KR101255796B1 - 집속 레이저 빔 측정 장치 - Google Patents

집속 레이저 빔 측정 장치 Download PDF

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Publication number
KR101255796B1
KR101255796B1 KR1020107008066A KR20107008066A KR101255796B1 KR 101255796 B1 KR101255796 B1 KR 101255796B1 KR 1020107008066 A KR1020107008066 A KR 1020107008066A KR 20107008066 A KR20107008066 A KR 20107008066A KR 101255796 B1 KR101255796 B1 KR 101255796B1
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KR
South Korea
Prior art keywords
lens
laser beam
measuring device
lenses
adapter
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Expired - Fee Related
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KR1020107008066A
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English (en)
Korean (ko)
Other versions
KR20100063118A (ko
Inventor
베른드 제를
올라프 키텔만
Original Assignee
웨이브라이트 게엠베하
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Publication of KR20100063118A publication Critical patent/KR20100063118A/ko
Application granted granted Critical
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Assigned to 알콘 인코포레이티드 reassignment 알콘 인코포레이티드 권리의 전부이전등록 Assignors: 웨이브라이트 게엠베하
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0448—Adjustable, e.g. focussing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
KR1020107008066A 2007-09-13 2008-09-12 집속 레이저 빔 측정 장치 Expired - Fee Related KR101255796B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07017968.4 2007-09-13
EP07017968A EP2037238B1 (de) 2007-09-13 2007-09-13 Messgerät zur Vermessung eines Laserstrahls
PCT/EP2008/007575 WO2009036932A1 (de) 2007-09-13 2008-09-12 Messgerät zur vermessung eines fokussierten laserstrahls

Publications (2)

Publication Number Publication Date
KR20100063118A KR20100063118A (ko) 2010-06-10
KR101255796B1 true KR101255796B1 (ko) 2013-04-17

Family

ID=39059375

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107008066A Expired - Fee Related KR101255796B1 (ko) 2007-09-13 2008-09-12 집속 레이저 빔 측정 장치

Country Status (14)

Country Link
US (1) US8351028B2 (https=)
EP (1) EP2037238B1 (https=)
JP (1) JP5554710B2 (https=)
KR (1) KR101255796B1 (https=)
CN (1) CN101821595B (https=)
BR (1) BRPI0815425B1 (https=)
CA (1) CA2699629C (https=)
DE (1) DE502007001924D1 (https=)
ES (1) ES2333369T3 (https=)
IN (1) IN2010KN00855A (https=)
MX (1) MX2010002894A (https=)
RU (1) RU2474795C2 (https=)
TW (1) TW200920334A (https=)
WO (1) WO2009036932A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010029089B4 (de) * 2010-05-18 2019-08-29 Carl Zeiss Ag Optisches System zur Kalibrierung einer Lichtquelle
CN102384782A (zh) * 2010-09-06 2012-03-21 杭州法珀激光科技有限公司 手持式激光光束分析仪
FR2974176B1 (fr) 2011-04-14 2014-01-17 Centre Nat Rech Scient Analyseur spatial de faisceau laser a reglage automatique
CN105606213B (zh) * 2015-12-05 2018-02-13 中国航空工业集团公司洛阳电光设备研究所 一种激光微脉冲峰值功率测试装置
DE102016009475B4 (de) * 2016-08-05 2019-06-19 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Strahlleistungsmessung mit Aufweitung
CN110799892B (zh) * 2017-06-23 2022-04-12 业纳光学系统有限公司 用于辅助调整射束扩展器的方法、调整辅助设备以及射束扩展器
CN112368638A (zh) * 2018-07-05 2021-02-12 应用材料公司 光掩模保护膜残胶移除
US11243114B2 (en) * 2018-09-17 2022-02-08 Trumpf Lasersystems For Semiconductor Manufacturing Gmbh Method for determining at least one beam propagation parameter of a laser beam
TWI729403B (zh) * 2019-05-31 2021-06-01 致茂電子股份有限公司 光電元件特性測量裝置
US12153208B2 (en) * 2020-11-23 2024-11-26 Coherent Lasersystems Gmbh & Co. Kg Laser beam wavefront correction with adaptive optics and mid-field monitoring
CN116907369B (zh) * 2023-09-06 2023-12-12 太原科技大学 一种螺旋焊管管径激光检测系统及其使用方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040066504A1 (en) 2002-09-24 2004-04-08 Infineon Technologies North America Corp. Test system for laser diode far-field pattern measurement
US20060043258A1 (en) 2004-08-26 2006-03-02 Masayuki Jyumonji Method of picking up sectional image of laser light
US20060254115A1 (en) 2004-11-22 2006-11-16 Thomas Mark A Optical sight with side focus adjustment
US20070019100A1 (en) 2005-07-08 2007-01-25 Konica Minolta Photo Imaging, Inc. Lens barrel unit and imaging apparatus

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GB909336A (en) 1959-11-13 1962-10-31 Leitz Ernst Gmbh Improvements in or relating to tubular guide arrangements
JPS6079127U (ja) 1983-11-07 1985-06-01 長田電機工業株式会社 レ−ザ−用パワ−メ−タ
JPH01168843U (https=) 1988-05-19 1989-11-28
JPH0222658A (ja) * 1988-07-08 1990-01-25 Mitsubishi Electric Corp 電子ビーム露光方法
JPH071201B2 (ja) * 1989-01-17 1995-01-11 株式会社オプトアート 光ビーム測定装置
US5194993A (en) * 1991-09-24 1993-03-16 Eastman Kodak Company Adjustable mount for cylindrical lens
FR2698182B1 (fr) * 1992-11-13 1994-12-16 Commissariat Energie Atomique Dispositif de contrôle du centrage d'un faisceau lumineux, application à l'introduction de ce faisceau dans une fibre optique.
JPH071201A (ja) 1993-02-28 1995-01-06 Sanshin Kogyo Kk 円筒部材の加工方法
CN2293794Y (zh) * 1997-04-28 1998-10-07 中国科学技术大学 可调式半导体激光准直头
JP2000234916A (ja) 1999-02-15 2000-08-29 Konica Corp 光ビーム形状計測装置及びアライメント測定装置
JP2001004491A (ja) * 1999-06-25 2001-01-12 Sankyo Seiki Mfg Co Ltd 光ビームの検査装置
RU40103U1 (ru) * 2004-01-08 2004-08-27 Федеральное государственное унитарное предприятие "Производственное объединение "Уральский оптико-механический завод" Устройство для определения углового рассогласования пучков лазерного излучения
JP3935168B2 (ja) * 2004-08-26 2007-06-20 シャープ株式会社 レンズ鏡筒装置
WO2006078349A2 (en) * 2004-11-22 2006-07-27 Meade Instruments Corporation Scope for a firearm
JP4524403B2 (ja) * 2005-05-31 2010-08-18 三菱電機株式会社 フーリエ変換光学装置及び光制御型フェーズドアレイアンテナ装置
US7463342B2 (en) * 2007-05-02 2008-12-09 Angstrom, Inc. Optical tracking device using micromirror array lenses

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040066504A1 (en) 2002-09-24 2004-04-08 Infineon Technologies North America Corp. Test system for laser diode far-field pattern measurement
US20060043258A1 (en) 2004-08-26 2006-03-02 Masayuki Jyumonji Method of picking up sectional image of laser light
US20060254115A1 (en) 2004-11-22 2006-11-16 Thomas Mark A Optical sight with side focus adjustment
US20070019100A1 (en) 2005-07-08 2007-01-25 Konica Minolta Photo Imaging, Inc. Lens barrel unit and imaging apparatus

Also Published As

Publication number Publication date
DE502007001924D1 (de) 2009-12-17
TW200920334A (en) 2009-05-16
CA2699629A1 (en) 2009-03-26
ES2333369T3 (es) 2010-02-19
BRPI0815425A2 (pt) 2016-08-09
EP2037238A1 (de) 2009-03-18
WO2009036932A1 (de) 2009-03-26
MX2010002894A (es) 2010-04-01
RU2010113570A (ru) 2011-10-20
US20100253937A1 (en) 2010-10-07
IN2010KN00855A (https=) 2015-08-28
CA2699629C (en) 2016-04-19
CN101821595A (zh) 2010-09-01
RU2474795C2 (ru) 2013-02-10
EP2037238B1 (de) 2009-11-04
JP2010539459A (ja) 2010-12-16
KR20100063118A (ko) 2010-06-10
BRPI0815425B1 (pt) 2019-04-09
US8351028B2 (en) 2013-01-08
CN101821595B (zh) 2014-11-26
JP5554710B2 (ja) 2014-07-23

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