CN102105216A - 卤代聚硅烷和生产卤代聚硅烷的等离子体-化学方法 - Google Patents

卤代聚硅烷和生产卤代聚硅烷的等离子体-化学方法 Download PDF

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Publication number
CN102105216A
CN102105216A CN2009801198089A CN200980119808A CN102105216A CN 102105216 A CN102105216 A CN 102105216A CN 2009801198089 A CN2009801198089 A CN 2009801198089A CN 200980119808 A CN200980119808 A CN 200980119808A CN 102105216 A CN102105216 A CN 102105216A
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CN
China
Prior art keywords
halopolysilane
polysilane
ppm
halogen
hydrogen
Prior art date
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Pending
Application number
CN2009801198089A
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English (en)
Chinese (zh)
Inventor
克里斯蒂安·鲍赫
鲁门·德尔特舍维
格尔德·利波尔德
赛耶德-加瓦德·莫赫森尼-阿拉
诺伯特·奥尼尔
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Spawnt Private SARL
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Spawnt Private SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=41134603&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN102105216(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Spawnt Private SARL filed Critical Spawnt Private SARL
Publication of CN102105216A publication Critical patent/CN102105216A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871—Heating or cooling of the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0881—Two or more materials
    • B01J2219/0883—Gas-gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Polymers (AREA)
  • Silicon Compounds (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
CN2009801198089A 2008-05-27 2009-05-27 卤代聚硅烷和生产卤代聚硅烷的等离子体-化学方法 Pending CN102105216A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008025261.1 2008-05-27
DE102008025261A DE102008025261B4 (de) 2008-05-27 2008-05-27 Halogeniertes Polysilan und plasmachemisches Verfahren zu dessen Herstellung
PCT/DE2009/000726 WO2009143823A2 (de) 2008-05-27 2009-05-27 Halogeniertes polysilan und plasmachemisches verfahren zu dessen herstellung

Publications (1)

Publication Number Publication Date
CN102105216A true CN102105216A (zh) 2011-06-22

Family

ID=41134603

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801198089A Pending CN102105216A (zh) 2008-05-27 2009-05-27 卤代聚硅烷和生产卤代聚硅烷的等离子体-化学方法

Country Status (16)

Country Link
US (1) US9701795B2 (https=)
EP (1) EP2296803B1 (https=)
JP (1) JP5658143B2 (https=)
KR (1) KR101620122B1 (https=)
CN (1) CN102105216A (https=)
AU (1) AU2009253522B2 (https=)
BR (1) BRPI0912048B1 (https=)
CA (1) CA2726000C (https=)
DE (1) DE102008025261B4 (https=)
IL (1) IL209579A0 (https=)
MX (1) MX2010013005A (https=)
MY (1) MY159112A (https=)
RU (1) RU2502555C2 (https=)
TW (1) TW201012750A (https=)
UA (1) UA103479C2 (https=)
WO (1) WO2009143823A2 (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5888831B2 (ja) * 2005-10-05 2016-03-22 シン フィルム エレクトロニクス エーエスエー 架橋済みポリマー及びその製造方法
DE102008025260B4 (de) * 2008-05-27 2010-03-18 Rev Renewable Energy Ventures, Inc. Halogeniertes Polysilan und thermisches Verfahren zu dessen Herstellung
DE102009033351B3 (de) 2009-07-16 2011-02-24 Technische Universität Bergakademie Freiberg Verfahren zur Herstellung von Oligo- und Polysilanen
DE102009056437B4 (de) 2009-12-02 2013-06-27 Spawnt Private S.À.R.L. Verfahren und Vorrichtung zur Herstellung von kurzkettigen halogenierten Polysilanen
DE102009056436B4 (de) 2009-12-02 2013-06-27 Spawnt Private S.À.R.L. Chloridhaltiges Silicium
DE102009056438B4 (de) 2009-12-02 2013-05-16 Spawnt Private S.À.R.L. Verfahren zur Herstellung von Hexachlordisilan
DE102009056731A1 (de) 2009-12-04 2011-06-09 Rev Renewable Energy Ventures, Inc. Halogenierte Polysilane und Polygermane
SG185123A1 (en) 2010-05-05 2012-11-29 Spawnt Private Sarl Nano-wires made of novel precursors and method for the production thereof
DE102010025710A1 (de) * 2010-06-30 2012-01-05 Spawnt Private S.À.R.L. Speichermaterial und Verfahren zur Gewinnung von H-Silanen aus diesem
DE102010025948A1 (de) * 2010-07-02 2012-01-05 Spawnt Private S.À.R.L. Polysilane mittlerer Kettenlänge und Verfahren zu deren Herstellung
DE102010043646A1 (de) 2010-11-09 2012-05-10 Evonik Degussa Gmbh Verfahren zur Herstellung von Trichlorsilan
DE102013207447A1 (de) 2013-04-24 2014-10-30 Evonik Degussa Gmbh Verfahren und Vorrichtung zur Herstellung von Octachlortrisilan
DE102013207444A1 (de) 2013-04-24 2014-10-30 Evonik Degussa Gmbh Verfahren und Vorrichtung zur Herstellung von Polychlorsilanen
DE102014203810A1 (de) 2014-03-03 2015-09-03 Evonik Degussa Gmbh Verfahren zur Herstellung reiner Octachlortrisilane und Decachlortetrasilane
DE102014007767B4 (de) 2014-05-21 2025-08-28 Christian Bauch Verfahren zur Herstellung halogenierter Oligosilane aus Silicium und Tetrachlorsilan
DE102014007766B4 (de) 2014-05-21 2025-10-16 Christian Bauch Verfahren zur plasmachemischen Herstellung halogenierter Oligosilane aus Tetrachlorsilan
DE102014109275A1 (de) 2014-07-02 2016-01-07 Spawnt Private S.À.R.L. Verfahren zur Herstellung von Nanopartikeln, Nanopartikel und deren Verwendung
CN106604924B (zh) 2014-07-22 2020-04-03 迈图高新材料有限责任公司 用于裂解单硅烷、聚硅烷和/或低聚硅烷中的硅-硅键和/或硅-氯键的方法
EP3088359B1 (de) 2015-04-28 2018-09-12 Evonik Degussa GmbH Verfahren zur herstellung von octachlortrisilan und höherer polychlorsilane unter verwertung von hexachlordisilan
JP7125062B2 (ja) * 2019-01-25 2022-08-24 株式会社東芝 判定方法及び処理方法

Citations (2)

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DE102005024041A1 (de) * 2005-05-25 2006-11-30 City Solar Ag Verfahren zur Herstellung von Silicium aus Halogensilanen
DE102006034061A1 (de) * 2006-07-20 2008-01-24 REV Renewable Energy Ventures, Inc., Aloha Polysilanverarbeitung und Verwendung

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GB703349A (en) 1949-12-10 1954-02-03 Ferranti Ltd Improvements relating to coin-actuated mechanisms
GB702349A (en) * 1950-07-08 1954-01-13 British Thomson Houston Co Ltd Improvements in and relating to the preparation of chloropolysilanes
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US4309259A (en) * 1980-05-09 1982-01-05 Motorola, Inc. High pressure plasma hydrogenation of silicon tetrachloride
US4374182A (en) * 1980-07-07 1983-02-15 Dow Corning Corporation Preparation of silicon metal through polymer degradation
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JPS59182222A (ja) * 1983-03-30 1984-10-17 Mitsui Toatsu Chem Inc ポリクロロシランの製造方法
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CL2007002067A1 (es) 2006-07-17 2008-01-25 Boehringer Ingelheim Int Uso de dabigatran etexilato, inhibidores directos de la trombina, para el tratamiento y/o profilaxis en niños de enfermedades tales como infarto cerebral no hemorragico, infarto de miocardio, arritmia, trombosis venosa central, entre otras.
DE102006043929B4 (de) * 2006-09-14 2016-10-06 Spawnt Private S.À.R.L. Verfahren zur Herstellung von festen Polysilanmischungen
DE102007007874A1 (de) * 2007-02-14 2008-08-21 Evonik Degussa Gmbh Verfahren zur Herstellung höherer Silane
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DE102005024041A1 (de) * 2005-05-25 2006-11-30 City Solar Ag Verfahren zur Herstellung von Silicium aus Halogensilanen
DE102006034061A1 (de) * 2006-07-20 2008-01-24 REV Renewable Energy Ventures, Inc., Aloha Polysilanverarbeitung und Verwendung

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Also Published As

Publication number Publication date
JP5658143B2 (ja) 2015-01-21
EP2296803A2 (de) 2011-03-23
KR20110043545A (ko) 2011-04-27
MX2010013005A (es) 2011-05-24
JP2011520762A (ja) 2011-07-21
RU2502555C2 (ru) 2013-12-27
AU2009253522B2 (en) 2016-05-12
BRPI0912048B1 (pt) 2018-01-16
UA103479C2 (ru) 2013-10-25
EP2296803B1 (de) 2013-07-10
BRPI0912048A2 (pt) 2016-01-05
CA2726000C (en) 2018-01-02
RU2010152681A (ru) 2012-07-10
TW201012750A (en) 2010-04-01
KR101620122B1 (ko) 2016-05-12
WO2009143823A2 (de) 2009-12-03
AU2009253522A1 (en) 2009-12-03
DE102008025261A1 (de) 2009-12-03
US20110150740A1 (en) 2011-06-23
DE102008025261B4 (de) 2010-03-18
US9701795B2 (en) 2017-07-11
MY159112A (en) 2016-12-15
WO2009143823A3 (de) 2010-04-08
CA2726000A1 (en) 2009-12-03
IL209579A0 (en) 2011-01-31

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Application publication date: 20110622