CN101577304B - 发光二极管封装结构 - Google Patents
发光二极管封装结构 Download PDFInfo
- Publication number
- CN101577304B CN101577304B CN2009101378647A CN200910137864A CN101577304B CN 101577304 B CN101577304 B CN 101577304B CN 2009101378647 A CN2009101378647 A CN 2009101378647A CN 200910137864 A CN200910137864 A CN 200910137864A CN 101577304 B CN101577304 B CN 101577304B
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- led
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- 239000000463 material Substances 0.000 claims description 97
- 239000011241 protective layer Substances 0.000 claims description 15
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- 239000007787 solid Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 37
- 238000000034 method Methods 0.000 description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 25
- 229910052710 silicon Inorganic materials 0.000 description 25
- 239000010703 silicon Substances 0.000 description 25
- 238000005516 engineering process Methods 0.000 description 16
- 230000004888 barrier function Effects 0.000 description 15
- 239000004020 conductor Substances 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 238000007747 plating Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 208000004350 Strabismus Diseases 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 241000724291 Tobacco streak virus Species 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
- H01L33/486—Containers adapted for surface mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/642—Heat extraction or cooling elements characterized by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/647—Heat extraction or cooling elements the elements conducting electric current to or from the semiconductor body
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Led Device Packages (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5052908P | 2008-05-05 | 2008-05-05 | |
US61/050,529 | 2008-05-05 | ||
US12/235,193 US20090273002A1 (en) | 2008-05-05 | 2008-09-22 | LED Package Structure and Fabrication Method |
US12/235,193 | 2008-09-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101577304A CN101577304A (zh) | 2009-11-11 |
CN101577304B true CN101577304B (zh) | 2012-03-21 |
Family
ID=41256531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009101378647A Active CN101577304B (zh) | 2008-05-05 | 2009-04-29 | 发光二极管封装结构 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20090273002A1 (zh) |
CN (1) | CN101577304B (zh) |
TW (1) | TWI381555B (zh) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
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US8044412B2 (en) | 2006-01-20 | 2011-10-25 | Taiwan Semiconductor Manufacturing Company, Ltd | Package for a light emitting element |
US8236583B2 (en) * | 2008-09-10 | 2012-08-07 | Tsmc Solid State Lighting Ltd. | Method of separating light-emitting diode from a growth substrate |
TW201031022A (en) * | 2009-02-09 | 2010-08-16 | Silitek Electronic Guangzhou | Photoelectric semiconductor device |
KR20100094246A (ko) * | 2009-02-18 | 2010-08-26 | 엘지이노텍 주식회사 | 발광소자 패키지 및 그 제조방법 |
US9502612B2 (en) | 2009-09-20 | 2016-11-22 | Viagan Ltd. | Light emitting diode package with enhanced heat conduction |
US8174044B2 (en) * | 2010-01-14 | 2012-05-08 | Shang-Yi Wu | Light emitting diode package and method for forming the same |
US20110198619A1 (en) * | 2010-02-18 | 2011-08-18 | Walsin Lihwa Corporation | Light emitting diode assembly having improved lighting efficiency |
US20130313965A1 (en) * | 2010-02-18 | 2013-11-28 | Walsin Lihwa Corporation | Light Emitting Diode Unit |
US8183580B2 (en) | 2010-03-02 | 2012-05-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermally-enhanced hybrid LED package components |
US8222139B2 (en) * | 2010-03-30 | 2012-07-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chemical mechanical polishing (CMP) processing of through-silicon via (TSV) and contact plug simultaneously |
US8507940B2 (en) * | 2010-04-05 | 2013-08-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Heat dissipation by through silicon plugs |
US20110284887A1 (en) * | 2010-05-21 | 2011-11-24 | Shang-Yi Wu | Light emitting chip package and method for forming the same |
US8319336B2 (en) * | 2010-07-08 | 2012-11-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reduction of etch microloading for through silicon vias |
US9293678B2 (en) * | 2010-07-15 | 2016-03-22 | Micron Technology, Inc. | Solid-state light emitters having substrates with thermal and electrical conductivity enhancements and method of manufacture |
CN102403413B (zh) * | 2010-09-19 | 2013-09-18 | 常州普美电子科技有限公司 | Led散热基板、led封装结构及二者的制作方法 |
US8772817B2 (en) * | 2010-12-22 | 2014-07-08 | Cree, Inc. | Electronic device submounts including substrates with thermally conductive vias |
US8653542B2 (en) * | 2011-01-13 | 2014-02-18 | Tsmc Solid State Lighting Ltd. | Micro-interconnects for light-emitting diodes |
US8941137B2 (en) * | 2011-03-06 | 2015-01-27 | Mordehai MARGALIT | Light emitting diode package and method of manufacture |
TWI451605B (zh) * | 2011-03-08 | 2014-09-01 | Lextar Electronics Corp | 具有金屬反射面與散熱塊之發光二極體結構 |
KR101847938B1 (ko) * | 2011-03-14 | 2018-04-13 | 삼성전자주식회사 | 발광소자 패키지 및 그 제조 방법 |
KR101812168B1 (ko) | 2011-04-19 | 2017-12-26 | 엘지전자 주식회사 | 발광 소자 패키지 및 이를 이용한 발광 장치 |
US8901578B2 (en) * | 2011-05-10 | 2014-12-02 | Rohm Co., Ltd. | LED module having LED chips as light source |
CN103563111B (zh) | 2011-06-01 | 2017-09-12 | 飞利浦照明控股有限公司 | 包括导热体的发光模块、灯和灯具 |
JP5985846B2 (ja) * | 2011-06-29 | 2016-09-06 | Flexceed株式会社 | 発光素子搭載用基板及びledパッケージ |
JP2013033910A (ja) * | 2011-06-29 | 2013-02-14 | Hitachi Cable Ltd | 発光素子搭載用基板、ledパッケージ、及びledパッケージの製造方法 |
TW201324705A (zh) * | 2011-12-08 | 2013-06-16 | Genesis Photonics Inc | 電子元件 |
JP6293995B2 (ja) * | 2012-03-23 | 2018-03-14 | 新光電気工業株式会社 | 発光素子搭載用パッケージ及びその製造方法、並びに発光素子パッケージ |
US9136341B2 (en) | 2012-04-18 | 2015-09-15 | Rf Micro Devices, Inc. | High voltage field effect transistor finger terminations |
US8908383B1 (en) * | 2012-05-21 | 2014-12-09 | Triquint Semiconductor, Inc. | Thermal via structures with surface features |
US20130313718A1 (en) * | 2012-05-24 | 2013-11-28 | Micron Technology, Inc. | Substrates Comprising Integrated Circuitry, Methods Of Processing A Substrate Comprising Integrated Circuitry, And Methods Of Back-Side Thinning A Substrate Comprising Integrated Circuitry |
US9147632B2 (en) | 2012-08-24 | 2015-09-29 | Rf Micro Devices, Inc. | Semiconductor device having improved heat dissipation |
US9917080B2 (en) | 2012-08-24 | 2018-03-13 | Qorvo US. Inc. | Semiconductor device with electrical overstress (EOS) protection |
US9202874B2 (en) | 2012-08-24 | 2015-12-01 | Rf Micro Devices, Inc. | Gallium nitride (GaN) device with leakage current-based over-voltage protection |
US9325281B2 (en) | 2012-10-30 | 2016-04-26 | Rf Micro Devices, Inc. | Power amplifier controller |
CN102983126B (zh) * | 2012-11-30 | 2015-04-01 | 余姚德诚科技咨询有限公司 | Led发光芯片阵列封装结构 |
TWI550920B (zh) * | 2012-12-13 | 2016-09-21 | 鴻海精密工業股份有限公司 | 發光二極體 |
KR20140094752A (ko) * | 2013-01-22 | 2014-07-31 | 삼성전자주식회사 | 전자소자 패키지 및 이에 사용되는 패키지 기판 |
US8933562B2 (en) * | 2013-01-24 | 2015-01-13 | International Business Machines Corporation | In-situ thermoelectric cooling |
US9516720B2 (en) * | 2013-11-04 | 2016-12-06 | Koninklijke Philips N.V. | Surge-protection arrangement |
US9455327B2 (en) | 2014-06-06 | 2016-09-27 | Qorvo Us, Inc. | Schottky gated transistor with interfacial layer |
TWM488746U (zh) * | 2014-07-14 | 2014-10-21 | Genesis Photonics Inc | 發光模組 |
US9536803B2 (en) | 2014-09-05 | 2017-01-03 | Qorvo Us, Inc. | Integrated power module with improved isolation and thermal conductivity |
US9502615B2 (en) * | 2014-11-13 | 2016-11-22 | Epistar Corporation | Light-emitting diode device |
US10615158B2 (en) | 2015-02-04 | 2020-04-07 | Qorvo Us, Inc. | Transition frequency multiplier semiconductor device |
US10062684B2 (en) | 2015-02-04 | 2018-08-28 | Qorvo Us, Inc. | Transition frequency multiplier semiconductor device |
US20170104135A1 (en) * | 2015-10-13 | 2017-04-13 | Sensor Electronic Technology, Inc. | Light Emitting Diode Mounting Structure |
KR102455086B1 (ko) * | 2017-09-12 | 2022-10-17 | 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 | 발광소자 패키지 및 광원장치 |
CN108198933B (zh) * | 2018-01-02 | 2020-01-31 | 扬州乾照光电有限公司 | 一种led芯片、制备方法及led晶片 |
CN109686707A (zh) * | 2019-01-28 | 2019-04-26 | 南通大学 | 高散热硅基封装基板、制作方法及高散热封装结构 |
JP7233304B2 (ja) * | 2019-05-30 | 2023-03-06 | スタンレー電気株式会社 | 発光装置、および、その製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6614103B1 (en) * | 2000-09-01 | 2003-09-02 | General Electric Company | Plastic packaging of LED arrays |
US6531328B1 (en) * | 2001-10-11 | 2003-03-11 | Solidlite Corporation | Packaging of light-emitting diode |
US6818464B2 (en) * | 2001-10-17 | 2004-11-16 | Hymite A/S | Double-sided etching technique for providing a semiconductor structure with through-holes, and a feed-through metalization process for sealing the through-holes |
JP3872490B2 (ja) * | 2004-12-24 | 2007-01-24 | 京セラ株式会社 | 発光素子収納パッケージ、発光装置および照明装置 |
KR100593937B1 (ko) * | 2005-03-30 | 2006-06-30 | 삼성전기주식회사 | Si기판을 이용한 LED 패키지 및 그 제조방법 |
KR101241650B1 (ko) * | 2005-10-19 | 2013-03-08 | 엘지이노텍 주식회사 | 엘이디 패키지 |
US7505275B2 (en) * | 2005-11-04 | 2009-03-17 | Graftech International Holdings Inc. | LED with integral via |
-
2008
- 2008-09-22 US US12/235,193 patent/US20090273002A1/en not_active Abandoned
-
2009
- 2009-02-27 TW TW098106338A patent/TWI381555B/zh active
- 2009-04-29 CN CN2009101378647A patent/CN101577304B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TWI381555B (zh) | 2013-01-01 |
CN101577304A (zh) | 2009-11-11 |
TW200947770A (en) | 2009-11-16 |
US20090273002A1 (en) | 2009-11-05 |
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Effective date of registration: 20160504 Address after: Hsinchu City, Taiwan, China Patentee after: EPISTAR Corp. Address before: Hsinchu City, Taiwan, China Patentee before: Yuanxin Optoelectronics Co.,Ltd. Effective date of registration: 20160504 Address after: Hsinchu City, Taiwan, China Patentee after: Yuanxin Optoelectronics Co.,Ltd. Address before: Hsinchu City, Taiwan, China Patentee before: Taiwan Semiconductor Manufacturing Co.,Ltd. |