CN101981790B - 线性电动机组及具备该线性电动机组的电子元件移载装置 - Google Patents

线性电动机组及具备该线性电动机组的电子元件移载装置 Download PDF

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Publication number
CN101981790B
CN101981790B CN200980111137.1A CN200980111137A CN101981790B CN 101981790 B CN101981790 B CN 101981790B CN 200980111137 A CN200980111137 A CN 200980111137A CN 101981790 B CN101981790 B CN 101981790B
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CN
China
Prior art keywords
linear motor
mover
linear
magnetic sensor
moving direction
Prior art date
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Active
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CN200980111137.1A
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English (en)
Chinese (zh)
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CN101981790A (zh
Inventor
堺清敬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Motor Co Ltd
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Yamaha Motor Co Ltd
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Publication date
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Publication of CN101981790A publication Critical patent/CN101981790A/zh
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool
    • H05K13/041—Incorporating a pick-up tool having multiple pick-up tools
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0413—Pick-and-place heads or apparatus, e.g. with jaws with orientation of the component while holding it; Drive mechanisms for gripping tools, e.g. lifting, lowering or turning of gripping tools
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/082—Integration of non-optical monitoring devices, i.e. using non-optical inspection means, e.g. electrical means, mechanical means or X-rays
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H02K16/02—Machines with one stator and two or more rotors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Operations Research (AREA)
  • Linear Motors (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Control Of Linear Motors (AREA)
CN200980111137.1A 2008-03-28 2009-03-25 线性电动机组及具备该线性电动机组的电子元件移载装置 Active CN101981790B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008-087999 2008-03-28
JP2008087999A JP4669021B2 (ja) 2008-03-28 2008-03-28 リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置
PCT/JP2009/055923 WO2009119648A1 (ja) 2008-03-28 2009-03-25 リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置

Publications (2)

Publication Number Publication Date
CN101981790A CN101981790A (zh) 2011-02-23
CN101981790B true CN101981790B (zh) 2014-02-19

Family

ID=41113839

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980111137.1A Active CN101981790B (zh) 2008-03-28 2009-03-25 线性电动机组及具备该线性电动机组的电子元件移载装置

Country Status (5)

Country Link
US (1) US8643226B2 (enExample)
EP (1) EP2259412B1 (enExample)
JP (1) JP4669021B2 (enExample)
CN (1) CN101981790B (enExample)
WO (1) WO2009119648A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4705118B2 (ja) * 2008-01-11 2011-06-22 ヤマハ発動機株式会社 多軸リニアモータ及び部品移載装置
JP5597158B2 (ja) * 2011-04-11 2014-10-01 ヤマハ発動機株式会社 部品実装装置
JP5873338B2 (ja) * 2012-01-11 2016-03-01 ヤマハ発動機株式会社 部品実装装置
JP5875376B2 (ja) * 2012-01-12 2016-03-02 ヤマハ発動機株式会社 吸着ノズル昇降用リニアモータおよび電子部品実装装置
JP5872908B2 (ja) * 2012-01-12 2016-03-01 ヤマハ発動機株式会社 リニアモータユニット、ヘッドユニットおよび部品実装機
JP5460753B2 (ja) * 2012-01-20 2014-04-02 ファナック株式会社 位置を検出する複数のスイッチを備えた射出成形機
CN104735965A (zh) * 2013-12-19 2015-06-24 王胜 一种用于高速插件机的元件传送装置
US9996071B2 (en) * 2014-06-24 2018-06-12 Western Digital Technologies, Inc. Moveable slider for use in a device assembly process
DE112016007262T8 (de) * 2016-09-26 2019-07-04 Yamaha Hatsudoki Kabushiki Kaisha Positionsdetektiervorrichtung und Linearfördervorrichtung, die mit derselben versehen ist
US11229148B2 (en) * 2017-07-18 2022-01-18 Fuji Corporation Component mounting machine
US20230156991A1 (en) * 2021-11-15 2023-05-18 Kulicke & Soffa Netherlands B.V. Component placement systems, multi-pipette placement heads, and methods of using the same
CN115097851B (zh) * 2022-06-30 2025-04-22 瑞声光电科技(常州)有限公司 直驱传输系统的控制方法及相关设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001105270A (ja) * 1999-08-13 2001-04-17 Mire Kk リニアモータが適用されたヘッドモジュール
JP2003244929A (ja) * 2002-02-18 2003-08-29 Yaskawa Electric Corp リニアモータ
CN1904740A (zh) * 2005-07-13 2007-01-31 Asml荷兰有限公司 工作台装置、光刻装置及器件制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03179215A (ja) 1989-12-07 1991-08-05 Hitachi Ltd 磁気エンコーダ
EP1319327A2 (en) * 2000-09-19 2003-06-18 Matsushita Electric Industrial Co., Ltd. Component suction device, component mounting apparatus and component mounting method
EP1504515A1 (de) * 2002-05-15 2005-02-09 Siemens Aktiengesellschaft Elektromagnetischer linearantrieb
JP4813056B2 (ja) * 2004-07-29 2011-11-09 パナソニック株式会社 部品実装用実装ヘッド、及び該実装ヘッドを備える部品実装装置
JP4886355B2 (ja) * 2006-05-02 2012-02-29 日本トムソン株式会社 可動マグネット型リニアモータを内蔵したスライド装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001105270A (ja) * 1999-08-13 2001-04-17 Mire Kk リニアモータが適用されたヘッドモジュール
JP2003244929A (ja) * 2002-02-18 2003-08-29 Yaskawa Electric Corp リニアモータ
CN1904740A (zh) * 2005-07-13 2007-01-31 Asml荷兰有限公司 工作台装置、光刻装置及器件制造方法

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
JP平3-179215A 1991.08.05
JP特开2001-105270AA 2001.04.17
JP特开2003-244929A 2003.08.29
JP特开2006-67771A 2006.03.09

Also Published As

Publication number Publication date
JP2009247056A (ja) 2009-10-22
US8643226B2 (en) 2014-02-04
US20110025137A1 (en) 2011-02-03
EP2259412A4 (en) 2013-03-13
CN101981790A (zh) 2011-02-23
EP2259412A1 (en) 2010-12-08
JP4669021B2 (ja) 2011-04-13
WO2009119648A1 (ja) 2009-10-01
EP2259412B1 (en) 2017-10-25

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