CN101794724B - 切割带集成晶片背面保护膜 - Google Patents

切割带集成晶片背面保护膜 Download PDF

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Publication number
CN101794724B
CN101794724B CN201010106090.4A CN201010106090A CN101794724B CN 101794724 B CN101794724 B CN 101794724B CN 201010106090 A CN201010106090 A CN 201010106090A CN 101794724 B CN101794724 B CN 101794724B
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CN
China
Prior art keywords
dicing tape
protection film
protective film
colored
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201010106090.4A
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English (en)
Chinese (zh)
Other versions
CN101794724A (zh
Inventor
高本尚英
松村健
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
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Nitto Denko Corp
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Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to CN201410351062.7A priority Critical patent/CN104103565B/zh
Publication of CN101794724A publication Critical patent/CN101794724A/zh
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7402—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00—Arrangements for protection of devices
    • H10W42/121—Arrangements for protection of devices protecting against mechanical damage
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7416—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H10W46/601—Marks applied to devices, e.g. for alignment or identification for use after dicing
    • H10W46/603—Formed on wafers or substrates before dicing and remaining on chips after dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/013—Manufacture or treatment of die-attach connectors
    • H10W72/01331—Manufacture or treatment of die-attach connectors using blanket deposition
    • H10W72/01336—Manufacture or treatment of die-attach connectors using blanket deposition in solid form, e.g. by using a powder or by laminating a foil
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07231—Techniques
    • H10W72/07236—Soldering or alloying
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/14—Layer or component removable to expose adhesive
    • Y10T428/1467—Coloring agent
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2848—Three or more layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31511—Of epoxy ether

Landscapes

  • Dicing (AREA)
  • Adhesive Tapes (AREA)
  • Laminated Bodies (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Wire Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201010106090.4A 2009-01-30 2010-01-29 切割带集成晶片背面保护膜 Expired - Fee Related CN101794724B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410351062.7A CN104103565B (zh) 2009-01-30 2010-01-29 切割带集成晶片背面保护膜

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009-020460 2009-01-30
JP2009020460 2009-01-30
JP2009-251125 2009-10-30
JP2009251125A JP5456440B2 (ja) 2009-01-30 2009-10-30 ダイシングテープ一体型ウエハ裏面保護フィルム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201410351062.7A Division CN104103565B (zh) 2009-01-30 2010-01-29 切割带集成晶片背面保护膜

Publications (2)

Publication Number Publication Date
CN101794724A CN101794724A (zh) 2010-08-04
CN101794724B true CN101794724B (zh) 2014-08-20

Family

ID=42397024

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201010106090.4A Expired - Fee Related CN101794724B (zh) 2009-01-30 2010-01-29 切割带集成晶片背面保护膜
CN201410351062.7A Expired - Fee Related CN104103565B (zh) 2009-01-30 2010-01-29 切割带集成晶片背面保护膜

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201410351062.7A Expired - Fee Related CN104103565B (zh) 2009-01-30 2010-01-29 切割带集成晶片背面保护膜

Country Status (5)

Country Link
US (5) US8237294B2 (https=)
JP (1) JP5456440B2 (https=)
KR (1) KR101312188B1 (https=)
CN (2) CN101794724B (https=)
TW (4) TWI623060B (https=)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080042940A (ko) * 2004-05-18 2008-05-15 히다치 가세고교 가부시끼가이샤 점접착 시트 및 그것을 이용한 반도체장치 및 그 제조 방법
JP5456441B2 (ja) * 2009-01-30 2014-03-26 日東電工株式会社 ダイシングテープ一体型ウエハ裏面保護フィルム
JP5456440B2 (ja) * 2009-01-30 2014-03-26 日東電工株式会社 ダイシングテープ一体型ウエハ裏面保護フィルム
JP5580719B2 (ja) * 2009-12-24 2014-08-27 日東電工株式会社 ダイシングテープ一体型半導体裏面用フィルム
JP5681374B2 (ja) 2010-04-19 2015-03-04 日東電工株式会社 ダイシングテープ一体型半導体裏面用フィルム
JP5439264B2 (ja) 2010-04-19 2014-03-12 日東電工株式会社 ダイシングテープ一体型半導体裏面用フィルム
JP5249290B2 (ja) * 2010-07-20 2013-07-31 日東電工株式会社 フリップチップ型半導体裏面用フィルム、ダイシングテープ一体型半導体裏面用フィルム、半導体装置の製造方法、及び、フリップチップ型半導体装置
JP5744434B2 (ja) * 2010-07-29 2015-07-08 日東電工株式会社 加熱剥離シート一体型半導体裏面用フィルム、半導体素子の回収方法、及び半導体装置の製造方法
JP2014511559A (ja) 2011-02-01 2014-05-15 ヘンケル コーポレイション プレカットされウェハに塗布されるアンダーフィル膜
EP2671248A4 (en) * 2011-02-01 2015-10-07 Henkel Corp ON A PRECUTED WAFER APPLIED FILM ON A DICING TAPE
JP5036887B1 (ja) * 2011-03-11 2012-09-26 日東電工株式会社 保護フィルム付きダイシングフィルム
US8994191B2 (en) * 2013-01-21 2015-03-31 Advanced Micro Devices (Shanghai) Co. Ltd. Die-die stacking structure and method for making the same
JP6278504B2 (ja) 2013-03-05 2018-02-14 公立大学法人首都大学東京 新規化合物及びそれを用いた光電変換素子
JP6091954B2 (ja) * 2013-03-26 2017-03-08 リンテック株式会社 粘着シート、保護膜形成用フィルム、保護膜形成用複合シート、およびマーキング方法
KR102750179B1 (ko) * 2013-08-01 2025-01-03 린텍 가부시키가이샤 보호막 형성용 복합 시트
US20160176169A1 (en) * 2013-08-01 2016-06-23 Lintec Corporation Protective Film Formation-Use Composite Sheet
JP5612747B2 (ja) * 2013-09-25 2014-10-22 日東電工株式会社 半導体装置製造用フィルム、半導体装置製造用フィルムの製造方法、及び、半導体装置の製造方法。
US9171749B2 (en) * 2013-11-13 2015-10-27 Globalfoundries U.S.2 Llc Handler wafer removal facilitated by the addition of an amorphous carbon layer on the handler wafer
KR102258918B1 (ko) 2014-01-08 2021-06-02 린텍 가부시키가이샤 보호막 형성용 복합 시트
KR102221484B1 (ko) * 2014-03-24 2021-02-26 린텍 가부시키가이샤 보호막 형성 필름, 보호막 형성용 시트 및 가공물의 제조 방법
JP5978246B2 (ja) 2014-05-13 2016-08-24 日東電工株式会社 ダイシングテープ一体型半導体裏面用フィルム、及び、半導体装置の製造方法
JP6272729B2 (ja) 2014-05-16 2018-01-31 日東電工株式会社 ダイシングテープ一体型半導体裏面用フィルム、及び、半導体装置の製造方法
KR102224972B1 (ko) 2014-07-04 2021-03-08 린텍 가부시키가이샤 보호막 형성용 필름
CN106415793A (zh) 2014-07-04 2017-02-15 琳得科株式会社 保护膜形成用薄膜
WO2016006719A1 (ja) * 2014-07-07 2016-01-14 リンテック株式会社 表面保護フィルム
JP6613516B2 (ja) * 2014-07-07 2019-12-04 リンテック株式会社 表面保護フィルム
JP6085288B2 (ja) * 2014-12-24 2017-02-22 リンテック株式会社 保護膜形成用フィルムおよび半導体チップの製造方法
JP6415383B2 (ja) 2015-04-30 2018-10-31 日東電工株式会社 半導体素子の裏面を保護するための裏面保護フィルム、一体型フィルム、フィルム、半導体装置の製造方法および保護チップの製造方法
JP2016213236A (ja) 2015-04-30 2016-12-15 日東電工株式会社 半導体装置用フィルム、及び、半導体装置の製造方法
JP6078581B2 (ja) * 2015-04-30 2017-02-08 日東電工株式会社 一体型フィルム、フィルム、半導体装置の製造方法および保護チップの製造方法
JP6517588B2 (ja) * 2015-05-27 2019-05-22 デクセリアルズ株式会社 熱硬化性接着シート、及び半導体装置の製造方法
WO2017010158A1 (ja) * 2015-07-15 2017-01-19 Dic株式会社 粘着剤組成物及び表面保護フィルム
JP6571437B2 (ja) * 2015-07-29 2019-09-04 リンテック株式会社 半導体装置の製造方法
JP6660156B2 (ja) 2015-11-13 2020-03-04 日東電工株式会社 積層体および合同体・半導体装置の製造方法
JP6791626B2 (ja) * 2015-12-14 2020-11-25 デクセリアルズ株式会社 熱硬化性接着シート、及び半導体装置の製造方法
US10199351B2 (en) * 2015-12-30 2019-02-05 Skyworks Solutions, Inc. Method and device for improved die bonding
TWI772293B (zh) * 2016-04-28 2022-08-01 日商琳得科股份有限公司 附有保護膜的半導體晶片的製造方法以及半導體裝置的製造方法
GB2551732B (en) * 2016-06-28 2020-05-27 Disco Corp Method of processing wafer
JP7096766B2 (ja) * 2016-08-31 2022-07-06 リンテック株式会社 半導体装置の製造方法
CN109616437B (zh) * 2018-11-21 2020-07-10 武汉华星光电半导体显示技术有限公司 待切割柔性oled面板及其切割方法
TWI713134B (zh) * 2019-11-14 2020-12-11 日月光半導體製造股份有限公司 用於製作半導體設備之整合系統
JP7451150B2 (ja) * 2019-11-20 2024-03-18 日東電工株式会社 ダイシングテープ一体型半導体背面密着フィルム
CN116095576A (zh) * 2023-01-29 2023-05-09 歌尔股份有限公司 用于发声装置的振膜、发声装置及电子设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1499579A (zh) * 2002-10-25 2004-05-26 ��ʽ���������Ƽ� 半导体电路器件的制造方法
US20060079011A1 (en) * 2000-08-25 2006-04-13 Tandy William D Methods for marking a bare semiconductor die
JP2006140348A (ja) * 2004-11-12 2006-06-01 Lintec Corp マーキング方法および保護膜形成兼ダイシング用シート
JP2007250970A (ja) * 2006-03-17 2007-09-27 Hitachi Chem Co Ltd 半導体素子裏面保護用フィルム及びそれを用いた半導体装置とその製造法

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001060938A1 (fr) 2000-02-15 2001-08-23 Hitachi Chemical Co., Ltd. Composition adhesive, procede de production de ladite resine, film adhesif fabrique a partir de ladite resine, substrat pour montage de semi-conducteur et dispositif semi-conducteur
AU2001290294A1 (en) 2000-09-27 2002-04-08 Hitachi Chemical Co. Ltd. Semiconductor mounting board, its manufacturing method, semiconductor package comprising this board, and its manufacturing method
JP4674836B2 (ja) 2001-02-13 2011-04-20 日東電工株式会社 ダイシング用粘着シート
JP3544362B2 (ja) 2001-03-21 2004-07-21 リンテック株式会社 半導体チップの製造方法
JP2004063551A (ja) 2002-07-25 2004-02-26 Hitachi Chem Co Ltd 半導体素子表面保護用フィルム及び半導体素子ユニット
DE10235482B3 (de) 2002-08-02 2004-01-22 Süss Microtec Lithography Gmbh Vorrichtung zum Fixieren dünner und flexibler Substrate
JP4341343B2 (ja) 2002-10-04 2009-10-07 日立化成工業株式会社 表面保護フィルム及びその製造方法
TW563212B (en) * 2002-10-24 2003-11-21 Advanced Semiconductor Eng Semiconductor package and manufacturing method thereof
KR20050088117A (ko) 2002-12-12 2005-09-01 덴끼 가가꾸 고교 가부시키가이샤 표면 보호 필름
CN1726250A (zh) 2002-12-12 2006-01-25 电气化学工业株式会社 表面保护膜
JP4364508B2 (ja) 2002-12-27 2009-11-18 リンテック株式会社 チップ裏面用保護膜形成用シートおよび保護膜付きチップの製造方法
JP2004221169A (ja) 2003-01-10 2004-08-05 Hitachi Chem Co Ltd 半導体素子保護材、及び半導体装置
US20080131715A1 (en) 2004-02-04 2008-06-05 Du Pont-Mitsui Polychemicals Co., Ltd. Resin Composition and Multi-Layer Article Thereof
JP2005302971A (ja) 2004-04-09 2005-10-27 Toshiba Corp 半導体チップ実装体の製造方法、半導体チップ実装体
US7452786B2 (en) * 2004-06-29 2008-11-18 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing thin film integrated circuit, and element substrate
JP4858678B2 (ja) * 2005-05-24 2012-01-18 ソニーケミカル＆インフォメーションデバイス株式会社 エステル基含有ポリ（イミド−アゾメチン）共重合体、エステル基含有ポリ（アミド酸−アゾメチン）共重合体及びポジ型感光性樹脂組成物
US20060289966A1 (en) * 2005-06-22 2006-12-28 Dani Ashay A Silicon wafer with non-soluble protective coating
JP4865312B2 (ja) 2005-12-05 2012-02-01 古河電気工業株式会社 チップ用保護膜形成用シート
JP4846406B2 (ja) 2006-03-28 2011-12-28 リンテック株式会社 チップ用保護膜形成用シート
JP4769975B2 (ja) * 2006-03-29 2011-09-07 オンセミコンダクター・トレーディング・リミテッド 半導体装置の製造方法
JP2008006386A (ja) 2006-06-29 2008-01-17 Furukawa Electric Co Ltd:The チップ用保護膜形成用シートによる保護膜形成方法。
KR100816881B1 (ko) 2006-08-31 2008-03-26 한국화학연구원 다이싱 다이본드 필름
KR101040439B1 (ko) * 2006-10-24 2011-06-09 주식회사 엘지화학 다이싱-다이본딩 필름 및 이를 이용하는 반도체 패키징방법
JP2008166451A (ja) 2006-12-27 2008-07-17 Furukawa Electric Co Ltd:The チップ保護用フィルム
JP5344802B2 (ja) 2007-03-30 2013-11-20 リンテック株式会社 チップ用保護膜形成用シートおよび保護膜付半導体チップ
JP5245301B2 (ja) * 2007-06-28 2013-07-24 住友ベークライト株式会社 樹脂組成物、プリプレグ、積層板、及び半導体装置
KR101009122B1 (ko) * 2007-09-14 2011-01-18 후루카와 덴키 고교 가부시키가이샤 웨이퍼 가공용 테이프
JP5456440B2 (ja) * 2009-01-30 2014-03-26 日東電工株式会社 ダイシングテープ一体型ウエハ裏面保護フィルム
CN101924055A (zh) * 2009-06-15 2010-12-22 日东电工株式会社 半导体背面用切割带集成膜
JP5174092B2 (ja) * 2009-08-31 2013-04-03 日東電工株式会社 ダイシングシート付き接着フィルム及びその製造方法
JP5143196B2 (ja) * 2009-09-28 2013-02-13 日東電工株式会社 半導体装置用フィルム
JP6144868B2 (ja) * 2010-11-18 2017-06-07 日東電工株式会社 フリップチップ型半導体裏面用フィルム、ダイシングテープ一体型半導体裏面用フィルム、及び、フリップチップ型半導体裏面用フィルムの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060079011A1 (en) * 2000-08-25 2006-04-13 Tandy William D Methods for marking a bare semiconductor die
CN1499579A (zh) * 2002-10-25 2004-05-26 ��ʽ���������Ƽ� 半导体电路器件的制造方法
JP2006140348A (ja) * 2004-11-12 2006-06-01 Lintec Corp マーキング方法および保護膜形成兼ダイシング用シート
JP2007250970A (ja) * 2006-03-17 2007-09-27 Hitachi Chem Co Ltd 半導体素子裏面保護用フィルム及びそれを用いた半導体装置とその製造法

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