CN101553758B - 图案的形成方法及其所使用的感光性树脂组合物 - Google Patents
图案的形成方法及其所使用的感光性树脂组合物 Download PDFInfo
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- CN101553758B CN101553758B CN2007800394213A CN200780039421A CN101553758B CN 101553758 B CN101553758 B CN 101553758B CN 2007800394213 A CN2007800394213 A CN 2007800394213A CN 200780039421 A CN200780039421 A CN 200780039421A CN 101553758 B CN101553758 B CN 101553758B
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- Prior art keywords
- pattern
- solvent
- polymer combination
- mixed solvent
- photosensitive polymer
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006347323A JP4403174B2 (ja) | 2006-12-25 | 2006-12-25 | パターン形成方法およびそれに用いる感光性樹脂組成物 |
JP347323/2006 | 2006-12-25 | ||
PCT/JP2007/074643 WO2008078676A1 (ja) | 2006-12-25 | 2007-12-21 | パターン形成方法およびそれに用いる感光性樹脂組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101553758A CN101553758A (zh) | 2009-10-07 |
CN101553758B true CN101553758B (zh) | 2012-04-04 |
Family
ID=39562466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800394213A Active CN101553758B (zh) | 2006-12-25 | 2007-12-21 | 图案的形成方法及其所使用的感光性树脂组合物 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4403174B2 (ja) |
KR (1) | KR101330558B1 (ja) |
CN (1) | CN101553758B (ja) |
TW (1) | TWI447782B (ja) |
WO (1) | WO2008078676A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5329999B2 (ja) | 2009-01-29 | 2013-10-30 | AzエレクトロニックマテリアルズIp株式会社 | パターン形成方法 |
US8257901B2 (en) | 2009-03-10 | 2012-09-04 | Lg Chem, Ltd. | Polyimide-based polymers, copolymers thereof and positive type photoresist compositions comprising the same |
CN102549497B (zh) * | 2009-09-10 | 2013-07-31 | 东丽株式会社 | 感光性树脂组合物及感光性树脂膜的制造方法 |
JP5924760B2 (ja) * | 2011-12-06 | 2016-05-25 | 東京応化工業株式会社 | スピンレスコーティング用レジストの製造方法 |
CN104662476B (zh) * | 2012-09-28 | 2019-04-23 | 富士胶片株式会社 | 感光性树脂组合物、图案的制造方法、硬化膜、有机el显示装置及液晶显示装置的制造方法 |
WO2014126034A1 (ja) * | 2013-02-14 | 2014-08-21 | 富士フイルム株式会社 | インクジェット塗布用感光性樹脂組成物、熱処理物及びその製造方法、樹脂パターン製造方法、液晶表示装置、有機el表示装置、タッチパネル及びその製造方法、並びに、タッチパネル表示装置 |
TWI731961B (zh) | 2016-04-19 | 2021-07-01 | 德商馬克專利公司 | 正向感光材料及形成正向凸紋影像之方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1191992A (zh) * | 1996-12-26 | 1998-09-02 | 克拉瑞特国际有限公司 | 滚涂用敏射线组合物 |
CN1550897A (zh) * | 2003-01-03 | 2004-12-01 | ���ǵ�����ʽ���� | 用于多个微型喷嘴涂布机的光致抗蚀剂组合物 |
CN1721989A (zh) * | 2004-07-05 | 2006-01-18 | 东进世美肯株式会社 | 光致抗蚀剂组合物 |
CN1777842A (zh) * | 2003-04-24 | 2006-05-24 | Az电子材料(日本)株式会社 | 抗蚀剂组合物以及用于除去抗蚀剂的有机溶剂 |
CN1881081A (zh) * | 2005-06-16 | 2006-12-20 | Jsr株式会社 | 用于形成着色层的放射线敏感性组合物和滤色器 |
CN1881080A (zh) * | 2005-06-15 | 2006-12-20 | Jsr株式会社 | 感光性树脂组合物、显示面板用间隔物和显示面板 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08110634A (ja) * | 1994-10-07 | 1996-04-30 | Fuji Photo Film Co Ltd | フォトレジスト塗布液 |
JP2002267833A (ja) | 2001-03-14 | 2002-09-18 | Toray Ind Inc | 液晶ディスプレイ用カラーフィルタの製造方法。 |
JP2005234045A (ja) * | 2004-02-17 | 2005-09-02 | Fujifilm Electronic Materials Co Ltd | 着色樹脂組成物 |
JP2005257884A (ja) * | 2004-03-10 | 2005-09-22 | Fuji Photo Film Co Ltd | ポジ型レジスト組成物及びパターン形成方法 |
JP4687902B2 (ja) * | 2005-06-15 | 2011-05-25 | Jsr株式会社 | 感光性樹脂組成物、表示パネル用スペーサーおよび表示パネル |
JP2007219499A (ja) * | 2006-01-18 | 2007-08-30 | Fujifilm Electronic Materials Co Ltd | 光硬化性組成物並びにそれを用いたカラーフィルタ及びその製造方法 |
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2006
- 2006-12-25 JP JP2006347323A patent/JP4403174B2/ja active Active
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2007
- 2007-12-21 WO PCT/JP2007/074643 patent/WO2008078676A1/ja active Search and Examination
- 2007-12-21 KR KR1020097005873A patent/KR101330558B1/ko active IP Right Grant
- 2007-12-21 CN CN2007800394213A patent/CN101553758B/zh active Active
- 2007-12-24 TW TW096149676A patent/TWI447782B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1191992A (zh) * | 1996-12-26 | 1998-09-02 | 克拉瑞特国际有限公司 | 滚涂用敏射线组合物 |
CN1550897A (zh) * | 2003-01-03 | 2004-12-01 | ���ǵ�����ʽ���� | 用于多个微型喷嘴涂布机的光致抗蚀剂组合物 |
CN1777842A (zh) * | 2003-04-24 | 2006-05-24 | Az电子材料(日本)株式会社 | 抗蚀剂组合物以及用于除去抗蚀剂的有机溶剂 |
CN1721989A (zh) * | 2004-07-05 | 2006-01-18 | 东进世美肯株式会社 | 光致抗蚀剂组合物 |
CN1881080A (zh) * | 2005-06-15 | 2006-12-20 | Jsr株式会社 | 感光性树脂组合物、显示面板用间隔物和显示面板 |
CN1881081A (zh) * | 2005-06-16 | 2006-12-20 | Jsr株式会社 | 用于形成着色层的放射线敏感性组合物和滤色器 |
Also Published As
Publication number | Publication date |
---|---|
JP2008158281A (ja) | 2008-07-10 |
KR20090094216A (ko) | 2009-09-04 |
CN101553758A (zh) | 2009-10-07 |
TWI447782B (zh) | 2014-08-01 |
WO2008078676A1 (ja) | 2008-07-03 |
JP4403174B2 (ja) | 2010-01-20 |
KR101330558B1 (ko) | 2013-11-18 |
TW200849329A (en) | 2008-12-16 |
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