JP2011011890A - Sheet supply device, supply method, sheet sticking device and sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet supply device and a supply method capable of surely separating and supplying an adhesive sheet from a separation sheet, a sheet sticking device and a sticking method capable of efficiently sticking the adhesive sheet to a coating body in a short time.SOLUTION: When separating and supplying a mount sheet MS as the adhesive sheet by the sheet supply device 3, while vibrating a peel plate 71 by a vibrating body 72, among a delivered original roll R, the separation sheet RL is deflected and carried by the peel plate 71, and the mount sheet MS is separated ad supplied from the separation sheet RL. The sheet sticking device 1 presses and sticks the mount sheet MS separated by the sheet supply device 3 in this way to a wafer W by a pressing roller 4.

Description

  The present invention relates to a sheet feeding apparatus and a feeding method for feeding an adhesive sheet, and a sheet sticking apparatus and a sticking method for sticking an adhesive sheet to an adherend.

  2. Description of the Related Art Conventionally, in a semiconductor manufacturing process, a sheet supply device that supplies a protective tape to be applied to the surface of a semiconductor wafer (hereinafter simply referred to as a wafer), or an attachment to a wafer and a ring frame in order to integrate the wafer and the ring frame A sheet supply device that supplies an adhesive sheet, such as a sheet supply device that supplies a mounting sheet, is used. Moreover, the adhesive sheet is provided with such a sheet supply device, and the pressure roller rolls on the adhesive sheet while pressing the adhesive sheet fed toward the surface of the wafer by the sheet supply device. A sheet sticking device for sticking the tape to a wafer or a ring frame is also used.

  Among these, as a sheet supply device used in the semiconductor manufacturing process, the original sheet in which a protective tape or a mounting sheet as an adhesive sheet is temporarily attached to one surface of the release sheet is fed out, and the original release sheet is fed out. It is known that the adhesive sheet is peeled off and supplied toward a wafer or a ring frame.

  On the other hand, in addition to those used in the semiconductor manufacturing process, there is known a sheet supply apparatus that peels off and supplies a printing label as an adhesive sheet from a release sheet (see, for example, Patent Document 1). In the sheet supply apparatus described in Patent Document 1, the printing label is fed out by a feeding mechanism in a state temporarily attached to the release sheet at a predetermined interval, and after printing on the printing label in a state temporarily attached to the release sheet, By folding the release sheet at the tip position of the peel plate, the printed label is peeled from the release sheet and supplied.

JP 2002-326615 A

  By the way, in the conventional sheet supply apparatus described in Patent Document 1, when the label as the adhesive sheet is not peeled off by the peel plate, the peeling operation is repeated again after the original fabric is conveyed in the reverse direction. Has been. However, depending on the type and nature of the adhesive sheet, there are those in which the adhesive sheet is difficult to peel from the release sheet. Therefore, the peeling operation must be repeated many times for such an adhesive sheet. For this reason, there is a problem that the supply cannot be made in time for the supply request of the adhesive sheet. Moreover, in the sheet sticking apparatus provided with such a sheet feeding apparatus, there is a problem that the sticking process takes a long time due to a delay in feeding the adhesive sheet.

  An object of the present invention is to provide a sheet feeding apparatus and a feeding method that can reliably peel and supply an adhesive sheet from a release sheet, and a sheet sticking apparatus and a sticking method that can stick an adhesive sheet to an adherend efficiently in a short time. There is.

  In order to achieve the above object, the sheet supply apparatus of the present invention is a sheet supply apparatus for supplying an adhesive sheet, and a feeding means for feeding out a raw material in which the adhesive sheet is temporarily attached to one surface of a release sheet; Peeling means for peeling the adhesive sheet from the peeling sheet of the original fabric fed by the feeding means, and the peeling means redirects and conveys the peeling sheet out of the original fabric. A configuration in which a peeling member to be peeled and a vibration means for vibrating the peeling member at a predetermined frequency is employed.

  Further, the sheet sticking device of the present invention is a sheet sticking device for sticking an adhesive sheet to an adherend, and a feeding means for feeding out a raw material in which the adhesive sheet is temporarily attached to one surface of a release sheet; A peeling means for peeling the adhesive sheet from the release sheet of the original fabric fed by the feeding means; and a pressing means for pressing and sticking the adhesive sheet to the adherend. A configuration is adopted in which a peeling member that peels and conveys the adhesive sheet by turning and transporting the peeling sheet of the original fabric, and a vibration means that vibrates the peeling member at a predetermined frequency are adopted.

At this time, it is preferable that the sheet feeding device and the sheet sticking device of the present invention include a vibration direction changing unit that changes a vibration direction of the peeling member by the vibration unit.
In the sheet supply device and the sheet sticking device of the present invention, it is preferable that the peeling unit includes an amplitude changing unit that changes an amplitude of the peeling member by the vibration unit.

  On the other hand, the sheet supply method of the present invention is a sheet supply method for supplying an adhesive sheet, which feeds out the original fabric with the adhesive sheet temporarily attached to one surface of the release sheet, and sets the release member at a predetermined frequency. The adhesive sheet is peeled from the release sheet and supplied by turning and transporting the release sheet by the release member while being vibrated.

  Further, the sheet sticking method of the present invention is a sheet sticking method for sticking an adhesive sheet to an adherend. The raw material with the adhesive sheet temporarily attached to one surface of the release sheet is fed out, and a peeling member is provided. While the vibrating sheet is vibrated at a predetermined frequency, the adhesive sheet is peeled off from the release sheet by turning and transporting the release sheet of the unrolled raw material by the release member, and the peeled adhesive sheet is applied to the covered sheet. It is characterized in that it is applied to the body by pressing.

  According to the present invention as described above, when feeding the original fabric with the adhesive sheet temporarily attached to the release sheet, the release sheet is peeled from the fed original fabric while vibrating the release member at a predetermined frequency. By carrying out turning conveyance by the member for use, the vibration of the peeling member is propagated to the adhesive layer of the adhesive sheet via the release sheet, and the peeling of the adhesive sheet can be promoted. That is, when the adhesive sheet is also turned along with the release sheet that is turned and conveyed by the release member, vibration (energy) of the release member is generated and the adhesive sheet is released from the release sheet. For this reason, the peelability of the adhesive sheet from the release sheet can be improved, and the adhesive sheet can be reliably peeled from the release sheet. Therefore, the adhesive sheet can be reliably supplied according to the supply request. And if such a sheet supply apparatus is utilized for a sheet sticking apparatus, an adhesive sheet can be stuck to an adherend efficiently in a short time.

  In addition, if means for changing the vibration direction of the peeling member is provided, the vibration direction of the peeling member is set to an appropriate direction according to the type, nature, material, thickness dimension, hardness, etc. of the adhesive sheet or release sheet. By changing, it becomes easy to peel an adhesive sheet from a peeling sheet, and an adhesive sheet can be supplied still more reliably. Furthermore, if a vibration width changing means for changing the amplitude of the peeling member is provided, the vibration width of the peeling means is appropriately set according to the type, nature, material, thickness dimension, hardness, etc. of the adhesive sheet or release sheet. By changing to, the peelability of the adhesive sheet from the release sheet can be improved.

The fragmentary sectional view of the sheet sticking device concerning one embodiment of the present invention. The side view of the peeling means in the sheet sticking apparatus of FIG. Operation | movement explanatory drawing of the sheet sticking apparatus of FIG.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the sheet sticking apparatus 1 of the present embodiment sticks a mounting sheet MS as an adhesive sheet to a wafer W as an adherend and a ring frame RF, and the mounting sheet MS The ring frame RF is integrated. Here, in the wafer W, a circuit is formed on the front surface WA located on the lower side in FIG. 1 and a protective sheet S is attached, and a mounting sheet MS is attached to the back surface WB of the wafer W. The back surface WB of the wafer W to which the mounting sheet MS is affixed and the upper surface RA of the ring frame RF are referred to as the adherend surface AS. The mounting sheet MS has an adhesive layer laminated on one surface of the base sheet, and is pre-cut into an outer shape matching the ring frame RF, and is previously provided as an original fabric R temporarily attached to the release sheet RL. Have been prepared.

  The sheet sticking apparatus 1 is supplied with a table 2 on which the wafer W and the ring frame RF are placed and held, and a sheet supply apparatus 3 that peels and supplies the mounting sheet MS from the release sheet RL of the original fabric R. A pressing roller 4 as pressing means for pressing and attaching the mounting sheet MS to the adherend surface AS, and a single-axis robot as moving means for moving the table 2 relative to the sheet supply device 3 in the left-right direction in FIG. 5.

  The table 2 has a holding surface 21 for sucking and holding the wafer W from the protective sheet S side by a plurality of suction ports (not shown), and the ring frame RF is lowered by one step outside the holding surface 21 by a plurality of suction ports (not shown). And a stepped portion 22 for sucking and holding. The level difference between the holding surface 21 and the stepped portion 22 is set to the difference in thickness dimension between the wafer W and the protective sheet S and the ring frame RF, and the back surface WB of the wafer W supported by the table 2 and the top surface of the ring frame RF. RA is configured to be located in the same plane.

  The sheet supply device 3 includes a feeding unit 6 as a feeding unit that feeds the original fabric R, and a peeling unit 7 as a peeling unit that peels the mounting sheet MS from the peeling sheet RL of the fed raw fabric R. Has been.

  The whole feeding means 6 is supported by the base plate 8. The feeding means 6 includes a support roller 61 that supports the roll R in a roll shape, two guide rollers 62 and 63 that guide the roll R, and a drive roller 65 that is driven by a rotation motor 64. A pinch roller 66 that sandwiches the release sheet RL between the drive roller 65 and a recovery roller 67 that recovers the release sheet RL by a driving means (not shown).

  As shown in FIG. 2, the peeling means 7 includes a peel plate 71 as a peeling member that folds the release sheet RL out of the unrolled raw fabric R and peels the mounting sheet MS from the release sheet RL, and a peel plate A vibrating body 72 as a vibrating means for vibrating 71, a bearing holder 73 provided on an output shaft 72A of the vibrating body 72 and connected to the peel plate 71, and an arcuate insertion groove formed in the base plate 8 A connecting shaft 74 inserted through 81 and connected to the main body of the vibrating body 72, a connecting arm 75 having the connecting shaft 74 fixed to one end thereof, and an output shaft 76A connected to the other end of the connecting arm 75. A rotation motor 76 capable of controlling the rotational position is provided.

  As shown in FIG. 2, the peel plate 71 has a support shaft 71 </ b> A on the side surface, and the support shaft 71 </ b> A is supported by an elastic support member 82 provided on the base plate 8, thereby causing the peel plate 71 to vibrate. It is supported by the base plate 8 as possible. The peel plate 71 has a shaft 71B, and the vibrating body 72 is connected to the peel plate 71 so as to be able to rotate and move by the bearing holder 73 holding the shaft 71B.

  The vibration body 72 includes a vibration source 72B such as various vibration motors and piezoelectric elements (electrostrictive elements) inside the main body, and the vibration of the vibration source 72B causes the output shaft 72A to reciprocate in a direction in which the main body protrudes from and protrudes from the main body. It has become. As this vibrating body 72, for example, a member having a vibration performance with a frequency (frequency) of 0.01 to 10 kHz and a vibration width of 1 μm to 10 mm can be applied, and a bearing holder 73 is connected to the output shaft 72A. The connected peel plate 71 is vibrated at a predetermined frequency and amplitude set appropriately.

  The vibrating body 72 includes amplitude changing means 72C that can arbitrarily set the vibration width, and is configured so that the amplitude of the output shaft 72A can be changed. That is, the vibrating body 72 is configured to change the amplitude of the reciprocating vibration of the output shaft 72A in accordance with an operation signal from an operating means (not shown), thereby changing the amplitude of the peel plate 71. .

  In the peeling means 7 described above, the rotation motor 76 is coupled to the base plate 8 via the support arm 77, and the rotation center of the output shaft 76A of the rotation motor 76 is coaxial with the axis of the shaft 71B of the peel plate 71. Is provided. As a result, the vibrating body 72, the connecting shaft 74, and the connecting arm 75 are rotatable about the output shaft 76A and the shaft 71B of the peel plate 71 by the rotation of the output shaft 76A of the rotating motor 76. Yes. The connecting shaft 74, the connecting arm 75, and the rotation motor 76 constitute a vibration direction changing means, and the vibration direction changing means changes the vibration direction A of the peel plate 71 to an arbitrary direction as shown in FIG. It can be done. Accordingly, for example, as shown in FIG. 3, the vibration direction A of the peel plate 71 is configured to be changeable so as to vibrate in a direction parallel to the supply direction of the mounting sheet MS.

  The single-axis robot 5 is provided below the table 2 so as to extend in the left-right direction in FIG. 1, and can slide the table 2 in the left-right direction in FIG. 1 by slidingly driving a slider 51 fixed to the lower surface of the table 2. It is configured. Then, the mounting sheet MS is affixed to the adherend surface AS by moving the table 2 in the left direction in FIG. 1 and pressing the mounting sheet MS supplied from the sheet supply device 3 with the pressing roller 4. It has become so.

  In the sheet sticking apparatus 1 described above, as a procedure for sticking the mounting sheet MS to the wafer W and the ring frame RF, first, the original fabric R wound around the support roller 61 is passed as shown in FIG. The lead end is fixed to the collection roller 67. Then, when an activation command is input by an operating means (not shown), the vibrating body 72 starts to drive, the peel plate 71 is vibrated, and the driving roller 65 is driven by the rotation motor 64 to The leading edge of the mounting sheet MS is detected and stopped by a detection means (not shown) at a predetermined position below the pressing roller 4 and enters a standby state (see FIG. 1). At this time, even if the mounting sheet MS tries to turn along with the release sheet RL that is turned and conveyed by the peel plate 71, the vibration (energy) is caused by the vibration of the peel plate 71, The mounting sheet MS is reliably peeled from the release sheet RL. In the present embodiment, the vibration direction A of the peel plate 71 is set by the vibration direction changing means so as to vibrate in a direction parallel to the supply direction of the mounting sheet MS as shown in FIG. However, the vibration direction A can be changed to an appropriate direction according to the type, nature, material, thickness dimension, hardness, and the like of the mounting sheet MS and the release sheet RL.

  Subsequently, the ring frame RF is placed on the step 22 of the table 2, and the wafer 2 with the protective sheet S attached is placed on the table 2 at a predetermined position in the opening of the ring frame RF so that the protective sheet S faces down. When they are placed on the holding surface 21, they are sucked and held.

  When the adsorption of the ring frame RF and the wafer W is confirmed, the table 2 is moved to the left in the figure by the single-axis robot 5, and the ring frame RF is moved to a predetermined position (a position below the pressing roller 4) by a detection means (not shown). When it is detected that the pressure has reached, the pressing roller 4 is lowered, and the mounting sheet MS is pressed against the ring frame RF by the pressing roller 4 to be pasted. Then, in synchronization with the movement of the table 2 by the single-axis robot 5, the sheet supply device 3 feeds the original fabric R so that the mounting sheet MS is pressed against the upper surface RA of the ring frame RF and the rear surface WB of the wafer W to be pasted. To do. Note that when the mounting sheet MS is peeled off from the release sheet RL by the peel plate 71 and enters the standby state as described above, the vibrator 72 may stop driving, or the mounting operation of the mounting sheet MS may be performed. The vibrating body 72 may be driven inside.

  When the mounting of the mounting sheet MS is completed as described above and the wafer W and the ring frame RF are integrated via the mounting sheet MS, the pressing roller 4 is raised and the table 2 is moved by the single-axis robot 5. Is moved to the right in the figure. Thereafter, the sheet supply device 3 is peeled off from the release sheet RL by the peel plate 71 by the same operation as described above, and again enters the standby state. Then, the wafer W and the ring frame RF can be detached from the table 2 by releasing the suction between the step portion 22 and the holding surface 21. Next, the wafer W integrated with the ring frame RF is conveyed to a subsequent process, for example, a peeling process of the protective sheet S or the like by a conveyance unit (not shown).

According to this embodiment as described above, the following effects are obtained.
That is, when the mounting sheet MS is supplied by the sheet supply device 3, the mounting sheet MS can be easily peeled from the release sheet RL by vibrating the peel plate 71 by the vibrating body 72. For this reason, it is possible to reliably supply the mounting sheet MS without repeatedly performing the peeling operation.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  For example, in the above-described embodiment, the case where the adherend is the wafer W or the ring frame RF has been described. However, the adherend is not limited thereto, and the ring frame RF may not be provided. In addition, other plate-like members such as a glass plate, a steel plate, a resin plate, and the like, and other than the plate-like member can also be targeted. Examples of the semiconductor wafer include a silicon wafer and a compound wafer. The adhesive sheet to be attached to such an adherend is not limited to the mounting sheet MS, but can be attached to an adherend of any use and shape, such as a protective sheet, any other sheet, film, tape, etc. Sheet can be applied.

  Further, heating means such as a heater can be provided inside the peel plate 71. In this case, since the adhesive layer of the mounting sheet MS can be softened by heating the peel plate 71 with the heat of the heater, the peelability from the release sheet RL can be further improved. This heating means may be constituted by hot air, hot water, a discharge heater, an infrared heater or the like in addition to the heater.

Furthermore, the vibration means may be a known ultrasonic vibration device, a known vibrator using an electric motor or air, and the like, and is limited to this as long as the peel plate 71 can vibrate. There is no.
In addition, the vibration direction changing unit may adopt a configuration other than the above-described embodiment as long as the vibration direction of the vibration unit can be changed.
Furthermore, the frequency (frequency) and vibration width of the vibration means are not limited to the numerical values of the above-described embodiment, but depending on the type, nature, material, thickness dimension, hardness, etc. of the adhesive sheet or release sheet. Appropriate frequency and vibration width can be set.

Further, the vibration direction A of the peel plate 71 is arbitrarily set via the vibration direction changing means such that the angle θ (see FIG. 3) formed with the adherend surface AS is 5 °, 10 °, 15 °,. Can do.
In the above embodiment, the vibration direction A of the peel plate 71 by the vibration direction changing means can be changed from the up and down direction to the left and right direction in FIG. You may comprise so that a vibration direction can be changed. With such a configuration, the vibration direction can be changed in any direction within the three-dimensional space.

  In the said embodiment, although the peel plate 71 turned up the peeling sheet | seat RL among the unfolded raw fabric R, it is not restricted to this. That is, the peel plate 71 does not necessarily have an acute-angle shape at the part where the mounting sheet MS is peeled from the release sheet RL, and may have an obtuse angle shape. In addition to the peel plate 71 as the peeling member, other members such as rollers may be used as long as the peeling sheet RL can be redirected and conveyed out of the fed raw fabric R. Good.

DESCRIPTION OF SYMBOLS 1 Sheet sticking apparatus 3 Sheet supply apparatus 4 Pressing roller (pressing means)
6 Feeding means 7 Peeling means 71 Peel plate (peeling member)
72 Vibrating body (vibration means)
72C Amplitude changing means 74 Connecting shaft (vibration direction changing means)
75 Connecting arm (vibration direction changing means)
76 Rotating motor (vibration direction changing means)
R Original fabric MS Mounting sheet (adhesive sheet)
RL release sheet

Claims (6)

A sheet supply device for supplying an adhesive sheet,
A feeding means for feeding out the original fabric in which the adhesive sheet is temporarily attached to one surface of the release sheet;
Peeling means for peeling the adhesive sheet from the peeling sheet of the original fabric fed by the feeding means,
The peeling means includes
A peeling member that peels off the adhesive sheet by turning and conveying the release sheet of the original fabric,
A sheet feeding apparatus comprising: a vibrating unit that vibrates the peeling member at a predetermined frequency.   The sheet feeding apparatus according to claim 1, wherein the peeling unit includes a vibration direction changing unit that changes a vibration direction of the peeling member by the vibration unit.   The sheet feeding apparatus according to claim 1, wherein the peeling unit includes an amplitude changing unit that changes an amplitude of the peeling member by the vibration unit. A sheet supply method for supplying an adhesive sheet,
Feed out the original fabric with the adhesive sheet temporarily attached to one side of the release sheet,
The adhesive sheet is peeled from the release sheet and supplied by turning and transporting the release sheet by the release member while feeding the release member at a predetermined frequency. A sheet supply method. A sheet sticking device for sticking an adhesive sheet to an adherend,
A feeding means for feeding out the original fabric in which the adhesive sheet is temporarily attached to one surface of the release sheet;
Peeling means for peeling the adhesive sheet from the release sheet of the original fabric fed by the feeding means;
Pressing means for pressing and sticking the adhesive sheet to the adherend,
The peeling means includes
A peeling member that peels off the adhesive sheet by turning and conveying the release sheet of the original fabric,
A sheet sticking apparatus comprising: an oscillating means that vibrates the peeling member at a predetermined frequency. A sheet sticking method for sticking an adhesive sheet to an adherend,
Feed out the original fabric with the adhesive sheet temporarily attached to one side of the release sheet,
While the peeling member is vibrated at a predetermined frequency, the adhesive sheet is peeled off from the peeling sheet by turning and transporting the peeling sheet by the peeling member among the unrolled raw material,
A sheet sticking method, wherein the peeled adhesive sheet is pressed against the adherend and stuck.

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