CN101847564A - 准分子灯 - Google Patents

准分子灯 Download PDF

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Publication number
CN101847564A
CN101847564A CN201010150661A CN201010150661A CN101847564A CN 101847564 A CN101847564 A CN 101847564A CN 201010150661 A CN201010150661 A CN 201010150661A CN 201010150661 A CN201010150661 A CN 201010150661A CN 101847564 A CN101847564 A CN 101847564A
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CN
China
Prior art keywords
electrode
mentioned
excimer lamp
discharge vessel
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201010150661A
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English (en)
Chinese (zh)
Inventor
竹添法隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of CN101847564A publication Critical patent/CN101847564A/zh
Pending legal-status Critical Current

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  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
CN201010150661A 2009-03-23 2010-03-23 准分子灯 Pending CN101847564A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP069406/2009 2009-03-23
JP2009069406A JP5201042B2 (ja) 2009-03-23 2009-03-23 エキシマランプ

Publications (1)

Publication Number Publication Date
CN101847564A true CN101847564A (zh) 2010-09-29

Family

ID=42772126

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010150661A Pending CN101847564A (zh) 2009-03-23 2010-03-23 准分子灯

Country Status (4)

Country Link
JP (1) JP5201042B2 (ja)
KR (1) KR101301806B1 (ja)
CN (1) CN101847564A (ja)
TW (1) TWI449083B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102683163A (zh) * 2011-03-11 2012-09-19 优志旺电机株式会社 准分子灯
KR20150015410A (ko) * 2013-07-31 2015-02-10 가부시키가이샤 지에스 유아사 방전 램프
CN112786433A (zh) * 2019-11-01 2021-05-11 崇翌科技股份有限公司 准分子灯

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3491532B2 (ja) * 1998-07-01 2004-01-26 東亞合成株式会社 シャドウマスク製造時の裏止め材用硬化型組成物
JP5287928B2 (ja) * 2011-05-17 2013-09-11 ウシオ電機株式会社 エキシマランプ
JP5898891B2 (ja) * 2011-09-13 2016-04-06 浜松ホトニクス株式会社 発光装置
JP5891804B2 (ja) * 2012-01-23 2016-03-23 ウシオ電機株式会社 エキシマランプ
JP6016059B2 (ja) * 2012-03-30 2016-10-26 ウシオ電機株式会社 エキシマランプ
JP6232782B2 (ja) * 2013-07-01 2017-11-22 ウシオ電機株式会社 エキシマランプ
JP6201925B2 (ja) * 2013-07-31 2017-09-27 株式会社Ｇｓユアサ 放電ランプ
JP6191870B2 (ja) * 2013-11-22 2017-09-06 ウシオ電機株式会社 エキシマランプ
JP5892189B2 (ja) * 2014-04-11 2016-03-23 ウシオ電機株式会社 エキシマランプおよびエキシマランプ装置
JP7106945B2 (ja) * 2018-04-02 2022-07-27 ウシオ電機株式会社 エキシマランプ、光照射装置、及び、オゾン発生装置
TWI841791B (zh) * 2019-10-07 2024-05-11 日商牛尾電機股份有限公司 紫外線照射裝置
JP7384090B2 (ja) 2020-03-26 2023-11-21 ウシオ電機株式会社 エキシマランプ、光照射装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08329903A (ja) * 1995-03-31 1996-12-13 Ushio Inc 外部電極式蛍光放電管
JPH10188910A (ja) * 1996-12-25 1998-07-21 Ushio Inc 外部電極型蛍光ランプ
JP2004178882A (ja) * 2002-11-26 2004-06-24 Iwasaki Electric Co Ltd 放電ランプ
JP2005259380A (ja) * 2004-03-09 2005-09-22 Japan Storage Battery Co Ltd 紫外線照射処理装置
CN1682349A (zh) * 2002-09-20 2005-10-12 日本电池株式会社 激发式气体分子放电灯
CN1713336A (zh) * 2004-06-24 2005-12-28 优志旺电机株式会社 受激准分子灯
CN1806311A (zh) * 2004-04-07 2006-07-19 株式会社杰士汤浅 电解质屏障放电灯
CN1815682A (zh) * 2005-02-02 2006-08-09 优志旺电机株式会社 稀有气体荧光灯
CN101188184A (zh) * 2006-11-24 2008-05-28 优志旺电机株式会社 放电灯
JP4221561B2 (ja) * 2002-10-02 2009-02-12 株式会社ジーエス・ユアサコーポレーション エキシマランプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4561448B2 (ja) * 2004-04-07 2010-10-13 株式会社Ｇｓユアサ 誘電体バリア放電ランプ及び紫外線照射装置
JP4857939B2 (ja) * 2006-06-19 2012-01-18 ウシオ電機株式会社 放電ランプ
JP4848879B2 (ja) * 2006-07-28 2011-12-28 ウシオ電機株式会社 希ガス蛍光ランプ
JP5019156B2 (ja) * 2006-08-21 2012-09-05 ウシオ電機株式会社 エキシマランプ装置
JP2008059888A (ja) * 2006-08-31 2008-03-13 Ushio Inc エキシマランプ
JP4946552B2 (ja) * 2007-03-19 2012-06-06 ウシオ電機株式会社 外部電極型希ガス蛍光ランプ
JP4424394B2 (ja) * 2007-08-31 2010-03-03 ウシオ電機株式会社 エキシマランプ

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08329903A (ja) * 1995-03-31 1996-12-13 Ushio Inc 外部電極式蛍光放電管
JPH10188910A (ja) * 1996-12-25 1998-07-21 Ushio Inc 外部電極型蛍光ランプ
CN1682349A (zh) * 2002-09-20 2005-10-12 日本电池株式会社 激发式气体分子放电灯
JP4221561B2 (ja) * 2002-10-02 2009-02-12 株式会社ジーエス・ユアサコーポレーション エキシマランプ
JP2004178882A (ja) * 2002-11-26 2004-06-24 Iwasaki Electric Co Ltd 放電ランプ
JP2005259380A (ja) * 2004-03-09 2005-09-22 Japan Storage Battery Co Ltd 紫外線照射処理装置
CN1806311A (zh) * 2004-04-07 2006-07-19 株式会社杰士汤浅 电解质屏障放电灯
CN1713336A (zh) * 2004-06-24 2005-12-28 优志旺电机株式会社 受激准分子灯
CN1815682A (zh) * 2005-02-02 2006-08-09 优志旺电机株式会社 稀有气体荧光灯
CN101188184A (zh) * 2006-11-24 2008-05-28 优志旺电机株式会社 放电灯

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102683163A (zh) * 2011-03-11 2012-09-19 优志旺电机株式会社 准分子灯
CN102683163B (zh) * 2011-03-11 2015-12-09 优志旺电机株式会社 准分子灯
KR20150015410A (ko) * 2013-07-31 2015-02-10 가부시키가이샤 지에스 유아사 방전 램프
CN104347344A (zh) * 2013-07-31 2015-02-11 株式会社杰士汤浅国际 放电灯
CN104347344B (zh) * 2013-07-31 2018-04-13 株式会社杰士汤浅国际 放电灯
KR102219742B1 (ko) 2013-07-31 2021-02-23 가부시키가이샤 지에스 유아사 방전 램프
CN112786433A (zh) * 2019-11-01 2021-05-11 崇翌科技股份有限公司 准分子灯

Also Published As

Publication number Publication date
JP5201042B2 (ja) 2013-06-05
KR20100106207A (ko) 2010-10-01
TW201036028A (en) 2010-10-01
JP2010225343A (ja) 2010-10-07
KR101301806B1 (ko) 2013-08-29
TWI449083B (zh) 2014-08-11

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Application publication date: 20100929