TWI427286B - 用於檢測玻璃板之裝置及方法 - Google Patents
用於檢測玻璃板之裝置及方法 Download PDFInfo
- Publication number
- TWI427286B TWI427286B TW099116371A TW99116371A TWI427286B TW I427286 B TWI427286 B TW I427286B TW 099116371 A TW099116371 A TW 099116371A TW 99116371 A TW99116371 A TW 99116371A TW I427286 B TWI427286 B TW I427286B
- Authority
- TW
- Taiwan
- Prior art keywords
- mirror
- radius
- glass sheet
- camera
- defect
- Prior art date
Links
- 239000011521 glass Substances 0.000 title claims description 114
- 238000000034 method Methods 0.000 title claims description 16
- 238000007689 inspection Methods 0.000 title description 8
- 230000003287 optical effect Effects 0.000 claims description 79
- 230000007547 defect Effects 0.000 claims description 66
- 230000000149 penetrating effect Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 description 21
- 238000010586 diagram Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000001483 mobilizing effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000012550 audit Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 210000003734 kidney Anatomy 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18046909P | 2009-05-22 | 2009-05-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201109646A TW201109646A (en) | 2011-03-16 |
| TWI427286B true TWI427286B (zh) | 2014-02-21 |
Family
ID=42993794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW099116371A TWI427286B (zh) | 2009-05-22 | 2010-05-21 | 用於檢測玻璃板之裝置及方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7929129B2 (enExample) |
| JP (1) | JP5610844B2 (enExample) |
| KR (1) | KR101600094B1 (enExample) |
| CN (2) | CN101900691B (enExample) |
| DE (1) | DE102010029216A1 (enExample) |
| TW (1) | TWI427286B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI658263B (zh) * | 2016-09-30 | 2019-05-01 | 大陸商上海微電子裝備（集團）股份有限公司 | 一種平板顆粒度檢測方法 |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2475726C1 (ru) * | 2011-06-16 | 2013-02-20 | Некоммерческая организация Научно-техническое учреждение "Инженерно-технический центр" открытого акционерного общества "Ижевский мотозавод "Аксион-холдинг" (НТУ "ИТЦ") | Устройство контроля качества стекла |
| JP6033041B2 (ja) * | 2012-10-31 | 2016-11-30 | 株式会社オハラ | 光学ガラス母材の自動品質検査装置及び光学ガラス母材の自動品質検査方法 |
| US9389187B2 (en) * | 2012-11-29 | 2016-07-12 | Corning Incorporated | Glass-sheet optical inspection systems and methods with illumination and exposure control |
| US20140152804A1 (en) * | 2012-12-05 | 2014-06-05 | Seagate Technology Llc | Sub-pixel imaging for enhanced pixel resolution |
| US8941825B2 (en) | 2013-03-15 | 2015-01-27 | Owens-Brockway Glass Container Inc. | Container inspection |
| JP6311267B2 (ja) * | 2013-05-10 | 2018-04-18 | 株式会社リコー | 分光特性取得装置、画像評価装置、画像形成装置 |
| WO2015100068A1 (en) * | 2013-12-23 | 2015-07-02 | Corning Incorporated | Non-imaging coherent line scanner systems and methods for optical inspection |
| US9588056B2 (en) | 2014-05-29 | 2017-03-07 | Corning Incorporated | Method for particle detection on flexible substrates |
| SG11201703493SA (en) | 2014-10-29 | 2017-05-30 | Corning Inc | Cell culture insert |
| CN105278131B (zh) * | 2015-11-17 | 2018-07-10 | 武汉华星光电技术有限公司 | 基板表面颗粒物的间隔式检测方法 |
| KR20170133113A (ko) * | 2016-05-25 | 2017-12-05 | 코닝정밀소재 주식회사 | 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법 |
| CN106238341A (zh) * | 2016-08-08 | 2016-12-21 | 凡音环保科技（苏州）有限公司 | 一种便捷式平面玻璃自动化光学检测设备 |
| CN110073203B (zh) * | 2016-11-02 | 2022-07-08 | 康宁股份有限公司 | 检查透明基材上的缺陷的方法和设备 |
| US10337977B1 (en) | 2016-11-22 | 2019-07-02 | Corning Incorporated | Systems and methods for glass particle detection |
| US11857970B2 (en) | 2017-07-14 | 2024-01-02 | Corning Incorporated | Cell culture vessel |
| CN107505321B (zh) * | 2017-08-14 | 2024-08-16 | 江苏杰克仪表有限公司 | 一种自动组装系统的玻璃片组装子系统 |
| US11055836B2 (en) * | 2018-02-13 | 2021-07-06 | Camtek Ltd. | Optical contrast enhancement for defect inspection |
| KR102580389B1 (ko) * | 2018-02-13 | 2023-09-19 | 코닝 인코포레이티드 | 유리 시트 검사 장치 및 방법 |
| CN111032851B (zh) | 2018-07-13 | 2024-03-29 | 康宁股份有限公司 | 具有包含液体介质传递表面的侧壁的微腔皿 |
| WO2020013845A1 (en) | 2018-07-13 | 2020-01-16 | Corning Incorporated | Cell culture vessels with stabilizer devices |
| CN111065725B (zh) | 2018-07-13 | 2024-03-29 | 康宁股份有限公司 | 包括具有互联的壁的微板的流体装置 |
| CN109297991B (zh) * | 2018-11-26 | 2019-12-17 | 深圳市麓邦技术有限公司 | 一种玻璃表面缺陷检测系统及方法 |
| JP2022519650A (ja) | 2019-02-06 | 2022-03-24 | コーニング インコーポレイテッド | 粘性リボンを加工する方法 |
| CN110806412A (zh) * | 2019-11-15 | 2020-02-18 | 中国工程物理研究院激光聚变研究中心 | 一种基于光学元件的缺陷尺寸检测方法及系统 |
| JP7738055B2 (ja) | 2020-08-04 | 2025-09-11 | コーニング インコーポレイテッド | 材料を検査する方法及び装置 |
| CN112986258B (zh) * | 2021-02-09 | 2023-12-22 | 厦门威芯泰科技有限公司 | 一种表面缺陷检测装置和判断表面缺陷所在表面的方法 |
| CN113074660B (zh) * | 2021-03-26 | 2022-09-20 | 深度光学科技(天津)有限公司 | 一种大尺寸透明物体的面型测量方法 |
| CN113533351B (zh) * | 2021-08-20 | 2023-12-22 | 合肥御微半导体技术有限公司 | 一种面板缺陷检测装置及检测方法 |
| KR102786782B1 (ko) * | 2022-10-20 | 2025-03-28 | 주식회사 에스에프에이 | 비파괴형 투명체 가공 깊이 측정장치 |
| CN115797360B (zh) * | 2023-02-11 | 2023-04-25 | 深圳市汉高建设有限公司 | 一种玻璃幕墙生产质量监测系统 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3748015A (en) * | 1971-06-21 | 1973-07-24 | Perkin Elmer Corp | Unit power imaging catoptric anastigmat |
| US5550672A (en) * | 1994-05-23 | 1996-08-27 | Hughes Electronics | Off-axis three-mirror anastignat having corrector mirror |
| JP2000275169A (ja) * | 1999-03-23 | 2000-10-06 | Chino Corp | 光学的測定装置 |
| JP2004191058A (ja) * | 2002-12-06 | 2004-07-08 | Nippon Sheet Glass Co Ltd | 非接触断面形状測定方法および装置 |
| US7158215B2 (en) * | 2003-06-30 | 2007-01-02 | Asml Holding N.V. | Large field of view protection optical system with aberration correctability for flat panel displays |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3951546A (en) | 1974-09-26 | 1976-04-20 | The Perkin-Elmer Corporation | Three-fold mirror assembly for a scanning projection system |
| JP3174615B2 (ja) * | 1992-03-24 | 2001-06-11 | コニカ株式会社 | 欠陥検査装置における投光光学系 |
| JPH06188173A (ja) * | 1992-12-16 | 1994-07-08 | Nikon Corp | 表面位置検出装置 |
| JP2705753B2 (ja) * | 1994-07-26 | 1998-01-28 | 防衛庁技術研究本部長 | 像検出光学系 |
| JPH08221792A (ja) * | 1995-02-20 | 1996-08-30 | Matsushita Electric Ind Co Ltd | 光集積素子 |
| US6483638B1 (en) | 1996-07-22 | 2002-11-19 | Kla-Tencor Corporation | Ultra-broadband UV microscope imaging system with wide range zoom capability |
| US6064517A (en) | 1996-07-22 | 2000-05-16 | Kla-Tencor Corporation | High NA system for multiple mode imaging |
| ATE262677T1 (de) * | 1996-09-05 | 2004-04-15 | Wea Mfg Inc | Vorrichtung und verfahren zum prüfen einer oberfläche einer runden glasscheibe |
| US6362923B1 (en) | 2000-03-10 | 2002-03-26 | Kla-Tencor | Lens for microscopic inspection |
| JP4104924B2 (ja) | 2002-07-08 | 2008-06-18 | 東レエンジニアリング株式会社 | 光学的測定方法およびその装置 |
| US7142295B2 (en) * | 2003-03-05 | 2006-11-28 | Corning Incorporated | Inspection of transparent substrates for defects |
| JP4560514B2 (ja) * | 2004-03-15 | 2010-10-13 | パナソニック株式会社 | 部品装着精度の検査方法及び検査装置 |
| JP4537131B2 (ja) * | 2004-06-30 | 2010-09-01 | 友達光電股▲ふん▼有限公司 | レーザー結晶シリコンの検査方法及びその装置 |
| US7714996B2 (en) * | 2007-01-23 | 2010-05-11 | 3i Systems Corporation | Automatic inspection system for flat panel substrate |
| JP2009050944A (ja) * | 2007-08-24 | 2009-03-12 | Disco Abrasive Syst Ltd | 基板の厚さ測定方法および基板の加工装置 |
| JP4512627B2 (ja) | 2007-10-03 | 2010-07-28 | キヤノン株式会社 | 測定装置、露光装置及びデバイス製造方法 |
-
2010
- 2010-05-19 US US12/782,832 patent/US7929129B2/en not_active Expired - Fee Related
- 2010-05-21 DE DE102010029216A patent/DE102010029216A1/de not_active Withdrawn
- 2010-05-21 TW TW099116371A patent/TWI427286B/zh not_active IP Right Cessation
- 2010-05-24 CN CN201010233477.6A patent/CN101900691B/zh not_active Expired - Fee Related
- 2010-05-24 KR KR1020100048233A patent/KR101600094B1/ko not_active Expired - Fee Related
- 2010-05-24 JP JP2010118163A patent/JP5610844B2/ja not_active Expired - Fee Related
- 2010-05-24 CN CN2010202671366U patent/CN201795992U/zh not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3748015A (en) * | 1971-06-21 | 1973-07-24 | Perkin Elmer Corp | Unit power imaging catoptric anastigmat |
| US5550672A (en) * | 1994-05-23 | 1996-08-27 | Hughes Electronics | Off-axis three-mirror anastignat having corrector mirror |
| JP2000275169A (ja) * | 1999-03-23 | 2000-10-06 | Chino Corp | 光学的測定装置 |
| JP2004191058A (ja) * | 2002-12-06 | 2004-07-08 | Nippon Sheet Glass Co Ltd | 非接触断面形状測定方法および装置 |
| US7158215B2 (en) * | 2003-06-30 | 2007-01-02 | Asml Holding N.V. | Large field of view protection optical system with aberration correctability for flat panel displays |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI658263B (zh) * | 2016-09-30 | 2019-05-01 | 大陸商上海微電子裝備（集團）股份有限公司 | 一種平板顆粒度檢測方法 |
| US10648926B2 (en) | 2016-09-30 | 2020-05-12 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Method of detecting particles on panel |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101900691B (zh) | 2013-05-22 |
| JP5610844B2 (ja) | 2014-10-22 |
| KR20100126233A (ko) | 2010-12-01 |
| CN101900691A (zh) | 2010-12-01 |
| CN201795992U (zh) | 2011-04-13 |
| US20100296084A1 (en) | 2010-11-25 |
| US7929129B2 (en) | 2011-04-19 |
| KR101600094B1 (ko) | 2016-03-04 |
| DE102010029216A1 (de) | 2010-11-25 |
| TW201109646A (en) | 2011-03-16 |
| JP2010271320A (ja) | 2010-12-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |