JP2006084238A - Apparatus for detecting parallelism between pressing face of pressure bonding device in crystal-liquid-related equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To automatically and efficiently detect parallelism between pressing faces of a pressing tool and a pressure bonding base by automatically inserting a pressure measuring film between the pressing faces, moving the pressure measuring film pressed between the pressing faces to an imaging position, and imaging the pressure measuring film with an imaging device. <P>SOLUTION: An unpressed part of the pressure measuring film 23 is automatically let out to a position of use 24 by an automatic film rewinding device 25. The unpressed part let out to the position of use is moved to a pressing position 26 between the pressing faces 17 and 18 of the pressing tool 15 and the pressure bonding base 16. A pressed part of the measuring film pressed between the pressing faces is moved to the imaging position 27 and imaged by the imaging device 28. Information on pickup images of the pressed part of the measuring film pressed between the pressing faces is outputted to an output device 53. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a parallelism between pressing surfaces of a pressure bonding apparatus in a liquid crystal related pressure bonding apparatus for pressure bonding a pressure bonding member such as a liquid crystal driving IC, an FPC board, or an ACF tape to a pressure bonding member mounting portion of a substrate placed on a pressure bonding table. It is related with the apparatus which detects.

  In a liquid crystal related crimping device, a thermocompression bonding device for thermocompression bonding of a liquid crystal driving IC or an FPC substrate or the like on which a plurality of electronic components are mounted on an LCD glass substrate, or a tape-like component mounting portion on the LCD glass substrate A pressure bonding apparatus such as an ACF bonding apparatus for bonding an anisotropic conductive film (ACF tape) includes a pressure tool having a pressing surface and a pressure bonding table. A thermocompression bonding apparatus for thermocompression bonding a pressure bonding member such as a liquid crystal driving IC to a substrate with the pressure bonding member mounting portion of the substrate mounted with an anisotropic conductive material interposed on the pressure bonding stand. Then, the heated pressure tool is lowered, and the pressure-bonding member is pressed against the pressure-bonding member mounting portion of the substrate to be pressure-bonded. In order to ensure that the pressure bonding member is thermally bonded to the LCD glass substrate, the parallel pressing surfaces of the pressure bonding table and the pressure tool are high in parallel, and there is no wear or damage on the pressure surface. It is necessary to apply pressure uniformly by both pressing surfaces.

Therefore, conventionally, the parallelism between the pressing surfaces of the pressing tool and the crimping table facing each other is adjusted, and the parallelism between the pressing surfaces is measured as a pre-stage of the adjustment. In order to measure the parallelism between both pressing surfaces, with the pressure measuring film inserted between the pressing surfaces of the pressing tool and the pressing table, the pressing tool is pressed against the pressing table, and the change in the color density of the film Patent Document 1 describes obtaining parallelism between both pressing surfaces.
JP-A-10-246618 (second page, FIG. 3)

  However, it is inefficient to manually insert the pressure measurement film between the pressing surface of the pressure tool and the pressure table, especially when the number of liquid crystal related pressure bonding devices is large. . Further, since the measurement result could not be grasped quantitatively, the measurement result could not be accurately used for the work for correcting the parallelism between the pressing surfaces.

   The present invention has been made to solve such problems, and a pressure measuring film is automatically inserted between the pressing surfaces of the pressing tool and the crimping table, and the pressure measuring film pressed between the pressing surfaces is imaged. The object is to automatically and safely detect the parallelism between the two pressing surfaces by moving to a position and taking an image with an imaging device.

  In order to solve the above-mentioned problem, the structural feature of the invention described in claim 1 is that the pressing tool is mounted on the base so as to be relatively movable toward the crimping table, and the pressing of the pressing tool A crimping device for crimping a crimping member on a crimping member mounting portion of a substrate between a surface and a pressing surface of the crimping table, and a stage for holding the substrate and moving in a horizontal plane, the crimping member mounting portion A liquid crystal related pressure bonding apparatus comprising a stage device for placing the pressure measurement film on the pressing surface, and feeding the unpressurized portion of the pressure measurement film to a use position and winding the prepressurized portion; An imaging device that images a pre-pressed portion of the pressure measuring film that is disposed at an imaging position adjacent to a pressing position between the pressing surface of the pressure tool and the pressing table and pressed between the pressing surfaces, and the film The use position of the automatic winding device In order to move between the pressure position and the imaging position, the automatic winding device is moved forward and backward, and the pressure tool is pressed between the pressure tool and the pressing surface of the crimping table at the pressure position. And an output device that outputs information relating to an image obtained by imaging the already-pressurized portion of the pressure measurement film at the imaging position by the imaging device.

  The structural feature of the invention according to claim 2 is that in claim 1, the color density of the image of the already-pressed portion is determined from the image information of the already-pressed portion of the pressure measuring film imaged by the imaging device. Computation means for computing equal density area distribution by dividing into equal areas is provided, and the equal density area distribution is output to the output device.

  The structural feature of the invention described in claim 3 is that in claim 1, the degree of change in the color density of the pre-pressurized portion from the image information of the pre-pressurized portion of the pressure measurement film imaged by the imaging device. And calculating means for calculating the direction of change and the degree of change in color density and the direction of inclination based on the direction of change and the direction of inclination between the two pressing faces. Is output to the output device.

  A structural feature of the invention according to claim 4 is that, in any one of claims 1 to 3, the pressure-bonding member is an IC component, an FPC board, or an ACF tape.

  According to the invention according to claim 1 configured as described above, the unpressurized portion of the pressure measurement film is automatically drawn out to the use position, and it is efficiently and safely between the pressing surfaces of the pressing tool and the pressing table. Can be inserted into. And since the pre-pressurized part of the measurement film pressed between the two pressing surfaces is moved to the imaging position and imaged by the imaging device, and information on the pre-pressurized captured image is output to the output device. The parallelism between the surfaces can be automatically and safely detected with a simple configuration, and the working time can be extremely shortened especially when the number of liquid crystal related crimping devices is large.

  In the invention according to claim 2 configured as described above, the equal density obtained by dividing the image of the pre-pressurized portion from the image information of the pre-pressurized portion of the pressure measurement film imaged by the image pickup device into the areas having the same color density Since the area distribution is calculated and the equal density area distribution is output to the output device, it is possible to efficiently and reliably detect a curved surface of the pressing surface, a defect generated on the pressing surface, and the like with a simple configuration.

  In the invention according to claim 3 configured as described above, the degree of change and direction of change in the color density of the pre-pressurized portion is obtained from the image information of the pre-pressurized portion of the pressure measurement film imaged by the imaging device, Since the degree of inclination and the direction of inclination between the two pressing surfaces are calculated and output based on the degree of color density change and the direction of change, the parallelism between the two pressing surfaces can be corrected accurately and easily.

  According to the invention according to claim 4 configured as described above, there are many cases where the IC component, the FPC board or the ACF tape is crimped to the substrate by a number of liquid crystal related crimping devices. The parallelism between the faces can be detected safely and efficiently.

  BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a first embodiment in which a parallelism detecting device between pressing surfaces of a pressure bonding device in a liquid crystal related pressure bonding device according to the present invention is applied to a case where a pressure bonding member is mounted on a terminal of an LCD glass substrate of a liquid crystal display device; Will be described with reference to FIG. In FIG. 1, reference numeral 10 denotes a liquid crystal related crimping device for crimping a crimping member 13 that is positioned and temporarily crimped on a crimping member mounting portion 12 of a substrate 11 such as an LCD glass substrate. A thermocompression bonding apparatus 20 that thermocompression-bonds the crimping member 13 on the crimping member mounting portion 12 of the substrate 11 between the pressing surface 18 of the crimping table 16 and a stage 21 that holds the substrate 11 and moves in the horizontal plane and in the vertical direction. A stage device 22, a non-pressurized portion of the pressure measurement film 23 pressed between the pressing surfaces 17 and 18, and a film automatic winder 25 that winds the pre-pressurized portion. An image pickup device 28 for picking up an image of a pre-pressurized portion of the pressure measurement film 23 which is arranged at an image pickup position 27 adjacent to the pressure position 26 between the press surfaces 17 and 18 and is pressed between the press surfaces 17 and 18; In order to move the use position 24 of the dynamic winding device 25 between the pressurization position 26 and the imaging position 27, the automatic winding device 25 is moved forward and backward, and the operation of each device is controlled. It is comprised from the control apparatus 30 etc. which perform various calculations.

  As shown in FIG. 3, a device in which the pressure-bonding member 13 is pressure-bonded to the substrate 11, for example, a liquid crystal display device 31 includes an LCD glass substrate that is a transparent substrate 11, and a liquid crystal unit 32 provided at the center of the LCD glass substrate 11. The FPC (Flexible Printed Circuit) is a crimping member 13 that is crimped to the edge of the LCD glass substrate 11. As shown in FIG. 4, a plurality of electrodes 33 are formed at a narrow pitch on the upper surface of the crimping member mounting portion 12 provided on one side edge of the LCD glass substrate 11, and in the vicinity of these electrodes 33. A pair of alignment marks 34 is formed. The FPC is an electronic circuit formed on a transparent or translucent flexible substrate. The electrode portion 35 provided on the lower surface of the front edge of the FPC has an electrode 33 and an alignment mark 34 on the substrate 11 as shown in FIG. A plurality of corresponding electrodes 36 and alignment marks 37 are formed. The electrode portion 35 of the FPC 13 is thermocompression bonded to the pressure member mounting portion 12 of the LCD glass substrate 11 with an anisotropic conductive film 38 such as an ACF (Anisotropic Conductive Film) tape interposed therebetween.

  In the thermocompression bonding apparatus 20, the crimping base 16 is fixed on the base 14, and a slider 40 is mounted on a base 19 erected on the base 14 so as to be slidable in the vertical direction. It is moved up and down toward the crimping table 16. The pressure tool 15 is fixed to the lower end of the slider 40, and the pressure tool 15 is heated by the heater 42. The pressure-bonding member mounting portion 12 is placed on the pressure-bonding base 16 in a state where the pressure-bonding member 13 is aligned on the pressure-bonding member mounting portion 12 of the substrate 11 and temporarily bonded with the anisotropic conductive film 38 interposed therebetween, and the slider 40 is placed. Is lowered by the cylinder device 41, the crimping member 13 is thermocompression-bonded onto the crimping member mounting portion 12 between the pressing surface 17 of the pressing tool 15 and the pressing surface 18 of the crimping table 16.

  The stage device 22 holds the substrate 11 on the upper surface of the stage 21, moves the stage 21 in the horizontal plane and in the vertical direction, and rotates it to index the rotation of the crimping member mounting portion 12 of the substrate 11 on the pressing surface 18 of the crimping table 16. An X-axis table that reciprocates along the horizontal X-axis on the base 14, and a Y-axis table that reciprocates along the horizontal Y-axis orthogonal to the X-axis on the X-axis table And a Z-axis slider that reciprocates along the vertical Z-axis perpendicular to the X and Y axes on the Y-axis table, and is rotatably supported by the Z-axis slider and indexed and rotated around the θ-axis by a servo motor. Stage 21 is provided. The X and Y axis tables and the Z axis slider are linearly guided by a known linear guide or the like, and moved by a servo motor via a ball screw. A plurality of suction holes connected to the vacuum pump via a switching valve are opened on the upper surface of the stage 21. When the suction holes are connected to the vacuum pump, the substrate 11 is sucked to the upper surface of the stage 21 by negative pressure. Opened when held and connected to the atmosphere.

  As shown in FIG. 2, the automatic film take-up device 23 is disposed on the opposite side of the stage device 22 with the crimping table 16 interposed therebetween, and the support base 43 of the automatic film take-up device 23 is movable in the horizontal direction on the gantry 19. It is mounted. The support base 43 is formed in a U-shape, and a roller 45 that is driven to rotate around a horizontal axis by a motor 44 is supported in parallel with the crimping base 16 at the front end portion of both side protrusions, and the rear end that connects the both side protrusions. Two rollers 46 and 47 are supported on the base in parallel with the roller 45. The roller 46 is wound with the A film 23a of the unpressurized pressure measuring film 23, the roller 47 is wound with the C film 23c, and the roller 45 is wound with the pre-pressurized portions of the A and C films 23a and 23c. ing. Spacers 48 and 49 for separating the A and C films 23a and 23c extending in parallel at the use position 24 between the roller 46 and the roller 45 when not pressed are interposed between the A and C films 23a and 23c. It is installed between the protruding parts on both sides of the support base 43. When the roller 45 is rotationally driven by the motor 44, the non-pressurized portions of the A and C films 23 a and 23 c of the pressure measurement film 23 are fed from the rollers 46 and 47 to the use position 24, and the prepressurized portions are transferred to the roller 45. It is wound up. The A film 23a is, for example, a film based on PET coated with microcapsules containing a color former, and the C film 23c is a film based on PET coated with a developer. When the A and C films 23a and 23b are pressurized, the microcapsules of the A film are destroyed according to the applied pressure, and the color former and the developer react to color the C film 23b to a concentration according to the applied pressure. To do.

  The piston rod of the cylinder device which is the advance / retreat device 29 is connected to the rear end base of the support base 43, and the automatic film take-up device 23 is moved from the advance position slightly above the press stand 16 and the press stand 16 by the operation of the cylinder device 29. It is advanced and retracted between the separated backward positions. Thereby, the use position 24 of the automatic film winding device 23 is between the press position 17 between the press surfaces 17 and 18 of the press tool 15 and the press stand 16 and the imaging position 27 adjacent to the press position 26. Moved. Below the C film 23c at the image pickup position 27, an image pickup device 28 for picking up an image of a pre-pressurized portion of the pressure measurement film 23 pressed between the pressing surfaces 17 and 18 from below is disposed.

  The control device 30 has a built-in computer, and the storage device 50 has a degree of change in the color density of the pre-pressurized portion obtained from the image information of the pre-pressurized portion of the pressure measurement film 23 imaged by the imaging device 28, and The relationship between the pressure tool 15 and the degree of inclination between the pressing surfaces 17 and 18 of the crimping table 16 when the pressure measuring film 23 is pressed is stored. Therefore, for example, the pressure measurement film 23 is pressed against the pressing surface 17 in a state where the pressing surface 17 of the pressing tool 15 is relatively inclined with respect to the pressing surface 18 of the crimping table 16 in a known inclination direction with a known inclination degree. , 18 at a predetermined pressure is executed in advance for a large number of inclination degrees in a large number of inclination directions. Thus, the pre-pressurized portion of the pressure measurement film 23 pressed between the pressing surfaces 17 and 18 that are relatively inclined in each inclination direction in each inclination direction is imaged by the imaging device 28. Based on the image information captured by the imaging device 28, the ratio between the difference in color density at two points separated in the tilt direction and the distance between the two points is calculated as the degree of change in color density. A relationship with the degree of inclination between the pressing surfaces 17 and 18 is obtained in advance in a number of known inclination directions, and this relationship is stored in the storage device 50. The storage device 50 stores the pre-pressurized portion from the measurement program for measuring the degree of inclination of the pressing surfaces 17 and 18 of the thermocompression bonding apparatus 20 and the image information of the pre-pressurized portion of the pressure measurement film 23 imaged by the imaging device 28. The equal density area distribution is calculated by dividing the image of the image into areas of equal color density, and the color density change degree and change direction of the pre-pressurized part are calculated from the equal density area distribution, and the color density change degree is calculated. The parallelism detection program 52 shown in FIG. 7 for calculating the degree of inclination and the direction of inclination between the pressing surfaces 17 and 18 based on the change direction is stored.

  Next, the operation of the parallelism detecting device between the pressing surfaces of the thermocompression bonding apparatus in the liquid crystal related crimping apparatus will be described based on the measurement program 51 and the parallelism detection program 52 shown in FIGS. The roller 45 is rotationally driven by the motor 44 of the automatic film take-up device 25, and the non-pressurized portions of the A and C films 23a and 23c of the pressure measuring film 23 are fed out from the rollers 46 and 47 to the use position 24 and are already pressed. The portion is wound around the roller 45 (step S1). The automatic film take-up device 25 is advanced by the cylinder device 29, and the use position 24 is moved to the pressurization position 26 between the pressurization tool 15 and the press surfaces 17 and 18 of the crimping table 16 (step S2). When the slider 40 is lowered by the cylinder device 41 and the pressing surface 17 of the pressing tool 15 is fed to the use position 24, the unpressurized portions of the A, C films 23a and 23c of the pressure measuring film 23 are pressed against the pressing surface of the crimping table 16. 18 is pressurized with a predetermined pressure (step S3). After pressurization, the slider 40 and the pressurizing tool 15 are raised to the retracted end by the cylinder device 41. The automatic film take-up device 25 is retracted by the cylinder device 29, the use position 24 is moved to the imaging position 27 (step S4), and the C film 23a of the pressure measurement film 23 pressed between the pressing surfaces 17 and 18 is removed. The already pressurized portion is imaged by the imaging device 28 (step S5).

  When the imaging is completed, the parallelism detection program 52 is executed, and the image information of the pre-pressurized portion of the C film 23a of the pressure measurement film 23 imaged by the imaging device 28 is input to the control device 30 (step S11). The input image information is subjected to image processing, the image of the pre-pressurized portion of the C film 23a is divided into areas having the same coloring density, the equal density area distribution is calculated, and the colors are classified into the equal density areas (step S12). When the equal density area of the same color is curved more than the allowable value or is broken (step S13), the parallelism of the pressing surfaces 17, 18 is poor, or the pressing surfaces 17, 18 are defective. It is determined that the parallelism between the pressing surfaces 17 and 18 is poor (step S14).

  If the equal density area of the same color is linear and not broken, the degree of change and the direction of change in the color density of the already-pressurized portion are calculated from the equal density area distribution (step S15). That is, the direction of the equal density area is averaged, and the change in the color density, which is the ratio between the difference in color density at two points spaced in the direction perpendicular to the average direction of the equal density area and the distance between the two points. Calculate the degree. A direction perpendicular to the average direction of the equal density area is determined as an inclination direction in which the pressing surface 17 and the pressing surface 18 are relatively inclined, and the equal concentration is selected from a plurality of known inclination directions stored in the storage device 50. An inclination direction close to the inclination direction obtained from the area is selected, and the degree of inclination at which the pressing surface 17 and the pressing surface 18 are relatively inclined is calculated from the relationship between the degree of change in color density and the degree of inclination in the selected inclination direction. (Step S16). If the inclination degree is less than or equal to the allowable value (step S17), it is determined that the parallelism between the pressing surfaces 17 and 18 is good (step S18). When the inclination degree exceeds the allowable value, the inclination direction and the inclination degree in which the pressing surface 17 and the pressing surface 18 are relatively inclined are displayed on the output device of the control device 30, for example, the display device 53 (step S19). The operator adjusts the mounting angle of the pressing tool 15 with reference to the inclination direction and the inclination degree displayed on the display device 53, and corrects the parallelism between the pressing surfaces 17,18.

  The determination of pass / fail of the parallelism of the pressing surfaces 15 and 18 of the pressure tool 15 and the pressure table 16 and the adjustment of the mounting angle of the pressure tool 15 are performed in order to correct an assembling error when the liquid crystal related pressure bonding device 10 is assembled. This is performed for readjustment of the liquid crystal related crimping device 10 in maintenance performed when the device is used a predetermined number of times, or for investigation and repair of the cause of failure. An automatic tilting device is interposed between the slider 40 and the pressurizing tool 15, and the control device 30 operates the automatic tilting device in accordance with the tilting direction and the tilting degree so that the mounting angle of the pressurizing tool 15 is automatically set. You may make it adjust.

  In the liquid crystal related pressure bonding apparatus 10 in which the parallelism between the pressing surfaces 17 and 18 is adjusted in this way, the substrate 11 on which the pressure bonding member 13 is temporarily bonded to the pressure bonding member mounting portion 12 by the anisotropic conductive film 38 is the stage 21. When placed on the upper surface, the stage device 22 connects the suction hole opened on the upper surface of the stage 21 to a vacuum pump based on a command from the control device 30, and sucks and holds the substrate 11 on the upper surface of the stage 21. Then, the stage 21 is moved in the horizontal plane by the movement of the X-axis and Y-axis tables and indexed and rotated on the Z-axis slider, so that the crimping member mounting portion 12 of the substrate 11 is conveyed above the crimping table 16, and thereafter The Z-axis slider is lowered until the upper surface of the stage 21 is located in the same horizontal plane as the pressing surface 18 of the crimping table 16, and the crimping member mounting portion 12 of the substrate 11 is placed on the pressing surface 18 of the crimping table 16. Thereafter, the slider 40 is lowered by the cylinder device 41, and the pressing surface 17 of the pressing tool 15 heated by the heater 42 presses the pressing member 13 against the pressing member mounting portion 12 of the substrate 11 with a uniform predetermined pressure. Is thermocompression bonded to the crimping member mounting portion 12 of the substrate 11.

  Next, a second embodiment will be described. In the first embodiment, the liquid crystal-related crimping device 10 is press-bonded with the thermocompression bonding device 13 to the pressure-bonding member 13 temporarily bonded to the pressure-bonding member mounting portion 12 of the substrate 11 by the anisotropic conductive film 38. In the second embodiment, in the liquid crystal related crimping device 60, the stage device 22 transports the substrate 11 and places the crimping member mounting portion 12 on the pressing surface 18 of the crimping table 16. The thermocompression bonding apparatus temporarily presses the crimping member 13. In the following, the second embodiment will be described with respect to the components that are different from the first embodiment, the same components as those of the first embodiment will be given the same reference numerals, and the description thereof will be omitted.

  The liquid crystal related crimping device 60 includes a Y-axis slider 63 that reciprocates along a Y axis on a pedestal 62 fixed to the base 14, and a Z that reciprocates along the Z axis in the vertical direction on the Y axis slider 63. A thermocompression bonding device 70 is provided which includes a shaft slider 64 and a rotation holder 65 supported on the Z-axis slider 64 so as to be rotatable around the R axis. The Y and Z axis sliders 63 and 64 are guided in the Y and Z axis directions by linear guides attached to the gantry 62 and the Y axis slider 63, respectively, and are moved by servo motors 68 and 69 via ball screws 66.67. . The rotation holder 65 is rotated via a gear by a servo motor 71 fixed to the Z-axis slider 64.

  An intermediate member 72 is mounted on the rotation holder 65 so as to be movable in the Z-axis direction with its relative rotation restricted. The intermediate member 72 is connected to the rotary holder 65 via a cylinder 73, and a pressure reducing valve that reduces pressure when the internal pressure of the cylinder 73 becomes a predetermined value or more is connected to the cylinder 73. When the force for temporarily press-bonding the pressure-bonding member 13 to the pressure-bonding member mounting portion 12 of the substrate 11 exceeds a predetermined value, the hydraulic pressure in the cylinder 73 is discharged through the pressure reducing valve, and the intermediate member 72 moves backward with respect to the rotary holder 65. The crimping member 13 is temporarily crimped to the crimping member mounting portion 12 with a predetermined pressure.

  A rectangular parallelepiped pressurizing tool 74 is provided at the lower end of the intermediate member 72, and a plurality of suction holes connected to the vacuum pump via the switching valve are opened on the elongated rectangular press surface 77 of the pressurizing tool 74. When the suction hole is connected to the vacuum pump, the crimping member 13 is sucked and held on the pressing surface 77 of the pressurizing tool 74 by negative pressure, and when connected to the atmosphere, the pressurizing member 13 is released from the pressurizing tool 74. Is done. The pressurizing tool 74 heats the pressure-bonding member 13 that is heated and attracted and held by a heater. Thus, the thermocompression bonding apparatus 70 picks up the pressure bonding member 13 with the pressing tool 74 from the component supply device 75 arranged away from the pressure bonding base 16 in the Y-axis direction, and moves the Y to the mounting position facing the pressure bonding base 16. It is transported in the axial direction and temporarily crimped onto the crimping member mounting portion 12 of the substrate 11. Between the component supply device 75 and the crimping table 16, an image of the crimping member 13 attracted to the pressing surface 77 of the pressurizing tool 74 is captured, and an adsorption error of the pressurizing member 13 to the pressurizing tool 74 is detected. A component imaging device 76 is arranged.

  An imaging device 78 that images the alignment mark 34 provided on the crimping member mounting portion 12 of the substrate 11 carried on the crimping table 16 is disposed below the crimping table 16. The crimping table 16 is formed of a transparent member such as glass, and the imaging device 78 images the alignment mark 34 through the crimping table 16 and the substrate 11.

  The automatic film take-up device 25 is disposed on the opposite side of the stage device 22 with the crimping table 16 interposed therebetween, and a support base 43 of the automatic film take-up device 25 is mounted on the stand 62 so as to be movable in the horizontal direction.

  The determination of the degree of parallelism of the pressing surfaces 74 and 18 of the pressing tool 74 and the crimping table 16 and the calculation of the inclination degree and the inclination direction between the pressing surfaces 77 and 18 are performed in the same manner as in the first embodiment.

  The substrate 11 with the anisotropic conductive film 38 attached to the crimping member mounting portion 12 is sucked and held on the stage 21 and conveyed by the stage device 22, and the crimping member mounting portion 12 is placed on the pressing surface 18 of the crimping table 16. When placed, the imaging device 78 images the alignment mark 34 of the crimping member mounting portion 12. The control device 30 calculates the position error and the angle error of the crimping member mounting portion 12 based on the image data of the pair of alignment marks 34 that have been imaged. The thermocompression bonding device 70 sucks and holds the pressure bonding member 13 placed on the component supply device 75 with the pressure tool 74 and conveys it in the Y-axis direction to the mounting position above the pressure bonding table 16. The crimping member 13 adsorbed on the pressing surface 77 of the pressing tool 74 is imaged by the component imaging device 76 on the way, and the control device 30 is input with image information of the crimping member 13, and a pair of alignment marks 37 on the crimping member 13. The position error and the angle error with respect to the pressurizing tool 74 are calculated from the positions. The control device 30 causes the stage device 22 to correct the angle of the stage 21 around the θ axis based on the position error and angle error of the crimping member mounting portion 12 and the position error and angle error of the crimping member 13 with respect to the pressing tool 74. At the same time, the position is corrected in the X and Y axis directions, and the position is corrected so that the pair of alignment marks 37 of the crimping member 13 and the pair of alignment marks 34 of the crimping member mounting portion 12 of the substrate 11 coincide with each other. Thereafter, the Z-axis slider 64 is lowered and the pressure-sensitive adhesive member 13 adsorbed on the pressing surface 77 of the pressure tool 74 heated by the heater is attached to the pressure-sensitive member mounting portion 12 of the substrate 11. Is temporarily bonded at a predetermined pressure and temperature.

  Next, a third embodiment will be described. In the first embodiment, the liquid crystal related crimping apparatus 10 is press-bonded by the thermocompression bonding apparatus 13 with the crimping member 13 temporarily bonded to the crimping member mounting portion 12 of the substrate 11 by the anisotropic conductive film 38. In the third embodiment, the liquid crystal related crimping device 80 is configured such that the stage device 22 transports the LCD glass substrate 11 and places the crimping member mounting portion 12 on the pressing surface 18 of the crimping table 16. A tape-like anisotropic conductive film (ACF tape) is bonded to the pressure-bonding member mounting portion 12 of the substrate 11 by pressure bonding. In the following, the third embodiment will be described with respect to components that are different from the first embodiment, and the same components as those of the first embodiment will be denoted by the same reference numerals and description thereof will be omitted.

  The liquid crystal related crimping device 80 includes an ACF pasting device 81 for crimping an ACF tape 84 on the crimping member mounting portion 12 of the substrate 11 between the pressing surface 83 of the ACF pasting head 82 and the pressing surface 18 of the crimping table 16, and a substrate A stage device 22 having a stage that holds 11 and moves in a horizontal plane and in the vertical direction, and a non-pressurized portion of a pressure measurement film that is pressed between both pressing surfaces 18 and 83 are extended to a use position. The automatic film take-up device 25 that winds the film and the image pickup position 27 adjacent to the pressure position 84 between the pressure surfaces 18 and 83 on the opposite side of the stage device 22 with the pressure-bonding table 16 interposed therebetween. , 83 is used to move the use position of the image pickup device 28 for picking up the pre-pressurized portion of the pressure measurement film and the film automatic winding device 25 between the pressure position 85 and the image pickup position 27. In an advancing and retracting device 29 for advancing and retracting the automatic winder controls the operation of each device, and a control device for performing various calculations. The determination of the degree of parallelism of the pressing surfaces 83 and 18 of the ACF adhering head 82 and the crimping table 16, the calculation of the inclination degree and the inclination direction between the pressing surfaces 83 and 18 are performed in the same manner as in the first embodiment. In this case, the ACF tape 84 is the pressure bonding member 13, the ACF bonding head 82 functions as a pressure tool, and the ACF bonding device 81 functions as a pressure bonding device.

  In the ACF sticking device 81, the crimping table 16 is fixed on the base 14, and a slider 40 is slidably mounted on a base 19 erected on the base 14. The slider 40 is mounted by a cylinder device 41. It is moved up and down toward the crimping table 16. An ACF sticking head 82 is fixed to the lower end of the slider 40. An ACF supply reel 88, in which an ACF tape 84 is stacked on a separator 87 and wound with an adhesive, is supported on the gantry 19 with appropriate rotational resistance and rotatably supported. The separator 87 fed out from the ACF supply reel 88 is guided by a plurality of guide rolls 89 supported so as to be freely rotatable on the gantry 19, and below the pressing surface 83 of the ACF sticking head 82 on the pressing surface 18 of the pressing table 16. It is stretched horizontally and passes through the vicinity of the upper part of the crimping member mounting portion 12 of the substrate 11 placed on the substrate 11. Thereafter, the separator 87 is sandwiched between a pair of drive rollers 91 that are rotationally driven by a motor, is driven with appropriate tension, and is stored in the disposal box 90. The ACF tape 84 fed out from the ACF supply reel 88 together with the separator 87 is cut to a predetermined length by a cutting device (not shown) in the middle, and the ACF tape 84 having the predetermined length is sent above the pressure member mounting portion 12. Then, the driving roller 91 is stopped. When the driving roller 91 stops, the ACF sticking head 82 is lowered by the cylinder device 41, and the ACF tape 84 is pressure-bonded onto the pressure-bonding member mounting portion 12 of the substrate 11 via the separator 87. When the ACF sticking head 82 is raised, the separator 87 is peeled off from the ACF tape 84 of a predetermined length stuck on the pressure member mounting portion 12 and returned to the horizontal state by the tension, and is fed by the driving roller 91 by a predetermined length. The ACF tape application operation described above is repeated.

  In the said embodiment, although the pressure measurement film 23 is comprised with the A film and C film, you may comprise with one film colored when pressurized. In this case, the roller 46 and the spacers 48 and 49 of the automatic film winding device 25 are not necessary.

  In the above embodiment, the pressure measurement film 23 is applied between the pressing tool 15 (74, 82) and the pressing surface of the crimping table 16 in a state where the pressure measuring film 23 is projected close to the pressing surface 18 of the crimping table 16. The pressure tool 15 (74, 82) is lowered while the pressure measurement film 23 is extended close to the upper surface of the substrate 11 placed on the pressing surface 18 of the crimping table 16. The pressure may be applied between the pressing surface 17 (77, 83) and the upper surface of the substrate 11. If it does in this way, in the state which added the parallelism of the upper and lower surfaces of the board | substrate 11 to the parallelism between the press surfaces 17 (77,83), 18, the press surface 17 (77,82) of the pressurization tool 15 (74,82). 83) and the parallelism between the upper surface of the substrate 11 can be detected. In this case, the parallelism between the pressing surfaces 17 (77, 83) and 18 was included in the parallelism between the pressing surface 17 (77, 83) of the pressing tool 15 (74, 82) and the upper surface of the substrate 11. It is detected in the state.

  In the above embodiment, the crimping member 13 is an FPC (Flexible Printed Circuit) using a polyimide film as a base material, but the crimping member 13 may be a chip.

  In the embodiment described above, the pressing tool 15 is moved in the vertical direction, but the crimping table 16 may be moved in the vertical direction.

The figure which shows the parallelism measuring apparatus of the thermocompression bonding apparatus in the liquid crystal related crimping | bonding apparatus which concerns on 1st Embodiment. The figure which shows a film automatic winding apparatus. The top view of the liquid crystal display device by which a crimping | compression-bonding member is crimped | bonded to a board | substrate with the liquid crystal related crimping apparatus shown in FIG. FIG. 4 is a partially enlarged bottom view showing the periphery of an electrode of the liquid crystal display device shown in FIG. 3. The partial expanded bottom view which shows the crimping | compression-bonding member shown in FIG. The figure which shows a measurement program. The figure which shows a parallelism detection program. The figure which shows 2nd Embodiment. The figure which shows 3rd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,60,80 ... Liquid crystal related crimping apparatus, 11 ... Board | substrate, 12 ... Crimping member mounting part, 13 ... Crimping member, 14 ... Base, 15, 74 ... Pressure tool, 16 ... Crimping stand, 17, 18, 77 , 83 ... pressing surface, 19, 62, 86 ... mount, 20, 70 ... thermocompression bonding device, 21 ... stage, 22 ... stage device, 23 ... pressure measuring film, 24 ... use position, 25 ... automatic film winding device, 26, 85 ... pressure position, 27 ... imaging position, 28, 76, 78 ... imaging device, 29 ... advance / retreat device, 30 ... control device, 31 ... liquid crystal display device, 34, 37 ... alignment mark, 38 ... anisotropy Conductive film, 40 ... slider, 41 ... cylinder device, 42 ... heater, 43 ... support base, 44 ... motor, 45-47 ... roller, 48, 49 ... spacer, 50 ... storage device, 51 ... measurement program, 52 ... parallel Degree detection Program, 53 ... output device, 81 ... ACF attachment device, 82 ... ACF application head, 84 ... ACF tape, 87 ... separator, 88 ... ACF supply reel, 91 ... driving roller.

Claims (4)

A pressure tool is mounted on the base so as to be relatively movable toward the pressure table, and a pressure bonding member is disposed on the pressure member mounting portion of the substrate between the pressure surface of the pressure tool and the pressure surface of the pressure table. A crimping device for crimping,
In a liquid crystal related crimping apparatus comprising a stage that holds the substrate and moves in a horizontal plane, and a stage device that places the crimping member mounting portion on the pressing surface,
An automatic film winding device that unwinds the unpressurized portion of the pressure measurement film to the use position and winds the pre-pressurized portion;
An imaging device that images a pre-pressurized portion of the pressure measurement film that is disposed at an imaging position adjacent to a pressing position between the pressing surface of the pressing tool and the pressing table and pressed between the pressing surfaces;
An advancing / retreating device for moving the automatic winding device back and forth in order to move the use position of the automatic film winding device between the pressure position and the imaging position;
An output device that outputs information related to an image obtained by capturing an already-pressed portion of the pressure measurement film pressed between the pressing tool and the pressing surface of the crimping table at the pressing position at the imaging position by the imaging device. A parallelism detecting device between the pressing surfaces of the pressure bonding device in the liquid crystal related pressure bonding device. In claim 1,
An operation unit is provided for calculating an equal density area distribution by dividing the image of the pressed part from the image information of the pressed part of the pressure measurement film imaged by the imaging device into areas of equal color density, An apparatus for detecting parallelism between pressing surfaces of a pressure bonding device in a liquid crystal related pressure bonding device, wherein the equal concentration area distribution is output to the output device. In claim 1,
The color density change degree and change direction of the pre-pressurized part are calculated from the image information of the pre-pressurized part of the pressure measurement film imaged by the imaging device, and based on the color density change degree and change direction. Computation means for calculating the degree of inclination and the inclination direction between the two pressing surfaces is provided, and the degree of inclination and the inclination direction between the two pressing faces calculated by the calculating means are output to the output device. The parallelism detection apparatus between the press surfaces of the crimping | compression-bonding apparatus in related crimping | compression-bonding apparatus. In any one of Claims 1 thru | or 3,
The apparatus for detecting parallelism between pressing surfaces of a pressure bonding apparatus in a liquid crystal related pressure bonding apparatus, wherein the pressure bonding member is an IC component, an FPC board, or an ACF tape.

Images