging can be performed. When the marks M1 and M2 are to be detected, in order to illuminate the reflected light, it is preferable that the portion of the workpiece S2 corresponding to the marks M1 and M2 has a place where light can be transmitted.

As described above, after at least three points of imaging (step 105), the three-point extracting unit 663 extracts the corner 工件 of the workpiece S1 or the three points of the identification mark M1 from the image after imaging, and extracts the corner of the workpiece S2 corresponding thereto.隅 or identify 3 points of the marker M2 (step 106). The process of extracting a point from the image can be realized by a conventional image processing technique, and thus the description is omitted.

As shown in FIG. 29(A), the center-of-gravity calculation unit 664 calculates the center-of-gravity coordinates G1 and G2 of the workpieces S1 and S2 at three points of the diagonal points at three points of the workpieces S1 and S2 (steps). 107). Further, the slope calculating unit 665 calculates the slopes of the straight lines connecting the long sides or the short sides at three points of the respective workpieces S1 and S2 as the slopes of the workpieces S1 and S2 (step 108).

Then, the positioning calculation unit 672 of the positioning control unit 670 calculates the amount of movement of the workpiece S1 so that the centers of gravity and the inclinations of the two workpieces S1 and S2 match each other (step 109). That is, the amount of movement in the XY direction (the amount of rotation of the rotating shafts 321, 331) for aligning the center of gravity is calculated, and the amount of rotation in the θ direction for aligning the slope (the amount of rotation of the lower rotating shaft 345) is calculated. ).

The clutch control unit 671 is connected to the coils 421, 431, and 441 The rotors 422, 432, 442 and the armatures 323, 333, 346 are electrically connected (step 110). The motor control unit 673 operates the motors 450, 460, and 470 to rotate the rotary shafts 321, 331, and 345 (step 111). When the rotation axes 321, 331, 345 only rotate the calculated amount of rotation, the motors 450, 460, 470 stop operating (step 112).

Then, the clutch control unit 671 operates the cylinder 356 of the lock unit 350 to release the biasing force against the pressed portion 355, whereby the brake 352 is lowered by the elastic pressure of the spring 354, and the brake plate 351 is clamped and locked ( Step 113). This action is performed almost simultaneously on the X, Y, and θ axes. Then, the clutch control unit 671 stops energization of the coils 421, 431, and 441, and releases the connection between the X-axis unit 320, the Y-axis unit 330, and the θ-axis unit 340 and the drive unit 400 in accordance with the clutches 420 to 440.

Thereby, the position of the X-Y-θ stage 311 is adjusted in such a manner that the positions of the two workpieces S1, S2 are aligned. For example, when the workpieces S1, S2 are offset as shown in Fig. 29(A), as shown in Fig. 29(B), the centers of gravity G1, G2 can be made coincident by the movement in the XY direction, and As shown in Fig. 29(C), the slope is made uniform by rotation.

When the detection target of the corner or the mark or the like has less variation per workpiece, if two points of the diagonal are detected, the alignment can be performed by aligning the slopes of the center of gravity and the diagonal. Therefore, in the present embodiment, two points diagonal to the workpieces S1 and S2 can be detected, and the mutual centers of gravity G1 and G2 are aligned by the movement in the X-Y direction, and the slopes of the diagonal lines are made uniform by the rotation. Thereby, the burden of the arithmetic processing can be reduced.

[4. Vacuum fit]

Next, the holding device 2 for holding the workpieces S1, S2 is brought to the vacuum bonding cooperative position 1D by the rotation of the rotary table 1. In this manner, the vacuum bonding is performed by the pressing device 5. This step can be explained as follows in accordance with the flowchart of FIG. 30 with reference to FIGS. 2, 10 to 12, and 23 to 25.

That is, as shown in Figs. 23 and 24, the processing chamber control unit 681 lowers the vacuum processing chamber 51 by operating the elevating mechanism 53, and seals the periphery of the holding device 2 (step 201). Then, the pressure reduction control unit 682 operates the pressure reduction pump 55 to decompress the inside of the vacuum processing chamber 51 (step 202).

The vacuum gauge 56 outputs the detected voltage value to the control device (step 203). In the vacuum calculation unit 683, the voltage determination unit 683a determines which of the above (1) to (3) the voltage value detected by the vacuum gauge 56 is located (step 204). In response to this determination result, the formula selection unit 683b selects a plurality of approximate expressions (steps 205-1 to 3). The pressure calculation unit 683c calculates the pressure based on the detected voltage value and the selected multiple approximation formula (step 206).

When the valve control unit 684 determines that the calculated pressure value is equal to or lower than the specific valve pressure (step 207), the pressing portion 527 is raised to push the pressed portion 525 of the three-way valve 520. As described above, as shown in FIG. 11 and FIG. 12(B), the link 524 of the three-way valve 520 is raised, and the upper valve 522 opens the upper end of the inner tube portion 521, and the lower valve 523 is closed (step 208). ). Thereby, the inside of the adsorption flat plate 510 is brought to the same pressure as the inside of the vacuum processing chamber 51 to prevent blowing out from the adsorption holes.

When the pressure control unit 685 determines that the calculated pressure value is equal to or lower than the specific pressing pressure (step 209), as shown in Fig. 25, the pressure cylinder 54 is operated to lower the pressing head 52. The workpiece S2 is pressed against the workpiece S1 (step 210). Then, the pressure reduction control unit 682 stops the pressure reduction pump 55 (step 211), and the processing chamber control unit 681 raises the pressure head 52 and the vacuum processing chamber 51 to open to atmospheric pressure (steps 212 and 213).

[5. Removal of workpiece]

As described above, when the holding device 2 for holding the workpieces S1 and S2 after bonding is brought to the take-out operation position 1A by the rotation of the turntable 1, the worker takes out the workpieces S1 and S2 from the holding unit 100. This work can also be performed by automation by a transport mechanism or the like.

[C. Effect]

According to the above embodiment, the following effects can be obtained. In other words, the supply of the pair of workpieces S1 and S2 can be performed at the work position of one place, and the workpieces S1 and S2 after the bonding can be taken out at the same work position, so that the work space can be reduced and completed.

Since the peeling head 33a of the peeling apparatus 3 is inclined, the pressure-adhesive tape T2 can be pressed from the edge of the workpieces S1 and S2, and the peeling paper F can be peeled off reliably. Further, since the peeling head 33a is inclined, and the feeding portion 31 is displaced from the longitudinal direction of the adhesive tape T2 of the peeling portion 33 by the converting portion 32, and the moving direction of the take-up reel 34a is the up and down direction, the depth direction can be reduced. The space required. The advantages of the peeling device 3 are, for example, shown in Figs. 19(A) to (D), compared to the configuration of the take-up reel It is more clear that the L1, the take-up reel L2, the peeling head L3, and the winding reel L1 are moved in the longitudinal direction of the adhesive tape T2.

Further, the peeling device 3 can easily correspond to the peeling of the release paper F from the lower workpiece S1 and the peeling of the release paper F from the upper workpiece S2 by the replacement units U1 and U2. The advantages of the peeling device 3 are, for example, the conventional example of the workpiece S1 on the lower side shown in Fig. 19 (A) and (B), and the workpiece S2 on the upper side shown in Fig. 19 (C) and (D). In the conventional example, since it is necessary to change the arrangement of the take-up reel L1 and the take-up reel L2, it is also apparent that it is difficult to perform unitization. For example, by means of the device having the rollers 33c to 33g shown in Figs. 17 and 18, even if the unit replacement type is not used, it is only necessary to replace the adhesive tape T2 as shown in Fig. 17 or Fig. 18. The present invention can be used for the upper side peeling and the lower side peeling.

Further, the peeling device 3 does not need to be provided with a transfer device even if it is configured to be detachable from the bonding device, so that adhesion of impurities or the like can be prevented. Further, since the peeling device 3 and the coating device are replaceable, they can correspond to various products.

The X-Y-θ stage 311 on the rotary table 1 can be moved in a state of being separated from the motors 450, 460, 470 by the clutches 420, 430, 440. Therefore, since the rotary table 1 does not need to be loaded with a drive source and does not need to have a power supply line and a control line, the stable operation can be realized by a simple configuration. Further, since the plurality of holding devices 2 can be mounted on the turntable 1, it is possible to achieve high speed and efficient bonding.

Further, since the drive source or the like can be provided in only one place, it can be configured inexpensively. Further, since the X-Y-θ stage 311 is sufficient for a small size, it is easy to store in a vacuum, and it is easy to prevent mixing of bubbles or the like. Further, since the workpieces S1 and S2 can be bonded to the positioned X-Y-θ stage 311, high-precision bonding can be performed.

In particular, since the detection device 4 detects the center of gravity and the slope of the workpieces S1 and S2 at three points, the processing load can be accurately detected by suppressing the processing load to a minimum. Further, even if the workpieces S1 and S2 have curvature or the like, the illumination light from the CCD camera 41 side can be reflected by the reflection surface 42a of the CCD camera 42, so that it can be accurately detected. Therefore, high-precision bonding can be performed based on correct detection.

Since the vacuum bonding can be performed at one working position on the rotary table 1, space saving can be achieved. Further, since positioning is not required in the vacuum processing chamber 51, the apparatus can be reduced and simplified. Further, when the pressure in the vacuum processing chamber 51 is reduced, the adsorption line of the adsorption unit 500 is blocked by the three-way valve 520, and the same pressure can be maintained in the vacuum processing chamber 51, so that the discharge from the adsorption hole can be prevented. This results in a shift in the workpiece S1 and a stable operation. Further, since the switching can be performed by the single three-way valve 520, it can be manufactured in a small size and inexpensively.

At the time of detecting the pressure in the vacuum processing chamber 51, the pressure can be calculated by appropriately approximating the appropriate value of the voltage value, so that the high-precision pressure can be calculated by the low-order approximation function. In addition, the arithmetic processing can often be performed by a simple one-item function, so that the burden can be reduced.

Protection by the protective member 511 and the pressing device 5 of the adsorption portion 500 Since the member 52a can be attached to the elastic member by the porous sheet, it is possible to prevent the impact of the workpieces S1 and S2 on the protective members 511 and 52a while absorbing the impact on the workpieces S1 and S2, thereby achieving stable bonding. Further, the slidability is better and the abrasion is less than that of the surface of the rubber which is roughened by mechanical processing. In addition, it is relatively inexpensive compared to the low energy irradiation treatment of rubber. Further, when it is deteriorated, it is easier to replace the sheet than the entire rubber replacement.

[D. Other embodiments]

The present invention is not limited to the above embodiment. For example, as described above, when a coating device using an adhesive is used instead of the peeling device, the adhesive can be applied to all materials that can be utilized currently or in the future. It can be applied to a resin such as an ultraviolet curing type or a radiation curing type by irradiating a generalized electromagnetic wave from the outside or a hardening type resin to cure it by applying a temperature change. As the coating apparatus, as described above, a generally known apparatus can be used. For example, an inkjet coating device, a screen printing device, an extrusion coating device, and a dispensing nozzle coating device are not limited thereto.

When the application of the adhesive is performed by the coating device, as shown in Fig. 37, the curing work position 1E of the adhesive can be measured as the stop working position of the turntable 1. At this time, a device for irradiating electromagnetic waves or a heating device or the like is provided at the hardening work position 1E, and when the bonded workpiece comes to the hardening work position 1E, the adhesive is cured by irradiation of electromagnetic waves or heating.

Further, the detailed configuration of the peeling device is not limited to the above embodiment. For example, the peeling head can be pressed against the peeling while moving the adhesive tape on one side. The paper is constructed by paper, and the driving mechanism may be configured to be separated from the release paper. In addition, the position or number of the guide rollers can be freely selected. Further, the conversion angle of the conversion portion is not limited to a right angle as long as the delivery portion is offset from the longitudinal direction of the adhesive tape of the peeling head. In addition, other generally known devices can be used for the stripping device.

The detachable member that attaches and detaches the positioning portion and the driving portion can be applied to all members generally known. For example, it may be a mechanical clutch that does not rely on the excitation of the coil. The coupling member and the bellows can be applied to other generally known ones as long as they are connecting members that can accommodate the displacement of the shaft.

The material, thickness, hardness, etc. of the protective member can also be freely selected. For example, a sheet made of a porous polyurethane film with a double-sided tape may be attached to a urethane rubber having a hardness of 40, and a polyurethane may be used for the side of the adsorption plate. The sheet made of a porous film is attached to a urethane rubber having a hardness of 80, but is not limited thereto.

The number of cameras of the detecting device is not limited to the above number. It is possible to set only one unit, or set only two units in the horizontal direction or only three to four units in the horizontal direction, and move this from the upper side to the lower side in order. In addition, two sets can be set up and down, respectively, and moved back and forth. Furthermore, it is possible to set 3 to 4 sets in the upper and lower sides and simultaneously capture the upper and lower 3 points. First, the two points of the diagonal are imaged, and when there is a point that cannot be extracted therefrom, the other points are imaged. Or, after shooting four places, extract 3 points from the three places that can be taken out or the three places where the portrait is good. The greater the number of cameras, the simpler the mechanism for driving these cameras and the high speed camera.

In addition, as shown in Fig. 38, the lower side CCD camera 42 can be taken The light from the light source is irradiated upward and downward by 稜鏡, and the upper CCD camera 41 is configured to sensitize the light irradiated to the upper side. Alternatively, as shown in Fig. 39, the lower CCD camera 42 can image the upper and lower sides, and can illuminate the light from the light source upward and downward, and reflect the upper light by the reflecting surface 42a. Further, the material of the reflecting surface may be metal, glass, resin, or the like, and any material may be used as long as it can reflect the irradiation light. Furthermore, the reflecting surface and the frame of the camera may be integrally formed.

As a workpiece to be bonded, a cover panel and a liquid crystal module (a display panel and a backlight are laminated) are typical examples, but an apparatus that bonds the elements constituting the display device can be widely used. Therefore, it can also be applied to the case where the touch panel and the liquid crystal module are attached.

The object to be used for positioning can be appropriately changed depending on the type of the workpiece. For example, as shown in FIG. 40, when the workpiece S2 covering the panel is attached to the workpiece S1 of the liquid crystal module, the corner 印刷 of the frame H printed on the workpiece S2 can also be detected. At this time, as shown in Fig. 41, it is preferable to position the side of the workpiece S1 (or the displayable area, the same below) so as to coincide with the side of the frame H. In particular, since the side of the frame H is a portion viewed by the user who purchased the product, when the frame H is inclined with respect to the workpiece S1, there is a high possibility that it becomes a defective product.

In order to prevent this, for the following reasons, the positioning based on the 3-point detection is more effective than the positioning based on the 2-point detection. That is, the size or shape of the frame H is formed by printing or the like, so that each of the workpieces S2 may have a change. For example, as shown in Figure 42 (A), when When the shapes of the workpiece S1 and the frame H do not match, even if two diagonal points are detected and the slopes of the center of gravity and the diagonal are matched, as shown in Fig. 42(B), the frame H is inclined with respect to the workpiece S1. The status is located.

On the other hand, in the same manner as in the above-described embodiment, when three points are detected and the slopes of the center of gravity and the long side are matched, as shown in FIG. 42(C), the sides of the workpiece S1 and the frame H are parallel. Thereby, the state in which the frame H viewed by the user who purchased the product is inclined with respect to the displayable area is not generated, and the occurrence of defective products can be prevented.

1‧‧‧Rotary table

1a‧‧‧Rack

2‧‧‧ Keeping device

3‧‧‧ peeling device

4‧‧‧Detection device

5‧‧‧ Pressing device

6‧‧‧Control device

11‧‧‧ Indexing agency

31‧‧‧Supply Department

31a‧‧‧Send the reel

31b, 34c‧‧‧ reel rotating mechanism

32‧‧‧Transition Department

33‧‧‧ peeling department

33a‧‧‧ peeling head

33b, 35, 54, 356‧ ‧ pressure cylinder

33c~33g‧‧‧guide roller

34‧‧‧Winding Department

34a‧‧‧Reel

34b‧‧‧Reel lifting mechanism

41~44‧‧‧CCD camera

43a, 44a‧‧‧reflecting surface

45~48‧‧‧ Arm

49‧‧‧Camera drive mechanism

51‧‧‧vacuum processing room

52‧‧‧ Pressing head

52a, 511‧‧‧ protective components

53‧‧‧ Lifting mechanism

55‧‧‧Relief pump

56‧‧‧ Vacuum gauge

100‧‧‧ Keeping Department

200‧‧‧ Pillars

300‧‧‧ Positioning Department

310‧‧‧Loading Department

311‧‧‧X-Y-θ platform

312, 320, 330, 340‧‧‧ shaft

313‧‧‧ movable table

313a, 313b‧‧‧ slots

314‧‧‧ telescopic bladder

315‧‧‧ pulley

321,331,345‧‧‧Rotary axis

322, 332‧ ‧ eccentric roller

323, 333, 346‧‧‧ armature

341‧‧‧Upper axis

342‧‧‧ pulley

343‧‧‧ Timing belt

344‧‧‧ Telescopic bladder coupling

345‧‧‧lower axis of rotation

350‧‧‧Locking Department

351‧‧‧ brake plate

352‧‧‧ brake

353‧‧‧ lifting shaft

354‧‧ ‧ spring

355, 525‧‧‧ pressed parts

400‧‧‧ Drive Department

410‧‧‧Fixed platform

420, 430, 440 ‧ ‧ clutch

421, 431, 441‧‧ ‧ coil

422, 432, 442‧‧ ‧ rotor

450, 460, 470‧‧ motor

500‧‧‧Adsorption Department

510‧‧‧Adsorption plate

512, 526‧‧‧ piping

520‧‧‧Three-way valve

521‧‧‧Inside Department

522‧‧‧Upper valve

523‧‧‧Bottom valve

524‧‧‧ Connecting rod

527‧‧‧ Pressing Department

530‧‧‧Adsorption pump

610‧‧‧ Platform Control Department

620‧‧‧Memory Department

624‧‧‧ Calculation Department

630‧‧‧Sequence Control Department

640‧‧‧output interface

650‧‧‧Dismanence Control Department

651‧‧‧ head control department

652‧‧‧Rotation Control Department

653‧‧‧ Lift Control Department

660‧‧‧Location Detection Department

661‧‧‧Camera Drive Department

662‧‧‧Video Control Department

663‧‧‧Three points of withdrawal

664‧‧‧ Center of Gravity Calculation

665‧‧‧Slope calculation department

670‧‧‧ Positioning Control Department

671‧‧‧Clutch Control Department

672‧‧‧Location Computing Department

673‧‧ ‧Motor Control Department

680‧‧‧ Vacuum Control Department

681‧‧‧Process Room Control Department

682‧‧‧Decompression Control Department

683‧‧‧ Vacuum Computing Department

683a‧‧‧Voltage Judgment Department

683b‧‧‧Selection Department

683c‧‧‧Pressure Computing Department

684‧‧‧Valve Control Department

685‧‧‧Press Control Department

Fig. 1 is a schematic plan view showing the overall configuration of an embodiment of the present invention.

Fig. 2 is a longitudinal sectional view showing a holding device of the embodiment of Fig. 1.

Fig. 3 is a perspective view showing a holding portion and an adsorption portion of the holding device of Fig. 2;

Fig. 4 is a longitudinal sectional view showing a positioning portion of the embodiment of Fig. 1.

Fig. 5 is a plan view showing the positioning of the positioning portion of Fig. 4 in the X direction and the Y direction.

Fig. 6 is a plan view showing the positioning of the positioning portion in the θ direction of Fig. 4;

Fig. 7 is a longitudinal cross-sectional view showing the unlocking of the lock portion of the positioning portion in Fig. 4;

Fig. 8 is a longitudinal sectional view showing the locking of Fig. 7.

Figure 9 is a plan view of Figure 7.

Fig. 10 is a longitudinal cross-sectional view showing the nip of the embodiment of Fig. 1 when it is adsorbed.

Fig. 11 is a longitudinal sectional view showing the adsorption opening of the nip portion of Fig. 10;

Fig. 12 is a longitudinal sectional view showing the three-way valve (A) of Fig. 10 and the three-way valve (B) of Fig. 11.

Fig. 13 is a side view showing the peeling device (first unit) of the embodiment of Fig. 1.

Fig. 14 is a plan view of Fig. 13.

Figure 15 is a rear view of Figure 13.

Fig. 16 is a side view showing the peeling device (second unit) of the embodiment of Fig. 1.

Fig. 17 is an explanatory view showing peeling by the peeling device according to Fig. 13.

Fig. 18 is an explanatory view showing peeling by the peeling device according to Fig. 16.

Fig. 19 is an explanatory view showing peeling (A) (B) and peeling (C) (D) on the lower side by the conventional peeling apparatus.

Fig. 20 is a perspective view showing the detecting device of the embodiment of Fig. 1.

Figure 21 is a side view showing the detecting device of Figure 20.

Figure 22 is a view showing the coaxial illumination illumination of the detecting device of Figure 20 Photographic illustration.

Fig. 23 is a longitudinal sectional view showing a state in which the vacuum processing chamber of the pressing device of the embodiment of Fig. 1 is raised.

Fig. 24 is a longitudinal sectional view showing the vacuum processing chamber of the pressing device of Fig. 23 as it descends.

Fig. 25 is a longitudinal sectional view showing the pressing head of the pressing device of Fig. 23 as it descends.

Fig. 26 is a functional block diagram showing a control device of the embodiment of Fig. 1.

Fig. 27 is a functional block diagram showing the vacuum calculation unit of Fig. 26.

Fig. 28 is a flow chart showing the positioning procedure of the embodiment of Fig. 1.

Fig. 29 is an explanatory view showing a positioning step of the embodiment of Fig. 1.

Fig. 30 is a flow chart showing the bonding step of the embodiment of Fig. 1.

Fig. 31 is an explanatory view showing a table showing the relationship between the detected voltage and the pressure measured by a vacuum gauge.

Fig. 32 is an explanatory view showing a table of Fig. 31.

Fig. 33 is an explanatory view showing a graph showing the relationship between the detected voltage and the pressure measured by the vacuum gauge according to the embodiment.

Fig. 34 is an explanatory diagram showing a section (1) of the graph of Fig. 33.

Figure 35 is an explanatory diagram showing the interval of (2) of the graph of Fig. 33 .

Fig. 36 is an explanatory view showing a section (3) of the graph of Fig. 33.

Fig. 37 is a schematic plan view showing an embodiment of a coating apparatus using the adhesive of the present invention.

Figure 38 is a longitudinal sectional view showing an example of another detecting device.

Fig. 39 is a longitudinal sectional view showing an example of another detecting device.

Fig. 40 is an explanatory view showing an example of a workpiece to be bonded.

Fig. 41 is an explanatory view showing a registration example of Fig. 40;

Fig. 42 is an explanatory view showing a positioning step of the embodiment of Fig. 40;

1‧‧‧Rotary table

1a‧‧‧Rack

300‧‧‧ Positioning Department

310‧‧‧Loading Department

311‧‧‧X-Y-θ platform

312, 320, 330, 340‧‧‧ shaft

313‧‧‧ movable table

313a, 313b‧‧‧ slots

314‧‧‧ telescopic bladder

315‧‧‧ pulley

321,331,345‧‧‧Rotary axis

322, 332‧ ‧ eccentric roller

323, 333, 346‧‧‧ armature

341‧‧‧Upper axis

342‧‧‧ pulley

343‧‧‧ Timing belt

344‧‧‧ Telescopic bladder coupling

345‧‧‧lower axis of rotation

350‧‧‧Locking Department

351‧‧‧ brake plate

352‧‧‧ brake

353‧‧‧ lifting shaft

354‧‧ ‧ spring

355, 525‧‧‧ pressed parts

356‧‧‧pressure cylinder

400‧‧‧ Drive Department

410‧‧‧Fixed platform

420, 430, 440 ‧ ‧ clutch

421, 431, 441‧‧ ‧ coil

422, 432, 442‧‧ ‧ rotor

450, 460, 470‧‧ motor

500‧‧‧Adsorption Department

510‧‧‧Adsorption plate

511‧‧‧protective components

S1‧‧‧ workpiece

Claims (12)

A laminating device is a laminating device for laminating one of a display device and a workpiece, and is characterized in that: a rotating table that intermittently rotates according to a plurality of working positions; and a plurality of rotating tables are provided And holding a pair of workpiece holding devices; and positioning portions provided on the holding device to position at least one of the pair of workpieces; and attaching a pair of at least one of the workpieces by one of the holding devices a pressing device for a workpiece; the pressing device having: a vacuum processing chamber capable of accommodating a portion of the positioning portion that holds a workpiece; the bonding device having a vacuum that outputs a voltage value corresponding to a pressure in the vacuum processing chamber a memory voltage value and a memory portion for calculating a plurality of multiple approximations corresponding to the pressure value; selecting a voltage value corresponding to the vacuum gauge from the voltage value and the plurality of approximations stored in the memory portion a formula selection unit of a plurality of approximate expressions; and a pressure calculation unit that calculates a pressure value based on the selected plurality of approximate expressions. A laminating device as recited in claim 1, wherein the front The memory unit stores a multiple approximation equation for each of the voltage values divided into complex sections. The bonding apparatus according to claim 1, wherein the positioning unit includes an adsorption flat plate having a ventilation path connected to a vacuum source, and is disposed on the adsorption flat plate so as to communicate with the ventilation path. a vacuum source that vacuum-adsorbs one workpiece to an adsorption hole of the adsorption plate and a valve for switching between a state in which the ventilation path communicates with a vacuum source and a state in which the ventilation path communicates with the vacuum processing chamber; and the holding device At a position facing the workpiece of the suction flat plate, there is a holding portion for holding the other workpiece. The bonding apparatus according to claim 3, further comprising: a valve control unit that controls opening and closing of the valve based on a pressure value calculated by the pressure calculating unit. The bonding apparatus according to claim 4, further comprising: a valve pressure value storage unit that stores a valve pressure value for causing the valve control unit to switch the threshold value of the valve. The bonding apparatus according to claim 3, wherein the valve has an inner tube portion in a vertical direction, a connecting rod that is provided to be movable up and down in the inner tube portion, and a connecting rod provided on the connecting rod. a lifting and lowering of the rod, a valve for opening and closing the communication between the vacuum source and the ventilation path, And a valve provided on the link to open and close the communication between the vacuum processing chamber and the air passage by the raising and lowering of the link. The bonding apparatus according to claim 6, comprising: a fixing platform provided separately from the rotating table; and a pressing portion provided on the fixed platform and switching the valve by pressing. The bonding apparatus according to claim 3, wherein a protective member that adheres a porous sheet to the elastic member is provided on a surface of the adsorption flat plate that is in contact with the workpiece. A control method of a bonding apparatus is a control method of a bonding apparatus for bonding a pair of workpieces by controlling a bonding apparatus, wherein the bonding apparatus has a rotation that intermittently rotates in response to a plurality of working positions And a plurality of holding means for holding the workpiece on the rotating table; and a positioning means for arranging the holding means and positioning at least one of the pair of workpieces; and a pressing device that presses one of the holding devices to at least one of the workpieces to bond the pair of workpieces; and a vacuum processing chamber that is provided in the pressing device to accommodate a portion of the positioning portion that holds the workpiece; and a vacuum gauge in a vacuum processing chamber; the control device includes: a memory unit, a formula selection unit, and a pressure calculation unit; the memory unit, a memory voltage value, and a plurality of values for calculating a pressure value corresponding thereto a plurality of approximation formulas; the above-mentioned formula selection unit is based on the voltage value stored in the memory portion and The term approximation formula selects a plurality of approximation formulas corresponding to voltage values from the vacuum gauge; the pressure calculation unit calculates a pressure value based on the selected plurality of approximation formulas. The control method of the bonding apparatus according to claim 9, wherein the memory unit stores a multiple approximation formula in each of the sections divided into voltage values of the complex section. The method of controlling a bonding apparatus according to claim 9, wherein the bonding apparatus includes: an adsorption unit, a valve, and a valve control unit that controls the valve; and the adsorption unit has a vacuum source and a vacuum processing chamber. a communication path that is vacuum-absorbed to the workpiece facing the workpiece of the positioning portion; the valve is configured to switch between a state in which the ventilation path communicates with the vacuum source and a state in which the ventilation path communicates with the vacuum processing chamber; The control unit controls opening and closing of the valve based on a pressure value calculated by the pressure calculation unit. The control method of the bonding apparatus according to claim 11, wherein the valve control unit is a valve pressure value that is stored in advance as a threshold value by a pressure value calculated by the pressure calculation unit. Then, the valve is controlled such that the aforementioned ventilation path communicates with the vacuum processing chamber.