JP4669021B2 - リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置 - Google Patents

リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置 Download PDF

Info

Publication number
JP4669021B2
JP4669021B2 JP2008087999A JP2008087999A JP4669021B2 JP 4669021 B2 JP4669021 B2 JP 4669021B2 JP 2008087999 A JP2008087999 A JP 2008087999A JP 2008087999 A JP2008087999 A JP 2008087999A JP 4669021 B2 JP4669021 B2 JP 4669021B2
Authority
JP
Japan
Prior art keywords
linear motor
linear
motor unit
mover
magnetic sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008087999A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009247056A (ja
JP2009247056A5 (enExample
Inventor
清敬 堺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Motor Co Ltd
Original Assignee
Yamaha Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Motor Co Ltd filed Critical Yamaha Motor Co Ltd
Priority to JP2008087999A priority Critical patent/JP4669021B2/ja
Priority to PCT/JP2009/055923 priority patent/WO2009119648A1/ja
Priority to CN200980111137.1A priority patent/CN101981790B/zh
Priority to US12/921,660 priority patent/US8643226B2/en
Priority to EP09724247.3A priority patent/EP2259412B1/en
Publication of JP2009247056A publication Critical patent/JP2009247056A/ja
Publication of JP2009247056A5 publication Critical patent/JP2009247056A5/ja
Application granted granted Critical
Publication of JP4669021B2 publication Critical patent/JP4669021B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool
    • H05K13/041—Incorporating a pick-up tool having multiple pick-up tools
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0413—Pick-and-place heads or apparatus, e.g. with jaws with orientation of the component while holding it; Drive mechanisms for gripping tools, e.g. lifting, lowering or turning of gripping tools
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/082—Integration of non-optical monitoring devices, i.e. using non-optical inspection means, e.g. electrical means, mechanical means or X-rays
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H02K16/02—Machines with one stator and two or more rotors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Operations Research (AREA)
  • Linear Motors (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Control Of Linear Motors (AREA)
JP2008087999A 2008-03-28 2008-03-28 リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置 Active JP4669021B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008087999A JP4669021B2 (ja) 2008-03-28 2008-03-28 リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置
PCT/JP2009/055923 WO2009119648A1 (ja) 2008-03-28 2009-03-25 リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置
CN200980111137.1A CN101981790B (zh) 2008-03-28 2009-03-25 线性电动机组及具备该线性电动机组的电子元件移载装置
US12/921,660 US8643226B2 (en) 2008-03-28 2009-03-25 Linear motor and electronic component transfer device equipped with linear motor unit
EP09724247.3A EP2259412B1 (en) 2008-03-28 2009-03-25 Linear motor unit and electronic component transfer device equipped with linear motor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008087999A JP4669021B2 (ja) 2008-03-28 2008-03-28 リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置

Publications (3)

Publication Number Publication Date
JP2009247056A JP2009247056A (ja) 2009-10-22
JP2009247056A5 JP2009247056A5 (enExample) 2010-10-07
JP4669021B2 true JP4669021B2 (ja) 2011-04-13

Family

ID=41113839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008087999A Active JP4669021B2 (ja) 2008-03-28 2008-03-28 リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置

Country Status (5)

Country Link
US (1) US8643226B2 (enExample)
EP (1) EP2259412B1 (enExample)
JP (1) JP4669021B2 (enExample)
CN (1) CN101981790B (enExample)
WO (1) WO2009119648A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4705118B2 (ja) * 2008-01-11 2011-06-22 ヤマハ発動機株式会社 多軸リニアモータ及び部品移載装置
JP5597158B2 (ja) * 2011-04-11 2014-10-01 ヤマハ発動機株式会社 部品実装装置
JP5873338B2 (ja) * 2012-01-11 2016-03-01 ヤマハ発動機株式会社 部品実装装置
JP5875376B2 (ja) * 2012-01-12 2016-03-02 ヤマハ発動機株式会社 吸着ノズル昇降用リニアモータおよび電子部品実装装置
JP5872908B2 (ja) * 2012-01-12 2016-03-01 ヤマハ発動機株式会社 リニアモータユニット、ヘッドユニットおよび部品実装機
JP5460753B2 (ja) * 2012-01-20 2014-04-02 ファナック株式会社 位置を検出する複数のスイッチを備えた射出成形機
CN104735965A (zh) * 2013-12-19 2015-06-24 王胜 一种用于高速插件机的元件传送装置
US9996071B2 (en) * 2014-06-24 2018-06-12 Western Digital Technologies, Inc. Moveable slider for use in a device assembly process
DE112016007262T8 (de) * 2016-09-26 2019-07-04 Yamaha Hatsudoki Kabushiki Kaisha Positionsdetektiervorrichtung und Linearfördervorrichtung, die mit derselben versehen ist
US11229148B2 (en) * 2017-07-18 2022-01-18 Fuji Corporation Component mounting machine
US20230156991A1 (en) * 2021-11-15 2023-05-18 Kulicke & Soffa Netherlands B.V. Component placement systems, multi-pipette placement heads, and methods of using the same
CN115097851B (zh) * 2022-06-30 2025-04-22 瑞声光电科技(常州)有限公司 直驱传输系统的控制方法及相关设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03179215A (ja) 1989-12-07 1991-08-05 Hitachi Ltd 磁気エンコーダ
KR100300521B1 (ko) * 1999-08-13 2001-11-01 정문술 리니어 모터가 적용된 헤드 모듈
EP1319327A2 (en) * 2000-09-19 2003-06-18 Matsushita Electric Industrial Co., Ltd. Component suction device, component mounting apparatus and component mounting method
JP2003244929A (ja) * 2002-02-18 2003-08-29 Yaskawa Electric Corp リニアモータ
EP1504515A1 (de) * 2002-05-15 2005-02-09 Siemens Aktiengesellschaft Elektromagnetischer linearantrieb
JP4813056B2 (ja) * 2004-07-29 2011-11-09 パナソニック株式会社 部品実装用実装ヘッド、及び該実装ヘッドを備える部品実装装置
US7417715B2 (en) * 2005-07-13 2008-08-26 Asml Netherlands B.V. Stage apparatus, lithographic apparatus and device manufacturing method using two patterning devices
JP4886355B2 (ja) * 2006-05-02 2012-02-29 日本トムソン株式会社 可動マグネット型リニアモータを内蔵したスライド装置

Also Published As

Publication number Publication date
JP2009247056A (ja) 2009-10-22
US8643226B2 (en) 2014-02-04
CN101981790B (zh) 2014-02-19
US20110025137A1 (en) 2011-02-03
EP2259412A4 (en) 2013-03-13
CN101981790A (zh) 2011-02-23
EP2259412A1 (en) 2010-12-08
WO2009119648A1 (ja) 2009-10-01
EP2259412B1 (en) 2017-10-25

Similar Documents

Publication Publication Date Title
JP4669021B2 (ja) リニアモータユニットおよび該リニアモータユニットを備えた電子部品移載装置
CN101911450B (zh) 线性电动机、元件安装装置及元件检查装置
JP4731903B2 (ja) 部品実装用実装ヘッド、及び該実装ヘッドを備えた部品実装装置
KR101426369B1 (ko) 부품 인식 장치, 표면 실장기 및 부품 시험기
US20130181546A1 (en) Linear motor for lifting and lowering suction nozzle, and electronic component mounting apparatus
CN103208902B (zh) 线性马达、元件安装装置以及元件检查装置
CN114830513A (zh) 线性输送机
KR101557718B1 (ko) 부품 실장 장치
JP6616507B2 (ja) リニアモータ、ヘッドユニット、表面実装機および単軸ロボット
JP5602990B2 (ja) 部品実装装置
JP5000537B2 (ja) 部品搬送装置、部品実装装置及び部品検査装置
CN104081636B (zh) 线性马达以及组件安装装置
JP5289775B2 (ja) 部品認識装置、部品実装装置及び部品試験装置
JP5390105B2 (ja) リニアモータ、部品実装装置及び部品検査装置
JP2009171657A (ja) リニアモータ及び部品移載装置
JP2009170526A (ja) 部品搬送装置、該部品搬送装置を備えた部品実装装置、前記部品搬送装置を備えた部品検査装置および部品搬送装置の異常検出方法
JP2009170529A (ja) 部品認識装置、部品実装装置及び部品試験装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100819

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100824

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20100824

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20100901

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101005

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101124

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110105

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140121

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4669021

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250