KR101600094B1 - 유리 시트 검사 시스템 - Google Patents

유리 시트 검사 시스템 Download PDF

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KR101600094B1
KR101600094B1 KR1020100048233A KR20100048233A KR101600094B1 KR 101600094 B1 KR101600094 B1 KR 101600094B1 KR 1020100048233 A KR1020100048233 A KR 1020100048233A KR 20100048233 A KR20100048233 A KR 20100048233A KR 101600094 B1 KR101600094 B1 KR 101600094B1
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glass sheet
mirror
line scan
radius
lens
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KR20100126233A (ko
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데이비드 엠. 버그
클라크 킴벌리 이스트맨
자크 골리어
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코닝 인코포레이티드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

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  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020100048233A 2009-05-22 2010-05-24 유리 시트 검사 시스템 Expired - Fee Related KR101600094B1 (ko)

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US18046909P 2009-05-22 2009-05-22
US61/180,469 2009-05-22

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KR20100126233A KR20100126233A (ko) 2010-12-01
KR101600094B1 true KR101600094B1 (ko) 2016-03-04

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US (1) US7929129B2 (enExample)
JP (1) JP5610844B2 (enExample)
KR (1) KR101600094B1 (enExample)
CN (2) CN101900691B (enExample)
DE (1) DE102010029216A1 (enExample)
TW (1) TWI427286B (enExample)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2475726C1 (ru) * 2011-06-16 2013-02-20 Некоммерческая организация Научно-техническое учреждение "Инженерно-технический центр" открытого акционерного общества "Ижевский мотозавод "Аксион-холдинг" (НТУ "ИТЦ") Устройство контроля качества стекла
JP6033041B2 (ja) * 2012-10-31 2016-11-30 株式会社オハラ 光学ガラス母材の自動品質検査装置及び光学ガラス母材の自動品質検査方法
US9389187B2 (en) * 2012-11-29 2016-07-12 Corning Incorporated Glass-sheet optical inspection systems and methods with illumination and exposure control
US20140152804A1 (en) * 2012-12-05 2014-06-05 Seagate Technology Llc Sub-pixel imaging for enhanced pixel resolution
US8941825B2 (en) 2013-03-15 2015-01-27 Owens-Brockway Glass Container Inc. Container inspection
JP6311267B2 (ja) * 2013-05-10 2018-04-18 株式会社リコー 分光特性取得装置、画像評価装置、画像形成装置
WO2015100068A1 (en) * 2013-12-23 2015-07-02 Corning Incorporated Non-imaging coherent line scanner systems and methods for optical inspection
US9588056B2 (en) 2014-05-29 2017-03-07 Corning Incorporated Method for particle detection on flexible substrates
SG11201703493SA (en) 2014-10-29 2017-05-30 Corning Inc Cell culture insert
CN105278131B (zh) * 2015-11-17 2018-07-10 武汉华星光电技术有限公司 基板表面颗粒物的间隔式检测方法
KR20170133113A (ko) * 2016-05-25 2017-12-05 코닝정밀소재 주식회사 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법
CN106238341A (zh) * 2016-08-08 2016-12-21 凡音环保科技（苏州）有限公司 一种便捷式平面玻璃自动化光学检测设备
CN107884318B (zh) 2016-09-30 2020-04-10 上海微电子装备（集团）股份有限公司 一种平板颗粒度检测方法
CN110073203B (zh) * 2016-11-02 2022-07-08 康宁股份有限公司 检查透明基材上的缺陷的方法和设备
US10337977B1 (en) 2016-11-22 2019-07-02 Corning Incorporated Systems and methods for glass particle detection
US11857970B2 (en) 2017-07-14 2024-01-02 Corning Incorporated Cell culture vessel
CN107505321B (zh) * 2017-08-14 2024-08-16 江苏杰克仪表有限公司 一种自动组装系统的玻璃片组装子系统
US11055836B2 (en) * 2018-02-13 2021-07-06 Camtek Ltd. Optical contrast enhancement for defect inspection
KR102580389B1 (ko) * 2018-02-13 2023-09-19 코닝 인코포레이티드 유리 시트 검사 장치 및 방법
CN111032851B (zh) 2018-07-13 2024-03-29 康宁股份有限公司 具有包含液体介质传递表面的侧壁的微腔皿
WO2020013845A1 (en) 2018-07-13 2020-01-16 Corning Incorporated Cell culture vessels with stabilizer devices
CN111065725B (zh) 2018-07-13 2024-03-29 康宁股份有限公司 包括具有互联的壁的微板的流体装置
CN109297991B (zh) * 2018-11-26 2019-12-17 深圳市麓邦技术有限公司 一种玻璃表面缺陷检测系统及方法
JP2022519650A (ja) 2019-02-06 2022-03-24 コーニング インコーポレイテッド 粘性リボンを加工する方法
CN110806412A (zh) * 2019-11-15 2020-02-18 中国工程物理研究院激光聚变研究中心 一种基于光学元件的缺陷尺寸检测方法及系统
JP7738055B2 (ja) 2020-08-04 2025-09-11 コーニング インコーポレイテッド 材料を検査する方法及び装置
CN112986258B (zh) * 2021-02-09 2023-12-22 厦门威芯泰科技有限公司 一种表面缺陷检测装置和判断表面缺陷所在表面的方法
CN113074660B (zh) * 2021-03-26 2022-09-20 深度光学科技(天津)有限公司 一种大尺寸透明物体的面型测量方法
CN113533351B (zh) * 2021-08-20 2023-12-22 合肥御微半导体技术有限公司 一种面板缺陷检测装置及检测方法
KR102786782B1 (ko) * 2022-10-20 2025-03-28 주식회사 에스에프에이 비파괴형 투명체 가공 깊이 측정장치
CN115797360B (zh) * 2023-02-11 2023-04-25 深圳市汉高建设有限公司 一种玻璃幕墙生产质量监测系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009092389A (ja) 2007-10-03 2009-04-30 Canon Inc 測定装置、露光装置及びデバイス製造方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748015A (en) * 1971-06-21 1973-07-24 Perkin Elmer Corp Unit power imaging catoptric anastigmat
US3951546A (en) 1974-09-26 1976-04-20 The Perkin-Elmer Corporation Three-fold mirror assembly for a scanning projection system
JP3174615B2 (ja) * 1992-03-24 2001-06-11 コニカ株式会社 欠陥検査装置における投光光学系
JPH06188173A (ja) * 1992-12-16 1994-07-08 Nikon Corp 表面位置検出装置
IL113789A (en) * 1994-05-23 1999-01-26 Hughes Aircraft Co A non-focusing device with three hinged mirrors and a corrective mirror
JP2705753B2 (ja) * 1994-07-26 1998-01-28 防衛庁技術研究本部長 像検出光学系
JPH08221792A (ja) * 1995-02-20 1996-08-30 Matsushita Electric Ind Co Ltd 光集積素子
US6483638B1 (en) 1996-07-22 2002-11-19 Kla-Tencor Corporation Ultra-broadband UV microscope imaging system with wide range zoom capability
US6064517A (en) 1996-07-22 2000-05-16 Kla-Tencor Corporation High NA system for multiple mode imaging
ATE262677T1 (de) * 1996-09-05 2004-04-15 Wea Mfg Inc Vorrichtung und verfahren zum prüfen einer oberfläche einer runden glasscheibe
JP2000275169A (ja) * 1999-03-23 2000-10-06 Chino Corp 光学的測定装置
US6362923B1 (en) 2000-03-10 2002-03-26 Kla-Tencor Lens for microscopic inspection
JP4104924B2 (ja) 2002-07-08 2008-06-18 東レエンジニアリング株式会社 光学的測定方法およびその装置
JP4230758B2 (ja) * 2002-12-06 2009-02-25 日本板硝子株式会社 非接触断面形状測定方法および装置
US7142295B2 (en) * 2003-03-05 2006-11-28 Corning Incorporated Inspection of transparent substrates for defects
US7158215B2 (en) 2003-06-30 2007-01-02 Asml Holding N.V. Large field of view protection optical system with aberration correctability for flat panel displays
JP4560514B2 (ja) * 2004-03-15 2010-10-13 パナソニック株式会社 部品装着精度の検査方法及び検査装置
JP4537131B2 (ja) * 2004-06-30 2010-09-01 友達光電股▲ふん▼有限公司 レーザー結晶シリコンの検査方法及びその装置
US7714996B2 (en) * 2007-01-23 2010-05-11 3i Systems Corporation Automatic inspection system for flat panel substrate
JP2009050944A (ja) * 2007-08-24 2009-03-12 Disco Abrasive Syst Ltd 基板の厚さ測定方法および基板の加工装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009092389A (ja) 2007-10-03 2009-04-30 Canon Inc 測定装置、露光装置及びデバイス製造方法

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Publication number Publication date
CN101900691B (zh) 2013-05-22
JP5610844B2 (ja) 2014-10-22
KR20100126233A (ko) 2010-12-01
CN101900691A (zh) 2010-12-01
CN201795992U (zh) 2011-04-13
US20100296084A1 (en) 2010-11-25
US7929129B2 (en) 2011-04-19
TWI427286B (zh) 2014-02-21
DE102010029216A1 (de) 2010-11-25
TW201109646A (en) 2011-03-16
JP2010271320A (ja) 2010-12-02

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