JP6535473B2 - Sheet sticking apparatus and sheet sticking method - Google Patents

Description

The present invention relates to a sheet over preparative sticking apparatus and a sheet sticking method.

  Conventionally, when air bubbles enter between the adhesive sheet and the adherend surface of the adherend, there is a possibility that adhesion failure occurs due to a reduction in the adhesion area due to the air bubbles. Therefore, after sticking the adhesive sheet to the adherend, A sheet sticking apparatus has been proposed in which bubbles are diffused and absorbed in the pressure-sensitive adhesive layer of the adhesive sheet by placing the adherend in a pressurized state (pressured atmosphere) (for example, Patent Document 1 below) ).

JP, 2001-088512, A

  However, in the sheet sticking apparatus described in Patent Document 1, air bubbles are diffused and absorbed in the pressure-sensitive adhesive layer of the adhesive sheet, but not all air bubbles are diffused and absorbed in the pressure-sensitive adhesive layer. There may be small bubbles that can not be confirmed. If bubbles are left between the adherend and the adhesive sheet and transported to the next step of subjecting the adherend to a predetermined treatment, the bubbles may become an obstacle to cause various problems. . In particular, in the case where the adhesive sheet is opaque, the case in which the air bubbles are left to be transported to the next step becomes significant.

An object of the present invention, one piece that has entered the bubble between the adhesive sheet and the adherend, Lucifer over can be prevented from being conveyed to the next step of performing predetermined processing on the adherend And providing a sheet sticking apparatus and a sheet sticking method.

In order to solve the problems described above, the present invention is a sheet sticking apparatus for sticking an adhesive sheet to an adherend, wherein the adhesive sheet supplied by the adhesive sheet can be supplied, and the adhesive sheet supplied by the supply section. And pressing means for pressing and sticking the adherend to the adherend , wherein the pressure means presses the adhesive sheet against the adherend, the atmosphere in which the adhesive sheet is pressed against the adherend After the adhesive sheet is attached to the adherend, the atmosphere is brought to a lower pressure than the pressurized state, and the adhesive sheet attached to the adherend and the adherend It is a sheet sticking apparatus characterized by comprising: an air pressure adjusting means for enlarging the air bubbles when there are air bubbles, and a detecting means for detecting the presence or absence of the air bubbles enlarged by the air pressure adjusting means.

Another aspect of the present invention is a sheet sticking method of sticking an adhesive sheet to an adherend, wherein the step of supplying the adhesive sheet, and pressing the adhesive sheet supplied to the adherend is carried out. And pressing the adhesive sheet against the adherend, the atmosphere in which the adhesive sheet is pressed against the adherend is in a pressurized state, and the adhesive sheet is adhered to the adherend. Air pressure to make the air bubbles larger if the air bubbles are placed between the adhesive sheet attached to the adherend and the adherend by setting the atmosphere at a lower pressure than the pressure state and attaching the air bubbles between the adhesive sheet attached to the adherend and the adherend A sheet sticking method comprising: an adjusting step; and a step of detecting the presence or absence of air bubbles enlarged in the air pressure adjusting step .

  According to the present invention, even a small air bubble can be greatly expanded, and an integral body in which the air bubble enters between the adherend and the adhesive sheet is conveyed to the next step of subjecting the adherend to a predetermined treatment. Can be prevented.

The side view which shows the sheet sticking apparatus which concerns on one Embodiment of this invention. Explanatory drawing which shows the change of the magnitude | size of air bubbles.

An inspection apparatus according to an embodiment of the present invention will be described below based on the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. Do. Furthermore, in the present embodiment, when the direction is indicated with reference to the front direction of FIG. 1 parallel to the Y axis, “upper” is the arrow direction of the Z axis, “lower” is the opposite direction, The left direction is the arrow direction of the X axis, the "right" is the opposite direction, and the "front" is the near direction perpendicular to the paper surface.

  In FIG. 1, the inspection apparatus 10 is an apparatus for attaching the adhesive sheet AS to the adherend WK, and adheres the supply means 20 capable of supplying the adhesive sheet AS and the adhesive sheet AS supplied by the supply means 20. Pressure roller 30 as pressing means for pressing and sticking to the body WK, pressure adjusting means 40 for pressing the atmosphere in which the adhesive sheet AS is pressed by the pressing roller 30, and conveying means for supporting and conveying the adherend WK 50, the detection means 60 for detecting the presence or absence of the air bubble AB (see FIG. 2) which has entered between the adhesive sheet AS attached to the adherend WK and the adherend WK, and the adherend WK etc. And a transfer unit 70.

  The feeding means 20 folds back the release sheet RL, a support roller 21 for supporting the original sheet RS on which the adhesive sheet AS is temporarily attached onto the strip-shaped release sheet RL, a plurality of guide rollers 22 for guiding the original sheet RS. The peeling sheet 23 is sandwiched between the peeling plate 23 as peeling means for peeling the adhesive sheet AS from the peeling sheet RL, the driving roller 25 rotationally driven by the rotation motor 24 as driving device, and the driving roller 25 The pinch roller 26 and a recovery roller 27 which is driven by a drive device (not shown) and recovers the release sheet RL.

  The air pressure adjusting means 40 includes a box-like storage means 41 for storing the supply means 20 and the pressure roller 30, etc., and an open / close member 42 capable of opening and closing the first opening 41A formed in the storage means 41 by a driving device not shown. The pressurizing means such as a pressure pump or a turbine which can make the inside of the accommodating means 41 higher than atmospheric pressure and the like through the second opening 41B formed in the accommodating means 41, and the inside of the accommodating means 41 A pressure reducing means 43 having a pressure reducing means such as a pressure reducing pump or a vacuum ejector capable of reducing the pressure to a lower pressure than air pressure or the like is provided.

  The conveyance means 50 is supported by a linear motor 51 as a drive device and a slider 51A of the linear motor 51, and has a support table 52 having a support surface 52A which can be held by suction by suction means (not shown) such as a pressure reduction pump or vacuum ejector. And have.

  The detection means 60 comprises an optical sensor, an imaging means such as a camera, etc., and can detect the presence or absence of the air bubble AB or measure the size of the air bubble AB.

  The transfer means 70 includes an articulated robot 71 as a driving device, and a holding member 72 supported by a tip arm (working arm) 71A of the articulated robot 71. The articulated robot 71 is a so-called six-axis robot capable of displacing what is held by the tip arm 71A within its working range at any position and at any angle.

  Next, the operation of the inspection apparatus 10 in the present embodiment will be described. First, with respect to the inspection apparatus 10 shown by the solid line in FIG. 1 in which each member stands by at the initial position, after the operator sets the original fabric RS as shown in the figure, input means such as an operation panel and a personal computer not shown When a signal for starting the automatic operation is input via the feed means 20, the supply means 20 drives the rotation motor 24 and feeds out the original fabric RS. Then, as shown in FIG. 1, when the leading end of the adhesive sheet AS is detected by the optical sensor or the detection means (not shown) such as an imaging means, it is supplied that peeling of a predetermined length from the front end of the peeling plate 23 is detected. The means 20 stops the drive of the rotary motor 24 and enters the standby state.

  Next, when the transfer means 70 drives the articulated robot 71 and the adherend WK held by the holding member 72 is transported to the vicinity of the first opening 41A, the air pressure adjustment means 40 drives a drive device (not shown), The opening and closing member 42 is moved to open the first opening 41A. Next, after the transfer means 70 drives the articulated robot 71 to place the adherend WK on the support surface 52A and move the holding member 72 out of the storage means 41, the air pressure adjustment means 40 is not shown. The driving device is driven to move the opening / closing member 42 to close the first opening 41A. Then, after the transport means 50 drives the adsorption means (not shown) and the adherend WK is adsorbed and held by the support surface 52A, the air pressure adjustment means 40 drives the pressurizing and depressurizing means 43 to supply the gas into the storage means 41. The pressure in the storage means 41 is set to a first pressurized state higher than the atmospheric pressure.

  Thereafter, when the conveyance means 50 drives the linear motor 51 and the support table 52 is moved leftward and the adherend WK is detected by the detection means (not shown) at a predetermined position, the supply means 20 turns the rotation motor 24. It drives and feeds out original fabric RS according to the conveyance speed of adherend WK. When the raw sheet RS is fed out, the first adhesive sheet AS is peeled off from the peeling sheet RL by the peeling plate 23, and is attached to the adherend WK by the pressure roller 30, thereby forming the integral product WK1. Thereafter, when it is detected by the detection means (not shown) that the leading end of the next adhesive sheet AS has been peeled off for a predetermined length from the front end of the peeling plate 23, the supply means 20 stops the driving of the rotation motor 24 and stands by again It becomes a state.

  Then, as shown by a two-dot chain line in FIG. 1, when the support table 52 supporting the integrated object WK1 reaches a predetermined position directly below the detection means 60, the conveyance means 50 stops the drive of the linear motor 51. Then, the air pressure adjusting means 40 drives the pressurizing and depressurizing means 43 to discharge the gas from the inside of the containing means 41, and the pressure in the containing means 41 is lower than the first pressurized state and higher than the atmospheric pressure. In this state, the pressure is returned to the atmospheric pressure, or the first low pressure state lower than the atmospheric pressure is obtained. When the inside of the storage means 41 is in a pressure state lower than the first pressure state, as shown in FIG. 2, when the air bubble AB is present between the adhesive sheet AS and the adherend WK, the air bubble AB is greatly expanded. The detection means 60 can detect the presence or absence of the air bubble AB or measure the size of the air bubble AB. In particular, even in the case of small air bubbles AB which can not be confirmed visually, and air bubbles AB in which the expansion of the air bubbles AB is absorbed by the elasticity of the adhesive of the adhesive sheet AS and the base sheet Can be expanded to a size that can be reliably detected.

  Then, when the detection by the detection means 60 is completed, the conveyance means 50 drives the linear motor 51 to return the support table 52 to the initial position, and then the conveyance means 50 stops driving the suction means (not shown). Release the suction holding of the one-piece WK1 at 52A. Next, after the air pressure adjustment means 40 drives a drive device (not shown) to move the open / close member 42 to open the first opening 41A, the transfer means 70 drives the articulated robot 71 to hold the integral object WK1 It is held by the member 72 and conveyed to the next process of subjecting the adherend WK to a predetermined process. At this time, based on the detection result by the detection means 60, the transfer means 70 detects only the integrated object WK1 in which the air bubble AB is not detected, or an integrated object in which the size of the air bubble AB is determined to be smaller than a predetermined size. Only the WK1 can be transported to the next step, and the one-piece WK1 in which the air bubble AB is detected can be transported to the re-sticking step of peeling the adhesive sheet AS and sticking another adhesive sheet AS to the adherend WK again. . Thereafter, the same operation as described above is repeated.

  According to the present embodiment as described above, even a small air bubble AB can be greatly expanded, and the integrated object WK1 in which the air bubble AB enters between the adherend WK and the adhesive sheet AS is the adherend WK. It can be prevented from being transported to the next step of performing a predetermined process.

  The means and steps in the present invention are not limited in any way as long as the operations, functions or steps described in the means and steps can be performed, and it is needless to say that the constitutions of only one embodiment shown in the above embodiment or There is no limitation to the process. For example, the supply means is not limited as long as it can supply the adhesive sheet within the range in light of the technical common knowledge at the time of filing of the application (the explanation of the other means and steps is omitted). To do).

The supply means 20 may be configured to feed and supply the adhesive sheet AS not temporarily attached to the release sheet RL.
The peeling means may use a peeling member such as a roller.

  The pressing means is supported by the output shaft of a linear motion motor as a driving device, and suctions and holds the adhesive sheet AS supplied by the feeding means 20 by suction means such as a pressure reducing pump or vacuum ejector, and presses against the adherend WK. It may be configured to be attached.

The air pressure adjusting means 40 may employ storage means which can be divided in the vertical direction and the left and right direction, and the divided storage means may be moved relative to each other for opening and closing. In this case, the opening and closing member 42 is It may not be.
The pressure adjusting means 40 may separately provide pressurizing means and depressurizing means, or separate pressurizing means and depressurizing means may pressurize or depressurize the inside of the separate containing means.
The gas supplied by the pressurizing and depressurizing means 43 may be the atmosphere, a composite gas, a single gas such as nitrogen or neon, or the like.
The gas supplied by the pressurizing and depressurizing means 43 may be a gas which is colored so that the detecting means 60 can easily detect the bubble AB or contains a specific component to which the detecting means 60 reacts, and the inspection of the detecting means 60 It can be an appropriate gas according to the method.
The pressure adjusting means 40 may be only the pressurizing means or only the pressure reducing means, and in the case of only the pressure reducing means, the inside of the containing means 41 is in the second low pressure state decompressed to atmospheric pressure or atmospheric pressure. The adhesive sheet AS may be attached to the body WK, and the detection means 60 may detect the air bubble AB in a state in which the inside of the storage means 41 is in the third low pressure state lower than the atmospheric pressure or the second low pressure state.
The pressure adjustment means 40 may be configured to change the pressure in the storage means 41 by changing the volume of the storage means 41.
The user can arbitrarily determine each pressure in the first pressurizing state, the second pressurizing state, and the first low pressure state to the third low pressure state in the storage means 41 adjusted by the air pressure adjusting means 40.

The conveying means 50 stops the adherend WK, or while moving the adherend WK, moves the other means such as the supply means 20 in the vertical and horizontal directions as appropriate, and performs the same adhesive sheet sticking operation as described above You may
The transport means 50 and the transfer means 70 may be configured to hold the adherend WK by chuck means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive, magnetic force or the like.
In the case where the adherend WK is transported by another device, the transport means 50 is unnecessary in the present invention, and the other detection means 60, the transfer means 70, etc. are not described as constituent elements in the independent claims of the present invention. The elements may or may not be adopted as necessary.

The detection means 60 may be provided outside the storage means 41.
In the case of an inspection apparatus without the detection means 60, the detection means 60 may be absent so that the inspector (human) may visually detect the presence or absence of the bubble AB, and the inspector visually detects the presence or absence of the bubble AB Furthermore, the detection means 60 may detect the presence or absence of the air bubble AB.
The detecting means 60 is, for example, a reflection type optical sensor, and detects a light projecting means for irradiating an adhesive sheet AS attached to the adherend WK with light rays such as ultraviolet rays, infrared rays and laser light and the reflected light thereof A device provided with a light receiving means provided with a light receiving element such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), a transmission type optical sensor, an ultrasonic wave transmitted, and a reflected wave reflected by the air bubble AB It may be an image sensor such as an ultrasonic sensor that can detect the presence or absence of the bubble AB or the size thereof, a camera that detects the color or temperature of the bubble AB, or a specific component, A contact-type sensor that detects the presence or absence and size of air bubbles AB by bringing a roller or the like into contact with the adhesive sheet AS can detect the presence or absence of air bubbles AB regardless of the transparency / opacity, and the size thereof. It is also good.
When the detection means 60 is provided outside the storage means 41 or when the inspector visually detects the presence or absence of the air bubble AB, the entire storage means 41 or the top surface portion of the storage means 41 or two points in FIG. The upper storage means 41 where the support table 52 stops as shown by the chain line may be formed of an inorganic material such as transparent or translucent glass or quartz, or a resin material such as polycarbonate or acrylic.

The inspection apparatus 10 may be provided with cooling means such as a Peltier element for cooling the atmosphere pressed by the pressing means or the cooling side of the heat pipe, and in this case, for example, lower than the atmosphere temperature at which the detection means 60 is disposed. The gas may be generated by the cooling means, and the pressure adjusting means 40 may supply the gas into the storage means 41 to pressurize the gas. In addition, the cooling means may cool the storage means 41 itself to cool the gas in the storage means 41. Since the cooled gas expands due to the temperature rise, the bubble AB can be further enlarged in the process of detection by the detection means 60.
The inspection apparatus 10 may be provided with heating means such as a coil heater for heating the atmosphere pressed by the pressing means or the heating side of the heat pipe. In this case, for example, the adhesive sheet AS is attached to decompress the storage means 41 After that, the heating means warms the inside of the storage means 41, and the bubbles AB can be further enlarged by the temperature rise.
The inspection apparatus 10 may be configured such that the adhesive sheet AS is attached to the lower surface or the side surface of the adherend WK by being placed upside down or placed horizontally.
Although the inspection device 10 is illustrated in the embodiment, the sheet sticking device may be provided with the same configuration requirements as the inspection device 10.
Furthermore, the material, type, shape and the like of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, adhesive sheet AS is not limited to adhesion forms, such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is employed, an appropriate coil heater for heating the adhesive sheet AS or a heating means such as the heating side of a heat pipe may be provided. Also, such an adhesive sheet AS is, for example, a single layer of adhesive AD layer only, one having an intermediate layer between the base sheet BS and the adhesive AD layer, a cover on the upper surface of the base sheet BS It may be a so-called double-sided adhesive sheet capable of peeling the base material sheet BS from the adhesive AD layer, and the double-sided adhesive sheet may be a single layer or a single layer or the like. It may be one having a multilayer intermediate layer, or a single layer or multilayer without an intermediate layer. Further, as the adherend WK, for example, food, resin container, semiconductor wafer such as silicon semiconductor wafer or compound semiconductor wafer, circuit substrate, electrode substrate, information recording substrate such as optical disk, glass plate, steel plate, pottery, wood plate or A member, articles, etc. of arbitrary forms, such as a resin board, can also be targeted. The adhesive sheet AS is changed to a functional and practical reading, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Sheets, films, tapes and the like.

  Further, the drive device in the above-described embodiment includes a rotary motor, a linear motion motor, a linear motor, an electric device such as a single-axis robot and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder and a rotary cylinder. Besides being adoptable, it is also possible to adopt a combination of them directly or indirectly (some overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 ... Inspection apparatus 20 ... Supply means 30 ... Press means 40 ... Air pressure adjustment means 60 ... Detection means AS ... Adhesive sheet WK ... Adherend AB ... Bubble

Claims (2)

A sheet sticking apparatus for sticking an adhesive sheet to an adherend, comprising:
Supply means capable of supplying the adhesive sheet;
And pressing means for pressing and sticking the adhesive sheet supplied by the supply means to the adherend;
When the pressing unit presses and adheres the adhesive sheet to the adherend, the atmosphere in which the adhesive sheet is pressed to the adherend is in a pressurized state, and the adhesive sheet is adhered to the adherend After that, when the air pressure is lower than the pressure, and air bubbles are present between the adhesive sheet attached to the adherend and the adherend, air pressure adjusting means for enlarging the air bubbles; ,
And a detection unit configured to detect the presence or absence of air bubbles enlarged by the air pressure adjustment unit. A sheet sticking method for sticking an adhesive sheet to an adherend, wherein
Supplying the adhesive sheet;
And pressing the adhesive sheet supplied to the adherend to adhere the adhesive sheet;
When pressing and sticking the adhesive sheet to the adherend, the atmosphere in which the adhesive sheet is pressed by the adherend is in a pressurized state, and the adhesive sheet is affixed to the adherend, and then the atmosphere is applied. A pressure adjustment step to make the air bubbles larger if the air bubbles are present between the adhesive sheet attached to the adherend and the adherend, with the pressure being lower than the pressurized state;
And a step of detecting the presence or absence of air bubbles enlarged in the pressure adjustment step .

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