JP6155180B2 - Sheet supply device, supply method, and sheet sticking device - Google Patents

Description

  The present invention relates to a sheet supply apparatus, a supply method, and a sheet sticking apparatus.

  Conventionally, for example, Patent Document 1 is known as a sheet manufacturing apparatus for forming a concave groove for removing air interposed between an adherend and an adhesive sheet.

JP 2012-72237 A

  However, in the disclosure of Patent Document 1, since the groove forming means acts directly on the adhesive layer of the adhesive sheet once peeled from the release sheet to form the groove, the adhesive sheet is attached to the groove forming means. Adhesives are entangled with each other, resulting in an inadequate supply of the adhesive sheet, and the indentation forming means is contaminated with an adhesive, which requires labor to remove it.

  An object of the present invention is to provide a sheet feeding device and a feeding method, and a sheet sticking device capable of forming a concave groove in an adhesive layer of an adhesive sheet without causing the adhesive sheet to become tangled or soiled with the adhesive. It is to provide.

In order to achieve the above object, the sheet feeding apparatus of the present invention is provided with a feeding means for feeding out an original fabric in which an adhesive sheet having an adhesive layer on one surface of a base sheet is temporarily attached to one surface of a release sheet. When, wherein the peeling means for peeling off the adhesive sheet from the release sheet in the raw fed out by feeding means, the at least one past the base sheet and the release sheet in the raw fed out by said feeding means, the adhesive and a concave groove forming means for forming a groove on the adhesive layer, the groove forming means is characterized Rukoto a drive device for adjusting the depth of the groove.

The sheet sticking apparatus according to the present invention includes: a feeding unit that feeds an original sheet in which an adhesive sheet having an adhesive layer on one side of a base sheet is temporarily attached to one side of a release sheet; A peeling means for peeling the adhesive sheet from the release sheet in the original fabric, a pressing means for pressing and adhering the adhesive sheet peeled by the peeling means to an adherend, and the raw material fed by the feeding means A groove forming means for forming a groove in the adhesive layer over at least one of the base sheet and the release sheet in the sheet, and the groove forming means includes a driving device for adjusting the depth of the groove. It is characterized by that.

The sheet sticking device has re-pressing means for pressing again the adhesive sheet attached to the adherend by the pressing means against the adherend, and the re-pressing means is along the extending direction of the groove. direction may be a changeably provided that configured to move to.

Sheet feeding method of the present invention includes the steps of adhesive sheet having an adhesive layer on one surface of the substrate sheet is fed out raw which is temporarily adhered to one surface of the release sheet, SL before in the raw sheet fed out The step of forming a concave groove in the adhesive layer, the step of adjusting the depth of the concave groove, and the adhesion from the release sheet in the unfolded raw fabric over at least one of the base sheet and the release sheet And a step of peeling the sheet.

According to the present invention, since the concave groove is formed in the adhesive layer from at least one side of the base material sheet and the release sheet in the raw fabric, the adhesive sheet is not entangled or soiled with the adhesive. A concave groove can be formed in the adhesive layer.
If the adhesive sheet is pressed against the adherend immediately after the concave groove is formed, the adhesive sheet is applied to the adherend before the concave groove disappears due to aging or heat. be able to.
Furthermore, if it is set as the structure provided with the repressing means, an adhesive sheet can be pressed to a to-be-adhered body, extracting the air which was not able to be extracted with the pressing means from a recessed groove, and making the said recessed groove smaller or disappearing.

The schematic side view of the sheet sticking apparatus which concerns on this embodiment. FIG. 2 is a partially enlarged front view of the sheet supply apparatus of FIG. 1. The partial expansion side view which shows a modification. Explanatory drawing of the pattern of a ditch.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. To do. Furthermore, in this embodiment, when viewed from the front direction in FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the arrow direction of the X axis, “Right” is the opposite direction, “Front” is the arrow direction of the Y axis, and the direction is from the paper to the front, and “Back” is the opposite direction.

  In FIG. 1, in the sheet sticking device 10 according to the present embodiment, an adhesive sheet AS having an adhesive AD layer on one surface of a base sheet BS (see FIG. 2) is temporarily attached to one surface of a release sheet RL. The feeding unit 20 that feeds the raw fabric RS, the peeling plate 30 as a peeling unit that peels the adhesive sheet AS from the release sheet RL in the raw fabric RS fed by the feeding unit 20, and the adhesive sheet AS peeled by the peeling plate 30 A pressing means 40 that presses and adheres to the adherend WK, and a concave groove that forms a concave groove CD (see FIG. 2) in the adhesive AD layer over the release sheet RL in the original fabric RS fed by the feeding means 20 A forming unit 50; a re-pressing unit 60 that presses the adhesive sheet AS attached to the adherend WK by the pressing unit 40 against the adherend WK; and a softening unit 70 that softens the adhesive AD layer. Is disposed in the vicinity of the conveying means 80 for conveying the adherend WK. The feeding means 20, the peeling plate 30, and the groove forming means 50 constitute a sheet feeding apparatus according to the present invention.

  The feeding means 20 includes a release sheet RL between a support roller 21 that supports the original fabric RS, a plurality of guide rollers 22 that guide the original fabric RS, and a driving roller 23 that is driven by a rotation motor 23A as a driving device. And a collecting roller 25 that is driven by a driving device (not shown) and collects the release sheet RL.

  The pressing means 40 is not shown, such as a support plate 42 supported by an output shaft 41A of a linear motor 41 as a drive device, and a decompression pump or a vacuum ejector that applies a suction force to the support surface (lower surface) of the support plate 42. Pressure reducing means.

  The concave groove forming means 50 includes a transfer roller 51 in which convex streaks 51B are embossed on the peripheral surface of the roller body 51A, and a receiving roller 52 that sandwiches the original fabric RS with the transfer roller 51. Note that at least one of the transfer roller 51 and the receiving roller 52 may be rotated in synchronization with the conveyance speed of the original fabric RS by a rotation motor as a driving device (not shown), or driven by the conveyance of the original fabric RS without a driving device. You may rotate. Also, at least one of the transfer roller 51 and the receiving roller 52 is supported by a driving device (not shown) so that the pressing force pressing each other can be adjusted, and the depth of the concave groove CD formed in the adhesive AD layer can be adjusted. Is provided. Furthermore, the transfer roller 51 and the receiving roller 52 correspond to the intermittent conveyance of the original fabric RS by the feeding means 20 and are driven not shown so that they can be arranged between the adhesive sheets AS that do not sandwich the adhesive sheet AS when the conveyance is stopped. It is provided so that it can be moved left and right by equipment or manually.

  The re-pressing means 60 includes a linear motor 62 as a driving device supported by an output shaft 61A of a rotation motor 61 as a driving device, and a linear motion motor 63 as a driving device supported by a slider 62A of the linear motor 62. And a pressing roller 64 rotatably supported by the output shaft 63A of the linear motor 63. The rotating motor 61 is provided so that the rolling direction of the pressing roller 64 can be changed, and the linear motor 63 presses the pressing roller 64. The pressing force to the adhesive sheet AS can be adjusted.

  The softening means 70 is a pressure roller between the concave groove forming means 50 and the peeling edge 31 of the peeling plate 30 on the upstream side in the original feed direction, inside and outside of the support plate 42, between the pressing means 40 and the repressing means 60. A heating means such as a coil heater or a heating side of the heat pipe disposed inside or outside 64 is provided.

  The conveying means 80 is a table 81 capable of adsorbing and holding the adherend WK placed on the support surface 81A by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and a driving device that supports the table 81 with a slider 82A. The linear motor 82 is provided.

  Next, a method of sticking the adhesive sheet AS using the sheet sticking device 10 in the present embodiment will be described.

  First, the operator sets the original fabric RS as shown in FIG. At this time, the operator peels off the adhesive sheet AS located on the downstream side of the concave groove forming means 50 with respect to the feed direction. Thereafter, when an operation start signal is input via an input unit (not shown) such as an operation panel or a personal computer, the feeding unit 20 drives the rotation motor 23A and a driving device (not shown) to feed out the original fabric RS. Then, when the adhesive sheet AS located on the upstream side in the feed direction with respect to the concave groove forming means 50 passes between the transfer roller 51 and the receiving roller 52, as shown in FIG. 2, over the release sheet RL, A concave groove CD is formed in the adhesive AD layer to form the leading adhesive sheet AS. Here, if the adhesive AD layer is softened by the softening means 70 before being sandwiched between the transfer roller 51 and the receiving roller 52, the concave groove CD is easily formed in the adhesive AD layer. After that, the feeding means 20 drives the rotation motor 23A and a driving device (not shown) to feed the original fabric RS, and the optical sensor indicates that the leading end of the leading adhesive sheet AS on the peeling plate 30 has reached a predetermined position. When a detecting means (not shown) such as a camera or a camera detects, the feeding means 20 stops driving the rotation motor 23A and a driving device (not shown) and enters a standby state. The concave groove CD is also formed in the same manner as described above after the next adhesive sheet AS following the top adhesive sheet AS.

  When an unillustrated conveying means such as a manual or multi-joint robot or a belt conveyor places the adherend WK on the table 81 waiting at the initial position indicated by the two-dot chain line on the right side in FIG. However, after driving the decompression means (not shown) and holding the adherend WK, the linear motor 82 is driven and the table 81 is conveyed in the left direction. At the same time, the pressing means 40 drives a decompression means (not shown), and the feeding means 20 drives a rotation motor 23A and a driving device (not shown) to feed out the raw material RS and attach the leading edge at the peeling edge 31 of the peeling plate 30. The sheet AS is peeled from the release sheet RL, and the leading adhesive sheet AS is held by the support plate 42. Thereafter, when detecting means (not shown) detects that the leading end of the next adhesive sheet AS in the feeding direction has reached a predetermined position, the feeding means 20 stops driving the rotation motor 23A and the driving device (not shown). Prepare for pasting of the body WK. Then, when detection means (not shown) such as an optical sensor or a camera detects that the adherend WK has reached a predetermined position directly below the support plate 42, the conveying means 80 stops driving the linear motor 82, and then the pressing means 40 drives the linear motion motor 41, lowers the support plate 42, and presses and attaches the leading adhesive sheet AS to the upper surface of the adherend WK. Here, when the adhesive AD layer is softened before being peeled off by the peeling plate 30 or by the softening means 70 disposed inside or outside the support plate 42, the adhesive sheet AS pressed against the adherend WK is removed. The adhesive sheet AS can be attached to the adherend WK while reducing the concave groove CD while removing air from the concave groove CD. Next, after a predetermined time has elapsed, the pressing unit 40 stops driving the decompression unit (not shown), drives the linear motion motor 41, raises the support plate 42, and returns to the original position. Drives the linear motor 82 and conveys the table 81 in the left direction. In the case of the present embodiment, the concave groove CD formed in the adhesive AD layer has a linear shape as shown in FIG. 4A. Therefore, the re-pressing means 60 drives the rotation motor 61 and the pressing roller 64. When the table 81 passes below the pressing roller 64 without driving the linear motor 62, the rotary shaft is parallel to the Y axis, and a predetermined pressing force is applied to the adherend WK by the linear motion motor 63. The adhesive sheet AS is pressed again. Here, when the adhesive AD layer is softened by the softening means 70 disposed between the pressing means 40 and the repressing means 60 or inside or outside the pressing roller 64, the air that cannot be removed by the support plate 42. The adhesive sheet AS can be pressed against the adherend WK while removing the concave groove CD from the concave groove CD and further reducing or removing the concave groove CD.

  When the leading adhesive sheet AS is pressed by the re-pressing means 60, the conveying means 80 stops driving the linear motor 82 and the decompressing means (not shown), and the adhesion sheet AS is adhered to which the leading adhesive sheet AS is pasted by the conveying means (not shown). The body WK is transported from the table 81 to another process. Then, the conveying means 80 drives the linear motor 82 to return the table 81 to the initial position, and thereafter the same operation as described above is repeated.

  As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to these, A various deformation | transformation and change are possible within the range of the summary.

For example, as shown in FIG. 3, the concave groove forming means is replaced with the concave groove forming means 50, and the transfer plate 92 supported by the output shaft 91 </ b> A of the linear motor 91 as a driving device, and the pressing of the transfer plate 92. And a receiving plate 93 for receiving, and a concave groove forming means 90 in which the convex streaks 92B are embossed on the upper surface 92A of the transfer plate 92 may be used. In this case, the concave groove forming means 90 drives the linear motion motor 91, sandwiches the original fabric RS between the transfer plate 92 and the receiving plate 93, and forms the concave groove CD in the adhesive AD layer over the release sheet RL. The linear motion motor 91 is provided so that the pressing force for pressing the transfer plate 92 against the receiving plate 93 can be adjusted, and the depth of the concave groove CD formed in the adhesive AD layer can be adjusted.
The concave groove forming means may be configured such that the convex streaks are appropriately changed to those having different shapes, and for example, as shown in FIGS. 4B to 4E, the concave grooves CD have various shapes. . The concave groove CD is not limited to that shown in FIGS.

  The peeling means may adopt a peeling mechanism using a roller instead of the peeling plate 30.

The pressing means may be configured by a pressing roller that directly presses the adhesive sheet AS peeled off by the peeling plate 30 against the adherend WK, spraying of compressed air, or the like.
When holding the adhesive sheet AS with the support plate 42, the pressing means moves the support plate 42 to the right in FIG. 1 and moves onto the peeling plate 30 to suck and hold the adhesive sheet AS. After moving in the direction, it may be configured to move downward and press and affix to the wafer WF.

The groove forming means may be configured such that the groove AD is formed in the adhesive AD layer through the base sheet BS, or the groove CD is formed in the adhesive AD layer through the release sheet RL and the base sheet BS. The structure to form may be sufficient. When the concave groove CD is formed in the adhesive agent AD layer over the base sheet BS, for example, the surface equivalent to the convex streaks 51B provided on the peripheral surface of the roller body 51A in the above embodiment is received on the surface of the roller 52. The configuration may be provided.
The concave groove forming means 50 is configured to be detachable by winding or fitting a plate-like member such as metal or resin or a cylindrical member provided with convex streaks 51B around the roller body 51A. It may be a thing.
The concave groove forming means 90 employs a receiving roller that can be moved in the left-right direction by a driving device (not shown) in place of the receiving plate 93, sandwich the original fabric RS between the receiving roller and the transfer plate 92, and transfer the receiving roller. It is good also as a structure which moves along the upper surface 92A of the plate 92, and forms the ditch | groove CD in the adhesive agent AD layer.
The concave groove forming means sprays compressed air onto the release sheet RL and the base sheet BS to form the concave groove CD, or rubs a rod-like or plate-like object against the release sheet RL and the base sheet BS to form the concave groove CD. May be formed.
The groove forming means 50 may not employ a driving device (not shown) that can adjust the pressing force of at least one of the transfer roller 51 and the receiving roller 52.
The concave groove forming means 50 may be disposed upstream of the peeling plate 30 in the original sheet feeding direction, or may be provided in the peeling plate 30. Any structure that can form the concave groove CD in the adhesive AD layer over at least one of the material sheet BS and the release sheet RL is sufficient.
The cross-sectional shape of the convex streak 51B of the concave groove forming means 50 is not limited to a triangular shape as in the above-described embodiment, but other shapes such as a quadrangle and a semicircular shape, and the cross-sectional shape of the concave groove CD is a triangular shape, a semicircular shape, and the like. Other shapes may be used.

In the case of the concave groove CD as shown in FIGS. 4B and 4C, the re-pressing means 60 can be configured to scan the pressing roller 64 in the extending direction of the concave groove CD. For example, in the case where the concave groove CD is shown in FIG. 4B, when the center of the adherend WK coincides with the rotation center of the rotation motor 61, the conveying means 80 stops driving the linear motor 82 and then presses again. The means 60 drives the rotation motor 61, makes the rotation axis of the pressing roller 64 parallel to the Y axis, drives the linear motor 62, and moves the slider 62A from the left end to the right end, thereby moving the pressing roller 64 in the X-axis direction. And the adhesive sheet AS is pressed again against the adherend WK. Thereafter, the re-pressing means 60 drives the rotation motor 61, makes the rotation axis of the pressing roller 64 parallel to the X axis, drives the linear motor 62, and moves the slider 62 </ b> A from the back end to the front end, thereby pressing The adhesive sheet AS can be re-pressed against the adherend WK by moving the roller 64 in the Y-axis direction.
4C, after the rotational axis of the pressure roller 64 is displaced from the Y axis or the X axis by a predetermined angle, for example, 45 degrees, and the pressure roller 64 is moved in one direction in the same manner as described above. Then, the adhesive sheet AS is displaced by 90 degrees from the one direction, the pressing roller 64 is moved in the other direction, and the adhesive sheet AS is pressed again on the adherend WK. In addition, the displacement angle of the rotating shaft of the pressing roller 64 can be appropriately changed according to the extending direction of the groove CD.
4 (D) and 4 (E), the re-pressing means 60 drives the rotation motor 61 and swings the pressing roller 64 (meandering) in one direction. It is good also as a structure moved to another direction.

The softening means 70 may be disposed at any position or may not be provided.
The softening means 70 includes an irradiation device such as ultraviolet rays, infrared rays, microwaves, and X-rays, a hot air blower such as a dryer, a cooling means such as a cooling side of a Peltier element and a heat pipe, an ultrasonic vibration device, a vibrator, and an eccentric motor. A vibration means, a laser irradiation apparatus, or the like that can soften the adhesive AD layer according to the configuration, type, property, etc. of the adhesive AD layer can be appropriately employed.

The adherend WK may be stopped, or another means such as the feeding means 20 may be appropriately moved in the left-right direction while the adherend WK is moved to perform the same adhesive sheet pasting operation.
In the case where the adherend WK is transported by another apparatus, the transport means 80 is not necessary in the present invention, and other components that are not described in the independent claims of the present invention, such as the re-pressing means 60, Each may be employed as necessary, and may not be employed.

The material, type, shape and the like of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness, and when a heat-sensitive adhesive is adopted, an appropriate coil heater that heats the adhesive sheet AS. Heating means such as the heating side of the heat pipe may be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive AD layer, an adhesive layer having an intermediate layer between the base sheet BS and the adhesive AD layer, and a cover on the upper surface of the base sheet BS. It may be a layer having three or more layers, such as a so-called double-sided adhesive sheet that can peel the base sheet BS from the adhesive AD layer. It may have a multilayer intermediate layer, or may be a single layer or a multilayer without an intermediate layer.
Examples of the adherend WK include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical disks, glass plates, steel plates, ceramics, wood plates, resin plates, and the like. Any form of member or article can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.

  Further, the means and steps in the present invention are not limited in any way as long as the operations, functions, or steps described with respect to the means and steps can be performed, and moreover, the configuration of the simple embodiment shown in the above embodiment. It is not limited at all to a thing or a process. For example, as long as the feeding means is capable of feeding the original fabric temporarily attached to one surface of the release sheet, an adhesive sheet having an adhesive layer on one surface of the base sheet is common technical knowledge at the beginning of the application. In view of the above, there is no limitation as long as it is within the technical scope (the description of other means and steps is omitted).

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

10: Sheet sticking device 20: Feeding means 30: Release plate (peeling means)
40: pressing means 50, 90: concave groove forming means 60: repressing means AD: adhesive AS: adhesive sheet BS: base sheet CD: concave groove RL: release sheet RS: original fabric WK: adherend

Claims (4)

A feeding means for feeding out the original fabric temporarily attached to one side of the release sheet by the adhesive sheet having an adhesive layer on one side of the base sheet;
A peeling means for peeling the adhesive sheet from the release sheet in the original fabric fed by the feeding means ;
A groove forming means for forming a groove in the adhesive layer over at least one of the base material sheet and the release sheet in the raw material fed by the feeding means ,
Sheet feeding apparatus the groove forming means, characterized that you have a drive device for adjusting the depth of the groove. A feeding means for feeding out the original fabric temporarily attached to one side of the release sheet by the adhesive sheet having an adhesive layer on one side of the base sheet;
A peeling means for peeling the adhesive sheet from the release sheet in the original fabric fed by the feeding means;
A pressing means for pressing and sticking the adhesive sheet peeled off by the peeling means to an adherend ;
A groove forming means for forming a groove in the adhesive layer over at least one of the base material sheet and the release sheet in the raw material fed by the feeding means ,
Sheet sticking device the groove forming means, characterized that you have a drive device for adjusting the depth of the groove. Re-pressing means for pressing again the adhesive sheet affixed to the adherend by the pressing means against the adherend, and the re-pressing means moves in a direction along the extending direction of the groove. The sheet sticking apparatus according to claim 2, wherein the sheet sticking apparatus is provided so as to be changeable . A step of feeding the original fabric temporarily attached to one surface of the release sheet by an adhesive sheet having an adhesive layer on one surface of the base sheet;
At least one over prior Kimoto sheet and the release sheet in the raw to the fed, forming a groove on the adhesive layer,
Adjusting the depth of the groove,
And a step of peeling the adhesive sheet from the release sheet in the unfolded raw material.

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