CN101471241B - 真空装置、真空处理系统以及真空室的压力控制方法 - Google Patents

真空装置、真空处理系统以及真空室的压力控制方法 Download PDF

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Publication number
CN101471241B
CN101471241B CN2008101888363A CN200810188836A CN101471241B CN 101471241 B CN101471241 B CN 101471241B CN 2008101888363 A CN2008101888363 A CN 2008101888363A CN 200810188836 A CN200810188836 A CN 200810188836A CN 101471241 B CN101471241 B CN 101471241B
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gas
vacuum
switching mechanism
action
control
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CN101471241A (zh
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锅山裕树
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN2008101888363A 2007-12-26 2008-12-26 真空装置、真空处理系统以及真空室的压力控制方法 Active CN101471241B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007333439A JP5059583B2 (ja) 2007-12-26 2007-12-26 真空装置、真空処理システムおよび真空室の圧力制御方法
JP2007-333439 2007-12-26
JP2007333439 2007-12-26

Publications (2)

Publication Number Publication Date
CN101471241A CN101471241A (zh) 2009-07-01
CN101471241B true CN101471241B (zh) 2011-07-13

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CN2008101888363A Active CN101471241B (zh) 2007-12-26 2008-12-26 真空装置、真空处理系统以及真空室的压力控制方法

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Country Link
JP (1) JP5059583B2 (ja)
KR (1) KR101033055B1 (ja)
CN (1) CN101471241B (ja)
TW (1) TWI471896B (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4914486B2 (ja) * 2009-12-25 2012-04-11 シーケーディ株式会社 電動真空弁による排気速度制御方法、電動真空弁による排気速度制御システム、排気速度制御に用いられる電動真空弁の弁開度設定点決定方法、及び、排気速度制御に用いられる排気速度決定プログラム
TWI490673B (zh) * 2012-01-04 2015-07-01 King Yuan Electronics Co Ltd 測試壓力控制系統與方法
CN106876304B (zh) * 2017-02-24 2019-09-10 成都京东方光电科技有限公司 一种湿法刻蚀排气系统及湿法刻蚀装置
WO2019037871A1 (en) * 2017-08-25 2019-02-28 Applied Materials, Inc. APPARATUS FOR TRANSPORTING A CARRIER, SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE, AND METHOD FOR TRANSPORTING A SUBSTRATE CARRIER IN A VACUUM CHAMBER
CN109110418A (zh) * 2018-10-24 2019-01-01 爱发科真空技术（沈阳）有限公司 一种压力可控搬送室结构
CN110512190B (zh) * 2019-09-25 2022-02-15 上海华力微电子有限公司 集成气动阀组的改装机构、气动阀组装置、气相沉积设备
CN112768330B (zh) * 2019-10-21 2023-10-31 中微半导体设备(上海)股份有限公司 一种防止反应气体泄露的等离子体处理装置及其方法
JP7327425B2 (ja) * 2021-02-19 2023-08-16 株式会社ダイフク 搬送設備

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6394109B1 (en) * 1999-04-13 2002-05-28 Applied Materials, Inc. Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system
US7052576B2 (en) * 2002-01-17 2006-05-30 Samsung Electronics Co., Ltd. Pressure control apparatus and method of establishing a desired level of pressure within at least one processing chamber
CN1925110A (zh) * 2005-09-02 2007-03-07 东京毅力科创株式会社 真空处理装置
CN101034677A (zh) * 2006-03-08 2007-09-12 平田机工株式会社 装料口

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
JPH05243165A (ja) * 1992-03-03 1993-09-21 Fujitsu Ltd 真空装置及び半導体装置の製造方法
JP3486821B2 (ja) * 1994-01-21 2004-01-13 東京エレクトロン株式会社 処理装置及び処理装置内の被処理体の搬送方法
JPH0932803A (ja) * 1995-07-20 1997-02-04 Hitachi Ltd エアーシリンダー及びそれを用いた搬送装置及び半導体製造装置
JPH10242238A (ja) * 1997-02-28 1998-09-11 Nikon Corp 試料搬送装置
KR100271758B1 (ko) * 1997-06-25 2001-01-15 윤종용 반도체장치 제조설비 및 이의 구동방법
JP3076775B2 (ja) * 1997-07-31 2000-08-14 芝浦メカトロニクス株式会社 真空処理装置
JP3866840B2 (ja) * 1997-10-28 2007-01-10 三機工業株式会社 不活性ガス供給設備
JP2002313869A (ja) * 2001-04-11 2002-10-25 Sony Corp 真空処理装置及び真空処理方法
JP2003306771A (ja) * 2002-04-17 2003-10-31 Ulvac Japan Ltd グローブボックス付き成膜装置
JP4798981B2 (ja) * 2004-10-28 2011-10-19 東京エレクトロン株式会社 基板処理装置の制御方法，基板処理装置，基板処理装置の制御を行うプログラム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6394109B1 (en) * 1999-04-13 2002-05-28 Applied Materials, Inc. Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system
US7052576B2 (en) * 2002-01-17 2006-05-30 Samsung Electronics Co., Ltd. Pressure control apparatus and method of establishing a desired level of pressure within at least one processing chamber
CN1925110A (zh) * 2005-09-02 2007-03-07 东京毅力科创株式会社 真空处理装置
CN101034677A (zh) * 2006-03-08 2007-09-12 平田机工株式会社 装料口

Also Published As

Publication number Publication date
CN101471241A (zh) 2009-07-01
TWI471896B (zh) 2015-02-01
KR20090071436A (ko) 2009-07-01
JP2009158627A (ja) 2009-07-16
TW200945410A (en) 2009-11-01
KR101033055B1 (ko) 2011-05-06
JP5059583B2 (ja) 2012-10-24

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