CN101900691B - 玻璃板检查系统 - Google Patents

玻璃板检查系统 Download PDF

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Publication number
CN101900691B
CN101900691B CN201010233477.6A CN201010233477A CN101900691B CN 101900691 B CN101900691 B CN 101900691B CN 201010233477 A CN201010233477 A CN 201010233477A CN 101900691 B CN101900691 B CN 101900691B
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China
Prior art keywords
line scan
glass plate
scan camera
mirror
concave surface
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Expired - Fee Related
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CN201010233477.6A
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English (en)
Chinese (zh)
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CN101900691A (zh
Inventor
D·M·伯格
C·K·伊斯特曼
J·高里尔
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Corning Inc
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Corning Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

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  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201010233477.6A 2009-05-22 2010-05-24 玻璃板检查系统 Expired - Fee Related CN101900691B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US18046909P 2009-05-22 2009-05-22
US61/180,469 2009-05-22

Publications (2)

Publication Number Publication Date
CN101900691A CN101900691A (zh) 2010-12-01
CN101900691B true CN101900691B (zh) 2013-05-22

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN2010202671366U Expired - Lifetime CN201795992U (zh) 2009-05-22 2010-05-24 用于检查具有第一表面和第二表面的透明玻璃板的装置
CN201010233477.6A Expired - Fee Related CN101900691B (zh) 2009-05-22 2010-05-24 玻璃板检查系统

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN2010202671366U Expired - Lifetime CN201795992U (zh) 2009-05-22 2010-05-24 用于检查具有第一表面和第二表面的透明玻璃板的装置

Country Status (6)

Country Link
US (1) US7929129B2 (enExample)
JP (1) JP5610844B2 (enExample)
KR (1) KR101600094B1 (enExample)
CN (2) CN201795992U (enExample)
DE (1) DE102010029216A1 (enExample)
TW (1) TWI427286B (enExample)

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JP6033041B2 (ja) * 2012-10-31 2016-11-30 株式会社オハラ 光学ガラス母材の自動品質検査装置及び光学ガラス母材の自動品質検査方法
US9389187B2 (en) * 2012-11-29 2016-07-12 Corning Incorporated Glass-sheet optical inspection systems and methods with illumination and exposure control
US20140152804A1 (en) * 2012-12-05 2014-06-05 Seagate Technology Llc Sub-pixel imaging for enhanced pixel resolution
US8941825B2 (en) 2013-03-15 2015-01-27 Owens-Brockway Glass Container Inc. Container inspection
JP6311267B2 (ja) * 2013-05-10 2018-04-18 株式会社リコー 分光特性取得装置、画像評価装置、画像形成装置
KR20160102244A (ko) * 2013-12-23 2016-08-29 코닝 인코포레이티드 광학 검사를 위한 비-이미징 코히어런트 라인 스캐너 시스템 및 방법
US9588056B2 (en) 2014-05-29 2017-03-07 Corning Incorporated Method for particle detection on flexible substrates
KR102460969B1 (ko) 2014-10-29 2022-10-31 코닝 인코포레이티드 세포 배양 인서트
CN105278131B (zh) * 2015-11-17 2018-07-10 武汉华星光电技术有限公司 基板表面颗粒物的间隔式检测方法
KR20170133113A (ko) * 2016-05-25 2017-12-05 코닝정밀소재 주식회사 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법
CN106238341A (zh) * 2016-08-08 2016-12-21 凡音环保科技（苏州）有限公司 一种便捷式平面玻璃自动化光学检测设备
CN107884318B (zh) 2016-09-30 2020-04-10 上海微电子装备（集团）股份有限公司 一种平板颗粒度检测方法
WO2018085233A1 (en) * 2016-11-02 2018-05-11 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate
US10337977B1 (en) 2016-11-22 2019-07-02 Corning Incorporated Systems and methods for glass particle detection
US11857970B2 (en) 2017-07-14 2024-01-02 Corning Incorporated Cell culture vessel
CN107505321B (zh) * 2017-08-14 2024-08-16 江苏杰克仪表有限公司 一种自动组装系统的玻璃片组装子系统
US11055836B2 (en) * 2018-02-13 2021-07-06 Camtek Ltd. Optical contrast enhancement for defect inspection
KR102580389B1 (ko) * 2018-02-13 2023-09-19 코닝 인코포레이티드 유리 시트 검사 장치 및 방법
CN111032851B (zh) 2018-07-13 2024-03-29 康宁股份有限公司 具有包含液体介质传递表面的侧壁的微腔皿
PL3649229T3 (pl) 2018-07-13 2021-12-06 Corning Incorporated Naczynia do hodowli komórkowych ze stabilizującymi urządzeniami
JP7171696B2 (ja) 2018-07-13 2022-11-15 コーニング インコーポレイテッド 相互接続されたウェルを有するマイクロプレートを備えた流体デバイス
CN109297991B (zh) * 2018-11-26 2019-12-17 深圳市麓邦技术有限公司 一种玻璃表面缺陷检测系统及方法
WO2020163054A1 (en) 2019-02-06 2020-08-13 Corning Incorporated Methods of processing a viscous ribbon
CN110806412A (zh) * 2019-11-15 2020-02-18 中国工程物理研究院激光聚变研究中心 一种基于光学元件的缺陷尺寸检测方法及系统
CN115997118A (zh) 2020-08-04 2023-04-21 康宁公司 用于检查材料的方法和装置
CN112986258B (zh) * 2021-02-09 2023-12-22 厦门威芯泰科技有限公司 一种表面缺陷检测装置和判断表面缺陷所在表面的方法
CN113074660B (zh) * 2021-03-26 2022-09-20 深度光学科技(天津)有限公司 一种大尺寸透明物体的面型测量方法
CN113533351B (zh) * 2021-08-20 2023-12-22 合肥御微半导体技术有限公司 一种面板缺陷检测装置及检测方法
KR102786782B1 (ko) * 2022-10-20 2025-03-28 주식회사 에스에프에이 비파괴형 투명체 가공 깊이 측정장치
CN115797360B (zh) * 2023-02-11 2023-04-25 深圳市汉高建设有限公司 一种玻璃幕墙生产质量监测系统

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CN1756949A (zh) * 2003-03-05 2006-04-05 康宁股份有限公司 用于检测透明基片中的缺陷的检测装置
EP1727416A1 (en) * 2004-03-15 2006-11-29 Matsushita Electric Industries Co., Ltd. Method and equipment for inspecting mounting accuracy of component
CN101372090A (zh) * 2007-08-24 2009-02-25 株式会社迪思科 基板的厚度测量方法及基板的加工装置

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CN1756949A (zh) * 2003-03-05 2006-04-05 康宁股份有限公司 用于检测透明基片中的缺陷的检测装置
EP1727416A1 (en) * 2004-03-15 2006-11-29 Matsushita Electric Industries Co., Ltd. Method and equipment for inspecting mounting accuracy of component
CN101372090A (zh) * 2007-08-24 2009-02-25 株式会社迪思科 基板的厚度测量方法及基板的加工装置

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Also Published As

Publication number Publication date
CN101900691A (zh) 2010-12-01
DE102010029216A1 (de) 2010-11-25
KR101600094B1 (ko) 2016-03-04
TW201109646A (en) 2011-03-16
JP5610844B2 (ja) 2014-10-22
US20100296084A1 (en) 2010-11-25
US7929129B2 (en) 2011-04-19
TWI427286B (zh) 2014-02-21
CN201795992U (zh) 2011-04-13
JP2010271320A (ja) 2010-12-02
KR20100126233A (ko) 2010-12-01

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Granted publication date: 20130522

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