CN101920962B - 一种用石英砂法制备四氟化硅的方法 - Google Patents
一种用石英砂法制备四氟化硅的方法 Download PDFInfo
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- CN101920962B CN101920962B CN2010102398956A CN201010239895A CN101920962B CN 101920962 B CN101920962 B CN 101920962B CN 2010102398956 A CN2010102398956 A CN 2010102398956A CN 201010239895 A CN201010239895 A CN 201010239895A CN 101920962 B CN101920962 B CN 101920962B
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- Prior art keywords
- silicon
- weight
- tetrafluoride
- silicon tetrafluoride
- dioxide
- Prior art date
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 108
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000006004 Quartz sand Substances 0.000 title claims abstract description 15
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 57
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 45
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 42
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 41
- 238000006243 chemical reaction Methods 0.000 claims abstract description 24
- 238000005406 washing Methods 0.000 claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 19
- 229910001512 metal fluoride Inorganic materials 0.000 claims abstract description 19
- 239000002002 slurry Substances 0.000 claims abstract description 17
- 238000001354 calcination Methods 0.000 claims abstract description 10
- 239000002994 raw material Substances 0.000 claims abstract description 10
- 230000003213 activating effect Effects 0.000 claims abstract description 8
- 229960001866 silicon dioxide Drugs 0.000 claims description 38
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 37
- 239000007789 gas Substances 0.000 claims description 27
- 239000003921 oil Substances 0.000 claims description 18
- YCNZFPXXIWEFCF-UHFFFAOYSA-N alumane;sodium Chemical compound [Na].[AlH3] YCNZFPXXIWEFCF-UHFFFAOYSA-N 0.000 claims description 12
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 9
- 229910001634 calcium fluoride Inorganic materials 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 230000035484 reaction time Effects 0.000 claims description 2
- 238000005201 scrubbing Methods 0.000 claims description 2
- 239000012535 impurity Substances 0.000 abstract description 7
- 238000001816 cooling Methods 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract description 2
- 239000000047 product Substances 0.000 description 5
- ARBIYISMVFAYHV-UHFFFAOYSA-N trifluoro(trifluorosilyloxy)silane Chemical compound F[Si](F)(F)O[Si](F)(F)F ARBIYISMVFAYHV-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 239000004576 sand Substances 0.000 description 3
- 229910004261 CaF 2 Inorganic materials 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 150000001669 calcium Chemical class 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
Abstract
Description
Claims (5)
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CN2010102398956A CN101920962B (zh) | 2010-07-26 | 2010-07-26 | 一种用石英砂法制备四氟化硅的方法 |
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CN2010102398956A CN101920962B (zh) | 2010-07-26 | 2010-07-26 | 一种用石英砂法制备四氟化硅的方法 |
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CN101920962A CN101920962A (zh) | 2010-12-22 |
CN101920962B true CN101920962B (zh) | 2012-01-11 |
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Families Citing this family (1)
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CN113247907A (zh) * | 2021-05-14 | 2021-08-13 | 浙江福陆工程设计有限公司 | 一种用石英砂法制备四氟化硅的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4470959A (en) * | 1983-06-20 | 1984-09-11 | Allied Corporation | Continuous production of silicon tetrafluoride gas in a vertical column |
CN101214925A (zh) * | 2007-12-29 | 2008-07-09 | 山东东岳化工有限公司 | 一种无水氟化氢生产工艺及设备 |
CN101693537A (zh) * | 2009-10-13 | 2010-04-14 | 西安三瑞实业有限公司 | 一种工业化连续制备四氟化硅的方法 |
CN101774587A (zh) * | 2010-02-11 | 2010-07-14 | 浙江中宁硅业有限公司 | 一种石英砂制备四氟化硅的方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09183608A (ja) * | 1995-12-28 | 1997-07-15 | Aichi Steel Works Ltd | 四フッ化ケイ素の製造方法 |
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2010
- 2010-07-26 CN CN2010102398956A patent/CN101920962B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4470959A (en) * | 1983-06-20 | 1984-09-11 | Allied Corporation | Continuous production of silicon tetrafluoride gas in a vertical column |
CN101214925A (zh) * | 2007-12-29 | 2008-07-09 | 山东东岳化工有限公司 | 一种无水氟化氢生产工艺及设备 |
CN101693537A (zh) * | 2009-10-13 | 2010-04-14 | 西安三瑞实业有限公司 | 一种工业化连续制备四氟化硅的方法 |
CN101774587A (zh) * | 2010-02-11 | 2010-07-14 | 浙江中宁硅业有限公司 | 一种石英砂制备四氟化硅的方法 |
Non-Patent Citations (1)
Title |
---|
JP特开平9-183608A 1997.07.15 |
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CN101920962A (zh) | 2010-12-22 |
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Address after: 315040, Lane 999, Lane 1, R & D Park, national hi tech Zone, Zhejiang, Ningbo Patentee after: SEDIN NINGBO ENGINEERING Co.,Ltd. Address before: 315040, Lane 999, Lane 1, R & D Park, national hi tech Zone, Zhejiang, Ningbo Patentee before: The Second Design Institute of Chemical Industry Ningbo Engineering Co.,Ltd. |
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Effective date of registration: 20231128 Address after: Room 1401, 14th Floor, No. 800 Chuangyuan Road, High tech Zone, Ningbo City, Zhejiang Province, 315040 Patentee after: Ningbo Zhongsai Intelligent Digital Technology Co.,Ltd. Address before: 315040 Lane No. 999, Yangfan Road, R&D Park, Ningbo National High-tech Zone, Zhejiang Province Patentee before: SEDIN NINGBO ENGINEERING Co.,Ltd. |