CN101821595B - 用于测量被聚焦的激光束的测量装置 - Google Patents

用于测量被聚焦的激光束的测量装置 Download PDF

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Publication number
CN101821595B
CN101821595B CN200880106717.7A CN200880106717A CN101821595B CN 101821595 B CN101821595 B CN 101821595B CN 200880106717 A CN200880106717 A CN 200880106717A CN 101821595 B CN101821595 B CN 101821595B
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CN
China
Prior art keywords
lens
measurement mechanism
laser beam
lens system
adapter
Prior art date
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Active
Application number
CN200880106717.7A
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English (en)
Chinese (zh)
Other versions
CN101821595A (zh
Inventor
贝恩德·热尔特
奥拉夫·基特尔曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcon Inc
Original Assignee
Wavelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of CN101821595A publication Critical patent/CN101821595A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0448—Adjustable, e.g. focussing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
CN200880106717.7A 2007-09-13 2008-09-12 用于测量被聚焦的激光束的测量装置 Active CN101821595B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07017968.4 2007-09-13
EP07017968A EP2037238B1 (de) 2007-09-13 2007-09-13 Messgerät zur Vermessung eines Laserstrahls
PCT/EP2008/007575 WO2009036932A1 (de) 2007-09-13 2008-09-12 Messgerät zur vermessung eines fokussierten laserstrahls

Publications (2)

Publication Number Publication Date
CN101821595A CN101821595A (zh) 2010-09-01
CN101821595B true CN101821595B (zh) 2014-11-26

Family

ID=39059375

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880106717.7A Active CN101821595B (zh) 2007-09-13 2008-09-12 用于测量被聚焦的激光束的测量装置

Country Status (14)

Country Link
US (1) US8351028B2 (https=)
EP (1) EP2037238B1 (https=)
JP (1) JP5554710B2 (https=)
KR (1) KR101255796B1 (https=)
CN (1) CN101821595B (https=)
BR (1) BRPI0815425B1 (https=)
CA (1) CA2699629C (https=)
DE (1) DE502007001924D1 (https=)
ES (1) ES2333369T3 (https=)
IN (1) IN2010KN00855A (https=)
MX (1) MX2010002894A (https=)
RU (1) RU2474795C2 (https=)
TW (1) TW200920334A (https=)
WO (1) WO2009036932A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010029089B4 (de) * 2010-05-18 2019-08-29 Carl Zeiss Ag Optisches System zur Kalibrierung einer Lichtquelle
CN102384782A (zh) * 2010-09-06 2012-03-21 杭州法珀激光科技有限公司 手持式激光光束分析仪
FR2974176B1 (fr) 2011-04-14 2014-01-17 Centre Nat Rech Scient Analyseur spatial de faisceau laser a reglage automatique
CN105606213B (zh) * 2015-12-05 2018-02-13 中国航空工业集团公司洛阳电光设备研究所 一种激光微脉冲峰值功率测试装置
DE102016009475B4 (de) * 2016-08-05 2019-06-19 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Strahlleistungsmessung mit Aufweitung
CN110799892B (zh) * 2017-06-23 2022-04-12 业纳光学系统有限公司 用于辅助调整射束扩展器的方法、调整辅助设备以及射束扩展器
CN112368638A (zh) * 2018-07-05 2021-02-12 应用材料公司 光掩模保护膜残胶移除
US11243114B2 (en) * 2018-09-17 2022-02-08 Trumpf Lasersystems For Semiconductor Manufacturing Gmbh Method for determining at least one beam propagation parameter of a laser beam
TWI729403B (zh) * 2019-05-31 2021-06-01 致茂電子股份有限公司 光電元件特性測量裝置
US12153208B2 (en) * 2020-11-23 2024-11-26 Coherent Lasersystems Gmbh & Co. Kg Laser beam wavefront correction with adaptive optics and mid-field monitoring
CN116907369B (zh) * 2023-09-06 2023-12-12 太原科技大学 一种螺旋焊管管径激光检测系统及其使用方法

Citations (4)

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GB909336A (en) * 1959-11-13 1962-10-31 Leitz Ernst Gmbh Improvements in or relating to tubular guide arrangements
CN2293794Y (zh) * 1997-04-28 1998-10-07 中国科学技术大学 可调式半导体激光准直头
US6922232B2 (en) * 2002-09-24 2005-07-26 Infineon Technologies North America Corp. Test system for laser diode far-field pattern measurement
WO2006078349A2 (en) * 2004-11-22 2006-07-27 Meade Instruments Corporation Scope for a firearm

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JPS6079127U (ja) 1983-11-07 1985-06-01 長田電機工業株式会社 レ−ザ−用パワ−メ−タ
JPH01168843U (https=) 1988-05-19 1989-11-28
JPH0222658A (ja) * 1988-07-08 1990-01-25 Mitsubishi Electric Corp 電子ビーム露光方法
JPH071201B2 (ja) * 1989-01-17 1995-01-11 株式会社オプトアート 光ビーム測定装置
US5194993A (en) * 1991-09-24 1993-03-16 Eastman Kodak Company Adjustable mount for cylindrical lens
FR2698182B1 (fr) * 1992-11-13 1994-12-16 Commissariat Energie Atomique Dispositif de contrôle du centrage d'un faisceau lumineux, application à l'introduction de ce faisceau dans une fibre optique.
JPH071201A (ja) 1993-02-28 1995-01-06 Sanshin Kogyo Kk 円筒部材の加工方法
JP2000234916A (ja) 1999-02-15 2000-08-29 Konica Corp 光ビーム形状計測装置及びアライメント測定装置
JP2001004491A (ja) * 1999-06-25 2001-01-12 Sankyo Seiki Mfg Co Ltd 光ビームの検査装置
RU40103U1 (ru) * 2004-01-08 2004-08-27 Федеральное государственное унитарное предприятие "Производственное объединение "Уральский оптико-механический завод" Устройство для определения углового рассогласования пучков лазерного излучения
JP3935168B2 (ja) * 2004-08-26 2007-06-20 シャープ株式会社 レンズ鏡筒装置
TW200608475A (en) 2004-08-26 2006-03-01 Adv Lcd Tech Dev Ct Co Ltd Method of picking up sectional image of laser light
US20060254115A1 (en) * 2004-11-22 2006-11-16 Thomas Mark A Optical sight with side focus adjustment
JP4524403B2 (ja) * 2005-05-31 2010-08-18 三菱電機株式会社 フーリエ変換光学装置及び光制御型フェーズドアレイアンテナ装置
JP4049171B2 (ja) * 2005-07-08 2008-02-20 コニカミノルタオプト株式会社 鏡胴ユニット並びに撮像装置
US7463342B2 (en) * 2007-05-02 2008-12-09 Angstrom, Inc. Optical tracking device using micromirror array lenses

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB909336A (en) * 1959-11-13 1962-10-31 Leitz Ernst Gmbh Improvements in or relating to tubular guide arrangements
CN2293794Y (zh) * 1997-04-28 1998-10-07 中国科学技术大学 可调式半导体激光准直头
US6922232B2 (en) * 2002-09-24 2005-07-26 Infineon Technologies North America Corp. Test system for laser diode far-field pattern measurement
WO2006078349A2 (en) * 2004-11-22 2006-07-27 Meade Instruments Corporation Scope for a firearm

Also Published As

Publication number Publication date
DE502007001924D1 (de) 2009-12-17
TW200920334A (en) 2009-05-16
CA2699629A1 (en) 2009-03-26
ES2333369T3 (es) 2010-02-19
BRPI0815425A2 (pt) 2016-08-09
EP2037238A1 (de) 2009-03-18
WO2009036932A1 (de) 2009-03-26
MX2010002894A (es) 2010-04-01
RU2010113570A (ru) 2011-10-20
US20100253937A1 (en) 2010-10-07
IN2010KN00855A (https=) 2015-08-28
CA2699629C (en) 2016-04-19
CN101821595A (zh) 2010-09-01
KR101255796B1 (ko) 2013-04-17
RU2474795C2 (ru) 2013-02-10
EP2037238B1 (de) 2009-11-04
JP2010539459A (ja) 2010-12-16
KR20100063118A (ko) 2010-06-10
BRPI0815425B1 (pt) 2019-04-09
US8351028B2 (en) 2013-01-08
JP5554710B2 (ja) 2014-07-23

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Owner name: SHILE CO., LTD.

Free format text: FORMER NAME: WAVELIGHT AG

CP03 Change of name, title or address

Address after: Erlangen

Patentee after: WAVELIGHT GMBH

Address before: Germany Erlangen

Patentee before: Wavelight AG

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20200415

Address after: Fribourg

Patentee after: ALCON, Inc.

Address before: Erlangen

Patentee before: WAVELIGHT GmbH