JP2014165380A - Sheet peeling device and peeling method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet peeling device which can quickly form an exfoliation start for an adhesive sheet and suppress occurrence of failure in peeling of the adhesive sheet.SOLUTION: A sheet peeling device 10 comprises: delivery means 2 for delivering a master roll RS where an adhesive sheet AS is tentatively adhered to one surface of a strip of release sheet RL; peeling means 4 which peels the adhesive sheet AS from the release sheet RL by folding the release sheet part AS which is delivered in a prescribed peeling direction and to which the adhesive sheet AS is tentatively adhered by use of peeling media 41A, 41B; and detection means 5 which can detect the adhesive sheet AS is peeled by the peeling means 4. The peeling means 4 includes peeling media moving means 48B which moves the peeling medium 41B along a peeling direction when the detection means 5 determines the adhesive sheet AS is not peeled by the peeling media 41A, 41B.

Description

  The present invention relates to a sheet peeling apparatus and a peeling method.

Conventionally, a label peeling method for peeling a label (adhesive sheet) temporarily attached to a belt-like mount (release sheet) from the belt-like mount is known (for example, see Patent Document 1).
In the label peeling method described in Patent Document 1, the label tip is peeled off in a method in which the belt-like mount is suddenly turned and conveyed at the peeling position, which is the tip position of the peeling plate (peeling medium), and the label is peeled off from the belt-like mount. When the position passes, the transport of the belt-like mount is temporarily stopped, and a peeling trigger is formed by the force (rigidity) that the label is going to peel from the belt-like mount.

JP 2002-326616 A

  However, the conventional label peeling method as described in Patent Document 1 waits for the adhesive sheet to be peeled off from the release sheet depending only on the rigidity of the label to be peeled off from the belt-like mount, so that a peeling trigger is formed. In addition to requiring a long time to be applied, there is a disadvantage that a peeling trigger cannot be formed and a peeling failure of the adhesive sheet occurs.

  An object of the present invention is to provide a sheet peeling apparatus and a peeling method that can quickly form an adhesive sheet peeling trigger and suppress the occurrence of defective peeling of the adhesive sheet.

  In order to achieve the above object, the sheet peeling apparatus of the present invention is conveyed in a predetermined peeling direction by the feeding means for feeding the original fabric in which the adhesive sheet is temporarily attached to one surface of the belt-like peeling sheet. A peeling means for peeling the adhesive sheet from the release sheet by bending the release sheet portion to which the adhesive sheet is temporarily attached via a release medium, and the adhesive sheet being peeled by the peeling means. Detecting means capable of detecting, when the peeling means determines that the adhesive sheet has not been peeled off by the peeling medium, the direction of the peeling medium along the peeling direction. The structure of having the peeling medium moving means to move to is adopted.

  At this time, in the sheet peeling apparatus of the present invention, the peeling means has a plurality of peeling media, and the peeling medium moving means moves at least one of the plurality of peeling media in a direction along the peeling direction. It is preferable that

  On the other hand, the sheet peeling method of the present invention includes a feeding step of feeding a raw material in which an adhesive sheet is temporarily attached to one surface of a strip-like peeling sheet, and the adhesive sheet conveyed in a predetermined peeling direction by the feeding. A peeling step of peeling off the adhesive sheet from the release sheet by bending the attached release sheet portion with a release medium, and when the adhesive sheet is not peeled in the peeling step, the peeling A configuration is adopted in which a step of moving the medium in a direction along the peeling direction is performed.

  According to the present invention as described above, when it is determined through the detecting means that the adhesive sheet has not been peeled off, the peeling medium is moved in the direction along the peeling direction. Rather than relying solely on rigidity to wait for the adhesive sheet to peel off from the release sheet, it can actively increase the chance of folding the release sheet, quickly forming a trigger for the adhesive sheet to peel off, and the adhesive sheet It is possible to provide a sheet peeling apparatus and a peeling method capable of suppressing the occurrence of peeling failure.

  At this time, if a plurality of release media are used and at least one of the plurality of release media is moved in the direction along the release direction, the chances of bending the release sheet can be increased efficiently.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. (A), (B) is operation | movement explanatory drawing when changing a bending angle. (A)-(C) are operation | movement explanatory drawings when an adhesive sheet is not peeled. (A)-(C) are operation | movement explanatory drawings of the sheet sticking apparatus which concerns on the modification of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, for example, when directions such as up, down, left, right, front, back, etc. are shown, all of FIG. The direction from the appropriate direction) is the reference, and the top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction perpendicular to the page. And

  In FIG. 1, a sheet sticking device 1 includes a sheet peeling device 10 for peeling an adhesive sheet AS from an original fabric RS in which an adhesive sheet AS having an adhesive surface AD is temporarily attached to one surface of a strip-shaped release sheet RL; A pressing roller 6 as pressing means for pressing and adhering the adhesive sheet AS to a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) WF as an adherend, and supporting the wafer WF and pressing the wafer WF Support means 7 for moving the roller 6 relative to each other is provided.

The sheet peeling apparatus 10 is temporarily attached with a feeding means 2 for feeding the original fabric RS, a peeling angle adjusting means 3 for adjusting the peeling angle of the original fabric RS, and an adhesive sheet AS conveyed in the predetermined peeling direction DA by the feeding. The release sheet RL is bent through first and second release plates 41A and 41B as release media, whereby the release sheet 4 is released from the release sheet RL, and the release means 4 is an adhesive sheet. And an optical sensor capable of detecting that the AS has been peeled off, and a detection means 5 constituted by an imaging device or the like.
The feeding means 2 sandwiches the release sheet RL between a support roller 21 that supports the original fabric RS, a guide roller 22 that guides the original fabric RS, and a drive roller 24 that is driven by a rotation motor 23 as a drive device. A pinch roller 25 and a collection roller 26 that is driven by a driving device (not shown) and collects the release sheet RL are provided, and the whole is supported by a frame 27.

  The peeling angle adjusting means 3 includes a linear motion motor 31 as a driving device, and a peeling angle adjusting roller 33 rotatably supported by a bracket 32 supported by an output shaft 31A of the linear motion motor 31.

The peeling means 4 is a peeling medium moving means for moving at least one of the first and second peeling plates 41A and 41B and the first and second peeling plates 41A and 41B in a direction along the peeling direction DA of the adhesive sheet. It includes linear motion motors 48A and 48B as certain drive devices, and first and second release plates 41A and 41B are supported on output shafts 49A and 49B of the direct motion motors 48A and 48B, respectively.
The first peeling plate 41A includes a first surface 43A and a second surface 44A that intersect at the first peeling edge 42A, and the second peeling plate 41B includes a third surface 43B and a fourth surface that intersect at the second peeling edge 42B. The second surface 44A and the fourth surface 44B are in contact with each other and function as a reinforcing material that reinforces each other.

  The support means 7 includes a table 72 having a support surface 71 capable of attracting and holding the wafer WF by a suction means such as a decompression pump or a vacuum ejector (not shown), and a linear motor 74 as a driving device for supporting the table 72 with a slider 73. I have.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, when the operator selects the first peeling plate 41A as a peeling medium to be used via an operation panel (not shown) or the like, the peeling means 4 drives the linear motion motors 48A and 48B, and as shown in FIG. The first peeling plate 41A is moved so that the edge 42A is located at the peeling position PP, and the second peeling plate 41B is moved to the retracted position indicated by the solid line in FIG. Thereafter, when the operator sets the original fabric RS as shown in FIG. 1 and an operation start signal is input through an operation panel (not shown) or the like, the peeling angle adjusting means 3 drives the linear motion motor 31 and the first The peeling angle adjusting roller 33 is lowered so that the peeling sheet RL is in contact with the surface 43A. Thereby, the bending angle of the release sheet RL becomes the angle θmin. Next, the feeding means 2 drives the rotation motor 23 and a driving device (not shown) to feed the raw material RS, and the peeling tip portion of the adhesive sheet AS is peeled by a predetermined length by the first peeling edge 42A, and the tip portion is detected. When detected by the means 5, the rotation motor 23 and the driving device (not shown) are stopped, and a standby state is set.

Here, for example, when the adhesive sheet AS is difficult to peel from the release sheet RL, the operator can select the first release plate 41A as described above so that the folding angle of the release sheet RL becomes as small as possible. it can.
Further, for example, when the release sheet RL is made of a material that is easily cut or is made of a brittle material, the operator operates an operation panel (not shown) so that the bending angle of the release sheet RL becomes as large as possible. Both the first peeling plate 41A and the second peeling plate 41B can be selected as a peeling medium to be used via the like. In this case, the peeling means 4 drives the linear motors 48A and 48B, and as shown in FIG. 2A, the first and second peeling edges 42A and 42B are positioned at the peeling position PP. 2 Move the peeling plates 41A and 41B. Thereby, the bending angle of the release sheet RL becomes an angle θmax larger than the angle θmin.
Further, for example, in the case where the above-mentioned intermediate sheet, that is, the adhesive sheet AS tends to be difficult to peel from the release sheet RL, and the release sheet RL tends to be cut easily, the operator The second peeling plate 41B can be selected as a peeling medium to be used via an operation panel (not shown) or the like so that the bending angle is intermediate. In this case, the peeling means 4 drives the direct acting motors 48A and 48B, and as shown in FIG. 2B, the second peeling plate 41B is moved so that the second peeling edge 42B is located at the peeling position PP. The first peeling plate 41A is moved to the retracted position indicated by the solid line in FIG. Next, the peeling angle adjusting unit 3 drives the linear motion motor 31 to lower the peeling angle adjusting roller 33 so that the peeling sheet RL is in contact with the fourth surface 44B. Thereby, the bending angle of the release sheet RL becomes an angle θmid that is larger than the angle θmin and smaller than the angle θmax.

  The feeding means 2 drives the rotary motor 23 and a driving device (not shown) to feed the original fabric RS for a predetermined length (one pitch of the adhesive sheet AS) or for a predetermined time (one adhesive sheet AS). When the detection means 5 does not detect the adhesive sheet AS in spite of the time), the adhesive sheet AS is folded together with the release sheet RL as shown in FIG. Since it can be determined that the adhesive sheet AS has not been peeled off by 41A, the peeling means 4 performs the tip part peeling operation after the feeding means 2 stops driving the rotation motor 23 and the driving device (not shown). That is, the peeling means 4 drives the linear motion motor 48B from the state of FIG. 3A to move the second peeling plate 41B along the peeling direction DA, and as shown in FIG. The second peeling edge 42B is positioned at the front position PQ ahead of (the first peeling edge 42A), and the bent portions of the adhesive sheet AS and the release sheet RL are once stretched (the adhesive sheet AS is once straightened). At this time, the feeding means 2 may drive the rotation motor 23 and a driving device (not shown) to convey the release sheet RL in the direction opposite to the direction in which the release sheet RL is collected, or drive the rotation motor 23 and a driving device (not shown). The release sheet RL may be stretched without any problem. Next, the peeling means 4 drives the linear motion motor 48B and returns the second peeling plate 41B to the retracted position as shown in FIG. 3C, whereby the peeling sheet RL is bent again at the first peeling edge 42A. When the bending opportunity increases, the peeling tip portion of the adhesive sheet AS is easily peeled from the peeling sheet RL, and when the peeling tip portion of the adhesive sheet AS is detected by the detection means 5, the standby state is set.

  When the transfer means (not shown) places the wafer WF on the support surface 71 of the table 72, the support means 7 drives the suction means (not shown), sucks and holds the wafer WF, and drives the linear motor 74 to drive the table. 72 is conveyed in the left direction. Then, in accordance with the conveyance of the table 72, the feeding means 2 drives the rotation motor 23 and a driving device (not shown) to feed out the raw fabric RS in synchronization with the conveyance of the table 72, and the first release plate 41A releases the release sheet. The adhesive sheet AS is peeled off from the RL, and the pressing roller 6 presses and attaches the adhesive sheet AS to the wafer WF. Thereafter, the wafer WF to which the adhesive sheet AS is attached is transferred to the next process by a transfer means (not shown), the table 72 returns to the position shown in FIG. 1, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, when it is determined via the detection means 5 that the adhesive sheet AS has not been peeled, the first and second peeling plates 41A and 41B are moved in the direction along the peeling direction DA. Providing a sheet peeling device 10 that can positively increase the chances of bending the release sheet RL, quickly form a trigger for peeling the adhesive sheet AS, and suppress the occurrence of peeling failure of the adhesive sheet AS. can do.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  For example, as shown in FIG. 4, a sheet peeling apparatus 10 </ b> G in which a peeling means 4 </ b> G configured only by a first peeling plate 41 </ b> A and a linear motion motor 48 </ b> A is provided instead of the peeling means 4 may be adopted. In such a configuration, as shown in FIG. 4A, when it is determined via the detecting means 5 that the adhesive sheet AS has not been peeled off by the first peeling plate 41A, the peeling means 4G becomes a linear motion motor. 48A is driven, the first peeling plate 41A is moved in the direction along the peeling direction DA of the adhesive sheet AS, and the first peeling edge 42A is positioned at the front position PQ as shown in FIG. Similarly, the bent portions of the adhesive sheet AS and the release sheet RL are once stretched. Next, the peeling means 4G drives the direct acting motor 48A to return the first peeling plate 41A to the peeling position PP as shown in FIG. Even with such a configuration, it is possible to increase the chances of bending the release sheet RL, quickly form a release trigger of the adhesive sheet AS, and suppress occurrence of defective release of the adhesive sheet AS.

Further, the tip portion peeling operation may be repeated a plurality of times until the adhesive sheet AS is detected by the detection means 5.
Furthermore, the tip part peeling operation is a stroke corresponding to twice a predetermined stroke, for example, a distance from the peeling position PP to the front position PQ (hereinafter referred to as “phase distance”) from the state shown in FIG. The second release plate 41B may be returned to the retracted position after the second release plate 41B has been moved back and forth one or more times.
Further, in the tip part peeling operation, after the second peeling edge 42B is moved to the peeling position PP from the state shown in FIG. 3B, for example, the first peeling plate 41A is reciprocated once in a stroke corresponding to the phase distance. You may return the 2nd peeling plate 41B to a retracted position after making it advance or retract.
Further, in the tip part peeling operation, after the second peeling edge 42B is positioned at the peeling position PP from the state shown in FIG. 3A, for example, the first peeling plate 41A is moved forward and backward by one stroke with a stroke corresponding to the phase distance. In addition, for example, the second peeling plate 41B may be returned to the retracted position after performing a reciprocating operation of moving the second peeling plate 41B back and forth once by a stroke corresponding to the phase distance one or more times.
In addition, the tip part peeling operation is performed not only when the adhesive sheet AS is peeled off by the first peeling plate 41A, but also when peeling off by the second peeling plate 41B or by the first peeling plate 41A and the second peeling plate 41B. Also when performing, it can carry out similarly to the above-mentioned.
Furthermore, the stroke distance of each of the first and second peeling plates 41A and 41B in the tip peeling operation can be set to an arbitrary distance regardless of the phase distance.

Further, the peeling medium may be composed of a linear member or a roller that is not a plate shape.
Further, three or more release plates, linear members, and rollers, which are release media, may be provided.
Moreover, you may comprise the peeling medium of this invention combining arbitrarily a peeling plate, a linear member, and a roller.
Further, when a plurality of peeling media are provided, the tip portion peeling operation can be performed with at least two peeling media.

Further, the angle of the first peeling edge 42A and the angle of the second peeling edge 42B may be the same angle or different angles.
Further, one of the first peeling plate 41A and the second peeling plate 41B may be fixed to the frame 27 so as not to move.

Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, an appropriate heating means for heating the adhesive sheet AS. May be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, earthenware, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.
In addition to the sheet sticking apparatus 1, the sheet peeling apparatus 10 may be employed in other apparatuses such as a label issuing apparatus that peels and issues a label as an adhesive sheet from a release sheet.

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).

2 ... Feeding means 4, 4G ... Peeling means 5 ... Detection means 10, 10G ... Sheet peeling devices 41A, 41B ... First and second peeling plates (peeling media)
48A, 48B ... linear motion motor (peeling medium moving means)
AS ... Adhesive sheet DA ... Release direction RL ... Release sheet RS ... Original fabric

Claims (3)

A feeding means for feeding out the original fabric in which the adhesive sheet is temporarily attached to one surface of the strip-shaped release sheet;
Peeling means for peeling the adhesive sheet from the release sheet by bending the release sheet part on which the adhesive sheet transported in a predetermined peeling direction by the feeding is temporarily attached via a release medium;
Detecting means capable of detecting that the adhesive sheet has been peeled off by the peeling means;
The peeling means includes a peeling medium moving means for moving the peeling medium in a direction along the peeling direction when it is determined via the detection means that the adhesive sheet has not been peeled by the peeling medium. The sheet peeling apparatus characterized by the above-mentioned. The peeling means has a plurality of peeling media,
The sheet peeling apparatus according to claim 1, wherein the peeling medium moving unit moves at least one of the plurality of peeling media in a direction along the peeling direction. An unwinding step of unwinding the original fabric with the adhesive sheet temporarily attached to one surface of the strip-shaped release sheet;
A peeling step of peeling the adhesive sheet from the release sheet by bending the release sheet portion on which the adhesive sheet transported in a predetermined peeling direction by the feeding is temporarily attached via a release medium;
When the said adhesive sheet is not peeled in the said peeling process, the process of moving the said peeling medium to the direction along the said peeling direction is performed, The sheet peeling method characterized by the above-mentioned.

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