JP6216582B2 - Sheet sticking device and sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and a sticking method.

2. Description of the Related Art Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) in a semiconductor manufacturing process is known (see, for example, Patent Document 1).
The sheet sticking apparatus described in Patent Document 1 includes a sticking unit (pressing means) having a pressing roller (pressing member) for sticking an adhesive tape (adhesive sheet) to a wafer (adhered body), and a tape cutting mechanism for cutting out the adhesive sheet. (Cutting means) and a peeling unit (peeling means) having a peeling roller and a feeding roller (a plurality of peeling members) sandwiching the adhesive sheet, and the cutting means cut out the adhesive sheet affixed to the adherend by the pressing means Thereafter, the unnecessary tape (unnecessary sheet) that has been cut out and left is separated by moving a plurality of peeling members.

JP 2007-227552 A

  However, since the conventional sheet sticking device described in Patent Document 1 includes a plurality of peeling members in addition to the pressing member, there is an inconvenience that the device becomes large and complicated.

  The objective of this invention is providing the sheet sticking apparatus and sticking method which can suppress the enlargement and complexity of an apparatus.

In order to achieve the above object, the sheet sticking device of the present invention includes an adherend support surface capable of supporting an adherend from the opposite side of the adherend surface and an unnecessary sheet provided outside the adherend support surface. Support means having a support surface, supply means for supplying an adhesive sheet to a position facing the adherend surface of the adherend, and a pressing member that presses and adheres the adhesive sheet to the adherend surface and the unnecessary sheet support surface Cutting means for cutting the adhesive sheet into a predetermined shape, and cutting the adhesive sheet into an adhesive sheet affixed to the adherend surface and an unnecessary sheet affixed to the unnecessary sheet support surface; A peeling means for peeling the unnecessary sheet from the unnecessary sheet supporting surface, and the peeling means passes the unnecessary sheet between the pressing member and cooperates with the pressing member to end one end of the unnecessary sheet supporting surface. From the other end By moving to, the provided an unnecessary sheet peelable peeling member said unnecessary sheet from the supporting surface, the pressing member, between the end and the other end of the release the unnecessary sheet supporting surface separately from the member It is provided so as to be movable , and adopts a configuration in which only the pressing member is moved to press the adhesive sheet .

On the other hand, the sheet sticking method of the present invention comprises a step of supporting an adherend from the opposite side of the adherend surface on an adherend support surface provided with an unnecessary sheet support surface on the outside, and an adherend surface of the adherend. Supplying the adhesive sheet to a position facing the surface, and separating the separation member from only the pressing member provided so as to be movable between one end and the other end of the unnecessary sheet supporting surface, A step of pressing and adhering the adhesive sheet to an unnecessary sheet supporting surface; cutting the adhesive sheet into a predetermined shape; and attaching an adhesive sheet affixed to the adherend surface and an unnecessary sheet affixed to the unnecessary sheet support surface a step of partitioning the adhesive sheet, the through unnecessary sheet between the pressing member and the peeling member, the peeling member and the pressing member cooperating to from one end to the other end of the unnecessary sheet supporting surface By moving the We employ a configuration that includes a step of peeling from the unnecessary sheet supporting surface.

  According to the present invention as described above, the unnecessary sheet is passed between the pressing member and the peeling member used for attaching the adhesive sheet, and the unnecessary sheet is peeled from the unnecessary sheet supporting surface by moving the pressing member and the peeling member. Therefore, it is not necessary to provide a plurality of peeling members, and the size and complexity of the apparatus can be suppressed.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. Operation | movement explanatory drawing of the sheet sticking apparatus of FIG. Operation | movement explanatory drawing of the sheet sticking apparatus which concerns on a modification.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this specification, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the X-axis arrow direction, “Right” is the opposite direction, “Front” is the Y-axis arrow direction, and this is the front direction orthogonal to the page, and “Rear” is the opposite direction.

  In FIG. 1, the sheet sticking apparatus 1 is unnecessary provided on the outer side of the adherend support surface 23 </ b> A and the adherend support surface 23 </ b> A that can support the wafer WF as the adherend from the opposite side of the adherend surface WF <b> 1. The support means 2 having the sheet support surface 21A, the supply means 3 for supplying the adhesive sheet AS to the position facing the adherend surface WF1 of the wafer WF, and the adhesive sheet AS are pressed against the adherend surface WF1 and the unnecessary sheet support surface 21A. The pressing means 4 having the pressing roller 42 as a pressing member to be pasted, the transport means 5 for transporting the wafer WF, and the adhesive sheet AS cut into a predetermined shape and adhered to the adherend surface WF1 (see FIG. 2 (C)) and the cutting means 6 for dividing the adhesive sheet AS into the unnecessary sheet US affixed to the unnecessary sheet support surface 21A, and the unnecessary sheet US from the unnecessary sheet support surface 21A. And a peeling means 7 for releasing.

  The support means 2 includes an outer table 21 having a recess 22 recessed from the unnecessary sheet support surface 21A, and an adherend support that is provided in the recess 22 and can be adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector And an inner table 23 having a surface 23A.

  The supply means 3 includes a support roller 31 that supports a belt-like adhesive sheet AS having an adhesive AD layer on one surface of the base sheet BS, a guide roller 32 that guides the adhesive sheet AS, and a rotation as a driving device. A pinch roller 34 that sandwiches the adhesive sheet AS between the driving roller 33 driven by the motor 33A, a linear motor 35 as a driving device, and a plurality of guide rollers that guide the unnecessary sheet US generated by cutting the adhesive sheet AS. 36 and a collection roller 37 that is driven by a rotation motor 37A as a drive device and collects the unnecessary sheet US. The rollers 31 to 34 are supported by the supply side frame 3A, and the rollers 36 and 37 are supported by the collection side frame 3B.

  The pressing means 4 includes a linear motor 41 as a driving device supported by the slider 35A of the linear motor 35, and a pressing roller 42 supported by the slider 41A of the linear motor 41 and driven by a rotation motor 42A as the driving device. It has.

  The conveying means 5 includes an articulated robot 51 as a driving device and a suction tool 52 that is detachably provided on a work arm 51A of the articulated robot 51 and that can communicate with a decompression means (not shown) such as a decompression pump or a vacuum ejector. I have. The multi-joint robot 51 is a so-called six-axis robot that can displace the one mounted on the work arm 51A within any work range at any position and any angle.

  The cutting means 6 includes an articulated robot 51 and a cutter tool 62 having a cutter blade 61 that is detachably provided on a work arm 51 A of the articulated robot 51.

  The peeling means 7 is supported by a linear motor 71 as a driving device supported by the slider 35 </ b> B of the linear motor 35, and the slider 71 </ b> A of the linear motor 71 via a bracket 72, and between the pressing roller 42 and an unnecessary sheet. Peeling as a peeling member capable of peeling the unnecessary sheet US from the unnecessary sheet supporting surface 21A by moving from one end side of the unnecessary sheet supporting surface 21A to the other end side in cooperation with the pressing roller 42 through the US And a roller 73.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, as shown in FIG. 2A, in the initial state where the pressing roller 42 and the peeling roller 73 are located on the left side, the operator sets the adhesive sheet AS as shown by the solid line in FIG. When an operation start signal is input via an input unit such as an operation panel or a personal computer, the supply unit 3 drives the linear motor 35 and presses and sandwiches the adhesive sheet AS between the pressing roller 42 and the peeling roller 73. The sticking device 1 enters a standby state. Next, when the transfer means 5 drives the articulated robot 51 and a decompression means (not shown), the suction tool 52 sucks and holds the wafer WF, and the wafer WF is placed on the adherend support surface 23A, the support means 2 A decompression means (not shown) is driven to hold the wafer WF by suction. At this time, the adherend surface WF1 and the unnecessary sheet support surface 21A are positioned in the same plane.

  Next, the pressing unit 4 suppresses the rotation of the rotation motor 42A, and the supply unit 3 maintains the rotation motors 33A, 37A and 37A while pressing the adhesive sheet AS between the pressing roller 42 and the peeling roller 73. The linear motor 35 is driven, the pressing roller 42 and the peeling roller 73 are moved to the position indicated by the two-dot chain line in FIG. 2A, and the unused portion of the adhesive sheet AS is placed at the position facing the adherend surface WF1 of the wafer WF. Supply (feed out). Next, the pressing means 4 and the peeling means 7 drive the linear motors 41 and 71, and the pressing roller 42 and the peeling roller 73 are lowered to the positions indicated by solid lines in FIG. The AS is pressed against the unnecessary sheet support surface 21A (hereinafter, feeding of unused portions of the adhesive sheet AS and pressing of the adhesive sheet AS against the unnecessary sheet support surface 21A are hereinafter referred to as “feeding step”).

  Thereafter, the supplying means 3 and the pressing means 4 drive the linear motor 35 and the rotating motor 42A, and move the pressing roller 42 to a position indicated by a two-dot chain line in FIG. 2B (hereinafter referred to as “pressing process”). Called). Thereafter, the pressure roller 42 is again returned to the position indicated by the solid line in the same manner (hereinafter referred to as “returning step”). Thereby, the adhesive sheet AS is pressed and pasted on the adherend surface WF1 and the unnecessary sheet support surface 21A. After that, the cutting means 6 drives the articulated robot 51, exchanges the tool from the suction tool 52 to the cutter tool 62, and moves the cutter blade 61 along the outer edge of the wafer WF, whereby the adhesive sheet AS is removed from the wafer WF. Cut along the outer edge and categorized into a stuck sheet TS and an unnecessary sheet US (hereinafter referred to as “cutting step”).

  Next, after the transfer means 5 drives the articulated robot 51 and exchanges the tool from the cutter tool 62 to the suction tool 52, the decompression means (not shown) is driven, and the wafer WF to which the sticking sheet TS is stuck is taken into the suction tool. Adsorbed and held at 52 and transported to an apparatus in another process (hereinafter referred to as “discharge process”). Next, the supply means 3 and the pressing means 4 drive the linear motor 35 and the rotation motor 42A, and the pressing roller 42 and the peeling roller remain pressed and sandwiched between the pressing roller 42 and the peeling roller 73. While rotating 73, it is moved to the position shown in FIG. 2C, and the unnecessary sheet US is peeled off from the unnecessary sheet support surface 21A (hereinafter referred to as “peeling step”). Thereafter, the pressing unit 4 and the peeling unit 7 drive the linear motors 41 and 71 to raise the pressing roller 42 and the peeling roller 73 to return to the initial state shown by the solid line in FIG. 2A (hereinafter referred to as “returning step”). Thereafter, the same operation as described above is repeated.

  According to the embodiment as described above, the unnecessary sheet US is sandwiched between the pressing roller 42 and the peeling roller 73 used for attaching the adhesive sheet AS, and the unnecessary sheet US is moved by moving the pressing roller 42 and the peeling roller 73. Can be peeled off from the unnecessary sheet support surface 21A, it is not necessary to provide a plurality of peeling rollers 73, and the apparatus can be prevented from becoming large and complicated.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such is included in this invention.

  For example, the peeling roller 73 may be driven by a rotating motor as a driving device. In this case, the rotating motor 42A for driving the pressing roller 42 may or may not be provided. In the case where a rotation motor for driving the peeling roller 73 is provided, the peeling means 7 does not have to drive the rotation motor when the unused portion of the adhesive sheet AS is fed out.

Further, it is not necessary to provide a rotation motor for driving the rotation motor 42A and the peeling roller 73. In this case, when the unused portion of the adhesive sheet AS is fed out, the pressing roller 42 and the separation roller 73 are moved in the right direction. It is only necessary to drive the rotation motors 33A and 37A while being moved to, before or after being moved.
Further, in the peeling process, the unnecessary sheet US is moved by a predetermined interval or without a predetermined interval without pressing the unnecessary sheet US with the pressing roller 42 and the peeling roller 73, and the unnecessary sheet US is moved without the predetermined interval. You may make it peel from 21 A of support surfaces.
In the peeling step, the pressing roller 42 moves, for example, a predetermined interval without pressing the unnecessary sheet US against the unnecessary sheet support surface 21A or pressing the unnecessary sheet US against the unnecessary sheet support surface 21A. Alternatively, the unnecessary sheet US may be peeled off the unnecessary sheet support surface 21A by moving without leaving a predetermined interval.
Further, in the peeling step, after the state shown in FIG. 3A, the pressing means 4 and the peeling means 7 drive the linear motors 41 and 71 to raise the pressing roller 42 and the peeling roller 73 by a predetermined interval. Next, the supply unit 3 and the pressing unit 4 drive the linear motor 35 and the rotation motors 37A and 42A to feed out the unnecessary sheet US having a predetermined length from the collection roller 37, while rotating the pressing roller 42 in the clockwise direction. Then, the pressure roller 42 and the peeling roller 73 are moved to the left by a predetermined distance to form the obtuse angle peeling portion US1. Thereafter, the supply means 3 and the pressing means 4 drive the linear motor 35 and the rotation motor 42A, and move the pressing roller 42 and the peeling roller 73 to the left while rotating the pressing roller 42 counterclockwise. In the state where the obtuse angle peeling portion US1 is maintained, the pressing roller 42 and the peeling roller 73 may be moved to the positions shown in FIG. 3C to peel off the unnecessary sheet US from the unnecessary sheet support surface 21A. . Such obtuse angle peeling is advantageous when the unnecessary sheet US is easy to cut, and the roller peeling as in the above embodiment and such obtuse angle peeling are combined with the adhesive sheet AS (unnecessary sheet US). In consideration of the material, the width in the front-rear direction of the unnecessary sheet US after the cutting process, etc., it may be provided so as to be selectable, or roller peeling and obtuse angle peeling may be alternately performed during one peeling process. .

  Further, the process from the feeding process to the returning process may be set as follows. That is, pressing process → return process → cutting process → peeling process → discharge process. Also, pressing process → cutting process → discharge process → return process → peeling process. Also, pressing process → cutting process → returning process → discharge process → peeling process. Also, pressing process → cutting process → returning process → peeling process → discharge process.

Furthermore, after the pressing roller 42 moves from the vicinity of the center of the adherend surface WF1 to one end edge, the pressing means 4 moves again from the vicinity of the center of the adherend surface WF1 to the other end edge to attach the adhesive sheet AS to the adherend surface WF1. It may be affixed to.
The pressing means moves one pressing roller from the vicinity of the center of the adherend surface WF1 to one end edge, and the other pressing roller moves from the vicinity of the center of the adherend surface WF1 to the other end edge to cover the adhesive sheet AS. You may affix on the landing surface WF1. In this case, the peeling means moves together with at least one of the one pressing roller and the other pressing roller and moves from one end to the other end of the adherend surface WF1 or from the other end toward the one end, thereby eliminating the unnecessary sheet. What is necessary is just to provide the peeling roller which can peel US from the unnecessary sheet | seat support surface 21A.
Further, instead of the pressing roller 42, a pressing member made of a blade material, rubber, resin, sponge or the like may be employed.
Further, the peeling means 7 may employ a peeling member made of a blade material, a round bar, a roller or the like instead of the peeling roller 73.
The adhesive sheet AS may be a sheet.

  Furthermore, the cutting means 6 can adopt any configuration capable of cutting the adhesive sheet AS, and may be constituted by, for example, a laser cutter, a device that can be cut by water pressure or wind pressure, or a rotary cutter that rotates and cuts. Other cutter blades may be used. Further, the cutting means 6 may have a separate and independent configuration from the conveying means 5.

  Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, an appropriate heating means for heating the adhesive sheet AS. May be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members, articles, etc. can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.

Furthermore, the means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for the means and steps, and moreover, the configuration of the simple embodiment shown in the above embodiment. It is not limited at all to a thing or a process. For example, if the support means has an adherend support surface capable of supporting an adherend from the opposite side of the adherend surface and an unnecessary sheet support surface provided outside the adherend support surface, an application is made. There is no limitation as long as it is within the technical scope in light of the original technical common sense (explanation of other means and processes is omitted).
Further, the drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1 ... Sheet sticking apparatus 2 ... Supporting means 3 ... Supply means 4 ... Pressing means 6 ... Cutting means 7 ... Peeling means 21A ... Unnecessary sheet supporting surface 23A ... Adhering body supporting surface 42 ... Pressing roller (pressing member)
73 ... peeling roller (peeling member)
AS ... Adhesive sheet TS ... Adhesive sheet US ... Unnecessary sheet WF ... Wafer (Substrate)
WF1 ... deposition surface

Claims (2)

A support means having an adherend support surface capable of supporting an adherend from the opposite side of the adherend surface and an unnecessary sheet support surface provided outside the adherend support surface;
Supply means for supplying an adhesive sheet to a position facing the adherend surface of the adherend;
A pressing means having a pressing member that presses and adheres the adhesive sheet to the adherend surface and the unnecessary sheet supporting surface;
Cutting means for cutting the adhesive sheet into a predetermined shape, and dividing the adhesive sheet into an adhesive sheet affixed to the adherend surface and an unnecessary sheet affixed to the unnecessary sheet support surface;
Peeling means for peeling the unnecessary sheet from the unnecessary sheet support surface,
The peeling means passes the unnecessary sheet between the pressing member and moves from one end side to the other end side of the unnecessary sheet supporting surface in cooperation with the pressing member. A peeling member capable of peeling the unnecessary sheet is provided ,
The pressing member is provided movably between one end and the other end of the unnecessary sheet supporting surface separately from the peeling member, and moves the pressing member only to press the adhesive sheet. Sheet sticking device. A step of supporting the adherend from the opposite side of the adherend surface on the adherend support surface provided with an unnecessary sheet support surface on the outside;
Supplying an adhesive sheet to a position facing the adherend surface of the adherend;
Separately from the peeling member, only the pressing member provided to be movable between one end and the other end of the unnecessary sheet supporting surface is moved to press the adhesive sheet against the adherend surface and the unnecessary sheet supporting surface. A process of applying,
Cutting the adhesive sheet into a predetermined shape, and dividing the adhesive sheet into an adhesive sheet affixed to the adherend surface and an unnecessary sheet affixed to the unnecessary sheet support surface;
The through unnecessary sheet between the pressing member and the peeling member, by moving to cooperate with the peeling member and the pressing member from one end of the unnecessary sheet supporting surface on the other end, the unnecessary sheet And a step of peeling from the unnecessary sheet support surface.

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