JP6236206B2 - Sheet peeling apparatus and peeling method - Google Patents

Description

  The present invention relates to a sheet peeling apparatus and a peeling method.

2. Description of the Related Art Conventionally, a sheet pasting apparatus for pasting an adhesive sheet on a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) in a semiconductor manufacturing process is known (see, for example, Patent Document 1).
The sheet sticking device described in Patent Document 1 includes a peeling plate (peeling medium) having a sharp region and a non-sharp region with different thicknesses at the tip.

JP 2011-20690 A

  However, in the conventional sheet sticking apparatus as described in Patent Document 1, since the peeling plate moves in a direction crossing the feeding direction of the original fabric, the peeling plate is allowed to protrude greatly from the side edge of the original fabric. It is necessary to secure a space, and there is a disadvantage that the apparatus becomes large.

  The objective of this invention is providing the sheet | seat peeling apparatus and peeling method which can suppress the enlargement of an apparatus and can change the bending angle of a peeling sheet.

In order to achieve the above object, the sheet peeling apparatus of the present invention is a sheet peeling apparatus that peels an adhesive sheet from an original sheet in which an adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet, and feeds the original sheet. And a peeling means having a peeling medium for bending the peeling sheet conveyed in the predetermined peeling direction by the feeding and peeling the adhesive sheet from the peeling sheet, and the peeling medium includes the sheet peeling A plurality of peeling devices are mounted at the same time, and the peeling means is provided so that one folding angle can be selected from a plurality of folding angles by moving at least one of the plurality of peeling media in a direction along the peeling direction. The structure of having the peeling medium moving means provided is adopted.

In this case, a sheet peeling apparatus of the present invention, the plurality of peeling medium, wherein the bending angle folding the release sheet are set to different angles, it is not preferable.

On the other hand, the sheet peeling method of the present invention is a sheet peeling method in a sheet peeling apparatus that peels an adhesive sheet from an original fabric in which an adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet, and the step of feeding out the original fabric And bending the release sheet conveyed in the predetermined peeling direction by the feeding with a release medium, and peeling the adhesive sheet from the release sheet, and a plurality of the release media are simultaneously applied to the sheet peeling apparatus. And a step of selecting one bending angle from a plurality of bending angles by moving at least one of the plurality of peeling media in a direction along the peeling direction of the adhesive sheet. Is adopted.

  According to the present invention as described above, since the folding angle of the release sheet can be changed by moving the plurality of release media in the direction along the release direction of the adhesive sheet, the release medium is the side edge of the original fabric. It is not necessary to secure a space that allows protrusion from the edge, and it is possible to provide a sheet peeling apparatus and a sheet peeling method that can suppress an increase in size of the apparatus and change a folding angle of the release sheet.

At this time, if the folding angles of the release sheets in the plurality of release media are set to different angles, an appropriate folding angle corresponding to the original fabric can be selected.
Furthermore, if a plurality of release media function as a reinforcing material by contacting each other, even when the thickness of each release media is reduced, they can be prevented from being bent by the tension of the release sheet, and the adhesive sheet Debonding failure can be prevented.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. (A), (B) is operation | movement explanatory drawing when changing a bending angle. (A)-(C) are operation | movement explanatory drawings when an adhesive sheet is not peeled. (A), (B) is operation | movement explanatory drawing of the sheet sticking apparatus which concerns on the modification of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, for example, when directions such as up, down, left, right, front, back, etc. are shown, all of FIG. The direction from the appropriate direction) is the reference, and the top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction perpendicular to the page. And

  In FIG. 1, a sheet sticking device 1 includes a sheet peeling device 10 for peeling an adhesive sheet AS from an original fabric RS in which an adhesive sheet AS having an adhesive surface AD is temporarily attached to one surface of a strip-shaped release sheet RL; A pressing roller 6 as pressing means for pressing and adhering the adhesive sheet AS to a wafer WF as an adherend, and a supporting means 7 for supporting the wafer WF and relatively moving the wafer WF and the pressing roller 6 are provided. ing.

The sheet peeling apparatus 10 includes a feeding unit 2 that feeds out the original fabric RS, a peeling angle adjusting unit 3 that adjusts a peeling angle of the original fabric RS, and an adhesive sheet AS that is conveyed in a predetermined peeling direction DA by the feeding out. Peeling means 4 that peels off from the peeling sheet RL, and detection means 5 constituted by an optical sensor, an imaging device or the like that can detect that the adhesive sheet AS has been peeled off from the peeling sheet RL.
The feeding means 2 sandwiches the release sheet RL between a support roller 21 that supports the original fabric RS, a guide roller 22 that guides the original fabric RS, and a drive roller 24 that is driven by a rotation motor 23 as a drive device. A pinch roller 25 and a collection roller 26 that is driven by a driving device (not shown) and collects the release sheet RL are provided, and the whole is supported by a frame 27.

  The peeling angle adjusting means 3 includes a linear motion motor 31 as a driving device, and a peeling angle adjusting roller 33 rotatably supported by a bracket 32 supported by an output shaft 31A of the linear motion motor 31.

The peeling means 4 includes a first and second peeling plates 41A and 41B serving as a plurality of peeling media for folding the peeling sheet RL, and at least one of the first and second peeling plates 41A and 41B in the peeling direction DA of the adhesive sheet. Linear motors 48A and 48B as drive devices that are peeling medium moving means for moving in the direction along the vertical axis, and first and second peeling plates 41A and 41B on output shafts 49A and 49B of the linear motors 48A and 48B, respectively. Is supported.
The first peeling plate 41A includes a first surface 43A and a second surface 44A that intersect at the first peeling edge 42A, and the second peeling plate 41B includes a third surface 43B and a fourth surface that intersect at the second peeling edge 42B. The second surface 44A and the fourth surface 44B are in contact with each other and function as a reinforcing material that reinforces each other.

  The support means 7 includes a table 72 having a support surface 71 capable of attracting and holding the wafer WF by a suction means such as a decompression pump or a vacuum ejector (not shown), and a linear motor 74 as a driving device for supporting the table 72 with a slider 73. I have.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, when the operator selects the first peeling plate 41A as a peeling medium to be used via an operation panel (not shown) or the like, the peeling means 4 drives the linear motion motors 48A and 48B, and as shown in FIG. The first peeling plate 41A is moved so that the edge 42A is located at the peeling position PP, and the second peeling plate 41B is moved to the retracted position indicated by the solid line in FIG. Thereafter, when the operator sets the original fabric RS as shown in FIG. 1 and an operation start signal is input through an operation panel (not shown) or the like, the peeling angle adjusting means 3 drives the linear motion motor 31 and the first The peeling angle adjusting roller 33 is lowered so that the peeling sheet RL is in contact with the surface 43A. Thereby, the bending angle of the release sheet RL becomes the angle θmin. Next, the feeding means 2 drives the rotation motor 23 and a driving device (not shown) to feed the raw material RS, the peeling tip portion of the adhesive sheet AS is peeled by a predetermined length by the first peeling edge 42A, and the peeling tip portion is When detected by the detection means 5, the drive of the rotation motor 23 and the driving device (not shown) is stopped and a standby state is set.

Here, for example, when the adhesive sheet AS is difficult to peel from the release sheet RL, the operator can select the first release plate 41A as described above so that the folding angle of the release sheet RL becomes as small as possible. it can.
Further, for example, when the release sheet RL is made of a material that is easily cut or is made of a brittle material, the operator operates an operation panel (not shown) so that the bending angle of the release sheet RL becomes as large as possible. Both the first peeling plate 41A and the second peeling plate 41B can be selected as a peeling medium to be used via the like. In this case, the peeling means 4 drives the linear motors 48A and 48B, and as shown in FIG. 2A, the first and second peeling edges 42A and 42B are positioned at the peeling position PP. 2 Move the peeling plates 41A and 41B. Thereby, the bending angle of the release sheet RL becomes an angle θmax larger than the angle θmin.
Further, for example, in the case where the above-mentioned intermediate sheet, that is, the adhesive sheet AS tends to be difficult to peel from the release sheet RL, and the release sheet RL tends to be cut easily, the operator The second peeling plate 41B can be selected as a peeling medium to be used via an operation panel (not shown) or the like so that the bending angle is intermediate. In this case, the peeling means 4 drives the direct acting motors 48A and 48B, and as shown in FIG. 2B, the second peeling plate 41B is moved so that the second peeling edge 42B is located at the peeling position PP. The first peeling plate 41A is moved to the retracted position indicated by the solid line in FIG. Next, the peeling angle adjusting unit 3 drives the linear motion motor 31 to lower the peeling angle adjusting roller 33 so that the peeling sheet RL is in contact with the fourth surface 44B. Thereby, the bending angle of the release sheet RL becomes an angle θmid that is larger than the angle θmin and smaller than the angle θmax.

  The feeding means 2 drives the rotary motor 23 and a driving device (not shown) to feed the original fabric RS for a predetermined length (one pitch of the adhesive sheet AS) or for a predetermined time (one adhesive sheet AS). When the detection means 5 does not detect the adhesive sheet AS in spite of the time), the adhesive sheet AS is folded together with the release sheet RL as shown in FIG. Since it can be determined that the adhesive sheet AS has not been peeled off by 41A, the peeling means 4 performs the tip part peeling operation after the feeding means 2 stops driving the rotation motor 23 and the driving device (not shown). That is, the peeling means 4 drives the linear motion motor 48B from the state of FIG. 3A to move the second peeling plate 41B along the peeling direction DA, and as shown in FIG. The second peeling edge 42B is positioned at the front position PQ ahead of (the first peeling edge 42A), and the bent portions of the adhesive sheet AS and the release sheet RL are once stretched (the adhesive sheet AS is once straightened). At this time, the feeding means 2 may drive the rotation motor 23 and a driving device (not shown) to convey the release sheet RL in the direction opposite to the direction in which the release sheet RL is collected, or drive the rotation motor 23 and a driving device (not shown). The release sheet RL may be stretched without any problem. Next, the peeling means 4 drives the linear motion motor 48B and returns the second peeling plate 41B to the retracted position as shown in FIG. 3C, whereby the peeling sheet RL is bent again at the first peeling edge 42A. When the bending opportunity increases, the peeling tip portion of the adhesive sheet AS is easily peeled from the peeling sheet RL, and when the peeling tip portion of the adhesive sheet AS is detected by the detection means 5, the standby state is set.

  When the transfer means (not shown) places the wafer WF on the support surface 71 of the table 72, the support means 7 drives the suction means (not shown), sucks and holds the wafer WF, and drives the linear motor 74 to drive the table. 72 is conveyed in the left direction. Then, in accordance with the conveyance of the table 72, the feeding means 2 drives the rotation motor 23 and a driving device (not shown) to feed out the raw fabric RS in synchronization with the conveyance of the table 72, and the first release plate 41A releases the release sheet. The adhesive sheet AS is peeled off from the RL, and the pressing roller 6 presses and attaches the adhesive sheet AS to the wafer WF. Thereafter, the wafer WF to which the adhesive sheet AS is attached is transferred to the next process by a transfer means (not shown), the table 72 returns to the position shown in FIG. 1, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, the folding angle of the release sheet RL can be changed by moving the first and second release plates 41A and 41B in the direction along the release direction DA of the adhesive sheet AS. It is not necessary to secure a space that allows the first and second release plates 41A and 41B to protrude from the side edge of the raw fabric RS, and the size of the apparatus can be suppressed, and the folding angle of the release sheet RL can be changed. The sheet peeling apparatus 10 can be provided.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  For example, as shown in FIG. 4A, the first and second linear members 41C and 41D may be adopted as the plurality of peeling media, or as shown in FIG. As an alternative, the first and second block-like members 41E and 41F may be employed. The first and second linear members 41C and 41D may be rollers.

Further, the angle of the first peeling edge 42A and the angle of the second peeling edge 42B may be the same angle or different angles.
Further, the first release plate 41A and the second release plate 41B may or may not be in contact with the second surface 44A and the fourth surface 44B. When the second surface 44A and the fourth surface 44B function as a reinforcing material that reinforces each other, even if the thickness of the first release plate 41A and the second release plate 41B is reduced, they are affected by the tension of the release sheet RL. It is possible to prevent bending, and it is possible to prevent problems such as defective peeling of the adhesive sheet AS and a peeling medium coming into contact with the adherend.
Also, each of the release plate, the linear member, the block member, and the rollers, which are release media, is provided with three or more, and the folding angle of the release sheet RL is smaller than the angle θmin, or larger than the angle θmax. The angle may be an intermediate angle between the angle θmin and the angle θmid, or may be an intermediate angle between the angle θmid and the angle θmax. When three or more peeling media are provided, the tip part peeling operation can be performed with at least two peeling media.
Furthermore, you may comprise the some peeling medium of this invention combining arbitrarily a peeling plate, a linear member, a block-shaped member, and a roller.
Moreover, you may change the bending angle of peeling sheet RL with respect to the case where a peeling front-end | tip part is peeled with respect to one adhesive sheet AS, and the case where parts other than a peeling front-end | tip part are peeled. In this case, for example, the peeling tip is peeled off by the first peeling plate 41A, and a part other than the peeling tip is peeled off by the first peeling plate 41A and the second peeling plate 41B, or the peeling tip is taken off by the second peeling plate 41B. An appropriate combination of the first peeling plate 41A and the second peeling plate 41B can be employed, such as peeling the portion other than the peeling tip with the first peeling plate 41A.
Further, when the bending angle is not set to the angle θmid shown in FIG. 2 (B), an equivalent to the guide roller 22 can be employed instead of the peeling angle adjusting means 3.
Further, one of the first peeling plate 41A and the second peeling plate 41B may be fixed to the frame 27 so as not to move.
Further, the peeling angle adjusting means may employ a shaft material, a blade material or the like instead of the peeling angle adjusting roller 33.

Further, the tip portion peeling operation may be repeated a plurality of times until the adhesive sheet AS is detected by the detection means 5.
Furthermore, the tip part peeling operation is a stroke corresponding to twice a predetermined stroke, for example, a distance from the peeling position PP to the front position PQ (hereinafter referred to as “phase distance”) from the state shown in FIG. The second release plate 41B may be returned to the retracted position after the second release plate 41B has been moved back and forth one or more times.
Further, in the tip part peeling operation, after the second peeling edge 42B is moved to the peeling position PP from the state shown in FIG. 3B, for example, the first peeling plate 41A is reciprocated once in a stroke corresponding to the phase distance. You may return the 2nd peeling plate 41B to a retracted position after making it advance or retract.
Further, in the tip part peeling operation, after the second peeling edge 42B is positioned at the peeling position PP from the state shown in FIG. 3A, for example, the first peeling plate 41A is moved forward and backward by one stroke with a stroke corresponding to the phase distance. In addition, for example, the second peeling plate 41B may be returned to the retracted position after performing a reciprocating operation of moving the second peeling plate 41B back and forth once by a stroke corresponding to the phase distance one or more times.
In addition, the tip part peeling operation is performed not only when the adhesive sheet AS is peeled off by the first peeling plate 41A, but also when peeling off by the second peeling plate 41B or by the first peeling plate 41A and the second peeling plate 41B. Also when performing, it can carry out similarly to the above-mentioned.
Furthermore, the stroke distance of each of the first and second peeling plates 41A and 41B in the tip peeling operation can be set to an arbitrary distance regardless of the phase distance.

Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, an appropriate heating means for heating the adhesive sheet AS. May be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, earthenware, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.
In addition to the sheet sticking apparatus 1, the sheet peeling apparatus 10 may be employed in other apparatuses such as a label issuing apparatus that peels and issues a label as an adhesive sheet from a release sheet.

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 2 ... Feeding means 4 ... Peeling means 10 ... Sheet peeling apparatus 41A, 41B ... 1st, 2nd peeling board (peeling medium)
41C, 41D ... 1st, 2nd linear member (peeling medium)
41E, 41F ... 1st, 2nd block-shaped member (peeling medium)
48A, 48B ... linear motion motor (peeling medium moving means)
AS ... Adhesive sheet DA ... Release direction RL ... Release sheet RS ... Original fabric

Claims (3)

In the sheet peeling apparatus for peeling the adhesive sheet from the original fabric in which the adhesive sheet is temporarily attached to one surface of the strip-shaped peeling sheet,
A feeding means for feeding out the original fabric;
A peeling means having a peeling medium for folding the release sheet conveyed in the predetermined peeling direction by the feeding and peeling the adhesive sheet from the release sheet;
A plurality of the release media are simultaneously attached to the sheet peeling apparatus,
The peeling means includes a peeling medium moving means provided such that one folding angle can be selected from a plurality of bending angles by moving at least one of the plurality of peeling media in a direction along the peeling direction. A sheet peeling apparatus comprising:   The sheet peeling apparatus according to claim 1, wherein the plurality of peeling media are set to have different bending angles at which the peeling sheet is folded. In the sheet peeling method in the sheet peeling apparatus that peels the adhesive sheet from the original fabric in which the adhesive sheet is temporarily attached to one surface of the strip-shaped peeling sheet,
Unwinding the original fabric;
Folding the release sheet conveyed in the predetermined release direction by the feeding with a release medium, and peeling the adhesive sheet from the release sheet,
Attaching a plurality of the release media to the sheet peeling apparatus at the same time;
A step of selecting one folding angle from a plurality of folding angles by moving at least one of the plurality of peeling media in a direction along a peeling direction of the adhesive sheet. Method.

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