CN102104108B - 发光二极管封装及其制造方法 - Google Patents
发光二极管封装及其制造方法 Download PDFInfo
- Publication number
- CN102104108B CN102104108B CN201010591413.3A CN201010591413A CN102104108B CN 102104108 B CN102104108 B CN 102104108B CN 201010591413 A CN201010591413 A CN 201010591413A CN 102104108 B CN102104108 B CN 102104108B
- Authority
- CN
- China
- Prior art keywords
- electrode
- lead frame
- semiconductor layer
- led
- led chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 230000005496 eutectics Effects 0.000 claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims description 45
- 238000005538 encapsulation Methods 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 15
- 229910052718 tin Inorganic materials 0.000 claims description 13
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 229910052759 nickel Inorganic materials 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 230000005670 electromagnetic radiation Effects 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000012780 transparent material Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims 7
- 230000001678 irradiating effect Effects 0.000 claims 3
- 229910017401 Au—Ge Inorganic materials 0.000 claims 2
- 229910017398 Au—Ni Inorganic materials 0.000 claims 2
- 229910015363 Au—Sn Inorganic materials 0.000 claims 2
- 238000009413 insulation Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 description 13
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 8
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 8
- 229910002601 GaN Inorganic materials 0.000 description 7
- 229910052693 Europium Inorganic materials 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 239000011777 magnesium Substances 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000002313 adhesive film Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 229910002704 AlGaN Inorganic materials 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 239000006023 eutectic alloy Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000003685 thermal hair damage Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910017083 AlN Inorganic materials 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 229910052771 Terbium Inorganic materials 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 229910019990 cerium-doped yttrium aluminum garnet Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
- H01L33/486—Containers adapted for surface mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
- H01L33/501—Wavelength conversion elements characterised by the materials, e.g. binder
- H01L33/502—Wavelength conversion materials
- H01L33/504—Elements with two or more wavelength conversion materials
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Led Device Packages (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090127788A KR101258586B1 (ko) | 2009-12-21 | 2009-12-21 | 발광다이오드 패키지 및 이의 제조방법 |
KR10-2009-0127788 | 2009-12-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102104108A CN102104108A (zh) | 2011-06-22 |
CN102104108B true CN102104108B (zh) | 2014-03-12 |
Family
ID=44149825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010591413.3A Active CN102104108B (zh) | 2009-12-21 | 2010-12-16 | 发光二极管封装及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8709844B2 (ko) |
KR (1) | KR101258586B1 (ko) |
CN (1) | CN102104108B (ko) |
TW (1) | TWI435483B (ko) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9443903B2 (en) | 2006-06-30 | 2016-09-13 | Cree, Inc. | Low temperature high strength metal stack for die attachment |
US8698184B2 (en) * | 2011-01-21 | 2014-04-15 | Cree, Inc. | Light emitting diodes with low junction temperature and solid state backlight components including light emitting diodes with low junction temperature |
KR101276053B1 (ko) * | 2011-07-22 | 2013-06-17 | 삼성전자주식회사 | 반도체 발광소자 및 발광장치 |
WO2013121708A1 (ja) * | 2012-02-15 | 2013-08-22 | パナソニック株式会社 | 発光装置およびその製造方法 |
KR101958419B1 (ko) | 2013-01-29 | 2019-03-14 | 삼성전자 주식회사 | 반도체 발광 소자 |
US10439107B2 (en) | 2013-02-05 | 2019-10-08 | Cree, Inc. | Chip with integrated phosphor |
US9318674B2 (en) * | 2013-02-05 | 2016-04-19 | Cree, Inc. | Submount-free light emitting diode (LED) components and methods of fabricating same |
KR102031967B1 (ko) * | 2013-05-07 | 2019-10-14 | 엘지이노텍 주식회사 | 발광 소자 패키지 |
CN103456729B (zh) * | 2013-07-26 | 2016-09-21 | 利亚德光电股份有限公司 | 发光二极管显示屏 |
KR101521939B1 (ko) | 2013-12-17 | 2015-05-20 | 엘지전자 주식회사 | 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법 |
CN104752578A (zh) * | 2013-12-25 | 2015-07-01 | 宝钢金属有限公司 | 一种用于ac-led芯片结构倒装焊金属层结构 |
CN104752594B (zh) * | 2013-12-25 | 2017-11-10 | 宝钢金属有限公司 | 一种用于ac‑led芯片结构倒装焊金属层的制作方法 |
CN103872212B (zh) * | 2014-01-26 | 2017-01-25 | 上海瑞丰光电子有限公司 | 一种led封装方法 |
KR20160025782A (ko) * | 2014-08-28 | 2016-03-09 | 엘지이노텍 주식회사 | 발광 소자 패키지 |
KR102014258B1 (ko) * | 2014-11-21 | 2019-08-26 | 엘지전자 주식회사 | 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법 |
TWI583019B (zh) * | 2015-02-17 | 2017-05-11 | 新世紀光電股份有限公司 | Light emitting diode and manufacturing method thereof |
TWI662724B (zh) * | 2018-06-06 | 2019-06-11 | 海華科技股份有限公司 | 覆晶式發光模組 |
CN108933188A (zh) * | 2018-09-06 | 2018-12-04 | 武汉华星光电技术有限公司 | 发光二极管及使用所述发光二极管的背光模组 |
TWI690102B (zh) * | 2019-01-04 | 2020-04-01 | 友達光電股份有限公司 | 發光裝置及其製造方法 |
TWI773322B (zh) * | 2021-05-14 | 2022-08-01 | 友達光電股份有限公司 | 發光二極體 |
KR102579242B1 (ko) * | 2022-02-22 | 2023-09-18 | 한국에너지공과대학교 | 마이크로 led 표시 장치 및 마이크로 led 표시 장치 제조 방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1747192A (zh) * | 2004-09-09 | 2006-03-15 | 丰田合成株式会社 | 发光装置 |
TW200939522A (en) * | 2008-03-05 | 2009-09-16 | Everlight Electronics Co Ltd | Apparatus and method for packaging thin LED |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6331459B1 (en) | 1999-02-18 | 2001-12-18 | Infineon Technologies Ag | Use of dummy poly spacers and divot fill techniques for DT-aligned processing after STI formation for advanced deep trench capacitor DRAM |
TW543128B (en) * | 2001-07-12 | 2003-07-21 | Highlink Technology Corp | Surface mounted and flip chip type LED package |
US6730940B1 (en) | 2002-10-29 | 2004-05-04 | Lumileds Lighting U.S., Llc | Enhanced brightness light emitting device spot emitter |
KR20050042608A (ko) * | 2003-11-03 | 2005-05-10 | 주식회사 엠피씨 | 콜센터 시스템에서의 상담원 휴가 배정 방법 |
KR100638824B1 (ko) * | 2005-05-20 | 2006-10-27 | 삼성전기주식회사 | 발광 다이오드 칩의 접합 방법 |
KR20070103139A (ko) | 2006-04-18 | 2007-10-23 | 애드씨커뮤니케이션(주) | 유무선 인터넷 환경에서의 광고게임 연동 서비스 |
TW200814362A (en) | 2006-09-13 | 2008-03-16 | Bright Led Electronics Corp | Light-emitting diode device with high heat dissipation property |
KR20090085594A (ko) * | 2006-10-05 | 2009-08-07 | 미쓰비시 가가꾸 가부시키가이샤 | GaN 계 LED 칩을 사용하여 이루어지는 발광 장치 |
WO2008041770A1 (fr) | 2006-10-05 | 2008-04-10 | Mitsubishi Chemical Corporation | DISPOSITIF D'ÉMISSION DE LUMIÈRE UTILISANT UNE PUCE DE LED AU GaN |
KR100880638B1 (ko) * | 2007-07-06 | 2009-01-30 | 엘지전자 주식회사 | 발광 소자 패키지 |
KR100888815B1 (ko) | 2007-10-12 | 2009-03-17 | 삼성전기주식회사 | 발광다이오드 패키지 |
US8917206B2 (en) * | 2009-06-09 | 2014-12-23 | Qualcomm Incorporated | Mobile-based positioning with non-conforming use of assistance data |
US20110309057A1 (en) * | 2010-06-21 | 2011-12-22 | Touch Micro-System Technology Corp. | Laser heating apparatus for metal eutectic bonding |
-
2009
- 2009-12-21 KR KR1020090127788A patent/KR101258586B1/ko active IP Right Grant
-
2010
- 2010-11-19 TW TW099139932A patent/TWI435483B/zh active
- 2010-12-16 CN CN201010591413.3A patent/CN102104108B/zh active Active
- 2010-12-20 US US12/972,529 patent/US8709844B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1747192A (zh) * | 2004-09-09 | 2006-03-15 | 丰田合成株式会社 | 发光装置 |
TW200939522A (en) * | 2008-03-05 | 2009-09-16 | Everlight Electronics Co Ltd | Apparatus and method for packaging thin LED |
Non-Patent Citations (2)
Title |
---|
基于共晶的MEMS芯片键合技术及其应用;陈明祥等;《半导体光电》;20041231;第25卷(第6期);5 * |
陈明祥等.基于共晶的MEMS芯片键合技术及其应用.《半导体光电》.2004,第25卷(第6期),5. |
Also Published As
Publication number | Publication date |
---|---|
TW201125175A (en) | 2011-07-16 |
US8709844B2 (en) | 2014-04-29 |
KR20110071270A (ko) | 2011-06-29 |
KR101258586B1 (ko) | 2013-05-02 |
TWI435483B (zh) | 2014-04-21 |
US20110147779A1 (en) | 2011-06-23 |
CN102104108A (zh) | 2011-06-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102104108B (zh) | 发光二极管封装及其制造方法 | |
US10777715B2 (en) | Semiconductor light emitting device | |
JP4101468B2 (ja) | 発光装置の製造方法 | |
JP4055373B2 (ja) | 発光装置の製造方法 | |
JP4645071B2 (ja) | パッケージ成型体およびそれを用いた半導体装置 | |
JP3891115B2 (ja) | 発光装置 | |
US7382033B2 (en) | Luminescent body and optical device including the same | |
JP4855869B2 (ja) | 発光装置の製造方法 | |
JP4591071B2 (ja) | 半導体装置 | |
US7462928B2 (en) | Semiconductor apparatus | |
JP4792751B2 (ja) | 発光装置およびその製造方法 | |
JP4430264B2 (ja) | 表面実装型発光装置 | |
WO2011099384A1 (ja) | 発光装置および発光装置の製造方法 | |
CN104164234B (zh) | 磷光体及包括磷光体的发光器件封装件 | |
JP2008244357A (ja) | 半導体発光装置 | |
JP2002252372A (ja) | 発光ダイオード | |
JP5755420B2 (ja) | 発光装置 | |
JP2004186309A (ja) | 金属パッケージを備えた半導体発光装置 | |
JP4539235B2 (ja) | 半導体装置およびその製造方法 | |
JP2006303548A (ja) | 発光装置 | |
JP3399342B2 (ja) | 発光ダイオードの形成方法 | |
JP4165592B2 (ja) | 発光装置 | |
JP4900374B2 (ja) | 金属パッケージを備えた半導体発光装置 | |
KR102409189B1 (ko) | 형광체 구조물, 이를 포함하는 발광 소자 패키지 및 조명 장치 | |
KR102164079B1 (ko) | 산질화물계 형광체를 포함하는 발광 소자 패키지 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |