CN101533153B - 光偏转器及其制造方法 - Google Patents

光偏转器及其制造方法 Download PDF

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Publication number
CN101533153B
CN101533153B CN200910127133.4A CN200910127133A CN101533153B CN 101533153 B CN101533153 B CN 101533153B CN 200910127133 A CN200910127133 A CN 200910127133A CN 101533153 B CN101533153 B CN 101533153B
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CN
China
Prior art keywords
movable plate
substrate
mask
mask pattern
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200910127133.4A
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English (en)
Chinese (zh)
Other versions
CN101533153A (zh
Inventor
中村真希子
沟口安志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
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Filing date
Publication date
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Publication of CN101533153A publication Critical patent/CN101533153A/zh
Application granted granted Critical
Publication of CN101533153B publication Critical patent/CN101533153B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B44—DECORATIVE ARTS
    • B44C—PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
    • B44C1/00—Processes, not specifically provided for elsewhere, for producing decorative surface effects
    • B44C1/22—Removing surface-material, e.g. by engraving, by etching
    • B44C1/227—Removing surface-material, e.g. by engraving, by etching by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
CN200910127133.4A 2008-03-13 2009-03-13 光偏转器及其制造方法 Expired - Fee Related CN101533153B (zh)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2008063524 2008-03-13
JP2008063524 2008-03-13
JP2008-063524 2008-03-13
JP2008-218586 2008-08-27
JP2008218586 2008-08-27
JP2008218586 2008-08-27
JP2009-053350 2009-03-06
JP2009053350 2009-03-06
JP2009053350A JP5521359B2 (ja) 2008-03-13 2009-03-06 光偏向器及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201110027528.4A Division CN102073138B (zh) 2008-03-13 2009-03-13 光偏转器

Publications (2)

Publication Number Publication Date
CN101533153A CN101533153A (zh) 2009-09-16
CN101533153B true CN101533153B (zh) 2015-09-23

Family

ID=41062724

Family Applications (2)

Application Number Title Priority Date Filing Date
CN200910127133.4A Expired - Fee Related CN101533153B (zh) 2008-03-13 2009-03-13 光偏转器及其制造方法
CN201110027528.4A Expired - Fee Related CN102073138B (zh) 2008-03-13 2009-03-13 光偏转器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201110027528.4A Expired - Fee Related CN102073138B (zh) 2008-03-13 2009-03-13 光偏转器

Country Status (3)

Country Link
US (2) US8331003B2 (enExample)
JP (1) JP5521359B2 (enExample)
CN (2) CN101533153B (enExample)

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WO2011118296A1 (ja) * 2010-03-24 2011-09-29 日本電気株式会社 磁気力型駆動装置、光走査装置、及び画像表示装置
US8975106B2 (en) * 2010-07-09 2015-03-10 Chien-Hung Liu Chip package and method for forming the same
JP5640687B2 (ja) * 2010-11-16 2014-12-17 セイコーエプソン株式会社 アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置
JP5842356B2 (ja) * 2011-03-24 2016-01-13 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
JP2012220641A (ja) 2011-04-06 2012-11-12 Seiko Epson Corp アクチュエーター、光スキャナーおよび画像形成装置
JP5909862B2 (ja) * 2011-04-06 2016-04-27 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
JP5842369B2 (ja) 2011-04-11 2016-01-13 セイコーエプソン株式会社 アクチュエーターの製造方法、光スキャナーの製造方法および画像形成装置の製造方法、アクチュエーター、光スキャナーおよび画像形成装置
JP5909914B2 (ja) 2011-08-05 2016-04-27 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
JP6003025B2 (ja) * 2011-08-25 2016-10-05 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
JP6036341B2 (ja) * 2013-01-29 2016-11-30 セイコーエプソン株式会社 光学モジュール、及び電子機器
JP5842837B2 (ja) * 2013-01-30 2016-01-13 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
JP2014183707A (ja) * 2013-03-21 2014-09-29 Kyocera Corp 圧電部品、光源装置および印刷装置
JP6457653B2 (ja) * 2015-03-17 2019-01-23 ハンズ レーザー テクノロジー インダストリー グループ カンパニー リミテッド レーザスキャン装置及びレーザスキャンシステム
JP6668126B2 (ja) * 2016-03-18 2020-03-18 株式会社豊田中央研究所 Ｍｅｍｓ装置
EP3531336A4 (en) * 2017-12-05 2020-02-26 Shenzhen Weitongbo Technology Co., Ltd. OPTICAL PATH MODULATOR AND MANUFACTURING METHOD THEREOF, FINGERPRINT RECOGNITION DEVICE, AND TERMINAL DEVICE
CN110703429B (zh) * 2019-09-04 2022-08-09 深圳市镭神智能系统有限公司 扫描振镜及激光雷达

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US6181460B1 (en) * 1998-11-18 2001-01-30 Trw Inc. Electromagnetic force controlled micromirror array

Also Published As

Publication number Publication date
CN101533153A (zh) 2009-09-16
US20130126469A1 (en) 2013-05-23
US20090231653A1 (en) 2009-09-17
US8331003B2 (en) 2012-12-11
US8828249B2 (en) 2014-09-09
CN102073138B (zh) 2013-03-13
JP2010079243A (ja) 2010-04-08
CN102073138A (zh) 2011-05-25
JP5521359B2 (ja) 2014-06-11

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