CN101894742A - 高q值电感器的制作方法 - Google Patents
高q值电感器的制作方法 Download PDFInfo
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- CN101894742A CN101894742A CN2010101873702A CN201010187370A CN101894742A CN 101894742 A CN101894742 A CN 101894742A CN 2010101873702 A CN2010101873702 A CN 2010101873702A CN 201010187370 A CN201010187370 A CN 201010187370A CN 101894742 A CN101894742 A CN 101894742A
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CN2010101873702A CN101894742A (zh) | 2010-05-28 | 2010-05-28 | 高q值电感器的制作方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102496620A (zh) * | 2011-12-30 | 2012-06-13 | 上海集成电路研发中心有限公司 | 集成压控振荡器的半导体芯片及其制造方法 |
CN105470105A (zh) * | 2014-09-12 | 2016-04-06 | 上海华虹宏力半导体制造有限公司 | 一种提高高阻衬底电感性能的方法 |
CN107403789A (zh) * | 2017-08-09 | 2017-11-28 | 上海华虹宏力半导体制造有限公司 | 提高高阻衬底电感性能的方法及半导体结构 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6169008B1 (en) * | 1998-05-16 | 2001-01-02 | Winbond Electronics Corp. | High Q inductor and its forming method |
US20020008301A1 (en) * | 1998-07-13 | 2002-01-24 | Ping Liou | Monolithic high-q inductance device and process for fabricating the same |
CN1377071A (zh) * | 2001-03-23 | 2002-10-30 | 华邦电子股份有限公司 | 具有高q值电感组件的半导体技术制造方法及其结构 |
CN1649087A (zh) * | 2004-01-29 | 2005-08-03 | 国际商业机器公司 | 形成电感器的方法以及半导体结构 |
US20090140383A1 (en) * | 2007-11-29 | 2009-06-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of creating spiral inductor having high q value |
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2010
- 2010-05-28 CN CN2010101873702A patent/CN101894742A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6169008B1 (en) * | 1998-05-16 | 2001-01-02 | Winbond Electronics Corp. | High Q inductor and its forming method |
US20020008301A1 (en) * | 1998-07-13 | 2002-01-24 | Ping Liou | Monolithic high-q inductance device and process for fabricating the same |
CN1377071A (zh) * | 2001-03-23 | 2002-10-30 | 华邦电子股份有限公司 | 具有高q值电感组件的半导体技术制造方法及其结构 |
CN1649087A (zh) * | 2004-01-29 | 2005-08-03 | 国际商业机器公司 | 形成电感器的方法以及半导体结构 |
US20090140383A1 (en) * | 2007-11-29 | 2009-06-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of creating spiral inductor having high q value |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102496620A (zh) * | 2011-12-30 | 2012-06-13 | 上海集成电路研发中心有限公司 | 集成压控振荡器的半导体芯片及其制造方法 |
CN102496620B (zh) * | 2011-12-30 | 2016-04-06 | 上海集成电路研发中心有限公司 | 集成压控振荡器的半导体芯片及其制造方法 |
CN105470105A (zh) * | 2014-09-12 | 2016-04-06 | 上海华虹宏力半导体制造有限公司 | 一种提高高阻衬底电感性能的方法 |
CN105470105B (zh) * | 2014-09-12 | 2018-03-30 | 上海华虹宏力半导体制造有限公司 | 一种提高高阻衬底电感性能的方法 |
CN107403789A (zh) * | 2017-08-09 | 2017-11-28 | 上海华虹宏力半导体制造有限公司 | 提高高阻衬底电感性能的方法及半导体结构 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140514 |
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Effective date of registration: 20140514 Address after: 201203 Shanghai Zhangjiang hi tech park Zuchongzhi Road No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai Guo Shou Jing Road, Zhangjiang hi tech Park No. 818 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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Application publication date: 20101124 |