CN101813825B - 干涉光调制器及显示装置 - Google Patents
干涉光调制器及显示装置 Download PDFInfo
- Publication number
- CN101813825B CN101813825B CN201010126163.6A CN201010126163A CN101813825B CN 101813825 B CN101813825 B CN 101813825B CN 201010126163 A CN201010126163 A CN 201010126163A CN 101813825 B CN101813825 B CN 101813825B
- Authority
- CN
- China
- Prior art keywords
- display device
- film
- layer
- dielectric
- light modulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims description 24
- 150000004767 nitrides Chemical class 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052681 coesite Inorganic materials 0.000 claims 2
- 229910052906 cristobalite Inorganic materials 0.000 claims 2
- 239000000377 silicon dioxide Substances 0.000 claims 2
- 235000012239 silicon dioxide Nutrition 0.000 claims 2
- 229910052682 stishovite Inorganic materials 0.000 claims 2
- 229910052905 tridymite Inorganic materials 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract 5
- 238000002310 reflectometry Methods 0.000 description 27
- 230000005540 biological transmission Effects 0.000 description 15
- 238000001228 spectrum Methods 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR15869/09 | 2009-02-25 | ||
| KR1020090015869A KR101614903B1 (ko) | 2009-02-25 | 2009-02-25 | 간섭 광 변조기 및 이를 채용한 디스플레이 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101813825A CN101813825A (zh) | 2010-08-25 |
| CN101813825B true CN101813825B (zh) | 2014-02-12 |
Family
ID=42145002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010126163.6A Expired - Fee Related CN101813825B (zh) | 2009-02-25 | 2010-02-25 | 干涉光调制器及显示装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8009346B2 (enExample) |
| EP (1) | EP2224275A1 (enExample) |
| JP (1) | JP5846719B2 (enExample) |
| KR (1) | KR101614903B1 (enExample) |
| CN (1) | CN101813825B (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5625614B2 (ja) | 2010-08-20 | 2014-11-19 | セイコーエプソン株式会社 | 光フィルター、光フィルターモジュール、分光測定器および光機器 |
| US20120056890A1 (en) * | 2010-09-02 | 2012-03-08 | Qualcomm Mems Technologies, Inc. | Flexible film interferometric modulator devices and methods of forming the same |
| TWI457615B (zh) * | 2011-04-25 | 2014-10-21 | E Ink Holdings Inc | 彩色濾光片、光柵結構及顯示模組 |
| US8736939B2 (en) * | 2011-11-04 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Matching layer thin-films for an electromechanical systems reflective display device |
| JP5910099B2 (ja) | 2012-01-18 | 2016-04-27 | セイコーエプソン株式会社 | 干渉フィルター、光学モジュールおよび電子機器 |
| US20130293519A1 (en) * | 2012-05-03 | 2013-11-07 | Qualcomm Mems Technologies, Inc. | Grey scale electromechanical systems display device |
| US8605351B1 (en) * | 2012-06-27 | 2013-12-10 | The United States Of America As Represented By The Secretary Of The Navy | Transparent interferometric visible spectrum modulator |
| CN102749667B (zh) * | 2012-07-28 | 2014-09-17 | 杭州科汀光学技术有限公司 | 用于图像芯片的光学滤波器 |
| JP5999159B2 (ja) * | 2014-10-01 | 2016-09-28 | セイコーエプソン株式会社 | 光フィルター、光フィルターモジュール、分光測定器および光機器 |
| CN107209301B (zh) * | 2015-02-05 | 2019-10-11 | 夏普株式会社 | 固态反射显示器 |
| KR102374120B1 (ko) * | 2015-09-23 | 2022-03-14 | 삼성전자주식회사 | 거울 디스플레이 및 그 제조 방법 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6094294A (en) * | 1996-02-26 | 2000-07-25 | Seiko Epson Corporation | Optical modulator device, display and electronic apparatus |
| TW200411274A (en) * | 2002-12-25 | 2004-07-01 | Prime View Int Co Ltd | Optical interference type color display |
| CN101006490A (zh) * | 2004-08-27 | 2007-07-25 | Idc公司 | 电流模式显示器驱动电路实现特征 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020010322A (ko) | 2000-07-29 | 2002-02-04 | 구본준, 론 위라하디락사 | 멤스(mems)를 이용한 투과형 디스플레이 장치 |
| JP2002062505A (ja) * | 2000-08-14 | 2002-02-28 | Canon Inc | 投影型表示装置及びそれに用いる干渉性変調素子 |
| JP2002174780A (ja) * | 2000-12-08 | 2002-06-21 | Stanley Electric Co Ltd | 反射型カラー表示器 |
| JP2003057567A (ja) | 2001-08-16 | 2003-02-26 | Sony Corp | 光学多層構造体、光スイッチング素子およびその製造方法、並びに画像表示装置 |
| JP3893421B2 (ja) | 2001-12-27 | 2007-03-14 | 富士フイルム株式会社 | 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置 |
| JP4470903B2 (ja) * | 2002-03-22 | 2010-06-02 | セイコーエプソン株式会社 | プロジェクタ |
| JP2004212674A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 2次元マトリクス平面表示素子及びその駆動方法 |
| TW594155B (en) * | 2002-12-27 | 2004-06-21 | Prime View Int Corp Ltd | Optical interference type color display and optical interference modulator |
| US7233029B2 (en) * | 2003-01-17 | 2007-06-19 | Fujifilm Corporation | Optical functional film, method of forming the same, and spatial light modulator, spatial light modulator array, image forming device and flat panel display using the same |
| JP4243201B2 (ja) | 2003-01-17 | 2009-03-25 | 富士フイルム株式会社 | 光変調素子及び光変調素子アレイ、並びに画像形成装置及び平面表示装置 |
| TW594360B (en) * | 2003-04-21 | 2004-06-21 | Prime View Int Corp Ltd | A method for fabricating an interference display cell |
| TWI226504B (en) * | 2003-04-21 | 2005-01-11 | Prime View Int Co Ltd | A structure of an interference display cell |
| TWI230801B (en) * | 2003-08-29 | 2005-04-11 | Prime View Int Co Ltd | Reflective display unit using interferometric modulation and manufacturing method thereof |
| JP2005157133A (ja) * | 2003-11-27 | 2005-06-16 | Okayama Prefecture | 光スイッチング素子と光スイッチング素子を用いた画像表示装置 |
| JP4452560B2 (ja) | 2004-06-07 | 2010-04-21 | 富士フイルム株式会社 | 透過型光変調素子及び透過型光変調アレイ素子 |
| US20060066932A1 (en) * | 2004-09-27 | 2006-03-30 | Clarence Chui | Method of selective etching using etch stop layer |
| US7355780B2 (en) * | 2004-09-27 | 2008-04-08 | Idc, Llc | System and method of illuminating interferometric modulators using backlighting |
| US7710632B2 (en) * | 2004-09-27 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Display device having an array of spatial light modulators with integrated color filters |
| JP4414855B2 (ja) | 2004-09-30 | 2010-02-10 | 富士フイルム株式会社 | 透過型光変調素子の製造方法 |
| JP4862460B2 (ja) * | 2006-04-04 | 2012-01-25 | ソニー株式会社 | 反射型液晶表示素子及びその製造方法並びに液晶表示装置 |
| JP2008145506A (ja) * | 2006-12-06 | 2008-06-26 | Institute Of National Colleges Of Technology Japan | 圧電素子による光学素子とその作成方法 |
| KR101269250B1 (ko) | 2007-04-09 | 2013-05-29 | 한양대학교 산학협력단 | 평판 디스플레이용 광 모듈레이터 |
| JP4633088B2 (ja) | 2007-06-04 | 2011-02-16 | シャープ株式会社 | 干渉性変調器および表示装置 |
| JP5082648B2 (ja) * | 2007-07-24 | 2012-11-28 | カシオ計算機株式会社 | 撮像装置、撮像装置制御プログラム及び撮像装置制御方法 |
-
2009
- 2009-02-25 KR KR1020090015869A patent/KR101614903B1/ko not_active Expired - Fee Related
-
2010
- 2010-01-25 US US12/693,064 patent/US8009346B2/en not_active Expired - Fee Related
- 2010-02-04 EP EP10001127A patent/EP2224275A1/en not_active Withdrawn
- 2010-02-23 JP JP2010037375A patent/JP5846719B2/ja not_active Expired - Fee Related
- 2010-02-25 CN CN201010126163.6A patent/CN101813825B/zh not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6094294A (en) * | 1996-02-26 | 2000-07-25 | Seiko Epson Corporation | Optical modulator device, display and electronic apparatus |
| TW200411274A (en) * | 2002-12-25 | 2004-07-01 | Prime View Int Co Ltd | Optical interference type color display |
| CN101006490A (zh) * | 2004-08-27 | 2007-07-25 | Idc公司 | 电流模式显示器驱动电路实现特征 |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2002-174780A 2002.06.21 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8009346B2 (en) | 2011-08-30 |
| KR20100096809A (ko) | 2010-09-02 |
| CN101813825A (zh) | 2010-08-25 |
| JP5846719B2 (ja) | 2016-01-20 |
| US20100214644A1 (en) | 2010-08-26 |
| KR101614903B1 (ko) | 2016-04-25 |
| JP2010198018A (ja) | 2010-09-09 |
| EP2224275A1 (en) | 2010-09-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101813825B (zh) | 干涉光调制器及显示装置 | |
| US20230266512A1 (en) | Nanoparticle-Based Holographic Photopolymer Materials and Related Applications | |
| CN102707536B (zh) | 反射器及具有所述反射器的显示装置 | |
| JP2005308871A (ja) | 干渉カラーフィルター | |
| JP5868706B2 (ja) | 干渉型フィルタ層付基板及びそれを用いた表示装置 | |
| TW200422750A (en) | A structure of an interference display cell | |
| JP2006201782A (ja) | ワイヤグリッド偏光フィルム、偏光フィルムの製造方法、これを用いた液晶ディスプレイ及びワイヤグリッド偏光フィルムのグリッド製造用モールドの製造方法 | |
| JP2008102416A (ja) | ワイヤーグリッド偏光子及びそれを用いた液晶表示装置 | |
| US11500239B2 (en) | Display device | |
| JP2014182280A (ja) | 表示装置 | |
| CN113589580B (zh) | 显示面板及显示装置 | |
| KR20120056528A (ko) | 반사형 폴리머 분산 액정 디스플레이 장치 | |
| JP2011008295A (ja) | 液晶表示装置およびそれを用いた表示体 | |
| WO2007132636A1 (ja) | 作動型反射/吸収板、及びこれを用いた表示素子 | |
| TW201243401A (en) | Color filter, optical grating structure and display module | |
| JP2006509240A (ja) | 高屈折率の被覆調光フィルム | |
| TW200300860A (en) | Liquid crystal display device | |
| JP2013164429A (ja) | カラーフィルタおよびこれを備えた反射型表示装置 | |
| KR102797434B1 (ko) | 컬러 필터 | |
| JP5881783B2 (ja) | 干渉型フィルタ層付基板及びそれを用いた表示装置 | |
| JP2019537037A (ja) | 表示基板及びその製造方法、表示装置及びその駆動方法 | |
| JP4663343B2 (ja) | 液晶表示装置およびそれを用いた表示体 | |
| JP4422456B2 (ja) | 半透過・半反射型液晶表示装置用カラーフィルタ及び半透過・半反射型液晶表示装置 | |
| WO2024031235A1 (zh) | 胆固醇液晶显示器 | |
| CN1963630A (zh) | 半穿透半反射式液晶显示装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: SAMSUNG MONITOR CO., LTD. Free format text: FORMER OWNER: SAMSUNG ELECTRONICS CO., LTD. Effective date: 20121026 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20121026 Address after: Gyeonggi Do, South Korea Applicant after: Samsung Display Co.,Ltd. Address before: Gyeonggi Do, South Korea Applicant before: Samsung Electronics Co.,Ltd. |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140212 Termination date: 20210225 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |