JP2016141530A - Inspection device and inspection method and sheet application device and sheet application method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device which unfailingly detects the existence of air bubbles.SOLUTION: An inspection device 10 applies an adhesive sheet AS to an adherend WK and includes: supply means 20 capable of supplying the adhesive sheet; and pressing means 30 which presses the adhesive sheet supplied by the supply means to the adherend and applies the adhesive sheet thereto. The inspection device 10 has air pressure adjustment means 40 which brings an atmosphere, in which the adhesive sheet is pressed by the pressing means, into a pressurized state.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an inspection apparatus and an inspection method, and a sheet sticking apparatus and a sheet sticking method.

  Conventionally, if air bubbles enter between the adhesive sheet and the adherend surface of the adherend, there is a risk of causing a sticking failure due to a decrease in the adhesive area due to the air bubbles, so after attaching the adhesive sheet to the adherend, There has been proposed a sheet sticking device in which bubbles are diffused and absorbed in the pressure-sensitive adhesive layer of an adhesive sheet by placing the adherend in a pressurized state (pressurized atmosphere) (for example, Patent Document 1 below). ).

JP 2001-08312 A

  However, in the sheet sticking device described in Patent Document 1, bubbles are diffused and absorbed in the adhesive layer of the adhesive sheet, but not all bubbles are diffused and absorbed in the adhesive layer. Small bubbles that cannot be confirmed may remain. If air bubbles remain between the adherend and the adhesive sheet and are transported to the next process in which a predetermined treatment is performed on the adherend, the air bubbles may become an obstacle and cause various inconveniences. . In particular, when the adhesive sheet is opaque, the case where bubbles are left and conveyed to the next process becomes conspicuous.

  An object of the present invention is to provide an inspection apparatus capable of preventing an integrated object in which air bubbles have entered between an adherend and an adhesive sheet from being conveyed to a next process for performing a predetermined process on the adherend. It is in providing an inspection method, a sheet sticking apparatus, and a sheet sticking method.

  In order to solve the above-described problem, the present invention is an inspection apparatus for attaching an adhesive sheet to an adherend, and includes a supply unit capable of supplying the adhesive sheet, and the adhesive sheet supplied by the supply unit. And an air pressure adjusting means for bringing the atmosphere in which the adhesive sheet is pressed by the pressing means into a pressurized state.

  The inspection apparatus may include a detecting unit that detects the presence or absence of air bubbles that have entered between the adhesive sheet attached to the adherend and the adherend.

  The inspection apparatus may include a cooling unit that cools an atmosphere pressed by the pressing unit.

  The inspection apparatus may include a heating unit that heats an atmosphere pressed by the pressing unit.

  Another aspect of the present invention is an inspection apparatus for applying an adhesive sheet to an adherend, a supply unit capable of supplying the adhesive sheet, and pressing the adhesive sheet supplied by the supply unit against the adherend Air pressure adjusting means for lowering the pressure of the adhesive sheet from the atmosphere pressed by the pressing means, and bubbles that have entered between the adhesive sheet affixed to the adherend and the adherend It is an inspection apparatus characterized by having a detection means for detecting the presence or absence of the liquid in the atmosphere in the low pressure state.

  Another aspect of the present invention is an inspection method for applying an adhesive sheet to an adherend, and includes a step of supplying the adhesive sheet and a step of pressing the supplied adhesive sheet onto the adherend to apply the adhesive sheet. And an inspection method comprising a step of bringing the atmosphere in which the adhesive sheet is pressed into a pressurized state.

  Another aspect of the present invention is a sheet affixing device for affixing an adhesive sheet to an adherend, a supply unit capable of supplying the adhesive sheet, and pressing the adhesive sheet supplied by the supply unit against the adherend The sheet sticking apparatus includes pressure means for sticking, and has an air pressure adjusting means for bringing an atmosphere in which the adhesive sheet is pressed by the press means into a pressurized state.

  Another aspect of the present invention is a sheet affixing method for affixing an adhesive sheet to an adherend, the step of supplying the adhesive sheet, and the step of affixing the supplied adhesive sheet by pressing it against the adherend. The sheet sticking method includes a step of bringing an atmosphere in which the adhesive sheet is pressed into a pressurized state.

  According to the present invention, even a small bubble can be inflated to a large extent, and the integrated object in which the bubble has entered between the adherend and the adhesive sheet is conveyed to the next step for performing a predetermined process on the adherend. This can be prevented.

The side view which shows the sheet sticking apparatus which concerns on one Embodiment of this invention. Explanatory drawing which shows the change of the magnitude | size of a bubble.

Hereinafter, an inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes within a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the X-axis arrow direction, “Right” is the opposite direction, “Front” is the front direction orthogonal to the plane of the page, Y-axis arrow direction is “Rear” and the opposite direction.

  In FIG. 1, an inspection apparatus 10 is an apparatus for affixing an adhesive sheet AS to an adherend WK, and a supply means 20 capable of supplying the adhesive sheet AS and an adhesive sheet AS supplied by the supply means 20 are attached. A pressing roller 30 as pressing means for pressing and sticking to the body WK, an atmospheric pressure adjusting means 40 for pressurizing an atmosphere in which the adhesive sheet AS is pressed by the pressing roller 30, and a conveying means for supporting and conveying the adherend WK. 50, detection means 60 for detecting the presence or absence of air bubbles AB (see FIG. 2) that have entered between the adherend WK adhered to the adherend WK and the adherend WK, and the adherend WK etc. The transfer means 70 is configured to be provided.

  The supply unit 20 folds back the release sheet RL, a support roller 21 that supports the original fabric RS on which the adhesive sheet AS is temporarily attached onto the strip-shaped release sheet RL, a plurality of guide rollers 22 that guide the original fabric RS, A peeling plate 23 as a peeling means for peeling the adhesive sheet AS from the peeling sheet RL, a driving roller 25 rotated by a rotation motor 24 as a driving device, and the peeling sheet RL are sandwiched between the driving roller 25. A pinch roller 26 and a collection roller 27 that is driven by a driving device (not shown) and collects the release sheet RL are provided.

  The atmospheric pressure adjusting means 40 includes a box-shaped storage means 41 for storing the supply means 20, the pressure roller 30, and the like, and an opening / closing member 42 that can open and close the first opening 41A formed in the storage means 41 by a driving device (not shown). The pressurizing means such as a pressurizing pump and a turbine that can make the inside of the storage means 41 higher than the atmospheric pressure or the like through the second opening 41B formed in the storage means 41, and the inside of the storage means 41 are large. And a pressurizing / depressurizing unit 43 having a depressurizing unit such as a decompression pump and a vacuum ejector that can be made lower than the atmospheric pressure.

  The conveying means 50 is supported by a linear motor 51 as a driving device and a slider 51A of the linear motor 51, and a support table 52 having a support surface 52A that can be adsorbed and held by an adsorbing means (not shown) such as a decompression pump or a vacuum ejector. And.

  The detection unit 60 includes an imaging unit such as an optical sensor or a camera, and can detect the presence or absence of the bubble AB or measure the size of the bubble AB.

  The transfer means 70 includes an articulated robot 71 as a driving device and a holding member 72 supported by a distal arm (working arm) 71A of the articulated robot 71. The articulated robot 71 is a so-called six-axis robot that can displace the object held by the tip arm 71A within any working range at any position and any angle.

  Next, operation | movement of the test | inspection apparatus 10 in this embodiment is demonstrated. First, with respect to the inspection apparatus 10 indicated by the solid line in FIG. 1 in which each member stands by at the initial position, after the operator sets the original fabric RS as shown in FIG. 1, input means such as an operation panel or personal computer (not shown) are provided. When the automatic operation start signal is input via the supply means 20, the supply means 20 drives the rotation motor 24 to feed out the original fabric RS. Then, as shown in FIG. 1, when the detection means (not shown) such as an optical sensor or an imaging means detects that the leading edge of the leading adhesive sheet AS is peeled from the leading edge of the peeling plate 23 by a predetermined length, The means 20 stops driving the rotation motor 24 and enters a standby state.

  Next, when the transfer means 70 drives the articulated robot 71 and conveys the adherend WK held by the holding member 72 to the vicinity of the first opening 41A, the atmospheric pressure adjustment means 40 drives a driving device (not shown), The opening / closing member 42 is moved to open the first opening 41A. Next, after the transfer means 70 drives the articulated robot 71 to place the adherend WK on the support surface 52A and move the holding member 72 out of the storage means 41, the air pressure adjustment means 40 is not shown. The driving device is driven, and the opening / closing member 42 is moved to close the first opening 41A. Then, after the conveying means 50 drives the suction means (not shown) and holds the adherend WK on the support surface 52A, the pressure adjusting means 40 drives the pressure adjusting means 43 to supply gas into the storage means 41. Thus, the pressure in the storage means 41 is set to a first pressurization state higher than the atmospheric pressure.

  Thereafter, the conveying means 50 drives the linear motor 51, moves the support table 52 to the left, and when the adherend WK is detected by a detecting means (not shown) at a predetermined position, the supplying means 20 causes the rotating motor 24 to move. Driven to feed out the original fabric RS in accordance with the conveyance speed of the adherend WK. When the original fabric RS is fed out, the leading adhesive sheet AS is peeled off from the release sheet RL by the release plate 23, and is attached to the adherend WK by the pressing roller 30 to form an integrated object WK1. Thereafter, when the detection means (not shown) detects that the leading edge of the next adhesive sheet AS has been peeled off from the leading edge of the peeling plate 23, the supply means 20 stops driving the rotation motor 24 and again enters standby. It becomes a state.

  Then, as indicated by a two-dot chain line in FIG. 1, when the support table 52 that supports the integrated object WK1 reaches a predetermined position directly below the detection means 60, the transport means 50 stops driving the linear motor 51. Next, the pressure adjusting means 40 drives the pressure increasing / decreasing means 43 to discharge the gas from the storage means 41, and the second pressurization in which the pressure in the storage means 41 is lower than the first pressurization state and higher than the atmospheric pressure. Or a first low pressure state lower than the atmospheric pressure. When the inside of the storage means 41 is in a pressure state lower than the first pressure state, as shown in FIG. 2, when there is a bubble AB between the adhesive sheet AS and the adherend WK, the bubble AB greatly expands. The detecting means 60 can detect the presence or absence of the bubble AB or measure the size of the bubble AB. In particular, even in the case of a small bubble AB that cannot be visually confirmed, or a bubble AB in which the swelling of the bubble AB is absorbed by the adhesive of the adhesive sheet AS or the elasticity of the base sheet, the visual or detection means 60 is used. Can be inflated to a size that can be reliably detected.

  When the detection by the detection unit 60 is completed, the conveyance unit 50 drives the linear motor 51 and returns the support table 52 to the initial position, and then the conveyance unit 50 stops driving the suction unit (not shown), The suction holding of the integrated object WK1 at 52A is released. Next, after the atmospheric pressure adjusting means 40 drives a driving device (not shown) and moves the opening / closing member 42 to open the first opening 41A, the transfer means 70 drives the articulated robot 71 to hold the integrated object WK1. It is held by the member 72 and conveyed to the next step for applying a predetermined process to the adherend WK. At this time, the transfer means 70 is based on the detection result of the detection means 60, and only the integrated object WK1 in which the bubble AB is not detected or the integrated object in which the size of the bubble AB is determined to be equal to or less than a predetermined size Only WK1 is transported to the next process, and the integrated object WK1 in which the bubble AB is detected can be transported to a re-sticking process in which the adhesive sheet AS is peeled off and another adhesive sheet AS is attached to the adherend WK again. . Thereafter, the same operation as described above is repeated.

  According to the present embodiment as described above, even a small bubble AB can be inflated greatly, and the integrated object WK1 in which the bubble AB enters between the adherend WK and the adhesive sheet AS is attached to the adherend WK. It can prevent being conveyed to the next process which performs a predetermined process.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, as long as the supply means can supply an adhesive sheet, there is no limitation as long as it is within the range in light of the common general technical knowledge at the time of filing (the description of other means and steps is omitted). To do).

The supply means 20 may be configured to supply and supply the adhesive sheet AS that is not temporarily attached to the release sheet RL.
As the peeling means, a peeling member such as a roller may be used.

  The pressing means is supported by the output shaft of a linear motor as a drive device, and adsorbs and holds the adhesive sheet AS supplied by the supply means 20 by a suction means such as a vacuum pump or a vacuum ejector, and presses it against the adherend WK. It may be configured to be attached.

The air pressure adjusting means 40 employs storage means that can be divided in the vertical direction or the left-right direction, and may be opened and closed by moving each of the divided storage means relatively. In this case, the opening and closing member 42 is provided. Not necessary.
The atmospheric pressure adjusting unit 40 may be provided with a pressurizing unit and a depressurizing unit separately, or the separate pressurizing unit and the depressurizing unit may pressurize or depressurize the inside of the separate storage units.
The gas supplied by the pressurizing / depressurizing means 43 may be air, a composite gas, or a simple gas such as nitrogen or neon.
The gas supplied by the pressurizing / depressurizing means 43 may be colored so that the detecting means 60 can easily detect the bubbles AB, or may contain a specific component to which the detecting means 60 reacts. An appropriate gas can be used according to the method.
The pressure adjusting means 40 may be only the pressurizing means or only the pressure reducing means. In the case of only the pressure reducing means, the pressure adjusting means 40 is applied in a state where the inside of the storage means 41 is in the second low pressure state where the pressure is reduced to atmospheric pressure or lower than the atmospheric pressure. The adhesive sheet AS may be affixed to the body WK, and the detection means 60 may detect the bubbles AB in a state where the storage means 41 is in the third low pressure state lower than the atmospheric pressure or the second low pressure state.
The air pressure adjusting means 40 may be configured to change the pressure in the storage means 41 by changing the volume of the storage means 41.
The user can arbitrarily determine each pressure in the first pressurizing state, the second pressurizing state, and the first low pressure state to the third low pressure state in the storage unit 41 adjusted by the atmospheric pressure adjusting unit 40.

The conveying means 50 stops the adherend WK, or moves the adherend WK while moving other means such as the supply means 20 in the vertical and horizontal directions as appropriate, and applies the same adhesive sheet pasting operation. May be performed.
The conveyance unit 50 and the transfer unit 70 may be configured to hold the adherend WK by a chuck unit such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive, a magnetic force, or the like.
When the adherend WK is transported by another apparatus, the transport means 50 is not necessary in the present invention, and other configurations such as the detection means 60, the transfer means 70, etc. that are not described in the independent claims of the present invention. The elements may or may not be adopted as necessary.

The detection unit 60 may be provided outside the storage unit 41.
The detection means 60 may be omitted. In the case of an inspection apparatus without the detection means 60, an inspector (human) may visually detect the presence or absence of bubbles AB, or the inspector may visually detect the presence or absence of bubbles AB. In addition, the detection unit 60 may detect the presence or absence of the bubble AB.
The detection means 60 is composed of, for example, a reflective optical sensor, and detects a light projection means for irradiating the adhesive sheet AS affixed to the adherend WK with light rays such as ultraviolet rays, infrared rays, and laser beams, and the reflected light. Receives light receiving means including light receiving elements such as CCD (Charge Coupled Device) and CMOS (Complementary Metal Oxide Semiconductor), transmissive optical sensors, and receives reflected waves that are transmitted by ultrasonic waves and reflected by bubbles AB By doing so, it may be an ultrasonic sensor that can detect the presence or absence of the bubble AB and its size, or an image processing device such as a camera that detects the color, temperature, or specific component of the bubble AB, and is not limited to the non-contact type. A contact-type sensor that detects the presence or size of the bubble AB by bringing a roller or the like into contact therewith, and can detect the presence or size of the bubble AB regardless of whether the adhesive sheet AS is transparent or opaque. Also good.
When the detection means 60 is provided outside the storage means 41, or when the inspector visually detects the presence or absence of bubbles AB, the entire storage means 41, the top surface of the storage means 41, or two points in FIG. The upper storage means 41 portion where the support table 52 as indicated by the chain line stops may be formed of a transparent or translucent inorganic material such as glass or quartz, or a resin material such as polycarbonate or acrylic.

The inspection apparatus 10 may include a cooling means such as a Peltier element that cools the atmosphere pressed by the pressing means or the cooling side of the heat pipe. In this case, for example, the inspection apparatus 10 is made lower than the ambient temperature where the detection means 60 is arranged. The generated gas may be generated by the cooling means, and the pressure adjusting means 40 may supply the pressurized gas into the storage means 41 to pressurize the gas. The cooling means may cool the storage means 41 itself to cool the gas in the storage means 41. Since the cooled gas expands due to the temperature rise, the bubble AB can be further enlarged in the detection process by the detection means 60.
The inspection apparatus 10 may include a heating means such as a coil heater for heating the atmosphere pressed by the pressing means or the heating side of the heat pipe. In this case, for example, the inside of the storage means 41 is depressurized by attaching an adhesive sheet AS. After that, the heating means warms the inside of the storage means 41, and the bubbles AB can be further enlarged by the temperature rise.
The inspection apparatus 10 may be configured so that the adhesive sheet AS is attached to the lower surface or the side surface of the adherend WK by placing it upside down or placing it horizontally.
Although the inspection apparatus 10 is illustrated in the embodiment, a sheet sticking apparatus having the same configuration requirements as the inspection apparatus 10 may be used.
Further, the material, type, shape, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, a heating means such as an appropriate coil heater for heating the adhesive sheet AS or a heating side of the heat pipe may be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive AD layer, an adhesive layer having an intermediate layer between the base sheet BS and the adhesive AD layer, and a cover on the upper surface of the base sheet BS. It may be a layer having three or more layers, such as a so-called double-sided adhesive sheet that can peel the base sheet BS from the adhesive AD layer. It may have a multilayer intermediate layer, or may be a single layer or a multilayer without an intermediate layer. Examples of the adherend WK include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards, electrode substrates, and optical disks, glass plates, steel plates, ceramics, wood plates, Arbitrary forms of members and articles such as resin plates can also be targeted. Note that the adhesive sheet AS can be read in a functional or application manner, and can be any information such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin sheet. Sheets, films, tapes, etc. may be used.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 ... Inspection apparatus 20 ... Supply means 30 ... Pressing means 40 ... Pressure adjustment means 60 ... Detection means AS ... Adhesive sheet WK ... Adhering body AB ... Bubble

Claims (8)

An inspection device for attaching an adhesive sheet to an adherend,
Supply means capable of supplying the adhesive sheet;
A pressing unit that presses and adheres the adhesive sheet supplied by the supplying unit to the adherend,
An inspection apparatus comprising an atmospheric pressure adjusting means for bringing an atmosphere in which the adhesive sheet is pressed by the pressing means into a pressurized state.   The inspection apparatus according to claim 1, further comprising a detection unit configured to detect presence or absence of air bubbles that have entered between the adhesive sheet affixed to the adherend and the adherend.   The inspection apparatus according to claim 1, further comprising a cooling unit that cools an atmosphere pressed by the pressing unit.   The inspection apparatus according to claim 1, further comprising a heating unit that heats an atmosphere pressed by the pressing unit. An inspection device for attaching an adhesive sheet to an adherend,
Supply means capable of supplying the adhesive sheet;
A pressing unit that presses and adheres the adhesive sheet supplied by the supplying unit to the adherend,
Air pressure adjusting means for lowering the pressure of the adhesive sheet than the atmosphere pressed by the pressing means, the presence or absence of bubbles that have entered between the adhesive sheet affixed to the adherend and the adherend An inspection apparatus comprising detection means for detecting in a low-pressure atmosphere. An inspection method for attaching an adhesive sheet to an adherend,
Supplying the adhesive sheet;
Including pressing and feeding the supplied adhesive sheet to the adherend,
An inspection method comprising the step of bringing the atmosphere in which the adhesive sheet is pressed into a pressurized state. A sheet sticking device for sticking an adhesive sheet to an adherend,
Supply means capable of supplying the adhesive sheet;
A pressing unit that presses and adheres the adhesive sheet supplied by the supplying unit to the adherend,
A sheet sticking device, comprising: an atmospheric pressure adjusting unit configured to pressurize an atmosphere in which the adhesive sheet is pressed by the pressing unit. A sheet sticking method for sticking an adhesive sheet to an adherend,
Supplying the adhesive sheet;
Including pressing and feeding the supplied adhesive sheet to the adherend,
The sheet sticking method characterized by including the process of making the atmosphere into which the said adhesive sheet is pressed into a pressurization state.

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