RU2474795C2 - Измерительное устройство для измерения параметров сфокусированного лазерного пучка - Google Patents

Измерительное устройство для измерения параметров сфокусированного лазерного пучка Download PDF

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Publication number
RU2474795C2
RU2474795C2 RU2010113570/28A RU2010113570A RU2474795C2 RU 2474795 C2 RU2474795 C2 RU 2474795C2 RU 2010113570/28 A RU2010113570/28 A RU 2010113570/28A RU 2010113570 A RU2010113570 A RU 2010113570A RU 2474795 C2 RU2474795 C2 RU 2474795C2
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RU
Russia
Prior art keywords
lens
measuring device
lenses
laser beam
adapter
Prior art date
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RU2010113570/28A
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English (en)
Russian (ru)
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RU2010113570A (ru
Inventor
Бернд ЦЕРЛЬ
Олаф КИТТЕЛЬМАНН
Original Assignee
Уэйвлайт Аг
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Application filed by Уэйвлайт Аг filed Critical Уэйвлайт Аг
Publication of RU2010113570A publication Critical patent/RU2010113570A/ru
Application granted granted Critical
Publication of RU2474795C2 publication Critical patent/RU2474795C2/ru

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0448—Adjustable, e.g. focussing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
RU2010113570/28A 2007-09-13 2008-09-12 Измерительное устройство для измерения параметров сфокусированного лазерного пучка RU2474795C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07017968.4 2007-09-13
EP07017968A EP2037238B1 (de) 2007-09-13 2007-09-13 Messgerät zur Vermessung eines Laserstrahls
PCT/EP2008/007575 WO2009036932A1 (de) 2007-09-13 2008-09-12 Messgerät zur vermessung eines fokussierten laserstrahls

Publications (2)

Publication Number Publication Date
RU2010113570A RU2010113570A (ru) 2011-10-20
RU2474795C2 true RU2474795C2 (ru) 2013-02-10

Family

ID=39059375

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2010113570/28A RU2474795C2 (ru) 2007-09-13 2008-09-12 Измерительное устройство для измерения параметров сфокусированного лазерного пучка

Country Status (14)

Country Link
US (1) US8351028B2 (https=)
EP (1) EP2037238B1 (https=)
JP (1) JP5554710B2 (https=)
KR (1) KR101255796B1 (https=)
CN (1) CN101821595B (https=)
BR (1) BRPI0815425B1 (https=)
CA (1) CA2699629C (https=)
DE (1) DE502007001924D1 (https=)
ES (1) ES2333369T3 (https=)
IN (1) IN2010KN00855A (https=)
MX (1) MX2010002894A (https=)
RU (1) RU2474795C2 (https=)
TW (1) TW200920334A (https=)
WO (1) WO2009036932A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
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RU2827964C1 (ru) * 2024-07-03 2024-10-04 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский университет "Московский институт электронной техники" Устройство для определения параметров сфокусированного лазерного пучка

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DE102010029089B4 (de) * 2010-05-18 2019-08-29 Carl Zeiss Ag Optisches System zur Kalibrierung einer Lichtquelle
CN102384782A (zh) * 2010-09-06 2012-03-21 杭州法珀激光科技有限公司 手持式激光光束分析仪
FR2974176B1 (fr) 2011-04-14 2014-01-17 Centre Nat Rech Scient Analyseur spatial de faisceau laser a reglage automatique
CN105606213B (zh) * 2015-12-05 2018-02-13 中国航空工业集团公司洛阳电光设备研究所 一种激光微脉冲峰值功率测试装置
DE102016009475B4 (de) * 2016-08-05 2019-06-19 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Strahlleistungsmessung mit Aufweitung
CN110799892B (zh) * 2017-06-23 2022-04-12 业纳光学系统有限公司 用于辅助调整射束扩展器的方法、调整辅助设备以及射束扩展器
CN112368638A (zh) * 2018-07-05 2021-02-12 应用材料公司 光掩模保护膜残胶移除
US11243114B2 (en) * 2018-09-17 2022-02-08 Trumpf Lasersystems For Semiconductor Manufacturing Gmbh Method for determining at least one beam propagation parameter of a laser beam
TWI729403B (zh) * 2019-05-31 2021-06-01 致茂電子股份有限公司 光電元件特性測量裝置
US12153208B2 (en) * 2020-11-23 2024-11-26 Coherent Lasersystems Gmbh & Co. Kg Laser beam wavefront correction with adaptive optics and mid-field monitoring
CN116907369B (zh) * 2023-09-06 2023-12-12 太原科技大学 一种螺旋焊管管径激光检测系统及其使用方法

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JP2001004491A (ja) * 1999-06-25 2001-01-12 Sankyo Seiki Mfg Co Ltd 光ビームの検査装置
US20040066504A1 (en) * 2002-09-24 2004-04-08 Infineon Technologies North America Corp. Test system for laser diode far-field pattern measurement
RU40103U1 (ru) * 2004-01-08 2004-08-27 Федеральное государственное унитарное предприятие "Производственное объединение "Уральский оптико-механический завод" Устройство для определения углового рассогласования пучков лазерного излучения
US20060043258A1 (en) * 2004-08-26 2006-03-02 Masayuki Jyumonji Method of picking up sectional image of laser light
US20060056060A1 (en) * 2004-08-26 2006-03-16 Masaaki Ozaki Lens-barrel device
US20060254115A1 (en) * 2004-11-22 2006-11-16 Thomas Mark A Optical sight with side focus adjustment

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JP2001004491A (ja) * 1999-06-25 2001-01-12 Sankyo Seiki Mfg Co Ltd 光ビームの検査装置
US20040066504A1 (en) * 2002-09-24 2004-04-08 Infineon Technologies North America Corp. Test system for laser diode far-field pattern measurement
RU40103U1 (ru) * 2004-01-08 2004-08-27 Федеральное государственное унитарное предприятие "Производственное объединение "Уральский оптико-механический завод" Устройство для определения углового рассогласования пучков лазерного излучения
US20060043258A1 (en) * 2004-08-26 2006-03-02 Masayuki Jyumonji Method of picking up sectional image of laser light
US20060056060A1 (en) * 2004-08-26 2006-03-16 Masaaki Ozaki Lens-barrel device
US20060254115A1 (en) * 2004-11-22 2006-11-16 Thomas Mark A Optical sight with side focus adjustment

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2827964C1 (ru) * 2024-07-03 2024-10-04 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский университет "Московский институт электронной техники" Устройство для определения параметров сфокусированного лазерного пучка

Also Published As

Publication number Publication date
DE502007001924D1 (de) 2009-12-17
TW200920334A (en) 2009-05-16
CA2699629A1 (en) 2009-03-26
ES2333369T3 (es) 2010-02-19
BRPI0815425A2 (pt) 2016-08-09
EP2037238A1 (de) 2009-03-18
WO2009036932A1 (de) 2009-03-26
MX2010002894A (es) 2010-04-01
RU2010113570A (ru) 2011-10-20
US20100253937A1 (en) 2010-10-07
IN2010KN00855A (https=) 2015-08-28
CA2699629C (en) 2016-04-19
CN101821595A (zh) 2010-09-01
KR101255796B1 (ko) 2013-04-17
EP2037238B1 (de) 2009-11-04
JP2010539459A (ja) 2010-12-16
KR20100063118A (ko) 2010-06-10
BRPI0815425B1 (pt) 2019-04-09
US8351028B2 (en) 2013-01-08
CN101821595B (zh) 2014-11-26
JP5554710B2 (ja) 2014-07-23

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Effective date: 20200913