CN101970315B - 用于控制衬底污染的方法和设备 - Google Patents

用于控制衬底污染的方法和设备 Download PDF

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Publication number
CN101970315B
CN101970315B CN2008801269959A CN200880126995A CN101970315B CN 101970315 B CN101970315 B CN 101970315B CN 2008801269959 A CN2008801269959 A CN 2008801269959A CN 200880126995 A CN200880126995 A CN 200880126995A CN 101970315 B CN101970315 B CN 101970315B
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China
Prior art keywords
container
substrate container
purge
substrate
purging
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Expired - Fee Related
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CN2008801269959A
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English (en)
Chinese (zh)
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CN101970315A (zh
Inventor
奥列格·P·基什科维奇
大卫·L·哈尔布迈尔
阿纳托利·格雷费尔
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Entegris Inc
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Entegris Inc
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Publication of CN101970315A publication Critical patent/CN101970315A/zh
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    • H10P72/3404—
    • H10P72/0402—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Packaging Frangible Articles (AREA)
CN2008801269959A 2007-12-18 2008-12-18 用于控制衬底污染的方法和设备 Expired - Fee Related CN101970315B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US1470907P 2007-12-18 2007-12-18
US61/014,709 2007-12-18
PCT/US2008/087474 WO2009079636A2 (en) 2007-12-18 2008-12-18 Methods and apparatuses for controlling contamination of substrates

Publications (2)

Publication Number Publication Date
CN101970315A CN101970315A (zh) 2011-02-09
CN101970315B true CN101970315B (zh) 2013-05-15

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CN2008801269959A Expired - Fee Related CN101970315B (zh) 2007-12-18 2008-12-18 用于控制衬底污染的方法和设备

Country Status (6)

Country Link
US (1) US20110114129A1 (enExample)
JP (1) JP2011507309A (enExample)
KR (1) KR20100102616A (enExample)
CN (1) CN101970315B (enExample)
TW (1) TW200948688A (enExample)
WO (1) WO2009079636A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI805266B (zh) 2022-03-11 2023-06-11 迅得機械股份有限公司 基板卡匣的載具及微型倉儲系統

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US9536763B2 (en) 2011-06-28 2017-01-03 Brooks Automation, Inc. Semiconductor stocker systems and methods
KR101147192B1 (ko) * 2011-11-11 2012-05-25 주식회사 엘에스테크 웨이퍼 표면상의 증착 이물 제거 장치
JP5527624B2 (ja) * 2012-01-05 2014-06-18 株式会社ダイフク 保管棚用の不活性ガス注入装置
US9381011B2 (en) 2012-03-29 2016-07-05 Depuy (Ireland) Orthopedic surgical instrument for knee surgery
CN103426792A (zh) * 2012-05-24 2013-12-04 上海宏力半导体制造有限公司 一种密封的n2清洗装置
JP6131534B2 (ja) * 2012-06-11 2017-05-24 シンフォニアテクノロジー株式会社 パージノズルユニット、ロードポート、載置台、ストッカー
US9412632B2 (en) * 2012-10-25 2016-08-09 Taiwan Semiconductor Manufacturing Company, Ltd. Reticle pod
US9136149B2 (en) 2012-11-16 2015-09-15 Taiwan Semiconductor Manufacturing Company, Ltd. Loading port, system for etching and cleaning wafers and method of use
FR2999016A1 (fr) * 2012-11-30 2014-06-06 Adixen Vacuum Products Station et procede de mesure de la contamination en particules d'une enceinte de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs
TWI615334B (zh) * 2013-03-26 2018-02-21 Gudeng Precision Industrial Co., Ltd. 具有氣體導引裝置之光罩盒
CN103409814B (zh) * 2013-07-15 2016-05-18 东华大学 一种密封式吹干装置及方法
JP2018536984A (ja) 2015-10-05 2018-12-13 ブルックス シーシーエス ゲーエムベーハーＢｒｏｏｋｓ ＣＣＳ ＧｍｂＨ 半導体システムにおける湿度制御
JP6729115B2 (ja) * 2016-03-31 2020-07-22 株式会社ダイフク 容器収納設備
US10583983B2 (en) 2016-03-31 2020-03-10 Daifuku Co., Ltd. Container storage facility
JP2017210899A (ja) * 2016-05-24 2017-11-30 愛三工業株式会社 燃料通路構造
JP6631446B2 (ja) * 2016-09-09 2020-01-15 株式会社ダイフク 物品収納設備
US10741432B2 (en) * 2017-02-06 2020-08-11 Applied Materials, Inc. Systems, apparatus, and methods for a load port door opener
JP6347301B2 (ja) * 2017-04-06 2018-06-27 シンフォニアテクノロジー株式会社 ロードポート及びノズル駆動ユニット
KR102516885B1 (ko) * 2018-05-10 2023-03-30 삼성전자주식회사 증착 장비 및 이를 이용한 반도체 장치 제조 방법
JP6614278B2 (ja) * 2018-05-24 2019-12-04 シンフォニアテクノロジー株式会社 容器パージ装置
US11189511B2 (en) * 2018-10-26 2021-11-30 Applied Materials, Inc. Side storage pods, equipment front end modules, and methods for operating EFEMs
US11244844B2 (en) * 2018-10-26 2022-02-08 Applied Materials, Inc. High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
US11373891B2 (en) 2018-10-26 2022-06-28 Applied Materials, Inc. Front-ducted equipment front end modules, side storage pods, and methods of operating the same
KR102479895B1 (ko) * 2020-07-03 2022-12-21 우범제 웨이퍼 수납용기
US12087605B2 (en) * 2020-09-30 2024-09-10 Gudeng Precision Industrial Co., Ltd. Reticle pod with antistatic capability
US11822257B2 (en) * 2021-03-12 2023-11-21 Gudeng Precision Industrial Co., Ltd. Reticle storage pod and method for securing reticle
JP2024533399A (ja) * 2021-09-09 2024-09-12 インテグリス・インコーポレーテッド 傾斜面を含むラッチを有するレチクルポッド
FR3139904B1 (fr) * 2022-09-20 2024-08-30 Pfeiffer Vacuum Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé
US20250208526A1 (en) * 2023-12-26 2025-06-26 Entegris, Inc. Photolithography substrate with purge flow direction

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EP0552756A1 (en) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Article storage house in a clean room
US5746008A (en) * 1992-07-29 1998-05-05 Shinko Electric Co., Ltd. Electronic substrate processing system using portable closed containers
JP3226998B2 (ja) * 1992-12-04 2001-11-12 株式会社荏原製作所 二重シール容器構造
US6926017B2 (en) * 1998-01-09 2005-08-09 Entegris, Inc. Wafer container washing apparatus
EP1062468B1 (en) * 1998-03-09 2004-01-07 Convey Incorporated A package for storing contaminant-sensitive articles
TW522482B (en) * 2000-08-23 2003-03-01 Tokyo Electron Ltd Vertical heat treatment system, method for controlling vertical heat treatment system, and method for transferring object to be treated
JP3939101B2 (ja) * 2000-12-04 2007-07-04 株式会社荏原製作所 基板搬送方法および基板搬送容器
JP2003092345A (ja) * 2001-07-13 2003-03-28 Semiconductor Leading Edge Technologies Inc 基板収納容器、基板搬送システム、保管装置及びガス置換方法
KR100649926B1 (ko) * 2001-11-14 2006-11-27 로제 가부시키가이샤 웨이퍼 위치 결정 방법 및 장치, 처리 시스템, 웨이퍼위치 결정 장치의 웨이퍼 시트 회전 축선 위치 결정 방법
US7400383B2 (en) * 2005-04-04 2008-07-15 Entegris, Inc. Environmental control in a reticle SMIF pod

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI805266B (zh) 2022-03-11 2023-06-11 迅得機械股份有限公司 基板卡匣的載具及微型倉儲系統

Also Published As

Publication number Publication date
WO2009079636A3 (en) 2009-09-11
KR20100102616A (ko) 2010-09-24
US20110114129A1 (en) 2011-05-19
JP2011507309A (ja) 2011-03-03
WO2009079636A4 (en) 2009-10-29
WO2009079636A2 (en) 2009-06-25
TW200948688A (en) 2009-12-01
CN101970315A (zh) 2011-02-09

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